Debbie Senesky
Associate Professor of Aeronautics and Astronautics, of Electrical Engineering and Senior Fellow at the Precourt Institute for Energy
Web page: http://xlab.stanford.edu
Bio
Debbie G. Senesky is an Associate Professor at Stanford University in the Aeronautics and Astronautics Department and the Electrical Engineering Department. In addition, she is the Principal Investigator of the EXtreme Environment Microsystems Laboratory (XLab). Her research interests include the development of nanomaterials for extreme harsh environments, high-temperature electronics for Venus exploration, and microgravity synthesis of nanomaterials. In the past, she has held positions at GE Sensing (formerly known as NovaSensor), GE Global Research Center, and Hewlett Packard. She received the B.S. degree (2001) in mechanical engineering from the University of Southern California. She received the M.S. degree (2004) and Ph.D. degree (2007) in mechanical engineering from the University of California, Berkeley. Prof. Senesky is the Site Director of nano@stanford. She is currently the co-editor of two technical journals: IEEE Journal of Microelectromechanical Systems and Sensors. In recognition of her research, she received the Emerging Leader Abie Award from AnitaB.org in 2018, Early Faculty Career Award from the National Aeronautics and Space Administration (NASA) in 2012, Gabilan Faculty Fellowship Award in 2012, and Sloan Ph.D. Fellowship from the Alfred P. Sloan Foundation in 2004.
Prof. Senesky's career path and research has been featured by Scientific American, Seeker, People Behind the Science podcast, The Future of Everything radio show, Space.com, and NPR's Tell Me More program. More information about Prof. Senesky can be found at https://xlab.stanford.edu and on Instagram (@astrodebs).
Academic Appointments
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Associate Professor, Aeronautics and Astronautics
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Associate Professor, Electrical Engineering
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Senior Fellow, Precourt Institute for Energy
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Member, Bio-X
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Affiliate, Precourt Institute for Energy
Honors & Awards
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John Blume Faculty Scholar, Stanford University (2020)
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Selected Participant, Stanford Faculty Entrepreneurial Leadership Program (2019)
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Emerging Leader Abie Award in Honor of Denice Denton, AnitaB.org (2018)
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Selected Participant, US Frontiers of Engineering Symposium, National Academy of Engineering (2016)
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Golden Reviewer, IEEE Electron Devices Letters (2015)
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Early Faculty Career Award, National Aeronautics and Space Administration (NASA) (2012)
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Frederick E. Terman Faculty Fellow, Stanford University (2012)
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Gabilan Faculty Fellow, Stanford University (2012)
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Sloan Ph.D. Fellowship, Alfred P. Sloan Foundation (2004-2006)
Boards, Advisory Committees, Professional Organizations
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Member, Orbital Reef University Advisory Council (2022 - Present)
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Co-chair, Faculty Women's Forum Steering Committee (2022 - Present)
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Mentor, The Brooke Owens Fellowship (2022 - Present)
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Editor, IEEE Journal of Microelectromechanical Systems (2019 - Present)
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Editor, Micromachines (Journal) (2017 - Present)
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Editor, Sensors (Journal) (2015 - Present)
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Advisory Board, Multi-User Silicon Carbide Research and Fabrication Facility (University of Arkansas) (2022 - Present)
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Advisory Board, UC Berkeley, Department of Mechanical Engineering (2016 - Present)
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Faculty Advisor, Stanford Chapter, National Society of Women Engineers (SWE) (2018 - Present)
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Board Member, Scientific Adventures for Girls (2015 - 2022)
Program Affiliations
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Stanford SystemX Alliance
Professional Education
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B.S., University of Southern California, Mechanical Engineering (2001)
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M.S., University of California, Berkeley, Mechanical Engineering (2004)
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Ph.D., University of California, Berkeley, Mechanical Engineering (2007)
2024-25 Courses
- Advanced Micro and Nano Fabrication Laboratory
ENGR 241 (Spr) - How to Shoot for the Moon
AA 107N, DESIGN 187N (Win) - Lightweight Structures
AA 151 (Aut) -
Independent Studies (13)
- Directed Research and Writing in Aero/Astro
AA 190 (Aut, Win, Spr) - Graduate Independent Study
MATSCI 399 (Aut, Win, Spr) - Independent Study in Aero/Astro
AA 199 (Aut, Win, Spr) - Master's Research
MATSCI 200 (Aut, Win, Spr) - Master's Thesis and Thesis Research
EE 300 (Aut, Win, Spr) - Ph.D. Research
MATSCI 300 (Aut, Win, Spr) - Practical Training
AA 291 (Aut, Win, Spr) - Problems in Aero/Astro
AA 290 (Aut, Win, Spr) - Special Studies and Reports in Electrical Engineering
EE 191 (Aut, Win, Spr) - Special Studies and Reports in Electrical Engineering
EE 391 (Aut, Win, Spr) - Special Studies and Reports in Electrical Engineering (WIM)
EE 191W (Aut, Win, Spr) - Special Studies or Projects in Electrical Engineering
EE 190 (Aut, Win, Spr) - Special Studies or Projects in Electrical Engineering
EE 390 (Aut, Win, Spr)
- Directed Research and Writing in Aero/Astro
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Prior Year Courses
2023-24 Courses
- Advanced Micro and Nano Fabrication Laboratory
ENGR 241 (Spr) - How to Shoot for the Moon
AA 107N, DESIGN 187N (Spr) - Lightweight Structures
AA 151 (Aut)
2022-23 Courses
- How to Shoot for the Moon
AA 107N, DESIGN 187N (Spr) - Lightweight Structures
AA 151 (Aut) - Smart Structures
AA 280 (Win)
2021-22 Courses
- Analysis of Structures
AA 240 (Aut) - Smart Structures
AA 280 (Win)
- Advanced Micro and Nano Fabrication Laboratory
Stanford Advisees
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Doctoral Dissertation Reader (AC)
Guillem Megias i Homar -
Postdoctoral Faculty Sponsor
Zhou Li -
Doctoral Dissertation Advisor (AC)
Sergio Cordero, Jasmine Cox, Katheryn Kornegay, Anand Lalwani -
Doctoral Dissertation Co-Advisor (AC)
Zahra Heussen -
Master's Program Advisor
Justin Kao, Hannah Nabavi, Sharon Njeri -
Doctoral (Program)
Kevin Murillo, Mary Vaughan
All Publications
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Device and material investigations of GaN enhancement-mode transistors for Venus and harsh environments
APPLIED PHYSICS LETTERS
2024; 124 (17)
View details for DOI 10.1063/5.0186976
View details for Web of Science ID 001206889200004
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Autoclave Design for Microgravity Hydrothermal Synthesis
MICROGRAVITY SCIENCE AND TECHNOLOGY
2024; 36 (3)
View details for DOI 10.1007/s12217-024-10109-9
View details for Web of Science ID 001204632000001
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Temperature, Sensitivity, and Frequency Response of AlN/GaN Heterostructure Micro-Hall Effect Sensor
IEEE TRANSACTIONS ON ELECTRON DEVICES
2024
View details for DOI 10.1109/TED.2024.3382643
View details for Web of Science ID 001201914300001
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A DC to 25 MHz Current Sensing Interface for Hall-Effect Sensor
IEEE SENSORS JOURNAL
2024; 24 (7): 10316-10325
View details for DOI 10.1109/JSEN.2024.3360462
View details for Web of Science ID 001245584800068
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Evidence for phonon hardening in laser-excited gold using x-ray diffraction at a hard x-ray free electron laser.
Science advances
2024; 10 (6): eadh5272
Abstract
Studies of laser-heated materials on femtosecond timescales have shown that the interatomic potential can be perturbed at sufficiently high laser intensities. For gold, it has been postulated to undergo a strong stiffening leading to an increase of the phonon energies, known as phonon hardening. Despite efforts to investigate this behavior, only measurements at low absorbed energy density have been performed, for which the interpretation of the experimental data remains ambiguous. By using in situ single-shot x-ray diffraction at a hard x-ray free-electron laser, the evolution of diffraction line intensities of laser-excited Au to a higher energy density provides evidence for phonon hardening.
View details for DOI 10.1126/sciadv.adh5272
View details for PubMedID 38335288
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Effect of Geometry on the Frequency Limit of GaAs/AlGaAs 2-D Electron Gas (2DEG) Hall Effect Sensors
IEEE SENSORS LETTERS
2023; 7 (12)
View details for DOI 10.1109/LSENS.2023.3320039
View details for Web of Science ID 001105613800008
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Optimal sensor placement for permanent magnet synchronous motor condition monitoring using a digital twin-assisted fault diagnosis approach
RELIABILITY ENGINEERING & SYSTEM SAFETY
2024; 242
View details for DOI 10.1016/j.ress.2023.109714
View details for Web of Science ID 001110643400001
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THE RIGHT STUFF Materials grown in space are stronger and hardier than those created on the ground
SCIENTIFIC AMERICAN
2023; 329 (4): 40-47
View details for Web of Science ID 001180327500010
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Thermal stability study of gallium nitride based magnetic field sensor
JOURNAL OF APPLIED PHYSICS
2023; 134 (14)
View details for DOI 10.1063/5.0156013
View details for Web of Science ID 001082652600003
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Temperature and field dependencies of current leakage mechanisms in IrO<sub>x</sub> contacts on InAlN/GaN heterostructures
APPLIED PHYSICS LETTERS
2023; 123 (15)
View details for DOI 10.1063/5.0171204
View details for Web of Science ID 001083944200002
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Investigation of mechanical properties and structural integrity of graphene aerogels via molecular dynamics simulations.
Physical chemistry chemical physics : PCCP
2023
Abstract
Graphene aerogel (GA), a 3D carbon-based nanostructure built on 2D graphene sheets, is well known for being the lightest solid material ever synthesized. It also possesses many other exceptional properties, such as high specific surface area and large liquid absorption capacity, thanks to its ultra-high porosity. Computationally, the mechanical properties of GA have been studied by molecular dynamics (MD) simulations, which uncover nanoscale mechanisms beyond experimental observations. However, studies on how GA structures and properties evolve in response to simulation parameter changes, which provide valuable insights to experimentalists, have been lacking. In addition, the differences between the calculated properties via simulations and experimental measurements have rarely been discussed. To address the shortcomings mentioned above, in this study, we systematically study various mechanical properties and the structural integrity of GA as a function of a wide range of simulation parameters. Results show that during the in silico GA preparation, smaller and less spherical inclusions (mimicking the effect of water clusters in experiments) are conducive to strength and stiffness but may lead to brittleness. Additionally, it is revealed that a structurally valid GA in the MD simulation requires the number of bonds per atom to be at least 1.40, otherwise the GA building blocks are not fully interconnected. Finally, our calculation results are compared with experiments to showcase both the power and the limitations of the simulation technique. This work may shed light on the improvement of computational approaches for GA as well as other novel nanomaterials.
View details for DOI 10.1039/d3cp02585c
View details for PubMedID 37580983
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Enhancement-Mode GaN Transistor Technology for Harsh Environment Operation
IEEE ELECTRON DEVICE LETTERS
2023; 44 (7): 1068-1071
View details for DOI 10.1109/LED.2023.3279813
View details for Web of Science ID 001021302800010
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Synthesis and characterization of UiO-66-NH2 incorporated graphene aerogel composites and their utilization for absorption of organic liquids
CARBON
2023; 201: 561-567
View details for DOI 10.1016/j.carbon.2022.09.015
View details for Web of Science ID 000868746600002
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DATA-DRIVEN DESIGN OF HIGH ELECTRON MOBILITY TRANSISTOR DEVICES USING PHYSICS-INFORMED GAUSSIAN PROCESS MODELING
AMER SOC MECHANICAL ENGINEERS. 2023
View details for Web of Science ID 001221606700014
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SENSOR NETWORK DESIGN FOR PERMANENT MAGNET SYNCHRONOUS MOTOR FAULT DIAGNOSIS
AMER SOC MECHANICAL ENGINEERS. 2023
View details for Web of Science ID 001221579000050
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Hall-Effect Sensor Design With Physics-Informed Gaussian Process Modeling
IEEE SENSORS JOURNAL
2022; 22 (23): 22519-22528
View details for DOI 10.1109/JSEN.2022.3216499
View details for Web of Science ID 000893571900026
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Biological growth as an alternative approach to on and off-Earth construction
FRONTIERS IN BUILT ENVIRONMENT
2022; 8
View details for DOI 10.3389/fbuil.2022.965145
View details for Web of Science ID 000863485200001
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Effects of Part Orientation, Printer Selection, and Infill Density on Mechanical Properties and Production Cost of 3D Printed Flexural
MANUFACTURING LETTERS
2022; 33: 549-560
View details for Web of Science ID 000880189100068
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Nanoindentation characterization of thin film stack structures by finite element analysis and experiments using acoustic emission testing
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
2022; 147
View details for DOI 10.1016/j.mssp.2022.106737
View details for Web of Science ID 000794109600002
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Effects of Part Orientation, Printer Selection, and Infill Density on Mechanical Properties and Production Cost of 3D Printed Flexural Specimens
MANUFACTURING LETTERS
2022; 33: 549-560
View details for Web of Science ID 000886542600007
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Dynamic Biasing for Improved On-Orbit Total-Dose Lifetimes of Commercial Electronic Devices
IEEE TRANSACTIONS ON AEROSPACE AND ELECTRONIC SYSTEMS
2022; 58 (4): 3326-3336
View details for DOI 10.1109/TAES.2022.3148974
View details for Web of Science ID 000838710200052
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On-Orbit Implementation of Discrete Isolation Schemes for Improved Reliability of Serial Communication Buses
IEEE TRANSACTIONS ON AEROSPACE AND ELECTRONIC SYSTEMS
2022; 58 (4): 2973-2982
View details for DOI 10.1109/TAES.2022.3142713
View details for Web of Science ID 000838710200027
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High Temperature Degradation Modes Observed in Gallium Nitride-Based Hall-Effect Sensors Magnetic field sensors
JOURNAL OF ELECTRONIC PACKAGING
2022; 144 (2)
View details for DOI 10.1115/1.4053765
View details for Web of Science ID 000789866100018
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Effect of proton irradiation temperature on persistent photoconductivity in zinc oxide metal-semiconductor-metal ultraviolet photodetectors
JOURNAL OF APPLIED PHYSICS
2022; 131 (15)
View details for DOI 10.1063/5.0077210
View details for Web of Science ID 000790988400006
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Cluster-based acoustic emission signal processing and loading rate effects study of nanoindentation on thin film stack structures
MECHANICAL SYSTEMS AND SIGNAL PROCESSING
2022; 165
View details for DOI 10.1016/j.ymssp.2021.108301
View details for Web of Science ID 000704878800002
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Hall-Effect Sensor Technique for No Induced Voltage in AC Magnetic Field Measurements Without Current Spinning
IEEE SENSORS JOURNAL
2022; 22 (2): 1245-1251
View details for DOI 10.1109/JSEN.2021.3130527
View details for Web of Science ID 000742717100002
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Selective aqueous ammonia sensors using electrochemical stripping and capacitive detection
AIChE Journal
2021
View details for DOI 10.1002/aic.17465
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Extended Exposure of Gallium Nitride Heterostructure Devices to a Simulated Venus Environment
IEEE. 2021
View details for DOI 10.1109/AERO50100.2021.9438131
View details for Web of Science ID 000681710100003
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Closed-form orthotropic constitutive model for aligned square array mesostructure
ADDITIVE MANUFACTURING
2020; 36
View details for DOI 10.1016/j.addma.2020.101463
View details for Web of Science ID 000600807800061
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Nanoarchitectonics for Wide Bandgap Semiconductor Nanowires: Toward the Next Generation of Nanoelectromechanical Systems for Environmental Monitoring.
Advanced science (Weinheim, Baden-Wurttemberg, Germany)
2020; 7 (21): 2001294
Abstract
Semiconductor nanowires are widely considered as the building blocks that revolutionized many areas of nanosciences and nanotechnologies. The unique features in nanowires, including high electron transport, excellent mechanical robustness, large surface area, and capability to engineer their intrinsic properties, enable new classes of nanoelectromechanical systems (NEMS). Wide bandgap (WBG) semiconductors in the form of nanowires are a hot spot of research owing to the tremendous possibilities in NEMS, particularly for environmental monitoring and energy harvesting. This article presents a comprehensive overview of the recent progress on the growth, properties and applications of silicon carbide (SiC), group III-nitrides, and diamond nanowires as the materials of choice for NEMS. It begins with a snapshot on material developments and fabrication technologies, covering both bottom-up and top-down approaches. A discussion on the mechanical, electrical, optical, and thermal properties is provided detailing the fundamental physics of WBG nanowires along with their potential for NEMS. A series of sensing and electronic devices particularly for environmental monitoring is reviewed, which further extend the capability in industrial applications. The article concludes with the merits and shortcomings of environmental monitoring applications based on these classes of nanowires, providing a roadmap for future development in this fast-emerging research field.
View details for DOI 10.1002/advs.202001294
View details for PubMedID 33173726
View details for PubMedCentralID PMC7640356
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Low Offset and Noise in High Biased GaN 2DEG Hall-Effect Plates Investigated With Infrared Microscopy
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
2020; 29 (5): 669–76
View details for DOI 10.1109/JMEMS.2020.3013187
View details for Web of Science ID 000576466500008
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Self-powered monolithic accelerometer using a photonic gate
NANO ENERGY
2020; 76
View details for DOI 10.1016/j.nanoen.2020.104950
View details for Web of Science ID 000573074100002
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Ultra-High-Q Gallium Nitride SAW Resonators for Applications With Extreme Temperature Swings
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
2020; 29 (5): 900–905
View details for DOI 10.1109/JMEMS.2020.2999040
View details for Web of Science ID 000576466500041
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Nanoarchitectonics for Wide Bandgap Semiconductor Nanowires: Toward the Next Generation of Nanoelectromechanical Systems for Environmental Monitoring
ADVANCED SCIENCE
2020
View details for DOI 10.1002/advs.202001294
View details for Web of Science ID 000572374800001
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Analysis of mobility-limiting mechanisms of the two-dimensional hole gas on hydrogen-terminated diamond
PHYSICAL REVIEW B
2020; 102 (7)
View details for DOI 10.1103/PhysRevB.102.075303
View details for Web of Science ID 000557726800002
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Effective In-Plane Moduli of Fused Filament Fabrication Material with Aligned Mesostructure
JOM
2020; 72 (3): 1314–23
View details for DOI 10.1007/s11837-019-03963-1
View details for Web of Science ID 000515408600032
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Lithography and Etching-Free Microfabrication of Silicon Carbide on Insulator Using Direct UV Laser Ablation
ADVANCED ENGINEERING MATERIALS
2020
View details for DOI 10.1002/adem.201901173
View details for Web of Science ID 000511390300001
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Extreme Temperature Modeling of AlGaN/GaN HEMTs
IEEE TRANSACTIONS ON ELECTRON DEVICES
2020; 67 (2): 430–37
View details for DOI 10.1109/TED.2019.2960573
View details for Web of Science ID 000510723400003
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Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology.
Science advances
2020; 6 (3): eaay4508
Abstract
Monolithic strong magnetic induction at the mtesla to tesla level provides essential functionalities to physical, chemical, and medical systems. Current design options are constrained by existing capabilities in three-dimensional (3D) structure construction, current handling, and magnetic material integration. We report here geometric transformation of large-area and relatively thick (~100 to 250 nm) 2D nanomembranes into multiturn 3D air-core microtubes by a vapor-phase self-rolled-up membrane (S-RuM) nanotechnology, combined with postrolling integration of ferrofluid magnetic materials by capillary force. Hundreds of S-RuM power inductors on sapphire are designed and tested, with maximum operating frequency exceeding 500 MHz. An inductance of 1.24 muH at 10 kHz has been achieved for a single microtube inductor, with corresponding areal and volumetric inductance densities of 3 muH/mm2 and 23 muH/mm3, respectively. The simulated intensity of the magnetic induction reaches tens of mtesla in fabricated devices at 10 MHz.
View details for DOI 10.1126/sciadv.aay4508
View details for PubMedID 32010770
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Deployment of InAlN/GaN Hall-effect Sensors for Bucket Transformer Monitoring and Forecasting
IEEE. 2020
View details for Web of Science ID 000646236300282
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Deployment of InAlN/GaN Hall-effect Sensors for Bucket Transformer Monitoring and Forecasting
2020 IEEE SENSORS
2020: 4
View details for DOI 10.1109/SENSORS47125.2020.9278866
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A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air.
Sensors (Basel, Switzerland)
2020; 21 (1)
Abstract
This paper reports the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO3; LN) MEMS resonator array up to 500 °C in air. After a high-temperature burn-in treatment, device quality factor (Q) was enhanced to 508 and the resonance shifted to a lower frequency and remained stable up to 500 °C. During subsequent in situ high-temperature testing, the resonant frequencies of two coupled shear horizontal (SH0) modes in the array were 87.36 MHz and 87.21 MHz at 25 °C and 84.56 MHz and 84.39 MHz at 500 °C, correspondingly, representing a -3% shift in frequency over the temperature range. Upon cooling to room temperature, the resonant frequency returned to 87.36 MHz, demonstrating the recoverability of device performance. The first- and second-order temperature coefficient of frequency (TCF) were found to be -95.27 ppm/°C and 57.5 ppb/°C2 for resonant mode A, and -95.43 ppm/°C and 55.8 ppb/°C2 for resonant mode B, respectively. The temperature-dependent quality factor and electromechanical coupling coefficient (kt2) were extracted and are reported. Device Q decreased to 334 and total kt2 increased to 12.40% after high-temperature exposure. This work supports the use of piezoelectric LN as a material platform for harsh environment radio-frequency (RF) resonant sensors (e.g., temperature and infrared) incorporated with high coupling acoustic readout.
View details for DOI 10.3390/s21010149
View details for PubMedID 33383685
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Significant Phonon Drag Enables High Power Factor in the AlGaN/GaN Two-Dimensional Electron Gas.
Nano letters
2019
Abstract
In typical thermoelectric energy harvesters and sensors, the Seebeck effect is caused by diffusion of electrons or holes in a temperature gradient. However, the Seebeck effect can also have a phonon drag component, due to momentum exchange between charge carriers and lattice phonons, which is more difficult to quantify. Here, we present the first study of phonon drag in the AlGaN/GaN two-dimensional electron gas (2DEG). We find that phonon drag does not contribute significantly to the thermoelectric behavior of devices with 100 nm GaN thickness, which suppresses the phonon mean free path. However, when the thickness is increased to 1.2 mum, up to 32% (88%) of the Seebeck coefficient at 300 K (50 K) can be attributed to the drag component. In turn, the phonon drag enables state-of-the-art thermoelectric power factor in the thicker GaN film, up to 40 mW m-1 K-2 at 50 K. By measuring the thermal conductivity of these AlGaN/GaN films, we show that the magnitude of the phonon drag can increase even when the thermal conductivity decreases. Decoupling of thermal conductivity and Seebeck coefficient could enable important advancements in thermoelectric power conversion with devices based on 2DEGs.
View details for DOI 10.1021/acs.nanolett.9b00901
View details for PubMedID 31088057
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Effect of Geometry on Sensitivity and Offset of AlGaN/GaN and InAlN/GaN Hall-Effect Sensors
IEEE SENSORS JOURNAL
2019; 19 (10): 3640–46
View details for DOI 10.1109/JSEN.2019.2895546
View details for Web of Science ID 000465288100009
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Modeling of radiation-induced defect recovery in 3C-SiC under high field bias conditions
COMPUTATIONAL MATERIALS SCIENCE
2019; 161: 10–15
View details for DOI 10.1016/j.commatsci.2019.01.016
View details for Web of Science ID 000462165100002
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500 degrees C SiC PWM Integrated Circuit
IEEE TRANSACTIONS ON POWER ELECTRONICS
2019; 34 (3): 1997–2001
View details for DOI 10.1109/TPEL.2018.2859430
View details for Web of Science ID 000458179200003
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Process-induced anomalous current transport in graphene/InAlN/GaN heterostructured diodes
IEEE. 2019
View details for Web of Science ID 000474762500053
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Gallium Nitride Photodetector Measurements of UV Emission from a Gaseous CH4/O-2 Hybrid Rocket Igniter Plume
IEEE. 2019
View details for Web of Science ID 000481648201013
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Stable Operation of AlGaN/GaN HEMTs for 25 h at 400C in air
IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY
2019; 7 (1): 931–35
View details for DOI 10.1109/JEDS.2019.2937008
View details for Web of Science ID 000495118900003
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Strain Effect in Highly-Doped n-Type 3C-SiC-on-Glass Substrate for Mechanical Sensors and Mobility Enhancement
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
2018; 215 (24)
View details for DOI 10.1002/pssa.201800288
View details for Web of Science ID 000453917000007
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High Responsivity, Low Dark Current Ultraviolet Photodetectors Based on Two-Dimensional Electron Gas Interdigitated Transducers
ACS PHOTONICS
2018; 5 (11): 4277–82
View details for DOI 10.1021/acsphotonics.8b01169
View details for Web of Science ID 000451496500013
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Highly sensitive pressure sensors employing 3C-SiC nanowires fabricated on a free standing structure
MATERIALS & DESIGN
2018; 156: 16–21
View details for DOI 10.1016/j.matdes.2018.06.031
View details for Web of Science ID 000441422300002
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Highly sensitive 4H-SiC pressure sensor at cryogenic and elevated temperatures
MATERIALS & DESIGN
2018; 156: 441–45
View details for DOI 10.1016/j.matdes.2018.07.014
View details for Web of Science ID 000441422300042
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A Single Input Multiple Output (SIMO) Variation-Tolerant Nanosensor.
ACS sensors
2018
Abstract
Successful transition to commercialization and practical implementation of nanotechnology innovations may very well need device designs that are tolerant to the inherent variations and imperfections in all nanomaterials including carbon nanotubes, graphene, and others. As an example, a single-walled carbon nanotube network based gas sensor is promising for a wide range of applications such as environment, industry, and biomedical and wearable devices due to its high sensitivity, fast response, and low power consumption. However, a long-standing issue has been the production of extremely high purity semiconducting nanotubes, thereby contributing to the delay in the market adoption of those sensors. Inclusion of even less than 0.1% of metallic nanotubes, which is inevitable, is found to result in a significant deterioration of sensor-to-sensor uniformity. Acknowledging the coexistence of metallic and semiconducting nanotubes as well as all other possible imperfections, we herein present a novel variation-tolerant sensor design where the sensor response is defined by a statistical Gaussian measure in contrast to a traditional deterministic approach. The single input and multiple output data are attained using multiport electrodes fabricated over a relatively large area single nanotube ensemble. The data processing protocol discards outlier data points and the origin of the outliers is investigated. Both the experimental demonstration and complementary analytical modeling support the hypothesis that the statistical analysis of the device can strengthen the credibility of the sensor constructed using nanomaterials with any imperfections. The proposed strategy can also be applied to physical, radiation, and biosensors as well as other electronic devices.
View details for PubMedID 30146873
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Characterization of the piezoresistance in highly doped p-type 3C-SiC at cryogenic temperatures.
RSC advances
2018; 8 (52): 29976-29979
Abstract
This paper reports on the piezoresistive effect in p-type 3C-SiC thin film mechanical sensing at cryogenic conditions. Nanothin 3C-SiC films with a carrier concentration of 2 × 1019 cm-3 were epitaxially grown on a Si substrate using the LPCVD process, followed by photolithography and UV laser engraving processes to form SiC-on-Si pressure sensors. The magnitude of the piezoresistive effect was measured by monitoring the change of the SiC conductance subjected to pressurizing/depressurizing cycles at different temperatures. Experimental results showed a relatively stable piezoresistive effect in the highly doped 3C-SiC film with the gauge factor slightly increased by 20% at 150 K with respect to that at room temperature. The data was also in good agreement with theoretical analysis obtained based on the charge transfer phenomenon. This finding demonstrates the potential of 3C-SiC for MEMS sensors used in a large range of temperatures from cryogenic to high temperatures.
View details for DOI 10.1039/c8ra05797d
View details for PubMedID 35547286
View details for PubMedCentralID PMC9085268
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Tuning Electrical and Thermal Transport in AlGaN/GaN Heterostructures via Buffer Layer Engineering
ADVANCED FUNCTIONAL MATERIALS
2018; 28 (22)
View details for DOI 10.1002/adfm.201705823
View details for Web of Science ID 000434030800001
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Graphene-enhanced gallium nitride ultraviolet photodetectors under 2 MeV proton irradiation
APPLIED PHYSICS LETTERS
2017; 111 (24)
View details for DOI 10.1063/1.5005797
View details for Web of Science ID 000418098900015
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In situ ultraviolet shock radiance measurements using GaN-on-sapphire photodetectors
REVIEW OF SCIENTIFIC INSTRUMENTS
2017; 88 (11): 115004
Abstract
Gallium nitride (GaN)-on-sapphire photodetectors are used to measure the ultraviolet (UV) radiance behind a shock wave in support of atmospheric entry sensing technologies. DC spectral response characterization of the GaN-based photodetectors shows a peak response around 365 nm with an UV/visible rejection of an order of magnitude. To conduct in situ measurements of UV shock-layer radiation, the GaN-based photodetectors were installed, without protective packaging, in the test section of a shock tube. The measured UV radiation, in terms of incident optical power on the photodetectors, is in excellent agreement with average UV radiation measured by the shock tube facility spectrometers. Furthermore, the device response after being subjected to the shock wave is unaltered, suggesting that the GaN-based material platform is suitable for implementation in aerospace and other harsh environment sensing applications.
View details for PubMedID 29195343
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Highly antireflective AlGaN/GaN ultraviolet photodetectors using ZnO nanorod arrays on inverted pyramidal surfaces
APPLIED SURFACE SCIENCE
2017; 409: 91-96
View details for DOI 10.1016/j.apsusc.2017.02.139
View details for Web of Science ID 000400223900014
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Lithography-free microfabrication of AlGaN/GaN 2DEG strain sensors using laser ablation and direct wire bonding
MICROELECTRONIC ENGINEERING
2017; 173: 54-57
View details for DOI 10.1016/j.mee.2017.03.012
View details for Web of Science ID 000401387400009
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Profile Evolution of High Aspect Ratio Silicon Carbide Trenches by Inductive Coupled Plasma Etching
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
2017; 26 (1): 135-142
View details for DOI 10.1109/JMEMS.2016.2621131
View details for Web of Science ID 000397049500014
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Suppression of Persistent Photoconductivity in AlGaN/GaN Ultraviolet Photodetectors Using In Situ Heating
IEEE ELECTRON DEVICE LETTERS
2017; 38 (1): 56-59
View details for DOI 10.1109/LED.2016.2626388
View details for Web of Science ID 000393765800014
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LOW-TEMPERATURE AND PRESSURE RESPONSE OF InAlN/GaN RING-SHAPED HIGH ELECTRON MOBILITY TRANSISTORS
IEEE. 2017: 786–89
View details for Web of Science ID 000426701400194
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ZnO nanorod arrays and direct wire bonding on GaN surfaces for rapid fabrication of antireflective, high-temperature ultraviolet sensors
APPLIED SURFACE SCIENCE
2016; 387: 280-284
View details for DOI 10.1016/j.apsusc.2016.06.166
View details for Web of Science ID 000381251100034
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Wafer-level MOCVD growth of AlGaN/GaN-on-Si HEMT structures with ultra-high room temperature 2DEG mobility
AIP ADVANCES
2016; 6 (11)
View details for DOI 10.1063/1.4967816
View details for Web of Science ID 000392082600024
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DC characteristics of ALD-grown Al2O3/AlGaN/GaN MIS-HEMTs and HEMTs at 600 degrees C in air
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
2016; 31 (11)
View details for DOI 10.1088/0268-1242/31/11/115017
View details for Web of Science ID 000386372800001
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A microfabricated sun sensor using GaN-on-sapphire ultraviolet photodetector arrays
REVIEW OF SCIENTIFIC INSTRUMENTS
2016; 87 (9)
Abstract
A miniature sensor for detecting the orientation of incident ultraviolet light was microfabricated using gallium nitride (GaN)-on-sapphire substrates and semi-transparent interdigitated gold electrodes for sun sensing applications. The individual metal-semiconductor-metal photodetector elements were shown to have a stable and repeatable response with a high sensitivity (photocurrent-to-dark current ratio (PDCR) = 2.4 at -1 V bias) and a high responsivity (3200 A/W at -1 V bias) under ultraviolet (365 nm) illumination. The 3 × 3 GaN-on-sapphire ultraviolet photodetector array was integrated with a gold aperture to realize a miniature sun sensor (1.35 mm × 1.35 mm) capable of determining incident light angles with a ±45° field of view. Using a simple comparative figure of merit algorithm, measurement of incident light angles of 0° and 45° was quantitatively and qualitatively (visually) demonstrated by the sun sensor, supporting the use of GaN-based sun sensors for orientation, navigation, and tracking of the sun within the harsh environment of space.
View details for DOI 10.1063/1.4962704
View details for Web of Science ID 000385634500061
View details for PubMedID 27782578
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Rapid fabrication and packaging of AlGaN/GaN high-temperature ultraviolet photodetectors using direct wire bonding
JOURNAL OF PHYSICS D-APPLIED PHYSICS
2016; 49 (28)
View details for DOI 10.1088/0022-3727/49/28/285109
View details for Web of Science ID 000383675600010
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Continuous V-Grooved AlGaN/GaN Surfaces for High-Temperature Ultraviolet Photodetectors
IEEE SENSORS JOURNAL
2016; 16 (10): 3633-3639
View details for DOI 10.1109/JSEN.2016.2531181
View details for Web of Science ID 000374239600038
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Interdigitated Pt-GaN Schottky interfaces for high-temperature soot-particulate sensing
APPLIED SURFACE SCIENCE
2016; 368: 104-109
View details for DOI 10.1016/j.apsusc.2016.01.178
View details for Web of Science ID 000373949000015
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Strain- and temperature-induced effects in AlGaN/GaN high electron mobility transistors
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
2016; 31 (3)
View details for DOI 10.1088/0268-1242/31/3/035024
View details for Web of Science ID 000372423200028
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Low-resistance gateless high electron mobility transistors using three-dimensional inverted pyramidal AlGaN/GaN surfaces
APPLIED PHYSICS LETTERS
2016; 108 (1)
View details for DOI 10.1063/1.4939509
View details for Web of Science ID 000374313000032
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4th International Symposium on Sensor Science (I3S2015): Conference Report.
Sensors
2015; 15 (9): 24458-24465
View details for DOI 10.3390/s150924458
View details for PubMedID 26404306
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4H-SiC N-Channel JFET for Operation in High-Temperature Environments
IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY
2014; 2 (6): 164-167
View details for DOI 10.1109/JEDS.2014.2355132
View details for Web of Science ID 000209607000006
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Operation of ohmic Ti/Al/Pt/Au multilayer contacts to GaN at 600 degrees C in air
APPLIED PHYSICS LETTERS
2014; 105 (8)
View details for DOI 10.1063/1.4894290
View details for Web of Science ID 000342753500026
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Temperature sensor based on 4H-silicon carbide pn diode operational from 20 degrees C to 600 degrees C
APPLIED PHYSICS LETTERS
2014; 104 (7)
View details for DOI 10.1063/1.4865372
View details for Web of Science ID 000332038500075
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Characterization of gallium nitride microsystems within radiation and high-temperature environments
Conference on Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII
SPIE-INT SOC OPTICAL ENGINEERING. 2014
View details for DOI 10.1117/12.2046690
View details for Web of Science ID 000336038300005
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Emerging GaN-based HEMTs for mechanical sensing within harsh environments
Conference on Sensors for Extreme Harsh Environments
SPIE-INT SOC OPTICAL ENGINEERING. 2014
View details for DOI 10.1117/12.2051568
View details for Web of Science ID 000343119800011
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Characterization of Irradiated and Temperature-compensated Gallium Nitride Surface Acoustic Wave Resonators
Conference on Sensors for Extreme Harsh Environments
SPIE-INT SOC OPTICAL ENGINEERING. 2014
View details for DOI 10.1117/12.2050838
View details for Web of Science ID 000343119800009
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Effects of radiation and temperature on gallium nitride (GaN) metal-semiconductor-metal ultraviolet photodetectors
Conference on Sensors for Extreme Harsh Environments
SPIE-INT SOC OPTICAL ENGINEERING. 2014
View details for DOI 10.1117/12.2050983
View details for Web of Science ID 000343119800003
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Solar-Blind Photodetectors for Harsh Electronics
SCIENTIFIC REPORTS
2013; 3
View details for DOI 10.1038/srep02628
View details for Web of Science ID 000324157500003
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Advances in silicon carbide science and technology at the micro- and nanoscales
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
2013; 31 (5)
View details for DOI 10.1116/1.4807902
View details for Web of Science ID 000324388800006
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Surface acoustic wave devices on AlN/3C-SiC/Si multilayer structures
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
2013; 23 (2)
View details for DOI 10.1088/0960-1317/23/2/025019
View details for Web of Science ID 000313752800019
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Characterization of Gallium Nitride Heterostructures for Strain Sensing at Elevated Temperatures
9th International Workshop on Structural Health Monitoring (IWSHM)
DESTECH PUBLICATIONS, INC. 2013: 1621–1628
View details for Web of Science ID 000329292700198
- MEMS Piezoelectric Energy Harvesters for Harsh Environment Sensing 2013
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Robust Sensors for Structural Health Monitoring within Harsh Environments
9th International Workshop on Structural Health Monitoring (IWSHM)
DESTECH PUBLICATIONS, INC. 2013: 45–50
View details for Web of Science ID 000329292700005
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4H-SiC Metal-Semiconductor-Metal Ultraviolet Photodetectors in Operation of 450 degrees C
IEEE ELECTRON DEVICE LETTERS
2012; 33 (11): 1586-1588
View details for DOI 10.1109/LED.2012.2214759
View details for Web of Science ID 000310387100025
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AlN/3C-SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators
ADVANCED MATERIALS
2012; 24 (20): 2722-2727
Abstract
An AlN/3C-SiC composite layer enables the third-order quasi-symmetric (QS(3)) Lamb wave mode with a high quality factor (Q) characteristic and an ultra-high phase velocity up to 32395 ms(-1). A Lamb wave resonator utilizing the QS(3) mode exhibits a low motional impedance of 91 Ω and a high Q of 5510 at a series resonance frequency (f(s)) of 2.92 GHz, resulting in the highest f(s)·Q product of 1.61 × 10(13) Hz among the suspended piezoelectric thin film resonators reported to date.
View details for DOI 10.1002/adma.201104842
View details for Web of Science ID 000304043000011
View details for PubMedID 22495881
- Micromachined aluminum nitride acoustic resonators with an epitaxial silicon carbide layer utilizing high-order Lamb wave modes 2012
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Wide Bandgap Semiconductors for Sensing within Extreme Harsh Environments
Symposia on Low-Dimensional Nanoscale Elect and Photonic Devices 5 and State-of-the-Art Program on Cpd Semicond 54 (SOTAPOCS)
ELECTROCHEMICAL SOC INC. 2012: 233–38
View details for DOI 10.1149/05006.0233ecst
View details for Web of Science ID 000338190200034
- Epitaxial Graphene Growth on 3C-SiC(111)/AlN(0001)/Si(100) Electrochemical and Solid-State Letters 2011; 14 (2): K13-K15
- Active Materials for New Energy Efficient Window Glazing Technology: Feasibility Study Technical Report for Lawrence Berkeley National Laboratory and Department of Energy 2011
- MEMS Strain Sensors for Intelligent Structural Systems. New Developments in Sensing Technology for Structural Health Monitoring edited by Mukhopadhyay, S. Springer-Verlag. 2011: 63–74
- High-Q aluminum nitride Lamb wave resonators with biconvex edges Applied Physics Letters 2011; 99: 143501
- Low-Temperature, Ion Beam-Assisted SiC Thin Films With Antireflective ZnO Nanorod Arrays for High-Temperature Photodetection IEEE Electron Device Letters 2011; 32: 1564 - 1566
- Quality factor enhancement in Lamb wave resonators utilizing AlN plates with convex edges 2011
- Nanocrystalline SiC Metal-Semiconductor-Metal Photodetector with ZnO Nanorod Arrays for High-Temperature Applications. 2011
- MEMS Sensors for Down-Hole Monitoring of Geothermal Energy Systems 2011
- AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices Applied Physics Letters 2010; 97: 141907
- Synthesis of narrowband AlN Lamb wave ladder-type filters based on overhang adjustment 2010
- Growth of Highly C-Axis Oriented AlN Films on 3C-SiC/Si Substrate 2010
- Characterization of Aluminum Nitride Lamb Wave Resonators Operating At 600°C For Harsh Environment RF Applications 2010
- Ohmic Contact With Enhanced Stability to Polycrystalline Silicon Carbide Via Carbon Interfacial Layer 2010
- MEMS Sensing in an In-Cylinder Combustion Environment 2010
- Aluminum Nitride as a Masking Material for the Plasma Etching of Silicon Carbide Structures 2010
- Growth of 3C-SiC/AlN/Si(100) layered structure with atomically abrupt interface via modified precursor feeding procedure Electrochemical and Solid-State Letters 2010; 13 (7): D53-D56
- Genetic Algorithm Optimization for MEMS Cantilevered Piezoelectric Energy Harvesters 2010
- Surface acoustic wave propagation properties in AlN/3C-SiC/Si composite structure 2010
- Epitaxial Growth of 3C-SiC on AlN/Si (100) via Methyltrichlorosilane-based Chemical Vapor Deposition 2009
- Harsh Environment Silicon Carbide Sensors for Health and Performance Monitoring of Aerospace Systems: a Review IEEE Sensors Journal 2009; 9 (11): 1472-1478
- Electrodeposition of Permalloy in Deep Silicon Trenches without Edge-Overgrowth Utilizing Dry Film Photoresist 2009
- A Silicon Carbide Resonant Tuning Fork for Micro-Sensing Applications in High Temperature and High G-Shock Environments Journal of Micro/Nanolithography, MEMS, and MOEMS 2009; 8 (2): 21116
- High Resolution Silicon Carbide Strain Gauge at 600oC 2008
- Low Temperature Ion Beam Sputter Deposition of Amorphous Silicon Carbide for Vacuum Encapsulation 2007
- A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications IEEE Sensors Journal 2007; 7 (4): 568-576
- Ion Beam Sputter Deposition of Silicon Carbide for Vacuum Encapsulation 2007
- Silicon Carbide Coated MEMS Strain Sensor for Harsh Environment Applications 2007
- Fabrication of Ultra Thick Ferromagnetic Structures in Silicon 2004
- MEMS Rotary Engine Power System 2002