Stanford Advisors

Contact

  • Academic
    awerbro@stanford.edu
    University - Scholar Department: Chemical Engineering Position: Postdoctoral Scholar

Additional Info

All Publications

  • Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A Werbrouck, A., van de Kerckhove, K., Depla, D., Poelman, D., Smet, P. F., Dendooven, J., Detavernier, C. 2021; 39 (6)

    View details for DOI 10.1116/6.0001094

    View details for Web of Science ID 000724340700002

https://orcid.org/0000-0003-3796-0024