Bio


Professor Senesky's research is centered on the development of micro- and nano-systems for operation within extreme harsh environments. Her laboratory (EXtreme Environment Microsystems Laboratory, XLab) is researching the synthesis of temperature tolerant, chemically resistant, and radiation-hardened wide bandgap semiconductor thin films and nanostructures. These new material sets serve as a platform for the realization of sensor, actuator, and electronic components that can operate and collect data under the most hostile conditions. More specifically, smart and adaptable structures for extreme environments are enabled through the technology developed in her laboratory. Her research efforts support a variety of applications including deep space systems, hypersonic aircrafts, combustion monitoring and subsurface monitoring.

Academic Appointments


Honors & Awards


  • Alfred P. Sloan Foundation Ph.D. Fellowship, Stanford University (2004-2006)
  • Galiban Faculty Fellow, Stanford University (2012)
  • Frederick E. Terman Faculty Fellow, Stanford University (2012)
  • Space Technology Early Faculty Award, NASA (2012)

Professional Education


  • PhD, UC Berkeley (2007)

2013-14 Courses


Postdoctoral Advisees


Journal Articles


  • Surface acoustic wave devices on AlN/3C-SiC/Si multilayer structures JOURNAL OF MICROMECHANICS AND MICROENGINEERING Lin, C., Chen, Y., Felmetsger, V. V., Lien, W., Riekkinen, T., Senesky, D. G., Pisano, A. P. 2013; 23 (2)
  • 4H-SiC Metal-Semiconductor-Metal Ultraviolet Photodetectors in Operation of 450 degrees C IEEE ELECTRON DEVICE LETTERS Lien, W., Tsai, D., Lien, D., Senesky, D. G., He, J., Pisano, A. P. 2012; 33 (11): 1586-1588
  • AlN/3C-SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators ADVANCED MATERIALS Lin, C., Chen, Y., Felmetsger, V. V., Senesky, D. G., Pisano, A. P. 2012; 24 (20): 2722-2727

    Abstract

    An AlN/3C-SiC composite layer enables the third-order quasi-symmetric (QS(3)) Lamb wave mode with a high quality factor (Q) characteristic and an ultra-high phase velocity up to 32395 ms(-1). A Lamb wave resonator utilizing the QS(3) mode exhibits a low motional impedance of 91 ? and a high Q of 5510 at a series resonance frequency (f(s)) of 2.92 GHz, resulting in the highest f(s)·Q product of 1.61 × 10(13) Hz among the suspended piezoelectric thin film resonators reported to date.

    View details for DOI 10.1002/adma.201104842

    View details for Web of Science ID 000304043000011

    View details for PubMedID 22495881

  • Epitaxial Graphene Growth on 3C-SiC(111)/AlN(0001)/Si(100) Electrochemical and Solid-State Letters Hsia, B., Ferralis, N., Senesky, D., G., Pisano, A., P., Carraro, C., Maboudian, R. 2011; 14 (2): K13-K15
  • Active Materials for New Energy Efficient Window Glazing Technology: Feasibility Study Technical Report for Lawrence Berkeley National Laboratory and Department of Energy Senesky, D., G., Lee, E., Selkowitz, S. 2011
  • High-Q aluminum nitride Lamb wave resonators with biconvex edges Applied Physics Letters Lin, C., M., lai, Y., J., Hsu, J., C., Chen, Y., Y., Senesky, D., G., Pisano, A., P. 2011; 99: 143501
  • Low-Temperature, Ion Beam-Assisted SiC Thin Films With Antireflective ZnO Nanorod Arrays for High-Temperature Photodetection IEEE Electron Device Letters Lien, W., C., Tsai, D., S., Chiu, S., H., Senesky, D., G., Maboudian, R., Pisano, A., P. 2011; 32: 1564 - 1566
  • AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices Applied Physics Letters Lin, C., M., Lien, W., C, Felmetsger, V., Hopcroft, M., A., Senesky, D., G., Pisano, A., P. 2010; 97: 141907
  • Growth of 3C-SiC/AlN/Si(100) layered structure with atomically abrupt interface via modified precursor feeding procedure Electrochemical and Solid-State Letters Lien, W., C., Cheng, K., B., Senesky, D., G., Carraro, C., Pisano, A., P., Maboudian, R. 2010; 13 (7): D53-D56
  • Harsh Environment Silicon Carbide Sensors for Health and Performance Monitoring of Aerospace Systems: a Review IEEE Sensors Journal Senesky, D., G., Jamshidi, B., Cheng, K., B., Pisano, A., P. 2009; 9 (11): 1472-1478
  • A Silicon Carbide Resonant Tuning Fork for Micro-Sensing Applications in High Temperature and High G-Shock Environments Journal of Micro/Nanolithography, MEMS, and MOEMS Myers, D., R., Cheng, K., B., Jamshidi, B., Azevedo, R., G., Senesky, D., G., Chen, L. 2009; 8 (2): 21116
  • A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications IEEE Sensors Journal Azevedo, R., G., Jones (aka Senesky), D., G., Jog, A., V., Jamshidi, B., Myers, D., R., Chen, L. 2007; 7 (4): 568-576

Books and Book Chapters


  • MEMS Strain Sensors for Intelligent Structural Systems. New Developments in Sensing Technology for Structural Health Monitoring Senesky, D., G., Jamshidi, B. edited by Mukhopadhyay, S. Springer-Verlag. 2011: 63-74

Conference Proceedings


  • MEMS Piezoelectric Energy Harvesters for Harsh Environment Sensing Lai, Y., J., Li, W., C., Lin, C., M., Felmetsger, V., V., Senesky, D., G., Pisano, A., P. 2013
  • Micromachined aluminum nitride acoustic resonators with an epitaxial silicon carbide layer utilizing high-order Lamb wave modes Lin, C., M., Chen, Y., Y., Felmetsger, V., V., Vigevani, G., Senesky, D., G., Pisano, A., P. 2012
  • Quality factor enhancement in Lamb wave resonators utilizing AlN plates with convex edges Lin, C., M., Lai, Y., J., Yen, T., T., Hsu, J., C., Chen, Y., Y., Senesky, D., G. 2011
  • Nanocrystalline SiC Metal-Semiconductor-Metal Photodetector with ZnO Nanorod Arrays for High-Temperature Applications. Lien, W., C., Tsai, D., S., Chiu, S., H., Senesky, D., G., Maboudian, R., Pisano, A., P. 2011
  • MEMS Sensors for Down-Hole Monitoring of Geothermal Energy Systems Wodin-Schwartz, S., Chan, M., W., Mansukhani, K., Pisano, A., P., Senesky, D., G. 2011
  • Synthesis of narrowband AlN Lamb wave ladder-type filters based on overhang adjustment Yen, T., T., Lin, C., M., Hoprcoft, M., A., Kuypers, J., H., Senesky, D., G., Pisano, A., P. 2010
  • Growth of Highly C-Axis Oriented AlN Films on 3C-SiC/Si Substrate Lin, C., M., Lien, W., C, Felmetsger, V., Senesky, D., G., Hopcroft, M., A., Pisano, A., P. 2010
  • Characterization of Aluminum Nitride Lamb Wave Resonators Operating At 600°C For Harsh Environment RF Applications Yen, T., T., Lin, C., M., Zhao, X., Senesky, D., G., Hopcroft, M., A., Pisano, A., P. 2010
  • Ohmic Contact With Enhanced Stability to Polycrystalline Silicon Carbide Via Carbon Interfacial Layer Liu, F., Hsia, B., Senesky, D., G., Carraro, C., Pisano, A., P., Maboudian, R. 2010
  • MEMS Sensing in an In-Cylinder Combustion Environment Wodin-Schwartz, S., Hopcroft, M., A., Senesky, D., G., Pisano, A., P. 2010
  • Aluminum Nitride as a Masking Material for the Plasma Etching of Silicon Carbide Structures Senesky, D., G., Pisano, A., P. 2010
  • Genetic Algorithm Optimization for MEMS Cantilevered Piezoelectric Energy Harvesters Lai, Y., J., Senesky, D., G., Pisano, A., P. 2010
  • Surface acoustic wave propagation properties in AlN/3C-SiC/Si composite structure Lin, C., M., Chen, Y., Y., Felmetsger, V., V., Yen, T., T., Lien, W., C., Senesky, D., G. 2010
  • Epitaxial Growth of 3C-SiC on AlN/Si (100) via Methyltrichlorosilane-based Chemical Vapor Deposition Lien, W., C., Cheng, K., B., Senesky, D., G., Carraro, C., Pisano, A., P., Maboudian, R. 2009
  • Electrodeposition of Permalloy in Deep Silicon Trenches without Edge-Overgrowth Utilizing Dry Film Photoresist Park, S., W., Senesky, D., G., Pisano, A., P. 2009
  • High Resolution Silicon Carbide Strain Gauge at 600oC Cheng, K., B., Myers, D., R., Jamshidi, B., Azevedo, R., G., Jones (aka Senesky), D., G., Mehregany, M. 2008
  • Low Temperature Ion Beam Sputter Deposition of Amorphous Silicon Carbide for Vacuum Encapsulation Jones (aka Senesky), D., G., Azevedo, R., G., Chan, M., W., Pisano, A., P., Wijesundara, M., B. J. 2007
  • Ion Beam Sputter Deposition of Silicon Carbide for Vacuum Encapsulation Jones (aka Senesky), D., G., Pisano, A., P. 2007
  • Silicon Carbide Coated MEMS Strain Sensor for Harsh Environment Applications Azevedo, R., G., Zhang, J., Jones (aka Senesky), D., G., Myers, D., R., Jog, A., V., Jamshidi, B. 2007
  • Fabrication of Ultra Thick Ferromagnetic Structures in Silicon Jones (aka Senesky), D., G., Pisano, A., P. 2004
  • MEMS Rotary Engine Power System Fernandez-Pello, A., C., Pisano, A., P., Fu, K., Walther, D., Knobloch, A., Martinez, F. 2002