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  • Heat Transfer in Microchannels-2012 Status and Research Needs JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME Kandlikar, S. G., Colin, S., Peles, Y., Garimella, S., Pease, R. F., Brandner, J. J., Tuckerman, D. B. 2013; 135 (9)

    View details for DOI 10.1115/1.4024354

    View details for Web of Science ID 000326169800002

  • Single Cell Profiling of Circulating Tumor Cells: Transcriptional Heterogeneity and Diversity from Breast Cancer Cell Lines PLOS ONE Powell, A. A., Talasaz, A. H., Zhang, H., Coram, M. A., Reddy, A., Deng, G., Telli, M. L., Advani, R. H., Carlson, R. W., Mollick, J. A., Sheth, S., Kurian, A. W., Ford, J. M., Stockdale, F. E., Quake, S. R., Pease, R. F., Mindrinos, M. N., Bhanot, G., Dairkee, S. H., Davis, R. W., Jeffrey, S. S. 2012; 7 (5)

    Abstract

    To improve cancer therapy, it is critical to target metastasizing cells. Circulating tumor cells (CTCs) are rare cells found in the blood of patients with solid tumors and may play a key role in cancer dissemination. Uncovering CTC phenotypes offers a potential avenue to inform treatment. However, CTC transcriptional profiling is limited by leukocyte contamination; an approach to surmount this problem is single cell analysis. Here we demonstrate feasibility of performing high dimensional single CTC profiling, providing early insight into CTC heterogeneity and allowing comparisons to breast cancer cell lines widely used for drug discovery.We purified CTCs using the MagSweeper, an immunomagnetic enrichment device that isolates live tumor cells from unfractionated blood. CTCs that met stringent criteria for further analysis were obtained from 70% (14/20) of primary and 70% (21/30) of metastatic breast cancer patients; none were captured from patients with non-epithelial cancer (n = 20) or healthy subjects (n = 25). Microfluidic-based single cell transcriptional profiling of 87 cancer-associated and reference genes showed heterogeneity among individual CTCs, separating them into two major subgroups, based on 31 highly expressed genes. In contrast, single cells from seven breast cancer cell lines were tightly clustered together by sample ID and ER status. CTC profiles were distinct from those of cancer cell lines, questioning the suitability of such lines for drug discovery efforts for late stage cancer therapy.For the first time, we directly measured high dimensional gene expression in individual CTCs without the common practice of pooling such cells. Elevated transcript levels of genes associated with metastasis NPTN, S100A4, S100A9, and with epithelial mesenchymal transition: VIM, TGFß1, ZEB2, FOXC1, CXCR4, were striking compared to cell lines. Our findings demonstrate that profiling CTCs on a cell-by-cell basis is possible and may facilitate the application of 'liquid biopsies' to better model drug discovery.

    View details for DOI 10.1371/journal.pone.0033788

    View details for Web of Science ID 000305335000005

    View details for PubMedID 22586443

  • Cooling Three-Dimensional Integrated Circuits using Power Delivery Networks 2012 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM) Wei, H., Wu, T. F., Sekar, D., Cronquist, B., Pease, R. F., Mitra, S. 2012
  • Comment on "Ultrahigh secondary electron emission of carbon nanotubes" [Appl. Phys. Lett. 96, 213113, (2010)] APPLIED PHYSICS LETTERS ALAM, M. K., Pease, R. F., Nojeh, A. 2011; 98 (6)

    View details for DOI 10.1063/1.3552975

    View details for Web of Science ID 000287242100068

  • Sub-15 nm Photo-electron Source Using a Nano-aperture Integrated with a Nano-antenna 2011 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) Cheng, Y., Takashima, Y., Maldonado, J. R., Scipioni, L., Ferranti, D., Pianetta, P. A., Hesselink, L., Pease, R. F. 2011
  • Semiconductor crystal islands for three-dimensional integration Crnogorac, F., Wong, S., Pease, R. F. A V S AMER INST PHYSICS. 2010: C6P53-C6P58

    View details for DOI 10.1116/1.3511473

    View details for Web of Science ID 000285015200113

  • Optical and computed evaluation of keyhole diffractive imaging for lensless x-ray microscopy Dai, B., Zhu, D., Jaroensri, R., Kulalert, K., Pianetta, P., Pease, R. F. A V S AMER INST PHYSICS. 2010: C6Q1-C6Q5

    View details for DOI 10.1116/1.3501340

    View details for Web of Science ID 000285015200118

  • On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems Hosseini, A., Kwong, D., Zhang, Y., Chandorkar, S. A., Crnogorac, F., Carlson, A., Fallah, B., Bank, S., Tutuc, E., Rogers, J., Pease, R. F., Chen, R. T. A V S AMER INST PHYSICS. 2010: C6O1-C6O7

    View details for DOI 10.1116/1.3511508

    View details for Web of Science ID 000285015200091

  • Nondestructive detection of deviation in integrated circuits Baghaei, L., Dai, B., Pianetta, P., Pease, R. F. A V S AMER INST PHYSICS. 2010: C6Q25-C6Q27

    View details for DOI 10.1116/1.3518464

    View details for Web of Science ID 000285015200121

  • Iterative phase recovery using wavelet domain constraints JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B Baghaei, L., Rad, A., Dai, B., Pianetta, P., Miao, J., Pease, R. F. 2009; 27 (6): 3192-3195

    View details for DOI 10.1116/1.3258632

    View details for Web of Science ID 000272803400174

  • Unequally Spaced Waveguide Arrays for Silicon Nanomembrane-Based Efficient Large Angle Optical Beam Steering IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS Hosseini, A., Kwong, D., Zhao, Y., Chen, Y., Crnogorac, F., Pease, R. F., Chen, R. T. 2009; 15 (5): 1439-1446
  • Isolating highly enriched populations of circulating epithelial cells and other rare cells from blood using a magnetic sweeper device PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA Talasaz, A. H., Powell, A. A., Huber, D. E., Berbee, J. G., Roh, K., Yu, W., Xiao, W., Davis, M. M., Pease, R. F., Mindrinos, M. N., Jeffrey, S. S., Davis, R. W. 2009; 106 (10): 3970-3975

    Abstract

    The enumeration of rare circulating epithelial cells (CEpCs) in the peripheral blood of metastatic cancer patients has shown promise for improved cancer prognosis. Moving beyond enumeration, molecular analysis of CEpCs may provide candidate surrogate endpoints to diagnose, treat, and monitor malignancy directly from the blood samples. Thorough molecular analysis of CEpCs requires the development of new sample preparation methods that yield easily accessible and purified CEpCs for downstream biochemical assays. Here, we describe a new immunomagnetic cell separator, the MagSweeper, which gently enriches target cells and eliminates cells that are not bound to magnetic particles. The isolated cells are easily accessible and can be extracted individually based on their physical characteristics to deplete any cells nonspecifically bound to beads. We have shown that our device can process 9 mL of blood per hour and captures >50% of CEpCs as measured in spiking experiments. We have shown that the separation process does not perturb the gene expression of rare cells. To determine the efficiency of our platform in isolating CEpCs from patients, we have isolated CEpCs from all 47 tubes of 9-mL blood samples collected from 17 women with metastatic breast cancer. In contrast, we could not find any circulating epithelial cells in samples from 5 healthy donors. The isolated CEpCs are all stored individually for further molecular analysis.

    View details for DOI 10.1073/pnas.0813188106

    View details for Web of Science ID 000264036900059

    View details for PubMedID 19234122

  • Prospects of free electron analog to digital technology Aldana, R., Pease, R. F. A V S AMER INST PHYSICS. 2008: 2592-2595

    View details for DOI 10.1116/1.2991988

    View details for Web of Science ID 000261385600144

  • X-ray diffraction microscopy: Reconstruction with partial magnitude and spatial a priori information Rad, L. B., Downes, I., Dai, B., Zhu, D., Scherz, A., Ye, J., Pianetta, P., Pease, R. F. A V S AMER INST PHYSICS. 2008: 2362-2366

    View details for DOI 10.1116/1.3002487

    View details for Web of Science ID 000261385600098

  • Pulsed laser techniques for nanographoepitaxy Crnogorac, F., Witte, D. J., Pease, R. F. A V S AMER INST PHYSICS. 2008: 2520-2523

    View details for DOI 10.1116/1.3013373

    View details for Web of Science ID 000261385600129

  • Preferential orientation effects in partial melt laser crystallization of silicon Witte, D. J., Masbou, M. P., Crnogorac, F., Pease, R. F., Pickard, D. S. A V S AMER INST PHYSICS. 2008: 2455-2459

    View details for DOI 10.1116/1.2998702

    View details for Web of Science ID 000261385600116

  • Photoemission from single-walled carbon nanotubes JOURNAL OF APPLIED PHYSICS Nojeh, A., Ioakeimidi, K., Sheikhaei, S., Pease, R. F. 2008; 104 (5)

    View details for DOI 10.1063/1.2968457

    View details for Web of Science ID 000259853600114

  • Secondary electron detection for distributed axis electron beam systems MICROELECTRONIC ENGINEERING Tanimoto, S., Pickard, D. S., Kenney, C., Pease, R. F. 2008; 85 (8): 1786-1791
  • Spatial Quantized Analog-to-Digital Conversion Based on Optical Beam-Steering JOURNAL OF LIGHTWAVE TECHNOLOGY Jarrahi, M., Pease, R. F., Lee, T. H. 2008; 26 (13-16): 2219-2226
  • Demonstration of secondary electron detection using monolithic multi-channel electron detector Tanimoto, S., Pickard, D. S., Kenney, C., Hasi, J., Pease, R. F. JAPAN SOC APPLIED PHYSICS. 2008: 4913-4917
  • Lithography and other patterning techniques for future electronics PROCEEDINGS OF THE IEEE Pease, R. F., Chou, S. Y. 2008; 96 (2): 248-270
  • Significant advances in scanning electron microscopes (1965-2007) ADVANCES IN IMAGING AND ELECTRON PHYSICS, VOL 150 Pease, R. F. 2008; 150: 53-86
  • Metal-semiconductor-metal electron detectors Aldana, R., Pease, R. F. A V S AMER INST PHYSICS. 2007: 2077-2080

    View details for DOI 10.1116/1.2798745

    View details for Web of Science ID 000251611900061

  • CsBr/GaN heterojunction photoelectron source Maldonado, J. R., Liu, Z., Sun, Y., Schuetter, S., Pianetta, P., Pease, R. F. A V S AMER INST PHYSICS. 2007: 2266-2270

    View details for DOI 10.1116/1.2779042

    View details for Web of Science ID 000251611900100

  • Rapid partial melt crystallization of silicon for monolithic three-dimensional integration Witte, D. J., Pickard, D. S., Crnogorac, F., Pianetta, P., Pease, R. F. A V S AMER INST PHYSICS. 2007: 1989-1992

    View details for DOI 10.1116/1.2798732

    View details for Web of Science ID 000251611900041

  • Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection Pickard, D. S., Kenney, C., Tanimoto, S., Crane, T., Groves, T., Pease, R. F. A V S AMER INST PHYSICS. 2007: 2277-2283

    View details for DOI 10.1116/1.2804611

    View details for Web of Science ID 000251611900102

  • Economic approximate models for backscattered electrons Rad, L. B., Downes, I., Ye, J., Adler, D., Pease, R. F. A V S AMER INST PHYSICS. 2007: 2425-2429

    View details for DOI 10.1116/1.2794068

    View details for Web of Science ID 000251611900132

  • High current density GaN/CsBr heterojunction photocathode with improved photoyield APPLIED PHYSICS LETTERS Liu, Z., Sun, Y., Pianetta, P., Maldonado, J. R., Pease, R. F., Schuetter, S. 2007; 90 (23)

    View details for DOI 10.1063/1.2746959

    View details for Web of Science ID 000247145500015

  • Lamellar crystallization of silicon for 3-dimensional integration Witte, D. J., Crnogorac, F., Pickard, D. S., Mehta, A., Liu, Z., Rajendran, B., Pianetta, P., Pease, R. F. ELSEVIER SCIENCE BV. 2007: 1186-1189
  • Nano-graphoepitaxy of semiconductors for 3D integration Crnogorac, F., Witte, D. J., Xia, Q., Rajendran, B., Pickard, D. S., Liu, Z., Mehta, A., Sharma, S., Yasseri, A., Kamins, T. I., Chou, S. Y., Pease, R. F. ELSEVIER SCIENCE BV. 2007: 891-894
  • Low thermal budget processing for sequential 3-D IC fabrication IEEE TRANSACTIONS ON ELECTRON DEVICES Rajendran, B., Shenoy, R. S., Witte, D. J., Chokshi, N. S., DeLeon, R. L., Tompa, G. S., Pease, R. F. 2007; 54 (4): 707-714
  • High-speed scanning electron Microscopy using distributed-axis electron optics MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS Pease, R. F., Pickard, D. S., Tanimoto, S. 2007: 414-415
  • Effect of nanoimprinted surface relief on Si and Ge nucleation and ordering Kamins, T. I., Yasseri, A. A., Sharma, S., Pease, R. F., Xia, Q., Chou, S. Y. ELSEVIER SCI LTD. 2006: 1481-1485
  • Pattern reconstruction of scanning electron microscope images using long-range content complexity analysis of the edge ridge signal Feng, H., Ye, J., Pease, R. F. A V S AMER INST PHYSICS. 2006: 3110-3114

    View details for DOI 10.1116/1.2363408

    View details for Web of Science ID 000243324400115

  • Alkylsiloxane self-assembled monolayer formation guided by nanoimprinted Si and SiO2 templates APPLIED PHYSICS LETTERS Yasseri, A. A., Sharma, S., Kamins, T. I., Xia, Q., Chou, S. Y., Pease, R. F. 2006; 89 (15)

    View details for DOI 10.1063/1.2360920

    View details for Web of Science ID 000241247900113

  • CsBr photocathode at 257 nm: A rugged high current density electron source APPLIED PHYSICS LETTERS Liu, Z., Maldonado, J., Sun, Y., Pianetta, P., Pease, R. F. 2006; 89 (11)

    View details for DOI 10.1063/1.2354029

    View details for Web of Science ID 000240545400014

  • Shot noise models for sequential processes and the role of lateral mixing Neureuther, A. R., Pease, R. F., Yuan, L., Parizi, K. B., Esfandyarpour, H., Poppe, W. J., Liddle, J. A., Anderson, E. H. A V S AMER INST PHYSICS. 2006: 1902-1908

    View details for DOI 10.1116/1.2218875

    View details for Web of Science ID 000239890000036

  • Parameters and mechanisms governing image contrast in scanning electron microscopy of single-walled carbon nanotubes SCANNING Wong, W. K., Nojeh, A., Pease, R. F. 2006; 28 (4): 219-227

    Abstract

    Image formation of single-walled carbon nanotubes (SWNTs) in the scanning electron microscope (SEM) is peculiarly sensitive to primary electron landing energy, imaging history, sample/substrate geometry, electrical conductivity, sample contamination, and substrate charging. This sensitivity is probably due to the extremely small interaction volume of the SWNTs' monolayered, nanoscale structures with the electron beam. Traditional electron beam/bulk specimen interaction models appear unable to explain the contrast behavior when directly applied to SWNTs. We present one systematic case study of SWNT SEM imaging with special attention to the above parameters and propose some physical explanations for the effect of each. We also demonstrate that it is possible to employ voltage biasing to counteract this extrinsic behavior, gain better control of the image contrast, and facilitate the interpretation of SWNT images in the SEM.

    View details for Web of Science ID 000239952200004

    View details for PubMedID 16898669

  • Direct, in-scanner, aerial image sensing Pease, R. F. ELSEVIER SCIENCE BV. 2006: 1030-1035
  • Ab initio modeling of the interaction of electron beams and single-walled carbon nanotubes PHYSICAL REVIEW LETTERS Nojeh, A., Shan, B., Cho, K., Pease, R. F. 2006; 96 (5)

    Abstract

    Single-walled carbon nanotubes are readily observable in a scanning electron microscope, which traditional models fail to explain. We present an ab initio model to explain how the electron beam can interact with these structures despite the very small, nanoscale, interaction volume. In particular, we show how the electron beam can generate very strong secondary electron emission from the tip of a nanotube under external electric field. The approach may also be used in modeling the interaction of charged particles with nanostructures in other applications such as electron detection.

    View details for DOI 10.1103/PhysRevLett.96.056802

    View details for Web of Science ID 000235252200065

    View details for PubMedID 16486969

  • Self inspection of integrated circuits pattern defects using support vector machines Feng, H. Y., Ye, J., Pease, R. F. A V S AMER INST PHYSICS. 2005: 3085-3089

    View details for DOI 10.1116/1.2062434

    View details for Web of Science ID 000234613200157

  • Reconstruction of pattern images from scanning electron microscope images Feng, H. Y., Ye, J., Pease, R. F. A V S AMER INST PHYSICS. 2005: 3080-3084

    View details for DOI 10.1116/1.2127944

    View details for Web of Science ID 000234613200156

  • Narrow cone emission from negative electron affinity photocathodes Liu, Z., Sun, Y., Pianetta, P., Pease, R. F. A V S AMER INST PHYSICS. 2005: 2758-2762

    View details for DOI 10.1116/1.2101726

    View details for Web of Science ID 000234613200092

  • Maskless lithography Pease, R. F. ELSEVIER SCIENCE BV. 2005: 381-392
  • Distributed-axis electron beam optics for fast inspection Pease, R. F., Pickard, D. WILEY-BLACKWELL. 2005: 67-67
  • Parameters and mechanisms governing image contrast in the scanning electron microscopy of carbon nanotubes Wong, W. K., Nojeh, A., Pease, R. F. WILEY-BLACKWELL. 2005: 87-88
  • Photoelectronic analog-to-digital conversion: Sampling and quantizing at 100 Gs/s IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES Ioakeimidi, K., Leheny, R. F., Gradinaru, S., Bolton, P. R., Aldana, R., Ma, K., Clendenin, J. E., Harris, J. S., Pease, R. F. 2005; 53 (1): 336-342
  • Subpicosecond jitter in picosecond electron bunches Ioakeimidi, K., Gradinaru, S., Liu, Z., Machuca, F., Nielsen, J. F., Aldana, R., Bolton, R. P., Clendenin, J., Leheny, R., Pease, R. F. A V S AMER INST PHYSICS. 2005: 196-200
  • Electron beam stimulated field-emission from single-walled carbon nanotubes Nojeh, A., Wong, W. K., Yieh, E., Pease, R. F., DAI, H. J. A V S AMER INST PHYSICS. 2004: 3124-3127

    View details for DOI 10.1116/1.1809628

    View details for Web of Science ID 000226439800104

  • Reaching for the bottom: The evolution of EIPBN Smith, H. I., Pease, R. F. A V S AMER INST PHYSICS. 2004: 2882-2884

    View details for DOI 10.1116/1.1828088

    View details for Web of Science ID 000226439800055

  • Dynamic self-inspection of integrated circuit pattern defects Feng, H. Y., Ye, J., Pease, R. F. A V S AMER INST PHYSICS. 2004: 3373-3377

    View details for DOI 10.1116/1.1824049

    View details for Web of Science ID 000226439800158

  • Electric-field-directed growth of carbon nanotubes in two dimensions Nojeh, A., Ural, A., Pease, R. F., DAI, H. J. A V S AMER INST PHYSICS. 2004: 3421-3425

    View details for DOI 10.1116/1.1821578

    View details for Web of Science ID 000226439800168

  • Self-inspection of IC pattern defects Feng, H. Y., Ye, J., Pease, R. F. A V S AMER INST PHYSICS. 2004: 3386-3389

    View details for DOI 10.1116/1.1809627

    View details for Web of Science ID 000226439800161

  • Electron scattering study within the depletion region of the GaN(0001) and the GaAs(100) surface APPLIED PHYSICS LETTERS Liu, Z., Machuca, F., Pianetta, P., SPICER, W. E., Pease, R. F. 2004; 85 (9): 1541-1543

    View details for DOI 10.1063/1.1785865

    View details for Web of Science ID 000223555000031

  • Scanning electron microscopy of field-emitting individual single-walled carbon nanotubes APPLIED PHYSICS LETTERS Nojeh, A., Wong, W. K., Baum, A. W., Pease, R. F., Dai, H. 2004; 85 (1): 112-114

    View details for DOI 10.1063/1.1763984

    View details for Web of Science ID 000222360300038

  • Induced thermal stress fields for three-dimensional distortion control of Si wafer topography REVIEW OF SCIENTIFIC INSTRUMENTS Schaper, C. D., Chen, B. D., Pease, R. F. 2004; 75 (6): 1997-2002

    View details for DOI 10.1063/1.1753101

    View details for Web of Science ID 000221793800010

  • Electrical test structures for mapping nanometer-scale pattern placement errors Wang, F. M., Pease, R. F. A V S AMER INST PHYSICS. 2004: 12-15

    View details for DOI 10.1116/1.1633279

    View details for Web of Science ID 000220573800004

  • Towards higher-resolution scanning electron microscopy ADVANCES IN IMAGING AND ELECTRON PHYSICS, VOL 133 Pease, R. F. 2004; 133: 187-193
  • Distributed axis electron beam technology for maskless lithography and defect inspection Pickard, D. S., Groves, T. R., Meisburger, W. D., Crane, T., Pease, R. F. A V S AMER INST PHYSICS. 2003: 2834-2838

    View details for DOI 10.1116/1.1629291

    View details for Web of Science ID 000188193600101

  • Transient temperature measurements of resist heating using nanothermocouples Chu, D. C., Wong, W. K., Goodson, K. E., Pease, R. F. A V S AMER INST PHYSICS. 2003: 2985-2989

    View details for DOI 10.1116/1.1624255

    View details for Web of Science ID 000188193600133

  • Photoelectronic analog-to-digital conversion using miniature electron optics: Basic design considerations Pease, R. F., Ioakeimidi, K., Aldana, R., Leheny, R. A V S AMER INST PHYSICS. 2003: 2826-2829

    View details for DOI 10.1116/1.1621664

    View details for Web of Science ID 000188193600099

  • Electron beam induced conductivity in poly(methylmethacrylate) and SiO2 thin films Bai, M., Pease, R. F., Meisburger, D. A V S AMER INST PHYSICS. 2003: 2638-2644

    View details for DOI 10.1116/1.1618237

    View details for Web of Science ID 000188193600064

  • Effect of oxygen adsorption on the efficiency of magnesium photocathodes Yuan, Q., Baum, A. W., Pease, R. F., Pianetta, P. A V S AMER INST PHYSICS. 2003: 2830-2833

    View details for DOI 10.1116/1.1624265

    View details for Web of Science ID 000188193600100

  • A carbon nanotube cross structure as a nanoscale quantum device NANO LETTERS Nojeh, A., Lakatos, G. W., Peng, S., Cho, K., Pease, R. F. 2003; 3 (9): 1187-1190

    View details for DOI 10.1021/nl034278b

    View details for Web of Science ID 000185330700003

  • Optimization and characterization of III-V surface cleaning Liu, Z., Sun, Y., Machuca, F., Pianetta, P., SPICER, W. E., Pease, R. F. A V S AMER INST PHYSICS. 2003: 1953-1958

    View details for DOI 10.1116/1.1593644

    View details for Web of Science ID 000185080000140

  • Low frequency noise in sub-100 nm MOSFETs Kramer, T. A., Pease, R. F. ELSEVIER SCIENCE BV. 2003: 13-17
  • Oxygen species in Cs/O activated gallium nitride (GaN) negative electron affinity photocathodes Machuca, F., Liu, Z., Sun, Y., Pianetta, P., SPICER, W. E., Pease, R. F. A V S AMER INST PHYSICS. 2003: 1863-1869

    View details for DOI 10.1116/1.1589512

    View details for Web of Science ID 000185080000124

  • Transient measurement of resist charging during electron beam exposure Bai, M., Meisburger, W. D., Pease, R. F. A V S AMER INST PHYSICS. 2003: 106-111

    View details for DOI 10.1116/1.1534571

    View details for Web of Science ID 000182603900021

  • Preparation of clean GaAs(100) studied by synchrotron radiation photoemission JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A Liu, Z., Sun, Y., Machuca, F., Pianetta, P., SPICER, W. E., Pease, R. F. 2003; 21 (1): 212-218

    View details for DOI 10.1116/1.1532737

    View details for Web of Science ID 000182598200031

  • Thin film nano thermocouple sensors for applications in laser and electron beam irradiation BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 CHU, D. C., Bilir, D. T., Pease, R. F., Goodson, K. E. 2003: 1112-1115
  • Role of oxygen in semiconductor negative electron affinity photocathodes Machuca, F., Liu, Z., Sun, Y., Pianetta, P., SPICER, W. E., Pease, R. F. A V S AMER INST PHYSICS. 2002: 2721-2725

    View details for DOI 10.1116/1.1521742

    View details for Web of Science ID 000180307300093

  • Submicron thermocouple measurements of electron-beam resist heating Chu, D. C., Bilir, D. T., Pease, R. F., Goodson, K. E. A V S AMER INST PHYSICS. 2002: 3044-3046

    View details for DOI 10.1116/1.1523023

    View details for Web of Science ID 000180307300159

  • Distributed axis electron-beam system for lithography and inspection - preliminary experimental results Pickard, D. S., Campbell, C., Crane, T., Cruz-Rivera, L. J., Davenport, A., Meisburger, W. D., Pease, R. F., Groves, T. R. A V S AMER INST PHYSICS. 2002: 2662-2665

    View details for DOI 10.1116/1.1520566

    View details for Web of Science ID 000180307300080

  • Correcting for global space charge by positive ion generation Crane, T., Campbell, C., Pickard, D., Han, L. Q., Takahashi, K., Meisburger, W. D., Pease, R. F. A V S AMER INST PHYSICS. 2002: 2709-2712

    View details for DOI 10.1116/1.1523398

    View details for Web of Science ID 000180307300090

  • Simple method for cleaning gallium nitride (0001) Machuca, F., Liu, Z., Sun, Y., Pianetta, R., SPICER, W. E., Pease, R. F. A V S AMER INST PHYSICS. 2002: 1784-1786

    View details for DOI 10.116/1.11503782

    View details for Web of Science ID 000178146700041

  • Semiconductor technology - Imprints offer moore NATURE Pease, R. F. 2002; 417 (6891): 802-803
  • High-throughput mapping of short-range spatial variations using active electrical metrology IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING Xu, O. Y., Berglund, C. N., Pease, R. F. 2002; 15 (1): 108-117
  • Modeling resist heating in mask fabrication using a multilayer Green's function approach. METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XVI, PTS 1 & 2 CHU, D. C., Pease, R. F., Goodson, K. E. 2002; 4689: 206-212
  • Stochastic Coulomb interaction effect in ion-neutralized electron-beam projection optics Takahashi, K., Han, L. Q., Pease, R. F., Meisburger, W. D. A V S AMER INST PHYSICS. 2001: 2572-2580
  • Characterization of multicusp-plasma ion source brightness using micron-scale apertures Scott, K. L., King, T. J., Leung, K. N., Pease, R. F. A V S AMER INST PHYSICS. 2001: 2602-2606
  • Thermal conductivity measurements of thin-film resist Chu, D. C., Touzelbaev, M., Goodson, K. E., Babin, S., Pease, R. F. A V S AMER INST PHYSICS. 2001: 2874-2877
  • Simulation of space charge neutralization using ions in electron beam projection optics Takahashi, K., Han, L. Q., Pease, R. F., Meisburger, W. D. ELSEVIER SCIENCE BV. 2001: 231-238
  • Prospect for high brightness III-nitride electron emitter Machuca, F., Sun, Y., Liu, Z., Ioakeimidi, K., Pianetta, P., Pease, R. F. A V S AMER INST PHYSICS. 2000: 3042-3046
  • Scaled measurements of global space-charge induced image blur in electron beam projection system Han, L. Q., Pease, R. F., Meisburger, W. D., Winograd, G. I., Takahashi, K. A V S AMER INST PHYSICS. 2000: 2999-3003
  • Prospects for charged particle lithography as a manufacturing technology Pease, R. F., Han, L. Q., Winograd, G. I., Meisburger, W. D., Pickard, D., McCord, M. A. ELSEVIER SCIENCE BV. 2000: 55-60
  • Field size versus column shortness in high throughput electron beam lithography Han, L., Pease, R. F., Meisburger, W. D., Winograd, G. I., McCord, M. A. A V S AMER INST PHYSICS. 1999: 2830-2835
  • Space-charge-induced aberrations Winograd, G. I., Meisburger, W. D., Pease, R. F. A V S AMER INST PHYSICS. 1999: 2803-2807
  • Maskless extreme ultraviolet lithography Choksi, N., Pickard, D. S., McCord, M., Pease, R. F., Shroff, Y., Chen, Y. J., Oldham, W., Markle, D. A V S AMER INST PHYSICS. 1999: 3047-3051
  • High-throughput, high-spatial-frequency measurement of critical dimension variations using memory circuits as electrical test structures Ouyang, X., Deeter, T. L., Berglund, C. N., McCord, M. A., Pease, R. F. A V S AMER INST PHYSICS. 1999: 2707-2713
  • Charging and discharging of electron beam resist films Bai, M., Pease, R. F., Tanasa, C., McCord, M. A., Pickard, D. S., Meisburger, D. A V S AMER INST PHYSICS. 1999: 2893-2896
  • Performance of adaptive alignment method on asymmetric signals Chen, X., Ghazanfarian, A. A., McCord, M. A., Pease, R. F. A V S AMER INST PHYSICS. 1998: 3637-3641
  • Patterned negative electron affinity photocathodes for maskless electron beam lithography Schneider, J. E., Sen, P., Pickard, D. S., Winograd, G. I., McCord, M. A., Pease, R. F., SPICER, W. E., Baum, A. W., Costello, K. A., Davis, G. A. A V S AMER INST PHYSICS. 1998: 3192-3196
  • Performance investigation of Coulomb interaction-limited high through put electron beam lithography based on empirical modeling Han, L. Q., McCord, M. A., Winograd, G. I., Pease, R. F. A V S AMER INST PHYSICS. 1998: 3215-3220
  • Multiplexed blanker array for parallel electron beam lithography Winograd, G. I., Han, L., McCord, M. A., Pease, R. F., Krishnamurthi, V. A V S AMER INST PHYSICS. 1998: 3174-3176
  • Lifetime and reliability results for a negative electron affinity photocathode in a demountable vacuum system Sen, P., Pickard, D. S., Schneider, J. E., McCord, M. A., Pease, R. F., Baum, A. W., Costello, K. A. A V S AMER INST PHYSICS. 1998: 3380-3384
  • Economical sampling algorithm using Fourier analysis for mapping wafer critical dimension variations Xu, O. Y., Berglund, C. N., McCord, M. A., Pease, R. F., Spence, C., Liu, H. Y. A V S AMER INST PHYSICS. 1998: 3655-3660
  • The micromechanical tunneling transistor JOURNAL OF MICROMECHANICS AND MICROENGINEERING McCord, M. A., Dana, A., Pease, R. F. 1998; 8 (3): 209-212
  • Analysis of the performance limitations from Coulomb interaction in maskless parallel electron beam lithography systems EMERGING LITHOGRAPHIC TECHNOLOGIES II Han, L. Q., McCord, M. A., Winograd, G. I., Pease, R. F. 1998; 3331: 292-301
  • Obtaining a physical two-dimensional Cartesian reference Takac, M. T., Ye, J., Raugh, M. R., Pease, R. F., Berglund, C. N., Owen, G. A V S AMER INST PHYSICS. 1997: 2173-2176
  • Minimum emission current of liquid metal ion sources Beckman, J. C., Chang, T. H., Wagner, A., Pease, R. F. A V S AMER INST PHYSICS. 1997: 2332-2336
  • Practical approach to separating the pattern generator-induced mask CD errors from the blank/process-induce mask CD errors using conventional market measurements Han, L. Q., Wang, W. D., McCord, M. A., Berglund, C. N., Pease, R. F., Weaver, L. S. A V S AMER INST PHYSICS. 1997: 2243-2248
  • Blanked aperture array for parallel electron beam lithography Winograd, G. I., Pease, R. F., McCord, M. A. A V S AMER INST PHYSICS. 1997: 2289-2292
  • Accurate alignment on asymmetrical signals Chen, X., Ghazanfarian, A. A., McCord, M., Pease, R. F. A V S AMER INST PHYSICS. 1997: 2185-2188
  • Novel objective lens for low voltage electron beam imaging Liu, W., McCord, M., Pease, R. F. A V S AMER INST PHYSICS. 1997: 2737-2741
  • Neural network model for global alignment incorporating wafer and stage distortion Ghazanfarian, A. A., Pease, R. F., Chen, X., McCord, M. A. A V S AMER INST PHYSICS. 1997: 2146-2150
  • Semiconductor on glass photocathodes for high throughput maskless electron beam lithography Baum, A. W., Schneider, J. E., Pease, R. F., McCord, M. A., SPICER, W. E., Costello, K. A., Aebi, V. W. A V S AMER INST PHYSICS. 1997: 2707-2712
  • Optimal coherent decompositions for radially symmetric optical systems von Bunau, R. M., Pati, Y. C., Wang, Y. T., Pease, R. F. A V S AMER INST PHYSICS. 1997: 2412-2416
  • Exploiting structure in fast aerial image computation for integrated circuit patterns IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING Pati, Y. C., Ghazanfarian, A. A., Pease, R. F. 1997; 10 (1): 62-74
  • Improved heat sinking for laser-diode arrays using microchannels in CVD diamond IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY PART B-ADVANCED PACKAGING Goodson, K. E., Kurabayashi, K., Pease, R. F. 1997; 20 (1): 104-109
  • Fabrication of silicon nanopillars containing polycrystalline silicon/insulator multilayer structures APPLIED PHYSICS LETTERS Fukuda, H., Hoyt, J. L., McCord, M. A., Pease, R. F. 1997; 70 (3): 333-335
  • An exact algorithm for self-calibration of two-dimensional precision metrology stages PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING Ye, J., Takac, M., Berglund, C. N., Owen, G., Pease, R. F. 1997; 20 (1): 16-32
  • Patterned media: A viable route to 50 Gbit/in(2) and up for magnetic recording? White, R. L., New, R. M., Pease, R. F. IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 1997: 990-995
  • Minimizing alignment error induced by asymmetric resist coating Chen, X., Pease, R. F. A V S AMER INST PHYSICS. 1996: 3980-3984
  • Energy spread in liquid metal ion sources at low currents Beckman, J. C., Chang, T. H., Wagner, A., Pease, R. F. A V S AMER INST PHYSICS. 1996: 3911-3915
  • Semiconductor on glass photocathodes as high-performance sources for parallel electron beam lithography Schneider, J. E., Baum, A. W., Winograd, G. I., Pease, R. F., McCord, M., SPICER, W. E., Costello, K. A., Aebi, V. W. A V S AMER INST PHYSICS. 1996: 3782-3786
  • Micro-objective lens with compact secondary electron detector for miniature low voltage electron beam systems Liu, W., Ambe, T., Pease, R. F. A V S AMER INST PHYSICS. 1996: 3738-3741
  • Structure in thin and ultrathin spin-cast polymer films SCIENCE Frank, C. W., Rao, V., DESPOTOPOULOU, M. M., Pease, R. F., Hinsberg, W. D., Miller, R. D., Rabolt, J. F. 1996; 273 (5277): 912-915
  • Switching characteristics of submicron cobalt islands JOURNAL OF APPLIED PHYSICS Gomez, R. D., Shih, M. C., New, R. M., Pease, R. F., White, R. L. 1996; 80 (1): 342-346
  • Magnetic force microscopy of single-domain single-crystal iron particles with uniaxial surface anisotropy New, R. M., Pease, R. F., White, R. L., Osgood, R. M., Babcock, K. AMER INST PHYSICS. 1996: 5851-5853
  • Lithographically patterned single-domain cobalt islands for high-density magnetic recording New, R. M., Pease, R. F., White, R. L. ELSEVIER SCIENCE BV. 1996: 140-145
  • Can nanolithography ever be a manufacturing technology? Pease, R. F. ELSEVIER SCIENCE SA. 1995: 188-191
  • EFFECT OF MAGNETOCRYSTALLINE ANISOTROPY IN SINGLE-DOMAIN POLYCRYSTALLINE COBALT ISLANDS New, R. M., Pease, R. F., White, R. L. IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 1995: 3805-3807
  • Field distortion characterization using linewidth or pitch measurement Ye, J., Berglund, C. N., Pease, R. F., Owen, G., Jaeger, R., Alexander, K., Seeger, J. A V S AMER INST PHYSICS. 1995: 2904-2908
  • Adaptive metrology: An economical strategy for judging the acceptability of a mask pattern Wang, W. D., Ye, J., Owen, A. B., Berglund, C. N., Pease, R. F. A V S AMER INST PHYSICS. 1995: 2642-2647
  • RESIST CHARGING IN ELECTRON-BEAM LITHOGRAPHY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B Liu, W., INGINO, J., Pease, R. F. 1995; 13 (5): 1979-1983
  • GROWTH OF SINGLE DIAMOND CRYSTALLITES AROUND NANOMETER-SCALE SILICON WIRES APPLIED PHYSICS LETTERS DENNIG, P. A., Liu, H. I., Stevenson, D. A., Pease, R. F. 1995; 67 (7): 909-911
  • A REVIEW OF MASK ERRORS ON A VARIETY OF PATTERN GENERATORS IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING Ye, J., Berglund, C. N., Robinson, J., Pease, R. F. 1995; 8 (3): 319-325
  • LOW-ENERGY-ELECTRON ATOM ELASTIC-SCATTERING CROSS-SECTIONS FROM 0.1-30 KEV SCANNING Browning, R., Li, T. Z., Chui, B., Ye, J., Pease, R. F., CZYZEWSKI, Z., Joy, D. C. 1995; 17 (4): 250-253
  • PENETRATION DEPTH AND CRITICAL-CURRENT IN NBN RESONATORS - PREDICTING NONLINEARITIES AND BREAKDOWN IN MICROSTRIP TAKKEN, T. E., Beasley, M. R., Pease, R. F. IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 1995: 1975-1978
  • PHYSICAL AND MAGNETIC-PROPERTIES OF SUBMICRON LITHOGRAPHICALLY PATTERNED MAGNETIC ISLANDS New, R. M., Pease, R. F., White, R. L. A V S AMER INST PHYSICS. 1995: 1089-1094
  • IMPROVED RETARDING-FIELD OPTICS VIA IMAGE OUTSIDE FIELD JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B HORDON, L. S., Boyer, B. B., Pease, R. F. 1995; 13 (3): 826-832
  • CHARACTERIZATION OF IN-SITU VARIABLE-ENERGY FOCUSED ION BEAM/MBE MQW STRUCTURES Bone, D. J., LEE, H., Williams, K., Harris, J. S., Pease, R. F. IOP PUBLISHING LTD. 1995: 359-362
  • Resist charging in electron beam lithography Liu, W., Pease, R. F. SPIE - INT SOC OPTICAL ENGINEERING. 1995: 516-526
  • Does 0.1 micron equal mach 1? Pease, R. F. MATERIALS RESEARCH SOC. 1995: 165-171
  • Retarding field optics with field-free sample HORDON, L. S., Boyer, B. B., Pease, R. F. SPIE - INT SOC OPTICAL ENGINEERING. 1995: 44-53
  • High-performance negative electron affinity photocathodes for high resolution electron beam lithography and metrology Baum, A. W., Schneider, J. E., Pease, R. F. IEEE. 1995: 409-412
  • Negative electron affinity photocathodes as high-performance electron sources .1. Achievement of ultra-high brightness from an NEA photocathode Baum, A. W., SPICER, W. E., Pease, R. F., Costello, K. A., Aebi, V. W. SPIE - INT SOC OPTICAL ENGINEERING. 1995: 208-219
  • Negative electron affinity photocathodes as high-performance electron sources .2. Energy spectrum measurements Baum, A. W., SPICER, W. E., Pease, R. F., Costello, K. A., Aebi, V. W. SPIE-INT SOC OPTICAL ENGINEERING. 1995: 189-196
  • 2X2-PHASE MASK FOR ARBITRARY PATTERN-FORMATION Watanabe, H., Pati, Y. C., Pease, R. F. INST PURE APPLIED PHYSICS. 1994: 6790-6795
  • SUBMICRON PATTERNING OF THIN COBALT FILMS FOR MAGNETIC STORAGE JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B New, R. M., Pease, R. F., White, R. L. 1994; 12 (6): 3196-3201
  • QUARTER-MICRON LITHOGRAPHY WITH A GAPPED MARKLE-DYSON SYSTEM Owen, G., BORKHOLDER, D., Knorr, C., Markle, D. A., Pease, R. F. AMER INST PHYSICS. 1994: 3809-3813
  • CHARACTERIZATION OF A 193 NM OPTICAL LITHOGRAPHY SYSTEM FOR 0.18 MU-M AND BELOW Grenville, A., Owen, G., Pease, R. F. AMER INST PHYSICS. 1994: 3814-3819
  • SPATIAL-FREQUENCY FILTERING USING MULTIPLE-PASS PRINTING Ye, J., Berglund, C. N., Pease, R. F. AMER INST PHYSICS. 1994: 3455-3459
  • EMPIRICAL FORMS FOR THE ELECTRON-ATOM ELASTIC-SCATTERING CROSS-SECTIONS FROM 0.1 TO 30 KEV JOURNAL OF APPLIED PHYSICS Browning, R., Li, T. Z., Chui, B., Ye, J., Pease, R. F., CZYZEWSKI, Z., Joy, D. C. 1994; 76 (4): 2016-2022
  • LIMITS OF HIGH-DENSITY, LOW-FORCE PRESSURE CONTACTS Beale, J., Pease, R. F. IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 1994: 257-262
  • WORKPIECE CHARGING IN ELECTRON-BEAM LITHOGRAPHY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B INGINO, J., Owen, G., Berglund, C. N., Browning, R., Pease, R. F. 1994; 12 (3): 1367-1371
  • SELF-LIMITING OXIDATION FOR FABRICATING SUB-5 NM SILICON NANOWIRES APPLIED PHYSICS LETTERS Liu, H. I., BIEGELSEN, D. K., Ponce, F. A., Johnson, N. M., Pease, R. F. 1994; 64 (11): 1383-1385
  • THE ROLE OF RESIDUAL CASTING SOLVENT IN DISSOLUTION BEHAVIOR OF POLY(3-METHYL-4-HYDROXYSTYRENE) FILMS Rao, V., Hinsberg, W. D., Frank, C. W., Pease, R. F. SPIE - INT SOC OPTICAL ENGINEERING. 1994: 596-609
  • 2-LEVEL MASKS FOR INCREASED DEPTH OF FOCUS VONBUNAU, R. M., DIOLA, R., DEPESA, P., Kay, S., Markle, D. A., Tai, E., Pease, R. F. SPIE - INT SOC OPTICAL ENGINEERING. 1994: 392-399
  • OPTIMIZATION OF PUPIL FILTERS FOR INCREASED DEPTH OF FOCUS VONBUNAU, R. M., Owen, G., Pease, R. F. JAPAN SOC APPLIED PHYSICS. 1993: 5850-5855
  • THE EFFECT OF GAPS IN MARKLE-DYSON OPTICS FOR SUB-QUARTER-MICRON LITHOGRAPHY Owen, G., Grenville, A., VONBUNAU, R., Jeong, H., Markle, D. A., Pease, R. F. JAPAN SOC APPLIED PHYSICS. 1993: 5840-5844
  • SELF-LIMITING OXIDATION OF SI NANOWIRES Liu, H. I., BIEGELSEN, D. K., Johnson, N. M., Ponce, F. A., Pease, R. F. A V S AMER INST PHYSICS. 1993: 2532-2537
  • IMAGE MONITOR FOR MARKLE-DYSON OPTICS Grenville, A., Owen, G., Pease, R. F. A V S AMER INST PHYSICS. 1993: 2700-2704
  • OPTICAL PROJECTION SYSTEM FOR GIGABIT DYNAMIC RANDOM-ACCESS MEMORIES Jeong, H., Markle, D. A., Owen, G., Pease, R. F., Grenville, A. A V S AMER INST PHYSICS. 1993: 2675-2679
  • HIGH-ASPECT-RATIO LINES AS LOW DISTORTION, HIGH-FREQUENCY OFF-CHIP INTERCONNECTS IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY BLENNEMANN, H. C., Pease, R. F. 1993; 16 (7): 692-698
  • LIMITS OF HIGH-DENSITY, LOW-FORCE PRESSURE CONTACTS Beale, J., Pease, R. F. I E E E. 1993: 136-140
  • LIMITS OF ULTRAVIOLET LITHOGRAPHY Pease, R. F. OPTICAL SOC AMERICA. 1993: 6-9
  • REPAIR OF PHASE-SHIFT MASKS USING LOW-ENERGY FOCUSED ION-BEAMS Lee, H. W., Pease, R. F. JAPAN J APPLIED PHYSICS. 1992: 4474-4478
  • EFFECT ON SCALING OF HEAT REMOVAL REQUIREMENTS IN 3-DIMENSIONAL SYSTEMS INTERNATIONAL JOURNAL OF ELECTRONICS Ozaktas, H. M., Oksuzoglu, H., Pease, R. F., Goodman, J. W. 1992; 73 (6): 1227-1232
  • PRESENT AND FUTURE-TRENDS IN MICROLITHOGRAPHY Pease, R. F. JAPAN J APPLIED PHYSICS. 1992: 4103-4109
  • LOW-VOLTAGE ALTERNATIVE FOR ELECTRON-BEAM LITHOGRAPHY Lee, Y. H., Browning, R., Maluf, N., Owen, G., Pease, R. F. AMER INST PHYSICS. 1992: 3094-3098
  • SPATIAL CORRELATION OF ELECTRON-BEAM MASK ERRORS AND THE IMPLICATIONS FOR INTEGRATED-CIRCUIT YIELD Berglund, C. N., Maluf, N. I., Ye, J., Owen, G., Browning, R., Pease, R. F. AMER INST PHYSICS. 1992: 2633-2637
  • DEPTH OF FOCUS ENHANCEMENT IN OPTICAL LITHOGRAPHY VONBUNAU, R., Owen, G., Pease, R. F. AMER INST PHYSICS. 1992: 3047-3054
  • OXIDATION OF SUB-50 NM SI COLUMNS FOR LIGHT-EMISSION STUDY Liu, H. I., Maluf, N. I., Pease, R. F., BIEGELSEN, D. K., Johnson, N. M., Ponce, F. A. AMER INST PHYSICS. 1992: 2846-2850
  • GROWTH MECHANISMS AND PROPERTIES OF 90-DEGREES GRAIN-BOUNDARIES IN YBA2CU3O7 THIN-FILMS PHYSICAL REVIEW B Eom, C. B., Marshall, A. F., Suzuki, Y., Geballe, T. H., Boyer, B., Pease, R. F., VANDOVER, R. B., Phillips, J. M. 1992; 46 (18): 11902-11913
  • ALL-REFLECTIVE PHASE-SHIFTING MASKS FOR MARKLE-DYSON OPTICS Hsieh, R. L., Grenville, A., Owen, G., Pease, R. F. AMER INST PHYSICS. 1992: 3042-3046
  • 1/8 MU-M OPTICAL LITHOGRAPHY Owen, G., Pease, R. F., Markle, D. A., Grenville, A., Hsieh, R. L., VONBUNAU, R., Maluf, N. I. AMER INST PHYSICS. 1992: 3032-3036
  • ANALYTIC OPTIMIZATION OF DYSON OPTICS APPLIED OPTICS New, R. M., Owen, G., Pease, R. F. 1992; 31 (10): 1444-1449

    Abstract

    A prototype of a 248-nm optical projection printer based on the unit magnification Dyson configuration was designed and built [J. Vac. Sci. Technol. 9, 3108 (1991)]. Iterative computer methods were used to optimize the geometry of the system to provide minimum aberrations over a given field. Here we present an alternative optimization procedure and use it to design a 193-nm system. This new procedure yields useful insights into the design process and allows us to see why modifications in geometry are required for optimum performance. An understanding of the trade-offs involved in the optimization allows us to suggest and evaluate future design changes.

    View details for Web of Science ID A1992HM11000012

    View details for PubMedID 20720776

  • NANOLITHOGRAPHY AND ITS PROSPECTS AS A MANUFACTURING TECHNOLOGY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B Pease, R. F. 1992; 10 (1): 278-285
  • MARKLE-DYSON OPTICS FOR 0.25-MU-M LITHOGRAPHY AND BEYOND Grenville, A., Hsieh, R. L., VONBUNAU, R., Lee, Y. H., Markle, D. A., Owen, G., Pease, R. F. AMER INST PHYSICS. 1991: 3108-3112
  • QUANTUM LITHOGRAPHY Maluf, N. I., Pease, R. F. AMER INST PHYSICS. 1991: 2986-2991
  • SILICON ON QUARTZ REFLECTIVE MASKS FOR 0.25-MU-M MICROLITHOGRAPHY Lee, Y. H., Hsieh, R. L., Grenville, A., VONBUNAU, R., Tsai, C. C., Markle, D. A., Owen, G., Browning, R., Pease, R. F. AMER INST PHYSICS. 1991: 3138-3142
  • AN ELASTIC CROSS-SECTION MODEL FOR USE WITH MONTE-CARLO SIMULATIONS OF LOW-ENERGY ELECTRON-SCATTERING FROM HIGH ATOMIC-NUMBER TARGETS Browning, R., Eimori, T., TRAUT, E. P., Chui, B., Pease, R. F. AMER INST PHYSICS. 1991: 3578-3581
  • ABSENCE OF WEAK-LINK BEHAVIOR IN YBA2CU3O7 GRAINS CONNECTED BY 90-DEGREES [010] TWIST BOUNDARIES NATURE Eom, C. B., Marshall, A. F., Suzuki, Y., Boyer, B., Pease, R. F., Geballe, T. H. 1991; 353 (6344): 544-547
  • LIMITS OF NANO-GATE FABRICATION PROCEEDINGS OF THE IEEE Allee, D. R., Broers, A. N., Pease, R. F. 1991; 79 (8): 1093-1105
  • LATERAL RESONANT TUNNELING TRANSISTORS EMPLOYING FIELD-INDUCED QUANTUM-WELLS AND BARRIERS PROCEEDINGS OF THE IEEE Chou, S. Y., Allee, D. R., Pease, R. F., Harris, J. S. 1991; 79 (8): 1131-1139
  • NANOELECTRONICS PROCEEDINGS OF THE IEEE Pease, R. F. 1991; 79 (8): 1091-1092
  • MAGNETIC PENETRATION DEPTH MEASUREMENTS OF SUPERCONDUCTING THIN-FILMS BY A MICROSTRIP RESONATOR TECHNIQUE REVIEW OF SCIENTIFIC INSTRUMENTS LANGLEY, B. W., Anlage, S. M., Pease, R. F., Beasley, M. R. 1991; 62 (7): 1801-1812
  • MULTICOMPONENT LANGMUIR-BLODGETT RESISTS FOR OPTICAL LITHOGRAPHY Kosbar, L. L., Frank, C. W., Pease, R. F. AMER INST PHYSICS. 1990: 1441-1446
  • DISTORTION MEASUREMENT OF EMBEDDED ABSORBER (SILICON MEMBRANE) AND CONVENTIONAL (DIAMOND MEMBRANE) X-RAY MASKS Maluf, N. I., Pease, R. F., Windischmann, H. AMER INST PHYSICS. 1990: 1584-1588
  • VOID FORMATION IN PULSED LASER-INDUCED VIA CONTACT HOLE FILLING APPLIED PHYSICS LETTERS MARELLA, P. F., TUCKERMAN, D. B., Pease, R. F. 1990; 56 (26): 2625-2627
  • RESONANT TUNNELING OF 1-DIMENSIONAL ELECTRONS ACROSS AN ARRAY OF 3-DIMENSIONALLY CONFINED POTENTIAL WELLS SUPERLATTICES AND MICROSTRUCTURES Allee, D. R., Chou, S. Y., Harris, J. S., Pease, R. F. 1990; 7 (2): 131-134
  • NEW LATERAL RESONANT TUNNELING FETS FABRICATED USING MOLECULAR-BEAM EPITAXY AND ULTRA-HIGH RESOLUTION ELECTRON-BEAM LITHOGRAPHY INSTITUTE OF PHYSICS CONFERENCE SERIES Chou, S. Y., Allee, D. R., Pease, R. F., Harris, J. S. 1990: 875-879
  • EXPOSURE OF ULTRATHIN POLYMER RESISTS WITH THE SCANNING TUNNELING MICROSCOPE Zhang, H., HORDON, L. S., KUAN, S. W., MACCAGNO, P., Pease, R. F. AMER INST PHYSICS. 1989: 1717-1722
  • EFFECTS OF CHROMIUM ON THE REACTIVE ION ETCHING OF STEEP-WALLED TRENCHES IN SILICON Maluf, N. I., Chou, S. Y., McVittie, J. P., KUAN, S. W., Allee, D. R., Pease, R. F. AMER INST PHYSICS. 1989: 1497-1501
  • ENGINEERING LATERAL QUANTUM INTERFERENCE DEVICES USING ELECTRON-BEAM LITHOGRAPHY AND MOLECULAR-BEAM EPITAXY Allee, D. R., Chou, S. Y., Harris, J. S., Pease, R. F. AMER INST PHYSICS. 1989: 2015-2019
  • ULTRATHIN POLY(METHYLMETHACRYLATE) RESIST FILMS FOR MICROLITHOGRAPHY KUAN, S. W., Frank, C. W., LEE, Y. H., Eimori, T., Allee, D. R., Pease, R. F., Browning, R. AMER INST PHYSICS. 1989: 1745-1750
  • OBSERVATION OF ELECTRON RESONANT TUNNELING IN A LATERAL DUAL-GATE RESONANT TUNNELING FIELD-EFFECT TRANSISTOR APPLIED PHYSICS LETTERS Chou, S. Y., Allee, D. R., Pease, R. F., Harris, J. S. 1989; 55 (2): 176-178
  • MODELING OF LASER PLANARIZATION OF THIN METAL-FILMS APPLIED PHYSICS LETTERS MARELLA, P. F., TUCKERMAN, D. B., Pease, R. F. 1989; 54 (12): 1109-1111
  • LITHOGRAPHY AND SPECTROSCOPY OF ULTRATHIN LANGMUIR BLODGETT POLYMER-FILMS POLYMERS IN MICROLITHOGRAPHY KUAN, S. W., Martin, P. S., Kosbar, L. L., Frank, C. W., Pease, R. F. 1989; 412: 349-363
  • PHOTOPHYSICAL STUDIES OF SPIN-CAST POLYMER-FILMS ACS SYMPOSIUM SERIES Kosbar, L. L., KUAN, S. W., Frank, C. W., Pease, R. F. 1989; 381: 95-111
  • ULTRATHIN POLYMER-FILMS FOR MICROLITHOGRAPHY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B KUAN, S. W., Frank, C. W., Fu, C. C., Allee, D. R., MACCAGNO, P., Pease, R. F. 1988; 6 (6): 2274-2279
  • HIGH-RESOLUTION AND HIGH-FIDELITY X-RAY MASK STRUCTURE EMPLOYING EMBEDDED ABSORBERS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B Chou, S. Y., Maluf, N. I., Pease, R. F. 1988; 6 (6): 2202-2206
  • APPLICATIONS OF A VARIABLE ENERGY FOCUSED ION-BEAM SYSTEM JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B NARUM, D. H., Pease, R. F. 1988; 6 (6): 2115-2119
  • NOVEL MONTE-CARLO SIMULATION OF SPACE-CHARGE-INDUCED ENERGY BROADENING IN LASER IRRADIATED CATHODES JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B Allee, D. R., Pehoushek, J. D., Pease, R. F. 1988; 6 (6): 1989-1994
  • OBSERVATION AND MANIPULATION OF POLYMERS BY SCANNING TUNNELLING AND ATOMIC FORCE MICROSCOPY JOURNAL OF MICROSCOPY-OXFORD DOVEK, M. M., Albrecht, T. R., KUAN, S. W., Lang, C. A., EMCH, R., Grutter, P., Frank, C. W., Pease, R. F., Quate, C. F. 1988; 152: 229-236
  • PHYSICAL LIMITS TO THE USEFUL PACKAGING DENSITY OF ELECTRONIC SYSTEMS IBM JOURNAL OF RESEARCH AND DEVELOPMENT Pease, R. F., Kwon, O. K. 1988; 32 (5): 636-646
  • IMAGING AND MODIFICATION OF POLYMERS BY SCANNING TUNNELING AND ATOMIC FORCE MICROSCOPY JOURNAL OF APPLIED PHYSICS Albrecht, T. R., DOVEK, M. M., Lang, C. A., Grutter, P., Quate, C. F., KUAN, S. W., Frank, C. W., Pease, R. F. 1988; 64 (3): 1178-1184
  • LATERAL UNIFORMITY OF N+/P JUNCTIONS FORMED BY ARSENIC DIFFUSION FROM EPITAXIALLY ALIGNED POLYCRYSTALLINE SILICON ON SILICON JOURNAL OF THE ELECTROCHEMICAL SOCIETY Hoyt, J. L., CRABBE, E. F., Pease, R. F., Gibbons, J. F., Marshall, A. F. 1988; 135 (7): 1773-1779
  • LATERAL RESONANT TUNNELING FIELD-EFFECT TRANSISTOR APPLIED PHYSICS LETTERS Chou, S. Y., Harris, J. S., Pease, R. F. 1988; 52 (23): 1982-1984
  • A VARIABLE ENERGY FOCUSED ION-BEAM SYSTEM FOR INSITU MICROFABRICATION JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B NARUM, D. H., Pease, R. F. 1988; 6 (3): 966-973
  • ELECTRON SATURATION VELOCITY VARIATION IN INGAAS AND GAAS CHANNEL MODFETS FOR GATE LENGTHS TO 550-A IEEE ELECTRON DEVICE LETTERS DELAHOUSSAYE, P. R., Allee, D. R., Pao, Y. C., Schlom, D. G., Harris, J. S., Pease, R. F. 1988; 9 (3): 148-150
  • CONTENT-ADDRESSABLE MEMORY FOR VLSI PATTERN INSPECTION IEEE JOURNAL OF SOLID-STATE CIRCUITS Chae, S. I., Walker, J. T., Fu, C. C., Pease, R. F. 1988; 23 (1): 74-78
  • A LATERAL RESONANT TUNNELING FET SUPERLATTICES AND MICROSTRUCTURES Chou, S. Y., Wolak, E., Harris, J. S., Pease, R. F. 1988; 4 (2): 181-186
  • SUB-100-NM GATE LENGTH GAAS METAL-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS AND MODULATION-DOPED FIELD-EFFECT TRANSISTORS FABRICATED BY A COMBINATION OF MOLECULAR-BEAM EPITAXY AND ELECTRON-BEAM LITHOGRAPHY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B Allee, D. R., DELAHOUSSAYE, P. R., Schlom, D. G., Harris, J. S., Pease, R. F. 1988; 6 (1): 328-332
  • LIFT-OFF METALLIZATION USING POLY(METHYL METHACRYLATE) EXPOSED WITH A SCANNING TUNNELING MICROSCOPE JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B McCord, M. A., Pease, R. F. 1988; 6 (1): 293-296
  • A MULTIPLE EXPOSURE STRATEGY FOR REDUCING BUTTING ERRORS IN A RASTER-SCANNED ELECTRON-BEAM EXPOSURE SYSTEM JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B DAMERON, D. H., Fu, C. C., Pease, R. F. 1988; 6 (1): 213-215
  • SUPERCONDUCTORS AS VERY HIGH-SPEED SYSTEM-LEVEL INTERCONNECTS IEEE ELECTRON DEVICE LETTERS Kwon, O. K., LANGLEY, B. W., Pease, R. F., Beasley, M. R. 1987; 8 (12): 582-585
  • MOLECULAR MONOLAYERS AND FILMS LANGMUIR Swalen, J. D., Allara, D. L., ANDRADE, J. D., Chandross, E. A., Garoff, S., Israelachvili, J., MCCARTHY, T. J., Murray, R., Pease, R. F., Rabolt, J. F., Wynne, K. J., Yu, H. 1987; 3 (6): 932-950
  • CLOSELY PACKED MICROSTRIP LINES AS VERY HIGH-SPEED CHIP-TO-CHIP INTERCONNECTS IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY Kwon, O. K., Pease, R. F. 1987; 10 (3): 314-320
  • EPITAXIAL ALIGNMENT OF ARSENIC IMPLANTED POLYCRYSTALLINE SILICON FILMS ON (100) SILICON OBTAINED BY RAPID THERMAL ANNEALING APPLIED PHYSICS LETTERS Hoyt, J. L., Crabbe, E., Gibbons, J. F., Pease, R. F. 1987; 50 (12): 751-753
  • SCANNING TUNNELING MICROSCOPE AS A MICROMECHANICAL TOOL APPLIED PHYSICS LETTERS McCord, M. A., Pease, R. F. 1987; 50 (10): 569-570
  • THE EFFECT OF REFLECTED AND SECONDARY ELECTRONS ON LITHOGRAPHY WITH THE SCANNING TUNNELING MICROSCOPE SURFACE SCIENCE McCord, M. A., Pease, R. F. 1987; 181 (1-2): 278-284
  • HIGH-RESOLUTION PATTERNING SYSTEM WITH A SINGLE BORE OBJECTIVE LENS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B Newman, T. H., Williams, K. E., Pease, R. F. 1987; 5 (1): 88-91
  • EXPOSURE OF CALCIUM-FLUORIDE RESIST WITH THE SCANNING TUNNELING MICROSCOPE JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B McCord, M. A., Pease, R. F. 1987; 5 (1): 430-433
  • A SCANNING TUNNELING MICROSCOPE FOR SURFACE MODIFICATION JOURNAL DE PHYSIQUE McCord, M. A., Pease, R. F. 1986; 47 (C-2): 485-491
  • SILVER DIFFUSION IN AG2SE/GESE2 INORGANIC RESIST SYSTEM JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B POLASKO, K. J., Tsai, C. C., CAGAN, M. R., Pease, R. F. 1986; 4 (1): 418-421
  • LITHOGRAPHY WITH THE SCANNING TUNNELING MICROSCOPE JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B McCord, M. A., Pease, R. F. 1986; 4 (1): 86-88
  • NEW TECHNIQUES FOR MODELING FOCUSED ION-BEAMS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B NARUM, D. H., Pease, R. F. 1986; 4 (1): 154-158
  • EXCIMER LASER EXPOSURE OF AG2SE/GESE2 - HIGH CONTRAST EFFECTS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B POLASKO, K. J., Pease, R. F., Marinero, E. E., CAGAN, M. R. 1985; 3 (1): 319-322
  • HIGH-RESOLUTION, LOW-VOLTAGE PROBES FROM A FIELD-EMISSION SOURCE CLOSE TO THE TARGET PLANE JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B McCord, M. A., Pease, R. F. 1985; 3 (1): 198-201
  • DEEP UV EXPOSURE OF AG2SE/GESE2 UTILIZING AN EXCIMER LASER IEEE ELECTRON DEVICE LETTERS POLASKO, K. J., Ehrlich, D. J., Tsao, J. Y., Pease, R. F., Marinero, E. E. 1984; 5 (1): 24-26
  • ELECTRON-ELECTRON INTERACTIONS IN FINELY FOCUSED BEAMS OF LOW-ENERGY ELECTRONS JOURNAL OF THE ELECTROCHEMICAL SOCIETY YAU, Y. W., Pease, R. F., Groves, T. R. 1984; 131 (4): 894-896
  • RETARDING-FIELD OPTICS FOR PRACTICAL ELECTRON-BEAM LITHOGRAPHY PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS Newman, T. H., Pease, R. F. 1984; 471: 25-30
  • DIRECT MEASUREMENT OF TEMPERATURE PROFILES INDUCED BY FINELY FOCUSED BEAMS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A IRANMANESH, A. A., Pease, R. F. 1983; 1 (2): 739-742
  • DOT MATRIX ELECTRON-BEAM LITHOGRAPHY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B Newman, T. H., Pease, R. F., DeVore, W. 1983; 1 (4): 999-1002
  • TEMPERATURE PROFILES IN SOLID TARGETS IRRADIATED WITH FINELY FOCUSED BEAMS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B IRANMANESH, A. A., Pease, R. F. 1983; 1 (1): 91-99
  • FABRICATION ISSUES FOR NEXT-GENERATION CIRCUITS IEEE SPECTRUM Pease, R. F. 1983; 20 (11): 102-105
  • SPACE-CHARGE EFFECTS IN FOCUSED ION-BEAMS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B YAU, Y. W., Groves, T. R., Pease, R. F. 1983; 1 (4): 1141-1144
  • LOW-ENERGY ELECTRON-BEAM LITHOGRAPHY OPTICAL ENGINEERING POLASKO, K. J., YAU, Y. W., Pease, R. F. 1983; 22 (2): 195-198
  • ELECTRON-BEAM EXPOSURE OF GESEX PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS POLASKO, K. J., Pease, R. F. 1983; 393: 27-33
  • VLSI LITHOGRAPHY FOR THE 80S ISSCC DIGEST OF TECHNICAL PAPERS Joy, R. C., ABRAHAM, H. E., GROBMAN, W. D., KING, M. C., Lepselter, M. P., Oldham, W. G., Pease, R. F., Terman, L. M., VARNELL, G. L. 1982; 25: 222-223
  • LOW-ENERGY ELECTRON-BEAM LITHOGRAPHY PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS POLASKO, K. J., YAU, Y. W., Pease, R. F. 1982; 333: 76-82
  • SPECIAL ISSUE ON HIGH-RESOLUTION FABRICATION OF ELECTRON DEVICES - FORWORD IEEE TRANSACTIONS ON ELECTRON DEVICES Pease, R. F. 1981; 28 (11): 1267-1267
  • ELECTRON-BEAM LITHOGRAPHY CONTEMPORARY PHYSICS Pease, R. F. 1981; 22 (3): 265-290
  • GENERATION AND APPLICATIONS OF FINELY FOCUSED BEAMS OF LOW-ENERGY ELECTRONS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY YAU, Y. W., Pease, R. F., IRANMANESH, A. A., POLASKO, K. J. 1981; 19 (4): 1048-1052
  • HIGH-PERFORMANCE HEAT SINKING FOR VLSI ELECTRON DEVICE LETTERS TUCKERMAN, D. B., Pease, R. F. 1981; 2 (5): 126-129
  • LATERAL EPITAXIAL RECRYSTALLIZATION OF DEPOSITED SILICON FILMS ON SILICON DIOXIDE JOURNAL OF THE ELECTROCHEMICAL SOCIETY Kamins, T. I., CASS, T. R., DELLOCA, C. J., Lee, K. F., Pease, R. F., Gibbons, J. F. 1981; 128 (5): 1151-1154
  • SCANNING-ELECTRON-BEAM ANNEALING OF ARSENIC-IMPLANTED SILICON APPLIED PHYSICS LETTERS Regolini, J. L., Gibbons, J. F., Sigmon, T. W., Pease, R. F., Magee, T. J., Peng, J. 1979; 34 (6): 410-412