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  • Direct electron beam patterning of electro-optically active PEDOT:PSS. Nanophotonics Doshi, S., Ludescher, D., Karst, J., Floess, M., Carlström, J., Li, B., Mintz Hemed, N., Duh, Y. S., Melosh, N. A., Hentschel, M., Brongersma, M., Giessen, H. 2024; 13 (12): 2271-2280

    Abstract

    The optical and electronic tunability of the conductive polymer poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) has enabled emerging applications as diverse as bioelectronics, flexible electronics, and micro- and nano-photonics. High-resolution spatial patterning of PEDOT:PSS opens up opportunities for novel active devices in a range of fields. However, typical lithographic processes require tedious indirect patterning and dry etch processes, while solution-processing methods such as ink-jet printing have limited spatial resolution. Here, we report a method for direct write nano-patterning of commercially available PEDOT:PSS through electron-beam induced solubility modulation. The written structures are water stable and maintain the conductivity as well as electrochemical and optical properties of PEDOT:PSS, highlighting the broad utility of our method. We demonstrate the potential of our strategy by preparing prototypical nano-wire structures with feature sizes down to 250 nm, an order of magnitude finer than previously reported direct write methods, opening the possibility of writing chip-scale microelectronic and optical devices. We finally use the high-resolution writing capabilities to fabricate electrically-switchable optical diffraction gratings. We show active switching in this archetypal system with >95 % contrast at CMOS-compatible voltages of +2 V and -3 V, offering a route towards highly-miniaturized dynamic optoelectronic devices.

    View details for DOI 10.1515/nanoph-2023-0640

    View details for PubMedID 38774765

    View details for PubMedCentralID PMC11104293

  • Direct electron beam patterning of electro-optically active PEDOT:PSS NANOPHOTONICS Doshi, S., Ludescher, D., Karst, J., Floess, M., Carlstrom, J., Li, B., Hemed, N., Duh, Y., Melosh, N. A., Hentschel, M., Brongersma, M., Giessen, H. 2024