Thomas Kenny

All Publications

• A temperature compensated biaxial eFM accelerometer in Epi-seal process SENSORS AND ACTUATORS A-PHYSICAL Shin, S., Kwon, H., Vukasin, G. D., Kenny, T. W., Ayazi, F. 2021; 330

  View details for DOI 10.1016/j.sna.2021.112860

  View details for Web of Science ID 000669229900010

• Amplitude stabilization of micromechanical oscillators using engineered nonlinearity PHYSICAL REVIEW RESEARCH Miller, J. L., Gomez-Franco, A., Shin, D. D., Kwon, H., Kenny, T. W. 2021; 3 (3)

  View details for DOI 10.1103/PhysRevResearch.3.033268

  View details for Web of Science ID 000705661700005

• Nonlinear Dissipation in Epitaxial SCS and Polysilicon MEMS Driven at Large Amplitudes (vol 29, pg 1118, 2020) JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Alter, A. L., Flader, I. B., Chen, Y., Shin, D. D., Kenny, T. W. 2021; 30 (2): 330

  View details for DOI 10.1109/JMEMS.2021.3062697

  View details for Web of Science ID 000638400700019

• Quantification of Energy Dissipation Mechanisms in Toroidal Ring Gyroscope JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Wang, Y., Lin, Y., Glaze, J., Vukasin, G., Shin, D. D., Kwon, H., Heinz, D. B., Chen, Y., Gerrard, D. D., Kenny, T. W., Shkel, A. M. 2021; 30 (2): 193–202

  View details for DOI 10.1109/JMEMS.2020.3045985

  View details for Web of Science ID 000638400700004

• A Novel Spring Disk Resonator Gyroscope for Maximizing Q/F Cameron, C. P., Gerrard, D., Rodriguez, J., Yang, Y., Ng, E., Kenny, T. W., IEEE IEEE. 2021

  View details for DOI 10.1109/INERTIAL51137.2021.9430453

  View details for Web of Science ID 000680838400001

• Bicontinuous Mesoporous Metal Foams with Enhanced Conductivity and Tunable Pore Size and Porosity via Electrodeposition for Electrochemical and Thermal Systems ACS APPLIED NANO MATERIALS Katz, J. S., Zhang, C., Barako, M. T., Kim, H. K., Asheghi, M., Kenny, T. W., Goodson, K. E. 2020; 3 (12): 12408–15

  View details for DOI 10.1021/acsanm.0c02970

  View details for Web of Science ID 000603402500078

• Negative Nonlinear Dissipation in Microelectromechanical Beams (vol 29, pg 1, 2020) JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Bousse, N., Miller, J., Alter, A., Cameron, C., Kwon, H., Vukasin, G., Kenny, T. W. 2020; 29 (6): 1582

  View details for DOI 10.1109/JMEMS.2020.3010425

  View details for Web of Science ID 000595526700022

• Numerical Modelling of Non-Linearities in MEMS Resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Zega, V., Gattere, G., Koppaka, S., Alter, A., Vukasin, G. D., Frangi, A., Kenny, T. W. 2020; 29 (6): 1443–54

  View details for DOI 10.1109/JMEMS.2020.3026085

  View details for Web of Science ID 000595526700006

• Characterization of Accelerated Fatigue in Thick Epi-Polysilicon Vacuum Encapsulated MEMS Resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Alter, A. L., Flader, I. B., Chen, Y., Ortiz, L., Shin, D. D., Kenny, T. W. 2020; 29 (6): 1483–92

  View details for DOI 10.1109/JMEMS.2020.3021947

  View details for Web of Science ID 000595526700010

• Nonlinear Dissipation in Epitaxial SCS and Polysilicon MEMS Driven at Large Amplitudes JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Alter, A. L., Flader, I. B., Chen, Y., Shin, D. D., Kenny, T. W. 2020; 29 (5): 1118–20

  View details for DOI 10.1109/JMEMS.2020.3005323

  View details for Web of Science ID 000576466500084

• Anchor Design Affects Dominant Energy Loss Mechanism in a Lame Mode MEM Resonator JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Vukasin, G. D., Sanchez, V. K., Glaze, J., Bousse, N. E., Bissel, N., Shin, D. D., Kwon, H., Heinz, D., Yen, E., Kenny, T. W. 2020; 29 (5): 860–66

  View details for DOI 10.1109/JMEMS.2020.3012925

  View details for Web of Science ID 000576466500035

• Limits to Thermal-Piezoresistive Cooling in Silicon Micromechanical Resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Miller, J. L., Zhu, H., Sundaram, S., Vukasin, G. D., Chen, Y., Flader, I. B., Shin, D. D., Kenny, T. W. 2020; 29 (5): 677–84

  View details for DOI 10.1109/JMEMS.2020.3022050

  View details for Web of Science ID 000576466500009

• Quality Factor Extraction and Enhancement Across Temperature in Ring Resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Alter, A. L., Gerrard, D. D., Kwon, H., Vukasin, G. D., Kenny, T. W. 2020; 29 (5): 1124–26

  View details for DOI 10.1109/JMEMS.2020.3004748

  View details for Web of Science ID 000576466500086

• Negative Nonlinear Dissipation in Microelectromechanical Beams JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Bousse, N., Miller, J., Alter, A., Cameron, C., Kwon, H., Vukasin, G., Kenny, T. W. 2020; 29 (5): 954–59

  View details for DOI 10.1109/JMEMS.2020.3006800

  View details for Web of Science ID 000576466500050

• Crystal Orientation Dependent Dual Frequency Ovenized MEMS Resonator With Temperature Stability and Shock Robustness Kwon, H., Vukasin, G. D., Bousse, N. E., Kenny, T. W. IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 2020: 1130–31

  View details for DOI 10.1109/JMEMS.2020.3012109

  View details for Web of Science ID 000576466500088

• On the effect of linear feedback and parametric pumping on a resonator's frequency stability NEW JOURNAL OF PHYSICS Mohammadi, Z., Heugel, T. L., Miller, J. L., Shin, D. D., Kwon, H., Kenny, T. W., Chitra, R., Zilberberg, O., Villanueva, L. 2020; 22 (9)

  View details for DOI 10.1088/1367-2630/abb1dd

  View details for Web of Science ID 000575215400001

• Spectral narrowing of parametrically pumped thermomechanical noise APPLIED PHYSICS LETTERS Miller, J. L., Shin, D. D., Kwon, H., Shaw, S. W., Kenny, T. W. 2020; 117 (3)

  View details for DOI 10.1063/5.0009848

  View details for Web of Science ID 000554946500002

• Low-Power Dual Mode MEMS Resonators With PPB Stability Over Temperature Ortiz, L., Kwon, H., Rodriguez, J., Chen, Y., Vukasin, G. D., Heinz, D. B., Shin, D. D., Kenny, T. W. IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 2020: 190–201

  View details for DOI 10.1109/JMEMS.2020.2970609

  View details for Web of Science ID 000524501600009

• Quality factor tuning of micromechanical resonators via electrical dissipation APPLIED PHYSICS LETTERS Bousse, N. E., Miller, J. L., Kwon, H., Vukasin, G. D., Kenny, T. W. 2020; 116 (2)

  View details for DOI 10.1063/1.5125286

  View details for Web of Science ID 000518030500007

• Design Comparison and Survivability of Fipitaxially hncapsulated MFMS Disc Resonating Gyroscopes at High Shock (> 27,000g) Cameron, C. P., Imamura, T., Devmalya, C., Vukasin, G., Alter, A., Kenny, T., IEEE IEEE. 2020

  View details for Web of Science ID 000582416900015

• Thermal Accelerometer Performance Enhancements through AC Biasing Schemes Kaplan, K. E., Winterkorn, M. M., Kim, H. K., Everhart, C. M., Prinz, F. B., Kenny, T. W., IEEE IEEE. 2020

  View details for Web of Science ID 000582416900025

• THERMAL STABILITY OF DETF MEMS RESONATORS: NUMERICAL MODELLING AND EXPERIMENTAL VALIDATION Zega, V., Opreni, A., Mussi, G., Kwon, H., Vukasin, G., Gattere, G., Langfelder, G., Frangi, A., Kenny, T. W., IEEE IEEE. 2020: 1207–10

  View details for Web of Science ID 000569381600312

• REQUENCY STABILIZATION IN AN ENCAPSULATED HIGH-Q MICROMECHANICAL RESONATOR VIA INTERNAL RESONANCE Yu, J., Kwon, H., Vukasin, G. D., Kenny, T. W., Cho, H., IEEE IEEE. 2020: 1191–94

  View details for Web of Science ID 000569381600308

• TEMPERATURE HYSTERESIS IN PIEZORESISTIVE MICROCANTILEVERS Miller, J. L., Zhang, Z., Bousse, N. E., Coso, D., Sadat, S., IEEE IEEE. 2020: 1203–6

  View details for Web of Science ID 000569381600311

• NONLINEAR MODAL INTERACTIONS AND INTERNAL RESONANCE IN A MICROMACHINED DISK RESONATOR Sun, J., Zhang, H., Chen, D., Pandit, M., Sobreviela, G., Xiao, D., Zhuo, M., Gerrard, D. D., Kwon, R., Vukasin, G., Kenny, T. W., Seshia, A., IEEE IEEE. 2020: 769–72

  View details for Web of Science ID 000569381600199

• AN EPI-SEAL ENCAPSULATED FRANKLIN OSCILLATOR SUSTAINING MORE THAN 200,000,000 ELECTRIC SWITCHING CYCLES Kassie, D. A., Flader, I. B., Shmulevich, S., Kwon, H., Kenny, T. W., Elata, D., IEEE IEEE. 2020: 230–33

  View details for Web of Science ID 000569381600058

• Thermomechanical-Noise-Limited Capacitive Transduction of Encapsulated MEM Resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Miller, J. L., Bousse, N. E., Heinz, D. B., Kim, H. K., Kwon, H., Vukasin, G. D., Kenny, T. W. 2019; 28 (6): 965–76

  View details for DOI 10.1109/JMEMS.2019.2936843

  View details for Web of Science ID 000501826900004

• Phase Control of Self-Excited Parametric Resonators PHYSICAL REVIEW APPLIED Miller, J. L., Shin, D. D., Kwon, H., Shaw, S. W., Kenny, T. W. 2019; 12 (4)

  View details for DOI 10.1103/PhysRevApplied.12.044053

  View details for Web of Science ID 000492000500003

• Micro-Tethering for Fabrication of Encapsulated Inertial Sensors With High Sensitivity JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Flader, I. B., Chen, Y., Yang, Y., Ng, E. J., Shin, D. D., Heinz, D. B., Ortiz, L., Alter, A. L., Park, W., Goodson, K. E., Kenny, T. W. 2019; 28 (3): 372–81

  View details for DOI 10.1109/JMEMS.2019.2900761

  View details for Web of Science ID 000470838300007

• Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition ACS APPLIED MATERIALS & INTERFACES Kim, H. K., Kaplan, K. E., Schindler, P., Xu, S., Winterkorn, M. M., Heinz, D. B., English, T. S., Provine, J., Prinz, F. B., Kenny, T. W. 2019; 11 (9): 9594–99

  Abstract

  The ability to deposit thin and conformal films has become of great importance because of downscaling of devices. However, because of nucleation difficulty, depositing an electrically stable and thin conformal platinum film on an oxide nucleation layer has proven challenging. By using plasma-enhanced atomic layer deposition (PEALD) and TiO2 as a nucleation layer, we achieved electrically continuous PEALD platinum films down to a thickness of 3.7 nm. Results show that for films as thin as 5.7 nm, the Mayadas-Shatzkes (MS) model for electrical conductivity and the Tellier-Tosser model for temperature coefficient of resistance hold. Although the experimental values start to deviate from the MS model below 5.7 nm because of incomplete Pt coverage, the films still show root mean square electrical stability better than 50 ppm over time, indicating that these films are not only electrically continuous but also sufficiently reliable for use in many practical applications.

  View details for DOI 10.1021/acsami.8b21054

  View details for Web of Science ID 000460996900096

  View details for PubMedID 30707831

  View details for PubMedCentralID PMC6407042

• Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator. Scientific reports Rodriguez, J., Chandorkar, S. A., Watson, C. A., Glaze, G. M., Ahn, C. H., Ng, E. J., Yang, Y., Kenny, T. W. 2019; 9 (1): 2244

  Abstract

  Silicon Microelectromechanical Systems (MEMS) resonators have broad commercial applications for timing and inertial sensing. However, the performance of MEMS resonators is constrained by dissipation mechanisms, some of which are easily detected and well-understood, but some of which have never been directly observed. In this work, we present measurements of the quality factor, Q, for a family of single crystal silicon Lame-mode resonators as a function of temperature, from 80-300K. By comparing these Q measurements on resonators with variations in design, dimensions, and anchors, we have been able to show that gas damping, thermoelastic dissipation, and anchor damping are not significant dissipation mechanisms for these resonators. The measured f·Q product for these devices approaches 2*1013, which is consistent with the expected range for Akhiezer damping, and the dependence of Q on temperature and geometry is consistent with expectations for Akhiezer damping. These results thus provide the first clear, direct detection of Akhiezer dissipation in a MEMS resonator, which is widely considered to be the ultimate limit to Q in silicon MEMS devices.

  View details for PubMedID 30783192

• Direct Detection of Akhiezer Damping in a Silicon MEMS Resonator SCIENTIFIC REPORTS Rodriguez, J., Chandorkar, S. A., Watson, C. A., Glaze, G. M., Ahn, C. H., Ng, E. J., Yang, Y., Kenny, T. W. 2019; 9

  View details for DOI 10.1038/s41598-019-38847-6

  View details for Web of Science ID 000459092800014

• High-speed video microscopy and numerical modeling of bubble dynamics near a surface of urinary stone. The Journal of the Acoustical Society of America Pishchalnikov, Y. A., Behnke-Parks, W. M., Schmidmayer, K. n., Maeda, K. n., Colonius, T. n., Kenny, T. W., Laser, D. J. 2019; 146 (1): 516

  Abstract

  Ultra-high-speed video microscopy and numerical modeling were used to assess the dynamics of microbubbles at the surface of urinary stones. Lipid-shell microbubbles designed to accumulate on stone surfaces were driven by bursts of ultrasound in the sub-MHz range with pressure amplitudes on the order of 1 MPa. Microbubbles were observed to undergo repeated cycles of expansion and violent collapse. At maximum expansion, the microbubbles' cross-section resembled an ellipse truncated by the stone. Approximating the bubble shape as an oblate spheroid, this study modeled the collapse by solving the multicomponent Euler equations with a two-dimensional-axisymmetric code with adaptive mesh refinement for fine resolution of the gas-liquid interface. Modeled bubble collapse and high-speed video microscopy showed a distinctive circumferential pinching during the collapse. In the numerical model, this pinching was associated with bidirectional microjetting normal to the rigid surface and toroidal collapse of the bubble. Modeled pressure spikes had amplitudes two-to-three orders of magnitude greater than that of the driving wave. Micro-computed tomography was used to study surface erosion and formation of microcracks from the action of microbubbles. This study suggests that engineered microbubbles enable stone-treatment modalities with driving pressures significantly lower than those required without the microbubbles.

  View details for DOI 10.1121/1.5116693

  View details for PubMedID 31370610

  View details for PubMedCentralID PMC6660306

• Pseudo-Extensional Mode MEMS Ring Gyroscope Prikhodko, I. P., Gregory, J. A., Shin, D., Kwon, R., Kenny, T. W., Judy, M. W., IEEE IEEE. 2019

  View details for Web of Science ID 000490937200018

• SIGNAL ENHANCEMENT IN MEM RESONANT SENSORS USING PARAMETRIC SUPPRESSION Miller, J. L., Bousse, N. E., Shin, D. D., Kwon, H., Kenny, T. W., IEEE IEEE. 2019: 881–84

  View details for Web of Science ID 000539487000222

• EFFECT OF SUBSTRATE THICKNESS ON ANCHOR DAMPING IN MEMS DEVICES Vukasin, G. D., Sanchez, V. K., Cameron, C. P., Kwon, H., Rodriguez, J., Flader, I. B., Chen, Y., Kenny, T. W., IEEE IEEE. 2019: 1843–45

  View details for Web of Science ID 000539487000466

• EXPERIMENTALLY OBSERVED NONLINEAR DISSIPATION LINKED TO CONTRIBUTIONS FROM GAS DAMPING AND TED IN MEMS FLEXURAL MODE RESONATORS Alter, A. L., Vukasin, G. D., Flader, I. B., Kim, H., Chen, Y., Shin, D. D., Kenny, T. W., IEEE IEEE. 2019: 2095–98

  View details for Web of Science ID 000539487000530

• AN OVEN-CONTROLLED MEMS OSCILLATOR (OCMO) WITH SUB 10MW, +/- 1.5 PPB STABILITY OVER TEMPERATURE Kwon, H., Ortiz, L., Vukasin, G. D., Chen, Y., Shin, D. D., Kenny, T. W., IEEE IEEE. 2019: 2072–75

  View details for Web of Science ID 000539487000524

• Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators. Nature communications Zhou, X. n., Zhao, C. n., Xiao, D. n., Sun, J. n., Sobreviela, G. n., Gerrard, D. D., Chen, Y. n., Flader, I. n., Kenny, T. W., Wu, X. n., Seshia, A. A. 2019; 10 (1): 4980

  Abstract

  Understanding and controlling modal coupling in micro/nanomechanical devices is integral to the design of high-accuracy timing references and inertial sensors. However, insight into specific physical mechanisms underlying modal coupling, and the ability to tune such interactions is limited. Here, we demonstrate that tuneable mode coupling can be achieved in capacitive microelectromechanical devices with dynamic electrostatic fields enabling strong coupling between otherwise uncoupled modes. A vacuum-sealed microelectromechanical silicon ring resonator is employed in this work, with relevance to the gyroscopic lateral modes of vibration. It is shown that a parametric pumping scheme can be implemented through capacitive electrodes surrounding the device that allows for the mode coupling strength to be dynamically tuned, as well as allowing greater flexibility in the control of the coupling stiffness. Electrostatic pump based sideband coupling is demonstrated, and compared to conventional strain-mediated sideband operations. Electrostatic coupling is shown to be very efficient, enabling strong, tunable dynamical coupling.

  View details for DOI 10.1038/s41467-019-12796-0

  View details for PubMedID 31672971

• NONLINEARITY OF DEGENERATELY DOPED FLEXURAL MODE SILICON MICROMECHANICAL RESONATORS Koppaka, S., Alter, A. L., Vukasin, G. D., Shin, D. D., Flader, I. B., Chen, Y., Kenny, T. W., IEEE IEEE. 2019: 1897–1900

  View details for Web of Science ID 000539487000480

• A Dual-Axis Resonant Accelerometer Based on Electrostatic Stiffness Modulation in Epi-Seal Process Shin, S., Wen, H., Kwon, H., Vukasin, G. D., Kenny, T. W., Ayazi, F., IEEE IEEE. 2019

  View details for Web of Science ID 000534184600112

• Effective quality factor tuning mechanisms in micromechanical resonators APPLIED PHYSICS REVIEWS Miller, J., Ansari, A., Heinz, D. B., Chen, Y., Flader, I. B., Shin, D. D., Villanueva, L., Kenny, T. W. 2018; 5 (4)

  View details for DOI 10.1063/1.5027850

  View details for Web of Science ID 000454617500019

• Thermal-Piezoresistive Tuning of the Effective Quality Factor of a Micromechanical Resonator PHYSICAL REVIEW APPLIED Miller, J., Zhu, H., Heinz, D. B., Chen, Y., Flader, I. B., Shin, D. D., Lee, J., Kenny, T. W. 2018; 10 (4)

  View details for DOI 10.1103/PhysRevApplied.10.044055

  View details for Web of Science ID 000448061700003

• Direct Detection of Anchor Damping in MEMS Tuning Fork Resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Rodriguez, J., Chandorkar, S., Glaze, G. M., Gerrard, D. D., Chen, Y., Heinz, D. B., Flader, I. B., Kenny, T. W. 2018; 27 (5): 800–809

  View details for DOI 10.1109/JMEMS.2018.2859958

  View details for Web of Science ID 000446657400006

• Assessing failure in epitaxially encapsulated micro-scale sensors using micro and nano x-ray computed tomography MRS COMMUNICATIONS Ortiz, L., Heinz, D. B., Flader, I. B., Alter, A. L., Shin, D. D., Chen, Y., Kenny, T. W. 2018; 8 (2): 275–82

  View details for DOI 10.1557/mrc.2018.70

  View details for Web of Science ID 000437442100008

• Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide THIN SOLID FILMS Barako, M. T., English, T. S., Roy-Panzer, S., Kenny, T. W., Goodson, K. E. 2018; 649: 24–29

  View details for DOI 10.1016/j.tsf.2018.01.019

  View details for Web of Science ID 000427524100005

• HIGH STABILITY THERMAL ACCELEROMETER BASED ON ULTRATHIN PLATINUM ALD NANOSTRUCTURES Everhart, C. M., Kaplan, K. E., Winterkorn, M. M., Kwon, H., Provine, J., Asheghi, M., Goodson, K. E., Prinz, F. B., Kenny, T. W., IEEE IEEE. 2018: 976–79

  View details for Web of Science ID 000434960900256

• Experimental observations and numerical modeling of lipid-shell microbubbles with calcium-adhering moieties for minimally-invasive treatment of urinary stones. Proceedings of meetings on acoustics. Acoustical Society of America Pishchalnikov, Y. A., Behnke-Parks, W. n., Maeda, K. n., Colonius, T. n., Mellema, M. n., Hopcroft, M. n., Luong, A. n., Wiener, S. n., Stoller, M. L., Kenny, T. n., Laser, D. J. 2018; 35 (1)

  Abstract

  A novel treatment modality incorporating calcium-adhering microbubbles has recently entered human clinical trials as a new minimally-invasive approach to treat urinary stones. In this treatment method, lipid-shell gas-core microbubbles can be introduced into the urinary tract through a catheter. Lipid moities with calcium-adherance properties incorporated into the lipid shell facilitate binding to stones. The microbubbles can be excited by an extracorporeal source of quasi-collimated ultrasound. Alternatively, the microbubbles can be excited by an intraluminal source, such as a fiber-optic laser. With either excitation technique, calcium-adhering microbubbles can significantly increase rates of erosion, pitting, and fragmentation of stones. We report here on new experiments using high-speed photography to characterize microbubble expansion and collapse. The bubble geometry observed in the experiments was used as one of the initial shapes for the numerical modeling. The modeling showed that the bubble dynamics strongly depends on bubble shape and stand-off distance. For the experimentally observed shape of microbubbles, the numerical modeling showed that the collapse of the microbubbles was associated with pressure increases of some two-to-three orders of magnitude compared to the excitation source pressures. This in-vitro study provides key insights into the use of microbubbles with calcium-adhering moieties in treatment of urinary stones.

  View details for DOI 10.1121/2.0000958

  View details for PubMedID 32440311

  View details for PubMedCentralID PMC7241592

• Lateral Diffusion Doping of Silicon for Temperature Compensation of MEMS Resonators Shin, D. D., Heinz, D. B., Kwon, H., Chen, Y., Kenny, T. W., IEEE IEEE. 2018: 125–28

  View details for Web of Science ID 000490927100033

• Active Temperature Compensation of Thermal Accelerometer for Improved Stability Kaplan, K. E., Winterkorn, M. M., Everhart, C. M., Shin, D. D., O'Brien, G. J., Prinz, F. B., Kenny, T. W., IEEE IEEE. 2018: 155–56

  View details for Web of Science ID 000490927100042

• Investigation of Orientation Dependence of the Thermal Expansion Coefficient in Silicon MEMS Resonators Rodriguez, J., Vukasin, G. D., Glaze, G. M., Hopcroft, M. A., Ortiz, L., Ahn, C. H., Ng, E., Park, W., Kenny, T. W., Watson, C. A., IEEE IEEE. 2018: 108–11

  View details for Web of Science ID 000461285600032

• EPITAXIAL ENCAPSULATION OF FULLY DIFFERENTIAL ELECTRODES AND LARGE TRANSDUCTION GAPS FOR MEMS RESONANT STRUCTURES Flader, I. B., Chen, Y., Ahn, C., Shin, D. D., Alter, A. L., Rodriguez, J., Kenny, T. W., IEEE IEEE. 2018: 483–86

  View details for Web of Science ID 000434960900129

• EXPERIMENTAL FRACTAL-LIKE INSTABILITY BANDS IN A RESONANT SILICON-SILICON CONTACT PULL-IN VIBRATION DETECTOR Maiwald, V., Flader, I. B., Muller, M., Chen, Y., Pluss, S., Shin, D. D., Roman, C., Heinz, D. B., Kenny, T. W., Hierold, C., IEEE IEEE. 2018: 984–87

  View details for Web of Science ID 000434960900258

• High Quality Factor Mode Ordered Dual Foucault Pendulum Gyroscope Asadian, M. H., Askari, S., Flader, I. B., Chen, Y., Gerrard, D. D., Shin, D. D., Kwon, H., Kenny, T. W., Shkel, A. M., IEEE IEEE. 2018: 1130–33

  View details for Web of Science ID 000468199300293

• TEMPERATURE COMPENSATION OF RESONANT ACCELEROMETER VIA NONLINEAR OPERATION Shin, D. D., Chen, Y., Flader, I. B., Kenny, T. W., IEEE IEEE. 2018: 1012–15

  View details for Web of Science ID 000434960900265

• UNANTICIPATED RESULTS IN THE FIRST DIRECT MEASUREMENTS OF ANCHOR DAMPING IN MEMS RESONATORS Rodriguez, J., Gerrard, D. D., Glaze, G. M., Chandorkar, S., Chen, Y., Flader, I. B., Shin, D. D., Kenny, T. W., IEEE IEEE. 2018: 543–46

  View details for Web of Science ID 000434960900145

• THERMAL EFFECTS OF OVENIZED CLOCKS ON EPISEAL ENCAPSULATED INERTIAL MEASUREMENT UNITS Ortiz, L., Flader, I. B., Vukasin, G. D., Gerrard, D. D., Chandorkar, S. A., Rodriguez, J., Shin, D. D., Kwon, R., Heinz, D. B., Chen, Y., Park, W., Goodson, K. E., Kenny, T. W., IEEE IEEE. 2018: 980–83

  View details for Web of Science ID 000434960900257

• Robust Method of Fabricating Epitaxially Encapsulated MEMS Devices with Large Gaps JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Chen, Y., Flader, I. B., Shin, D. D., Ahn, C., Rodriguez, J., Kenny, T. W. 2017; 26 (6): 1235–43

  View details for DOI 10.1109/JMEMS.2017.2758388

  View details for Web of Science ID 000417784500009

• Measurement of Young's modulus and residual stress of atomic layer deposited Al2O3 and Pt thin films JOURNAL OF MICROMECHANICS AND MICROENGINEERING Purkl, F., Daus, A., English, T. S., Provine, J., Feyh, A., Urban, G., Kenny, T. W. 2017; 27 (8)

  View details for DOI 10.1088/1361-6439/aa73e6

  View details for Web of Science ID 000415698500005

• Phonon conduction in silicon nanobeams APPLIED PHYSICS LETTERS Park, W., Shin, D. D., Kim, S., Katz, J. S., Park, J., Ahn, C., Kodama, T., Asheghi, M., Kenny, T. W., Goodson, K. E. 2017; 110 (21)

  View details for DOI 10.1063/1.4983790

  View details for Web of Science ID 000402320000033

• Modeling and Analysis for Thermal Management in Gallium Nitride HEMTs Using Microfluidic Cooling JOURNAL OF ELECTRONIC PACKAGING Agarwal, G., Kazior, T., Kenny, T., Weinstein, D. 2017; 139 (1)

  View details for DOI 10.1115/1.4035064

  View details for Web of Science ID 000395123200003

• WAFER-SCALE ENCAPSULATION OF FULLY DIFFERENTIAL ELECTRODES FOR MUTLI-AXIS INERTIAL SENSING Flader, I. B., Chen, Y., Gerrard, D. D., Kenny, T. W., IEEE IEEE. 2017: 591–94

  View details for Web of Science ID 000426701400146

• TRI-MODE OPERATION OF HIGHLY DOPED SILICON RESONATORS FOR TEMPERATURE COMPENSATED TIMING REFERENCES Chen, Y., Shin, D. D., Flader, I. B., Kenny, T. W., IEEE IEEE. 2017: 1158–61

  View details for Web of Science ID 000402552000297

• MANIPULATION OF HEAT FLUX PATHS IN THERMO-ELASTICALLY DAMPED RESONATORS FOR Q OPTIMIZATION Gerrard, D. D., Rodriguez, J., Ortiz, L., Chandorkar, S. A., Flader, I. B., Chen, Y., Shin, D. D., Kenny, T. W., IEEE IEEE. 2017: 1130–33

  View details for Web of Science ID 000402552000290

• ENVIRONMENTALLY ROBUST DIFFERENTIAL RESONANT ACCELEROMETER IN A WAFER-SCALE ENCAPSULATION PROCESS Shin, D. D., Ahn, C., Chen, Y., Christensen, D. L., Flader, I. B., Kenny, T. W., IEEE IEEE. 2017: 17–20

  View details for Web of Science ID 000402552000005

• ON CROSS-TALK BETWEEN GYROSCOPES INTEGRATED ON A FOLDED MEMS IMU CUBE Efimovskaya, A., Lin, Y., Yang, Y., Ng, E., Chen, Y., Flader, I., Ahn, C. H., Hong, V., Kenny, T. W., Shkel, A. M., IEEE IEEE. 2017: 1142–45

  View details for Web of Science ID 000402552000293

• Electrostatic Tuning of Temperature Coefficient of Frequency of Anisotropic Disk-Shaped Resonators Shin, D. D., Ahn, C., Chen, Y., Hong, V. A., Ng, E. J., Yang, Y., Kenny, T. W., IEEE IEEE. 2017: 164–67

  View details for Web of Science ID 000403208300044

• Dual-Resonator MEMS Lorentz Force Magnetometer Based on Differential Frequency Modulation Sonmezoglu, S., Flader, I. B., Chen, Y., Shin, D. D., Kenny, T. W., Horsley, D. A., IEEE IEEE. 2017: 160–63

  View details for Web of Science ID 000403208300043

• Compact Roll-Pitch-Yaw Gyroscope Implemented in Wafer-level Epitaxial Silicon Encapsulation Process Efimovskaya, A., Yang, Y., Ng, E., Chen, Y., Flader, I., Kenny, T. W., Shkel, A. M., IEEE IEEE. 2017: 181–82

  View details for Web of Science ID 000403208300050

• TOPOLOGY OPTIMIZATION FOR REDUCTION OF THERMO-ELASTIC DISSIPATION IN MEMS RESONATORS Gerrard, D. D., Chen, Y., Chandorkar, S. A., Yu, G., Rodriguez, J., Flader, I. B., Shin, D. D., Meinhart, C. D., Sigmund, O., Kenny, T. W., IEEE IEEE. 2017: 794–97

  View details for Web of Science ID 000426701400196

• DIRECT COMPARISON OF STICTION PROPERTIES OF OXIDE COATED POLYSILICON AND SMOOTH SINGLE CRYSTAL SILICON Heinz, D. B., Fickler, I. B., Chen, Y., Vukasin, G. D., Ortiz, L., Kenny, T. W., IEEE IEEE. 2017: 1203–6

  View details for Web of Science ID 000426701400298

• DUAL-RESONATOR MEMS MAGNETIC SENSOR WITH DIFFERENTIAL AMPLITUDE MODULATION Sonmezoglu, S., Flader, I. B., Chen, Y., Shin, D. D., Kenny, T. W., Horsley, D. A., IEEE IEEE. 2017: 814–17

  View details for Web of Science ID 000426701400201

• Direct Measurements of Anchor Damping in MEMS Resonators Rodriguez, J., Gerrard, D. D., Glaze, G. M., Chandorkar, S., Comenecia, L., Chen, Y., Flader, I. B., Kenny, T. W., IEEE IEEE. 2017: 10–12

  View details for Web of Science ID 000427677500004

• EFFECTIVE QUALITY FACTOR AND TEMPERATURE DEPENDENCE OF SELF-OSCILLATIONS IN A THERMAL-PIEZORESISTIVELY PUMPED RESONATOR Miller, J. L., Heinz, D. B., Flader, I. B., Chen, Y., Shin, D. D., Kenny, T. W., IEEE IEEE. 2017: 1907–10

  View details for Web of Science ID 000426701400471

• MICRO-TETHERING FOR IN-PROCESS STICTION MITIGATION OF HIGHLY COMPLIANT STRUCTURES Flader, I. B., Chen, Y., Shin, D. D., Heinz, D. B., Ortiz, L., Alter, A. L., Park, W., Goodson, K. E., Kenny, T. W., IEEE IEEE. 2017: 675–78

  View details for Web of Science ID 000402552000175

• HIGH-G (>20,000g) INERTIAL SHOCK SURVIVABILITY OF EPITAXIALLY ENCAPSULATED SILICON MEMS DEVICES Heinz, D. B., Hong, V. A., Yang, Y., Ahn, C., Kenny, T. W., IEEE IEEE. 2017: 1122–25

  View details for Web of Science ID 000402552000288

• EPITAXIALLY-ENCAPSULATED QUAD MASS RESONATOR WITH SHAPED COMB FINGERS FOR FREQUENCY TUNING Taheri-Tehrani, P., Defoort, M., Chen, Y., Flader, I., Shin, D. D., Kenny, T. W., Horsley, D. A., IEEE IEEE. 2017: 1111–14

  View details for Web of Science ID 000402552000285

• Fabrication of Wide and Deep Cavities for Silicon MEMS Devices Without Wafer Bonding Chen, Y., Flader, I. B., Shin, D. D., Ahn, C., Ortiz, L., Kenny, T. W., IEEE IEEE. 2017: 113–16

  View details for Web of Science ID 000403208300030

• EPITAXIALLY ENCAPSULATED RESONANT ACCELEROMETER WITH AN ON-CHIP MICRO-OVEN Shin, D. D., Chen, Y., Flader, I. B., Kenny, T. W., IEEE IEEE. 2017: 595–98

  View details for Web of Science ID 000426701400147

• Nonlinear damping and dephasing in nanomechanical systems PHYSICAL REVIEW B Atalaya, J., Kenny, T. W., Roukes, M. L., Dykman, M. I. 2016; 94 (19)

  View details for DOI 10.1103/PhysRevB.94.195440

  View details for Web of Science ID 000388818000017

• Nonlinearity of Degenerately Doped Bulk-Mode Silicon MEMS Resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Yang, Y., Ng, E. J., Polunin, P. M., Chen, Y., Flader, I. B., Shaw, S. W., Dykman, M. I., Kenny, T. W. 2016; 25 (5): 859-869

  View details for DOI 10.1109/JMEMS.2016.2586099

  View details for Web of Science ID 000389897800006

• Phase Noise Reduction in an MEMS Oscillator Using a Nonlinearly Enhanced Synchronization Domain JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Shoshani, O., Heywood, D., Yang, Y., Kenny, T. W., Shaw, S. W. 2016; 25 (5): 870-876

  View details for DOI 10.1109/JMEMS.2016.2590881

  View details for Web of Science ID 000389897800007

• Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops ULTRAMICROSCOPY English, T. S., Provine, J., Marshall, A. F., Koh, A. L., Kenny, T. W. 2016; 166: 39-47

  Abstract

  Specimen preparation remains a practical challenge in transmission electron microscopy and frequently limits the quality of structural and chemical characterization data obtained. Prevailing methods for thinning of specimens to electron transparency are serial in nature, time consuming, and prone to producing artifacts and specimen failure. This work presents an alternative method for the preparation of plan-view specimens using isotropic vapor-phase etching with integrated etch stops. An ultrathin amorphous etch-stop layer simultaneously serves as an electron transparent support membrane whose thickness is defined by a controlled growth process such as atomic layer deposition with sub-nanometer precision. This approach eliminates the need for mechanical polishing or ion milling to achieve electron transparency, and reduces the occurrence of preparation induced artifacts. Furthermore, multiple specimens from a plurality of samples can be thinned in parallel due to high selectivity of the vapor-phase etching process. These features enable dramatic reductions in preparation time and cost without sacrificing specimen quality and provide advantages over wet etching techniques. Finally, we demonstrate a platform for high-throughput transmission electron microscopy of plan-view specimens by combining the parallel preparation capabilities of vapor-phase etching with wafer-scale micro- and nanofabrication.

  View details for DOI 10.1016/j.ultramic.2016.04.003

  View details for Web of Science ID 000376734400005

  View details for PubMedID 27160487

• Experimental Investigation Into Stiction Forces and Dynamic Mechanical Anti-Stiction Solutions in Ultra-Clean Encapsulated MEMS Devices JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Heinz, D. B., Hong, V. A., Ahn, C. H., Ng, E. J., Yang, Y., Kenny, T. W. 2016; 25 (3): 469-478

  View details for DOI 10.1109/JMEMS.2016.2525008

  View details for Web of Science ID 000377372900007

• A Unified Epi-Seal Process for Fabrication of High-Stability Microelectromechanical Devices JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Yang, Y., Ng, E. J., Chen, Y., Flader, I. B., Kenny, T. W. 2016; 25 (3): 489-497

  View details for DOI 10.1109/JMEMS.2016.2537829

  View details for Web of Science ID 000377372900009

• Characterization of MEMS Resonator Nonlinearities Using the Ringdown Response JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Polunin, P. M., Yang, Y., Dykman, M. I., Kenny, T. W., Shaw, S. W. 2016; 25 (2): 297-303

  View details for DOI 10.1109/JMEMS.2016.2529296

  View details for Web of Science ID 000374177500008

• Stable Encapsulated Charge-Biased Resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Ng, E. J., Harrison, K. L., Yang, Y., Ahn, C. H., Hong, V. A., Howe, R. T., Kenny, T. W. 2016; 25 (1): 30-37

  View details for DOI 10.1109/JMEMS.2015.2483365

  View details for Web of Science ID 000370763900003

• Autonomous Calibration of MEMS Disk Resonating Gyroscope for Improved Sensor Performance Flader, I. B., Ahn, C. H., Gerrard, D. D., Ng, E. J., Yang, Y., Hong, V. A., Pavone, M., Kenny, T. W., IEEE IEEE. 2016: 5803–10

  View details for Web of Science ID 000388376105138

• STOCHASTIC METHOD FOR DISK RESONATING GYROSCOPE MODE MATCHING AND QUADRATURE NULLING Flader, I. B., Ahn, C., Ng, E. J., Yang, Y., Hong, V. A., Kenny, T. W., IEEE IEEE. 2016: 998–1001

  View details for Web of Science ID 000381797300261

• ENCAPSULATED DISK RESONATOR GYROSCOPE WITH DIFFERENTIAL INTERNAL ELECTRODES Ahn, C., Shin, D. D., Hong, V. A., Yang, Y., Ng, E. J., Chen, Y., Flader, I. B., Kenny, T. W., IEEE IEEE. 2016: 962–65

  View details for Web of Science ID 000381797300252

• EPITAXIALLY-ENCAPSULATED QUAD MASS GYROSCOPE WITH NONLINEARITY COMPENSATION Taheri-Tehrani, P., Kline, M., Izyumin, I., Eminoglu, B., Yeh, Y., Yang, Y., Chen, Y., Flader, I., Ng, E. J., Kenny, T. W., Boser, B. E., Horsley, D. A., IEEE IEEE. 2016: 966–69

  View details for Web of Science ID 000381797300253

• Mode-Matched MEMS Coriolis Vibratory Gyroscopes: Myth or Reality? Prikhodko, I. P., Gregory, J. A., Clark, W. A., Geen, J. A., Judy, M. W., Ahn, C. H., Kenny, T. W., IEEE IEEE. 2016: 1–4

  View details for Web of Science ID 000389021800001

• OVENIZED DUAL-MODE CLOCK (ODNIC) BASED ON HIGHLY DOPED SINGLE CRYSTAL SILICON RESONATORS Chen, Y., Ng, E. J., Shin, D. D., Ahn, C. H., Yang, Y., Flader, I. B., Hong, V. A., Kenny, T. W., IEEE IEEE. 2016: 91–94

  View details for Web of Science ID 000381797300025

• OVERCOMING STICTION FORCES WITH RESONANT OVER-TRAVEL STOPS Hong, V. A., Heinz, D. B., Christensen, D. L., Shin, D. D., Chen, Y., Ahn, C., Yang, Y., Ng, E. J., Flader, I. B., Kenny, T. W., IEEE IEEE. 2016: 47–50

  View details for Web of Science ID 000381797300014

• Q-FACTOR OPTIMIZATION IN DISK RESONATOR GYROSCOPES VIA GEOMETRIC PARAMETERIZATION Gerrard, D. D., Ahn, C. H., Flader, I. B., Chen, Y., Ng, E. J., Yang, Y., Kenny, T. W., IEEE IEEE. 2016: 994–97

  View details for Web of Science ID 000381797300260

• Investigation of a Vacuum Encapsulated Si-to-Si Contact Microswitch Operated From-60 degrees C to 400 degrees C JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Soon, B. W., Qian, Y., Ng, E. J., Hong, V. A., Yang, Y., Ahn, C. H., Kenny, T. W., Lee, C. 2015; 24 (6): 1906-1915

  View details for DOI 10.1109/JMEMS.2015.2451191

  View details for Web of Science ID 000365987000028

• Temperature Dependence of the Elastic Constants of Doped Silicon (vol 24, pg 730, 2015) JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Ng, E. J., Hong, V. A., Yang, Y., Ahn, C., Everhart, C. M., Kenny, T. W. 2015; 24 (6): 2178

  View details for DOI 10.1109/JMEMS.2015.2483373

  View details for Web of Science ID 000365987000058

• Characterization of Oxide-Coated Polysilicon Disk Resonator Gyroscope Within a Wafer-Scale Encapsulation Process JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Ahn, C. H., Ng, E. J., Hong, V. A., Huynh, J., Wang, S., Kenny, T. W. 2015; 24 (6): 1687-1694

  View details for DOI 10.1109/JMEMS.2015.2478034

  View details for Web of Science ID 000365987000005

• Nonhomogeneous morphology and the elastic modulus of aligned carbon nanotube films JOURNAL OF MICROMECHANICS AND MICROENGINEERING Won, Y., Gao, Y., Guzman de Villoria, R., Wardle, B. L., Xiang, R., Maruyama, S., Kenny, T. W., Goodson, K. E. 2015; 25 (11)

  View details for DOI 10.1088/0960-1317/25/11/115023

  View details for Web of Science ID 000366862100026

• Thermal Conduction in Vertically Aligned Copper Nanowire Arrays and Composites. ACS applied materials & interfaces Barako, M. T., Roy-Panzer, S., English, T. S., Kodama, T., Asheghi, M., Kenny, T. W., Goodson, K. E. 2015; 7 (34): 19251-19259

  Abstract

  The ability to efficiently and reliably transfer heat between sources and sinks is often a bottleneck in the thermal management of modern energy conversion technologies ranging from microelectronics to thermoelectric power generation. These interfaces contribute parasitic thermal resistances that reduce device performance and are subjected to thermomechanical stresses that degrade device lifetime. Dense arrays of vertically aligned metal nanowires (NWs) offer the unique combination of thermal conductance from the constituent metal and mechanical compliance from the high aspect ratio geometry to increase interfacial heat transfer and device reliability. In the present work, we synthesize copper NW arrays directly onto substrates via templated electrodeposition and extend this technique through the use of a sacrificial overplating layer to achieve improved uniformity. Furthermore, we infiltrate the array with an organic phase change material and demonstrate the preservation of thermal properties. We use the 3ω method to measure the axial thermal conductivity of freestanding copper NW arrays to be as high as 70 W m(-1) K(-1), which is more than an order of magnitude larger than most commercial interface materials and enhanced-conductivity nanocomposites reported in the literature. These arrays are highly anisotropic, and the lateral thermal conductivity is found to be only 1-2 W m(-1) K(-1). We use these measured properties to elucidate the governing array-scale transport mechanisms, which include the effects of morphology and energy carrier scattering from size effects and grain boundaries.

  View details for DOI 10.1021/acsami.5b05147

  View details for PubMedID 26284489

• Multifunctional Integrated Sensors for Multiparameter Monitoring Applications JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Roozeboom, C. L., Hill, B. E., Vu Anh Hong, V. A., Ahn, C. H., Ng, E. J., Yang, Y., Kenny, T. W., Hopcroft, M. A., Pruitt, B. L. 2015; 24 (4): 810-821

  View details for DOI 10.1109/JMEMS.2014.2349894

  View details for Web of Science ID 000358952600007

• Targeted microbubbles: a novel application for the treatment of kidney stones BJU INTERNATIONAL Ramaswamy, K., Marx, V., Laser, D., Kenny, T., Chi, T., Bailey, M., Sorensen, M. D., Grubbs, R. H., Stoller, M. L. 2015; 116 (1): 9-16

  Abstract

  Kidney stone disease is endemic. Extracorporeal shockwave lithotripsy was the first major technological breakthrough where focused shockwaves were used to fragment stones in the kidney or ureter. The shockwaves induced the formation of cavitation bubbles, whose collapse released energy at the stone, and the energy fragmented the kidney stones into pieces small enough to be passed spontaneously. Can the concept of microbubbles be used without the bulky machine? The logical progression was to manufacture these powerful microbubbles ex vivo and inject these bubbles directly into the collecting system. An external source can be used to induce cavitation once the microbubbles are at their target; the key is targeting these microbubbles to specifically bind to kidney stones. Two important observations have been established: (i) bisphosphonates attach to hydroxyapatite crystals with high affinity; and (ii) there is substantial hydroxyapatite in most kidney stones. The microbubbles can be equipped with bisphosphonate tags to specifically target kidney stones. These bubbles will preferentially bind to the stone and not surrounding tissue, reducing collateral damage. Ultrasound or another suitable form of energy is then applied causing the microbubbles to induce cavitation and fragment the stones. This can be used as an adjunct to ureteroscopy or percutaneous lithotripsy to aid in fragmentation. Randall's plaques, which also contain hydroxyapatite crystals, can also be targeted to pre-emptively destroy these stone precursors. Additionally, targeted microbubbles can aid in kidney stone diagnostics by virtue of being used as an adjunct to traditional imaging methods, especially useful in high-risk patient populations. This novel application of targeted microbubble technology not only represents the next frontier in minimally invasive stone surgery, but a platform technology for other areas of medicine.

  View details for DOI 10.1111/bju.12996

  View details for Web of Science ID 000357048700006

  View details for PubMedID 25402588

  View details for PubMedCentralID PMC4433869

• Predicting the closed-loop stability and oscillation amplitude of nonlinear parametrically amplified oscillators APPLIED PHYSICS LETTERS Zega, V., Nitzan, S., Li, M., Ahn, C. H., Ng, E., Hong, V., Yang, Y., Kenny, T., Corigliano, A., Horsley, D. A. 2015; 106 (23)

  View details for DOI 10.1063/1.4922533

  View details for Web of Science ID 000356170900043

• Temperature Dependence of the Elastic Constants of Doped Silicon JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Ng, E. J., Hong, V. A., Yang, Y., Ahn, C. H., Everhart, C. L., Kenny, T. W. 2015; 24 (3): 730-741

  View details for DOI 10.1109/JMEMS.2014.2347205

  View details for Web of Science ID 000356520200028

• Mode-Matching of Wineglass Mode Disk Resonator Gyroscope in (100) Single Crystal Silicon JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Ahn, C. H., Ng, E. J., Hong, V. A., Yang, Y., Lee, B. J., Flader, I., Kenny, T. W. 2015; 24 (2): 343-350

  View details for DOI 10.1109/JMEMS.2014.2330590

  View details for Web of Science ID 000352278200012

• Fatigue Experiments on Single Crystal Silicon in an Oxygen-Free Environment JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Hong, V. A., Yoneoka, S., Messana, M. W., Graham, A. B., Salvia, J. C., Branchflower, T. T., Ng, E. J., Kenny, T. W. 2015; 24 (2): 351-359

  View details for DOI 10.1109/JMEMS.2014.2331231

  View details for Web of Science ID 000352278200013

• Accurate Modeling of Quality Factor Behavior of Complex Silicon MEMS Resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Ghaffari, S., Ng, E. J., Ahn, C. H., Yang, Y., Wang, S., Hong, V. A., Kenny, T. W. 2015; 24 (2): 276-288

  View details for DOI 10.1109/JMEMS.2014.2374451

  View details for Web of Science ID 000352278200006

• Self-induced parametric amplification arising from nonlinear elastic coupling in a micromechanical resonating disk gyroscope SCIENTIFIC REPORTS Nitzan, S. H., Zega, V., Li, M., Ahn, C. H., Corigliano, A., Kenny, T. W., Horsley, D. A. 2015; 5

  Abstract

  Parametric amplification, resulting from intentionally varying a parameter in a resonator at twice its resonant frequency, has been successfully employed to increase the sensitivity of many micro- and nano-scale sensors. Here, we introduce the concept of self-induced parametric amplification, which arises naturally from nonlinear elastic coupling between the degenerate vibration modes in a micromechanical disk-resonator, and is not externally applied. The device functions as a gyroscope wherein angular rotation is detected from Coriolis coupling of elastic vibration energy from a driven vibration mode into a second degenerate sensing mode. While nonlinear elasticity in silicon resonators is extremely weak, in this high quality-factor device, ppm-level nonlinear elastic effects result in an order-of-magnitude increase in the observed sensitivity to Coriolis force relative to linear theory. Perfect degeneracy of the primary and secondary vibration modes is achieved through electrostatic frequency tuning, which also enables the phase and frequency of the parametric coupling to be varied, and we show that the resulting phase and frequency dependence of the amplification follow the theory of parametric resonance. We expect that this phenomenon will be useful for both fundamental studies of dynamic systems with low dissipation and for increasing signal-to-noise ratio in practical applications such as gyroscopes.

  View details for DOI 10.1038/srep09036

  View details for Web of Science ID 000351144900013

  View details for PubMedID 25762243

  View details for PubMedCentralID PMC4356982

• Disk Resonator Gyroscope with Whole-Angle Mode Operation Taheri-Tehrani, P., Izyumin, O., Izyumin, I., Ahn, C. H., Ng, E. J., Hong, V. A., Yang, Y., Kenny, T. W., Boser, B. E., Horsley, D. A., IEEE IEEE. 2015: 9–12

  View details for Web of Science ID 000380378400003

• A 7PPM, 6 degrees/HR FREQUENCY-OUTPUT MEMS GYROSCOPE Izyumin, I. I., Kline, M. H., Yeh, Y., Eminoglu, B., Ahn, C., Hong, V. A., Yang, Y., Ng, E. J., Kenny, T. W., Boser, B. E., IEEE IEEE. 2015: 33–36

  View details for Web of Science ID 000370382900011

• MODELING THE EFFECT OF ANCHOR GEOMETRY ON THE QUALITY FACTOR OF BULK MODE RESONATORS Gerrard, D. D., Ng, E. J., Ahn, C. H., Hong, V. A., Yang, Y., Kenny, T. W., IEEE IEEE. 2015: 1997–2000

  View details for Web of Science ID 000380461400499

• A UNIFIED EPI-SEAL PROCESS FOR RESONATORS AND INERTIAL SENSORS Yang, Y., Ng, E. J., Chen, Y., Flader, I. B., Ahn, C., Hong, V. A., Kenny, T. W., IEEE IEEE. 2015: 1326–29

  View details for Web of Science ID 000380461400330

• IN-SITU OVENIZATION OF LAME-MODE SILICON RESONATORS FOR TEMPERATURE COMPENSATION Chen, Y., Ng, E. J., Yang, Y., Ahn, C., Flader, I., Kenny, T. W., IEEE IEEE. 2015: 809–12

  View details for Web of Science ID 000370382900213

• TUNABLE QUALITY FACTOR THROUGH 1:1 MODAL COUPLING IN A DISK RESONATOR Flader, I. B., Ahn, C. H., Yang, Y., Ng, E. J., Hong, V. A., Baek, J., Kenny, T. W., IEEE IEEE. 2015: 1199–1202

  View details for Web of Science ID 000380440800316

• SILICON-TO-SILICON MICROSWITCH WITH WIDE OPERATION TEMPERATURE RANGE Soon, B., Qian, Y., Ng, E. J., Kenny, T. W., Lee, C., IEEE IEEE. 2015: 2105–8

  View details for Web of Science ID 000380461400526

• EXPERIMENTAL INVESTIGATION ON MODE COUPLING OF BULK MODE SILICON MEMS RESONATORS Yang, Y., Ng, E., Polunin, P., Chen, Y., Strachan, S., Vu Hong, Ahn, C., Shoshani, O., Shaw, S., Dykman, M., Kenny, T., IEEE IEEE. 2015: 1008–11

  View details for Web of Science ID 000370382900263

• Encapsulated high frequency (235 kHz), high-Q (100 k) disk resonator gyroscope with electrostatic parametric pump APPLIED PHYSICS LETTERS Ahn, C. H., Nitzan, S., Ng, E. J., Hong, V. A., Yang, Y., Kimbrell, T., Horsley, D. A., Kenny, T. W. 2014; 105 (24)

  View details for DOI 10.1063/1.4904468

  View details for Web of Science ID 000346643600074

• Fabrication and Characterization of a Vacuum Encapsulated Curved Beam Switch for Harsh Environment Application JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Soon, B. W., Ng, E. J., Hong, V. A., Yang, Y., Ahn, C. H., Qian, Y., Kenny, T. W., Lee, C. 2014; 23 (5): 1121-1130

  View details for DOI 10.1109/JMEMS.2014.2305754

  View details for Web of Science ID 000343318500014

• CHARACTERIZATION OF STICTION FORCES IN ULTRA-CLEAN ENCAPSULATED MEMS DEVICES Heinz, D. B., Hong, V. A., Ng, E. J., Ahn, C., Yang, Y., Kenny, T. W., IEEE IEEE. 2014: 588–91

  View details for Web of Science ID 000352217500152

• STABLE PULL-IN ELECTRODES FOR NARROW GAP ACTUATION Ng, E. J., Yang, Y., Hong, V. A., Ahn, C., Christensen, D. L., Gibson, B. A., Qalandar, K. R., Turner, K. L., Kenny, T. W., IEEE IEEE. 2014: 1281–84

  View details for Web of Science ID 000352217500326

• STABLE CHARGE-BIASED CAPACITIVE RESONATORS WITH ENCAPSULATED SWITCHES Ng, E. J., Harrison, K. L., Everhart, C. L., Hong, V. A., Yang, Y., Ahn, C., Heinz, D. B., Howe, R. T., Kenny, T. W., IEEE IEEE. 2014: 1277–80

  View details for Web of Science ID 000352217500325

• Zipping, entanglement, and the elastic modulus of aligned single-walled carbon nanotube films PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA Won, Y., Gao, Y., Panzer, M. A., Xiang, R., Maruyama, S., Kenny, T. W., Cai, W., Goodson, K. E. 2013; 110 (51): 20426-20430

  Abstract

  Reliably routing heat to and from conversion materials is a daunting challenge for a variety of innovative energy technologies--from thermal solar to automotive waste heat recovery systems--whose efficiencies degrade due to massive thermomechanical stresses at interfaces. This problem may soon be addressed by adhesives based on vertically aligned carbon nanotubes, which promise the revolutionary combination of high through-plane thermal conductivity and vanishing in-plane mechanical stiffness. Here, we report the data for the in-plane modulus of aligned single-walled carbon nanotube films using a microfabricated resonator method. Molecular simulations and electron microscopy identify the nanoscale mechanisms responsible for this property. The zipping and unzipping of adjacent nanotubes and the degree of alignment and entanglement are shown to govern the spatially varying local modulus, thereby providing the route to engineered materials with outstanding combinations of mechanical and thermal properties.

  View details for DOI 10.1073/pnas.1312253110

  View details for Web of Science ID 000328548600031

  View details for PubMedID 24309375

  View details for PubMedCentralID PMC3870663

• Experimental Validation of Topology Optimization for RF MEMS Capacitive Switch Design JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Philippine, M. A., Zareie, H., Sigmund, O., Rebeiz, G. M., Kenny, T. W. 2013; 22 (6): 1296-1309

  View details for DOI 10.1109/JMEMS.2013.2283241

  View details for Web of Science ID 000328047300008

• The effect of the temperature-dependent nonlinearities on the temperature stability of micromechanical resonators JOURNAL OF APPLIED PHYSICS Lee, H. K., Melamud, R., Kim, B., Chandorkar, S., Salvia, J. C., Kenny, T. W. 2013; 114 (15)

  View details for DOI 10.1063/1.4825327

  View details for Web of Science ID 000326117900025

• Lorentz force magnetometer using a micromechanical oscillator APPLIED PHYSICS LETTERS Li, M., Ng, E. J., Hong, V. A., Ahn, C. H., Yang, Y., Kenny, T. W., Horsley, D. A. 2013; 103 (17)

  View details for DOI 10.1063/1.4826278

  View details for Web of Science ID 000326455100079

• Vacuum encapsulated resonators for humidity measurement SENSORS AND ACTUATORS B-CHEMICAL Hennessy, R. G., Shulaker, M. M., Messana, M., Graham, A. B., Klejwa, N., Provine, J., Kenny, T. W., Howe, R. T. 2013; 185: 575-581

  View details for DOI 10.1016/j.snb.2013.05.016

  View details for Web of Science ID 000321509600077

• Crystallographic effects in modeling fundamental behavior of MEMS silicon resonators MICROELECTRONICS JOURNAL Ghaffari, S., Ahn, C. H., Ng, E. J., Wang, S., Kenny, T. W. 2013; 44 (7): 586-591

  View details for DOI 10.1016/j.mejo.2013.03.010

  View details for Web of Science ID 000321411900004

• Stability of Silicon Microelectromechanical Systems Resonant Thermometers IEEE SENSORS JOURNAL Ng, E. J., Lee, H. K., Ahn, C. H., Melamud, R., Kenny, T. W. 2013; 13 (3)

  View details for DOI 10.1109/JSEN.2012.2227708

  View details for Web of Science ID 000314690100011

• Topology Optimization of Stressed Capacitive RF MEMS Switches JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Philippine, M. A., Sigmund, O., Rebeiz, G. M., Kenny, T. W. 2013; 22 (1): 206-215

  View details for DOI 10.1109/JMEMS.2012.2224640

  View details for Web of Science ID 000314726900028

• Quantum limit of quality factor in silicon micro and nano mechanical resonators. Scientific reports Ghaffari, S., Chandorkar, S. A., Wang, S., Ng, E. J., Ahn, C. H., Hong, V., Yang, Y., Kenny, T. W. 2013; 3: 3244-?

  Abstract

  Micromechanical resonators are promising replacements for quartz crystals for timing and frequency references owing to potential for compactness, integrability with CMOS fabrication processes, low cost, and low power consumption. To be used in high performance reference application, resonators should obtain a high quality factor. The limit of the quality factor achieved by a resonator is set by the material properties, geometry and operating condition. Some recent resonators properly designed for exploiting bulk-acoustic resonance have been demonstrated to operate close to the quantum mechanical limit for the quality factor and frequency product (Q-f). Here, we describe the physics that gives rise to the quantum limit to the Q-f product, explain design strategies for minimizing other dissipation sources, and present new results from several different resonators that approach the limit.

  View details for DOI 10.1038/srep03244

  View details for PubMedID 24247809

  View details for PubMedCentralID PMC3832850

• SUB-10 NANOMETER UNCOOLED PLATINUM BOLOMETERS VIA PLASMA ENHANCED ATOMIC LAYER DEPOSITION Purkl, F., English, T., Yama, G., Provine, J., Samarao, A. K., Feyh, A., O'Brien, G., Ambacher, O., Howe, R. T., Kenny, T. W., IEEE IEEE. 2013: 185–88

  View details for Web of Science ID 000320549200048

• RESONANT PRESSURE SENSOR WITH ON-CHIP TEMPERATURE AND STRAIN SENSORS FOR ERROR CORRECTION 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Chiang, C., Graham, A. B., Lee, B. J., Ahn, C. H., Ng, E. J., O'Brien, G. J., Kenny, T. W. IEEE. 2013: 45–48

  View details for Web of Science ID 000320549200012

• Quantum limit of quality factor in silicon micro and nano mechanical resonators. Scientific reports Ghaffari, S., Chandorkar, S. A., Wang, S., Ng, E. J., Ahn, C. H., Hong, V., Yang, Y., Kenny, T. W. 2013; 3: 3244-?

  Abstract

  Micromechanical resonators are promising replacements for quartz crystals for timing and frequency references owing to potential for compactness, integrability with CMOS fabrication processes, low cost, and low power consumption. To be used in high performance reference application, resonators should obtain a high quality factor. The limit of the quality factor achieved by a resonator is set by the material properties, geometry and operating condition. Some recent resonators properly designed for exploiting bulk-acoustic resonance have been demonstrated to operate close to the quantum mechanical limit for the quality factor and frequency product (Q-f). Here, we describe the physics that gives rise to the quantum limit to the Q-f product, explain design strategies for minimizing other dissipation sources, and present new results from several different resonators that approach the limit.

  View details for DOI 10.1038/srep03244

  View details for PubMedID 24247809

• Bidirectionally tuning Kapitza conductance through the inclusion of substitutional impurities JOURNAL OF APPLIED PHYSICS Duda, J. C., English, T. S., Piekos, E. S., Beechem, T. E., Kenny, T. W., Hopkins, P. E. 2012; 112 (7)

  View details for DOI 10.1063/1.4757941

  View details for Web of Science ID 000310489400041

• Phase and thickness dependent modulus of Ge2Sb2Te5 films down to 25 nm thickness APPLIED PHYSICS LETTERS Won, Y., Lee, J., Asheghi, M., Kenny, T. W., Goodson, K. E. 2012; 100 (16)

  View details for DOI 10.1063/1.3699227

  View details for Web of Science ID 000303128500018

• Electrical and Thermal Conduction in Atomic Layer Deposition Nanobridges Down to 7 nm Thickness NANO LETTERS Yoneoka, S., Lee, J., Liger, M., Yama, G., Kodama, T., Gunji, M., Provine, J., Howe, R. T., Goodson, K. E., Kennyt, T. W. 2012; 12 (2): 683-686

  Abstract

  While the literature is rich with data for the electrical behavior of nanotransistors based on semiconductor nanowires and carbon nanotubes, few data are available for ultrascaled metal interconnects that will be demanded by these devices. Atomic layer deposition (ALD), which uses a sequence of self-limiting surface reactions to achieve high-quality nanolayers, provides an unique opportunity to study the limits of electrical and thermal conduction in metal interconnects. This work measures and interprets the electrical and thermal conductivities of free-standing platinum films of thickness 7.3, 9.8, and 12.1 nm in the temperature range from 50 to 320 K. Conductivity data for the 7.3 nm bridge are reduced by 77.8% (electrical) and 66.3% (thermal) compared to bulk values due to electron scattering at material and grain boundaries. The measurement results indicate that the contribution of phonon conduction is significant in the total thermal conductivity of the ALD films.

  View details for DOI 10.1021/nl203548w

  View details for PubMedID 22224582

• Mechanical characterization of aligned multi-walled carbon nanotube films using microfabricated resonators CARBON Won, Y., Gao, Y., Panzer, M. A., Dogbe, S., Pan, L., Kenny, T. W., Goodson, K. E. 2012; 50 (2): 347-355

  View details for DOI 10.1016/j.carbon.2011.08.009

  View details for Web of Science ID 000297397700001

• Reduction of Initial Stress Stiffening by Topology Optimization Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Philippine, M. A., Sigmund, O., Rebeiz, G. M., Kenny, T. W. IEEE COMPUTER SOC. 2012: 148–153

  View details for Web of Science ID 000310360600030

• ANHARMONIC PHONON DISPERSION RELATIONS, GROUP VELOCITIES, AND BRANCH-DEPENDENT SPECIFIC HEAT CAPACITIES MEASURED DIRECTLY FROM MOLECULAR DYNAMICS SIMULATIONS AT FINITE TEMPERATURES ASME Summer Heat Transfer Conference (SHTC) English, T. S., Kenny, T. W., Smoyer, J. L., Baker, C. H., Le, N. Q., Duda, J. C., Norris, P. M., Hopkins, P. E. AMER SOC MECHANICAL ENGINEERS. 2012: 617–624

  View details for Web of Science ID 000324956600073

• A SINGLE PROCESS FOR BUILDING CAPACITIVE PRESSURE SENSORS AND TIMING REFERENCES WITH PRECISE CONTROL OF RELEASED AREA USING LATERAL ETCH STOP 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Chiang, C., Graham, A. B., O'Brien, G. J., Kenny, T. W. IEEE. 2012

  View details for Web of Science ID 000312912800131

• Crust Removal and Effective Modulus of Aligned Multi-walled Carbon Nanotube Films 13th IEEE InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm) Won, Y., Gao, Y., de Villoria, R. G., Wardle, B. L., Kenny, T. W., Goodson, K. E. IEEE. 2012: 1070–1076

  View details for Web of Science ID 000312835500139

• Electrostatic Tuning to Achieve Higher Stability Microelectromechanical Composite Resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Lee, H. K., Melamud, R., Kim, B., Hopcroft, M. A., Salvia, J. C., Kenny, T. W. 2011; 20 (6): 1355-1365

  View details for DOI 10.1109/JMEMS.2011.2168083

  View details for Web of Science ID 000297589200016

• Stable Operation of MEMS Oscillators Far Above the Critical Vibration Amplitude in the Nonlinear Regime JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Lee, H. K., Melamud, R., Chandorkar, S., Salvia, J., Yoneoka, S., Kenny, T. W. 2011; 20 (6): 1228-1230

  View details for DOI 10.1109/JMEMS.2011.2170821

  View details for Web of Science ID 000297589200002

• Influence of the temperature dependent nonlinearities on the performance of micromechanical resonators APPLIED PHYSICS LETTERS Lee, H. K., Kim, B., Melamud, R., Hopcroft, M. A., Salvia, J. C., Kenny, T. W. 2011; 99 (19)

  View details for DOI 10.1063/1.3660235

  View details for Web of Science ID 000297030200082

• Orientation angle and the adhesion of single gecko setae JOURNAL OF THE ROYAL SOCIETY INTERFACE Hill, G. C., Soto, D. R., Peattie, A. M., Full, R. J., Kenny, T. W. 2011; 8 (60): 926-933

  Abstract

  We investigated the effects of orientation angle on the adhesion of single gecko setae using dual-axis microelectromechanical systems force sensors to simultaneously detect normal and shear force components. Adhesion was highly sensitive to the pitch angle between the substrate and the seta's stalk. Maximum lateral adhesive force was observed with the stalk parallel to the substrate, and adhesion decreased smoothly with increasing pitch. The roll orientation angle only needed to be roughly correct with the spatular tuft of the seta oriented grossly towards the substrate for high adhesion. Also, detailed measurements were made to control for the effect of normal preload forces. Higher normal preload forces caused modest enhancement of the observed lateral adhesive force, provided that adequate contact was made between the seta and the substrate. These results should be useful in the design and manufacture of gecko-inspired synthetic adhesives with anisotropic properties, an area of substantial recent research efforts.

  View details for DOI 10.1098/rsif.2010.0720

  View details for Web of Science ID 000290898500002

  View details for PubMedID 21288955

  View details for PubMedCentralID PMC3104340

• AC Polarization for Charge-Drift Elimination in Resonant Electrostatic MEMS and Oscillators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Bahl, G., Salvia, J. C., Melamud, R., Kim, B., Howe, R. T., Kenny, T. W. 2011; 20 (2): 355-364

  View details for DOI 10.1109/JMEMS.2010.2100027

  View details for Web of Science ID 000289205400002

• Wafer-Level Epitaxial Silicon Packaging for Out-of-Plane RF MEMS Resonators with Integrated Actuation Electrodes IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY Chen, K., Wang, S., Salvia, J. C., Melamud, R., Howe, R. T., Kenny, T. W. 2011; 1 (3): 310-317

  View details for DOI 10.1109/TCPMT.2010.2100711

  View details for Web of Science ID 000292780700004

• 3-D visualization of flow in microscale jet impingement systems INTERNATIONAL JOURNAL OF THERMAL SCIENCES Won, Y., Wang, E. N., Goodson, K. E., Kenny, T. W. 2011; 50 (3): 325-331

  View details for DOI 10.1016/j.ijthermalsci.2010.08.005

  View details for Web of Science ID 000287285700012

• Motional Impedance of Resonators in the Nonlinear Regime 5th Joint Conference of the 65th IEEE International Frequency Control Symposium/25th European Frequency and Time Forum Lee, H. K., Melamud, R., Chandorkar, S., Qu, Y. Q., Salvia, J., Kenny, T. W. IEEE. 2011: 372–377

  View details for Web of Science ID 000295261600087

• Tip-Based Nanofabrication: An Approach to True Nanotechnology Bloschock, K. P., Schofield, A. R., Kenny, T. W., George, T., Islam, M. S., Dutta, A. K. SPIE-INT SOC OPTICAL ENGINEERING. 2011

  View details for DOI 10.1117/12.887266

  View details for Web of Science ID 000291441400002

• Stability Measurements of Silicon MEMS Resonant Thermometers 10th IEEE Conference on Sensors Ng, E. J., Lee, H. K., Ahn, C. H., Melamud, R., Kenny, T. W. IEEE. 2011: 1257–1260

  View details for Web of Science ID 000299901200304

• Active Electrostatic Compensation of Micromechanical Resonators Under Random Vibrations JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Yoneoka, S., Salvia, J. C., Bahl, G., Melamud, R., Chandorkar, S. A., Kenny, T. W. 2010; 19 (5): 1270-1272

  View details for DOI 10.1109/JMEMS.2010.2067444

  View details for Web of Science ID 000283369500028

• Effect of fibril shape on adhesive properties APPLIED PHYSICS LETTERS Soto, D., Hill, G., Parness, A., Esparza, N., Cutkosky, M., Kenny, T. 2010; 97 (5)

  View details for DOI 10.1063/1.3464553

  View details for Web of Science ID 000281059500064

• What is the Young's Modulus of Silicon? JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Hopcroft, M. A., Nix, W. D., Kenny, T. W. 2010; 19 (2): 229-238

  View details for DOI 10.1109/JMEMS.2009.2039697

  View details for Web of Science ID 000276257700001

• Characterization of Encapsulated Micromechanical Resonators Sealed and Coated With Polycrystalline SiC JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Yoneoka, S., Roper, C. S., Candler, R. N., Chandorkar, S. A., Graham, A. B., Provine, J., Maboudian, R., Howe, R. T., Kenny, T. W. 2010; 19 (2): 357-366

  View details for DOI 10.1109/JMEMS.2010.2040460

  View details for Web of Science ID 000276257700014

• A Method for Wafer-Scale Encapsulation of Large Lateral Deflection MEMS Devices JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Graham, A. B., Messana, M. W., Hartwell, P. G., Provine, J., Yoneoka, S., Melamud, R., Kim, B., Howe, R. T., Kenny, T. W. 2010; 19 (1): 28-37

  View details for DOI 10.1109/JMEMS.2009.2035717

  View details for Web of Science ID 000274213700003

• Model and Observations of Dielectric Charge in Thermally Oxidized Silicon Resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Bahl, G., Melamud, R., Kim, B., Chandorkar, S. A., Salvia, J. C., Hopcroft, M. A., Elata, D., Hennessy, R. G., Candler, R. N., Howe, R. T., Kenny, T. W. 2010; 19 (1): 162-174

  View details for DOI 10.1109/JMEMS.2009.2036274

  View details for Web of Science ID 000274213700016

• Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked Loop JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Salvia, J. C., Melamud, R., Chandorkar, S. A., Lord, S. F., Kenny, T. W. 2010; 19 (1): 192-201

  View details for DOI 10.1109/JMEMS.2009.2035932

  View details for Web of Science ID 000274213700019

• AN OPTIMIZATION DESIGN FOR A MEMS FABRICATED JET IMPINGEMENT COOLING DEVICE ASME InterPack Conference Won, Y. J., Lee, J. H., Wang, E. N., Goodson, K. E., Kenny, T. W. AMER SOC MECHANICAL ENGINEERS. 2010: 491–496

  View details for Web of Science ID 000282288700064

• NONLINEARITY OF HERMETICALLY ENCAPSULATED HIGH-Q DOUBLE BALANCED BREATHE-MODE RING RESONATOR 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010) Wang, S., Chandorkar, S., Salvia, J., Melamud, R., Qu, Y., Lee, H. K., Kenny, T. W. IEEE. 2010: 715–718

  View details for Web of Science ID 000278416400177

• Encapsulated MEMS Resonators - A technology path for MEMS into Frequency Control Applications 2010 IEEE International Frequency Control Symposium Kim, B., Melamud, R., CANDLER, R. A., Hopcroft, M. A., Jha, C. M., Chandorkar, S., Kenny, T. W. IEEE. 2010: 1–4

  View details for Web of Science ID 000287378700001

• A NOVEL CHARACTERIZATION METHOD FOR TEMPERATURE COMPENSATION OF COMPOSITE RESONATORS 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010) Lee, H. K., Yoneoka, S., Bahl, G., Salvia, J., Qu, Y. Q., Melamud, R., Chandorkar, S., Kim, B., Hopcroft, M. A., Kenny, T. W. IEEE. 2010: 743–746

  View details for Web of Science ID 000278416400184

• CHARGE-DRIFT ELIMINATION IN RESONANT ELECTROSTATIC MEMS 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010) Bahl, G., Salvia, J., Bargatin, I., Yoneoka, S., Melamud, R., Kim, B., Chandorkar, S., Hopcroft, M. A., Bahl, R., Howe, R. T., Kenny, T. W. IEEE. 2010: 108–111

  View details for Web of Science ID 000278416400025

• HIGH-CYCLIC FATIGUE EXPERIMENTS OF SINGLE CRYSTAL SILICON IN AN OXYGEN-FREE ENVIRONMENT 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010) Yoneoka, S., Qu, Y. Q., Wang, S., Messana, M. W., Graham, A. B., Salvia, J., Kim, B., Melamud, R., Bahl, G., Kenny, T. W. IEEE. 2010: 224–227

  View details for Web of Science ID 000278416400054

• INFLUENCE OF THE TEMPERATURE DEPENDENT A-F EFFECT ON THE DESIGN AND PERFORMANCE OF MEMS OSCILLATORS 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010) Lee, H. K., Salvia, J., Bahl, G., Melamud, R., Yoneoka, S., Qu, Y. Q., Chandorkar, S., Hopcroft, M. A., Kim, B., Kenny, T. W. IEEE. 2010: 699–702

  View details for Web of Science ID 000278416400173

• STRESS RELAXATION STUDY OF SPUTTERED PLATINUM THIN FILMS AT NEAR ROOM TEMPERATURE USING AN ULTRA-SENSITIVE STRAIN GAUGE 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010) Qu, Y. Q., Melamud, R., Chandorkar, S., Lee, H. K., Kenny, T. W. IEEE. 2010: 548–551

  View details for Web of Science ID 000278416400135

• Development of wafer scale encapsulation process for large displacement piezoresistive MEMS devices SENSORS AND ACTUATORS A-PHYSICAL Ayanoor-Vitikkate, V., Chen, K., Park, W., Kenny, T. W. 2009; 156 (2): 275-283

  View details for DOI 10.1016/j.sna.2009.09.001

  View details for Web of Science ID 000272563900001

• Temperature-Insensitive Composite Micromechanical Resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Melamud, R., Chandorkar, S. A., Kim, B., Lee, H. K., Salvia, J. C., Bahl, G., Hopcroft, M. A., Kenny, T. W. 2009; 18 (6): 1409-1419

  View details for DOI 10.1109/JMEMS.2009.2030074

  View details for Web of Science ID 000272318900027

• Performance Evaluation and Equivalent Model of Silicon Interconnects for Fully-Encapsulated RF MEMS Devices IEEE TRANSACTIONS ON ADVANCED PACKAGING Chen, K., Salvia, J., Potter, R., Howe, R. T., Kenny, T. W. 2009; 32 (2): 402-409

  View details for DOI 10.1109/TADVP.2008.2005114

  View details for Web of Science ID 000266778000018

• Multimode thermoelastic dissipation JOURNAL OF APPLIED PHYSICS Chandorkar, S. A., Candler, R. N., Duwel, A., Melamud, R., Agarwal, M., Goodson, K. E., Kenny, T. W. 2009; 105 (4)

  View details for DOI 10.1063/1.3072682

  View details for Web of Science ID 000263803300018

• Hermeticity and diffusion investigation in polysilicon film encapsulation for microelectromechanical systems JOURNAL OF APPLIED PHYSICS Kim, B., Candler, R. N., Melamud, R., Hopcroft, M. A., Yoneoka, S., Lee, H. K., Agarwal, M., Chandorkar, S. A., Yama, G., Kenny, T. W. 2009; 105 (1)

  View details for DOI 10.1063/1.3054366

  View details for Web of Science ID 000262534100047

• AN INTEGRATED SOLUTION FOR WAFER-LEVEL PACKAGING AND ELECTROSTATIC ACTUATION OF OUT-OF-PLANE DEVICES 22nd International Conference on Micro Electro Mechanical Systems (MEMS) Chen, K., Melamud, R., Wang, S., Kenny, T. W. IEEE. 2009: 1071–1074

  View details for Web of Science ID 000341431500268

• ACCELERATION COMPENSATION OF MEMS RESONATORS USING ELECTROSTATIC TUNING 22nd International Conference on Micro Electro Mechanical Systems (MEMS) Yoneoka, S., Bahl, G., Salvia, J., Chen, K. L., Graham, A. B., Lee, H. K., Yama, G., Candler, R. N., Kenny, T. W. IEEE. 2009: 805–808

  View details for Web of Science ID 000341431500201

• PHASE LOCK LOOP BASED TEMPERATURE COMPENSATION FOR MEMS OSCILLATORS 22nd International Conference on Micro Electro Mechanical Systems (MEMS) Salvia, J., Melamud, R., Chandorkar, S., Lee, H. K., Qu, Y. Q., Lord, S. F., Murmann, B., Kenny, T. W. IEEE. 2009: 661–664

  View details for Web of Science ID 000341431500165

• WAFER SCALE ENCAPSULATION OF LARGE LATERAL DEFLECTION MEMS STRUCTURES 22nd International Conference on Micro Electro Mechanical Systems (MEMS) Graham, A. B., Messana, M., Hartwell, P., Provine, J., Yoneoka, S., Kim, B., Melamud, R., Howe, R. T., Kenny, T. W. IEEE. 2009: 745–748

  View details for Web of Science ID 000341431500186

• EPITAXIAL SILICON MICROSHELL VACUUM-ENCAPSULATED CMOS-COMPATIBLE 200 MHz BULK-MODE RESONATOR 22nd International Conference on Micro Electro Mechanical Systems (MEMS) Chen, K., Chandrahalim, H., Graham, A. B., Bhave, S. A., Howe, R. T., Kenny, T. W. IEEE. 2009: 23–26

  View details for Web of Science ID 000341431500006

• 3-D VISUALIZATION OF FLOW IN MICROSCALE JET IMPINGEMENT SYSTEM 7th International Conference on Nanochannels, Microchannels and Minichannels Won, Y. J., David, M., Wang, E. N., Goodson, K. E., Kenny, T. W. AMER SOC MECHANICAL ENGINEERS. 2009: 759–764

  View details for Web of Science ID 000286415600101

• Acceleration insensitive encapsulated silicon microresonator APPLIED PHYSICS LETTERS Jha, C. M., Salvia, J., Chandorkar, S. A., Melamud, R., Kuhl, E., Kenny, T. W. 2008; 93 (23)

  View details for DOI 10.1063/1.3036536

  View details for Web of Science ID 000261699700087

• Temperature dependence of quality factor in MEMS resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Kim, B., Hopcroft, M. A., Candler, R. N., Jha, C. M., Agarwal, M., Melamud, R., Chandorkar, S. A., Yama, G., Kenny, T. W. 2008; 17 (3): 755-766

  View details for DOI 10.1109/JMEMS.2008.924253

  View details for Web of Science ID 000256626300023

• Mission results for Sapphire, a student-built satellite ACTA ASTRONAUTICA Swartwout, M., Kitts, C., Twiggs, R., Kenny, T., Smith, B. R., Lu, R., Stattenfield, K., Pranajaya, F. 2008; 62 (8-9): 521-538

  View details for DOI 10.1016/j.actaastro.2008.01.009

  View details for Web of Science ID 000255445100008

• A study of electrostatic force nonlinearities in resonant microstructures APPLIED PHYSICS LETTERS Agarwal, M., Chandorkar, S. A., Mehta, H., Candler, R. N., Kim, B., Hopcroft, M. A., Melamud, R., Jha, C. M., Bahl, G., Yama, G., Kenny, T. W., Murmann, B. 2008; 92 (10)

  View details for DOI 10.1063/1.2834707

  View details for Web of Science ID 000253989300168

• Thermal isolation of encapsulated MEMS resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Jha, C. M., Hopcroft, M. A., Chandorkar, S. A., Salvia, J. C., Agarwal, M., Candler, R. N., Melamud, R., Kim, B., Kenny, T. W. 2008; 17 (1): 175-184

  View details for DOI 10.1109/JMEMS.2007.904332

  View details for Web of Science ID 000253259600020

• Limits of quality factor in bulk-mode micromechanical resonators 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008) Chandorkar, S. A., Agarwal, M., Melamud, R., Candler, R. N., Goodson, K. E., Kenny, T. W. IEEE. 2008: 74–77

  View details for Web of Science ID 000253356900019

• Variable thermal resistors (VTR) for thermal management of chip scale atomic clocks (CSAC) 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008) Kim, H., Liao, H., Song, H. O., Kenny, T. W. IEEE. 2008: 852–855

  View details for Web of Science ID 000253356900213

• Identification and management of diffusion pathways in polysilicon encapsulation for MEMS devices 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008) Kim, B., Candler, R. N., Melamud, R., Yoneoka, S., Lee, H. K., Yama, G., Kenny, T. W. IEEE. 2008: 104–107

  View details for Web of Science ID 000253356900026

• Exploring the Limits and Practicality of Q-based Temperature Compensation for Silicon Resonators IEEE International Electron Devices Meeting Salvia, J., Messana, M., Ohline, M., Hopcroft, M. A., Melamud, R., Chandorkar, S., Lee, H. K., Bahl, G., Murmann, B., Kenny, T. W. IEEE. 2008: 671–674

  View details for Web of Science ID 000265829300156

• Ultraminiature encapsulated accelerometers as a fully implantable sensor for implantable hearing aids 13th International Conference on Solid-State Sensors, Actuators and Microsystems Park, W., O'Connor, K. N., Chen, K., Mallon, J. R., Maetani, T., Dalal, P., Candler, R. N., Ayanoor-Vitikkate, V., Roberson, J. B., Puria, S., Kenny, T. W. SPRINGER. 2007: 939–49

  Abstract

  Experiments were conducted to evaluate a silicon accelerometer as an implantable sound sensor for implantable hearing aids. The main motivation of this study is to find an alternative sound sensor that is implantable inside the body, yet does not suffer from the signal attenuation from the body. The merit of the accelerometer sensor as a sound sensor will be that it will utilize the natural mechanical conduction in the middle ear as a source of the vibration. With this kind of implantable sound sensor, a totally implantable hearing aid is feasible. A piezoresistive silicon accelerometer that is completely encapsulated with a thin silicon film and long flexible flex-circuit electrical cables were used for this study. The sensor is attached on the middle ear ossicles and measures the vibration transmitted from the tympanic membrane due to the sound in the ear canal. In this study, the sensor is fully characterized on a human cadaveric temporal bone preparation.

  View details for DOI 10.1007/s10544-007-9072-4

  View details for Web of Science ID 000250462200019

  View details for PubMedID 17574533

• Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators JOURNAL OF APPLIED PHYSICS Agarwal, M., Mehta, H., Candler, R. N., Chandorkar, S. A., Kim, B., Hopcroft, M. A., Melamud, R., Bahl, G., Yama, G., Kenny, T. W., Murmann, B. 2007; 102 (7)

  View details for DOI 10.1063/1.2785018

  View details for Web of Science ID 000250147700148

• High resolution microresonator-based digital temperature sensor APPLIED PHYSICS LETTERS Jha, C. M., Bahl, G., Melamud, R., Chandorkar, S. A., Hopcroft, M. A., Kim, B., Agarwal, M., Salvia, J., Mehta, H., Kenny, T. W. 2007; 91 (7)

  View details for DOI 10.1063/1.2768629

  View details for Web of Science ID 000248866600117

• Using the temperature dependence of resonator quality factor as a thermometer APPLIED PHYSICS LETTERS Hopcroft, M. A., Kim, B., Chandorkar, S., Melamud, R., Agarwal, M., Jha, C. M., Bahl, G., Salvia, J., Mehta, H., Lee, H. K., Candler, R. N., Kenny, T. W. 2007; 91 (1)

  View details for DOI 10.1063/1.2753758

  View details for Web of Science ID 000247819700074

• Temperature-compensated high-stability silicon resonators APPLIED PHYSICS LETTERS Melamud, R., Kim, B., Chandorkar, S. A., Hopcroft, M. A., Agarwal, M., Jha, C. M., Kenny, T. W. 2007; 90 (24)

  View details for DOI 10.1063/1.2748092

  View details for Web of Science ID 000247305400116

• A multiaxis force sensor for the study of insect biomechanics JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Bartsch, M. S., Federle, W., Full, R. J., Kenny, T. W. 2007; 16 (3): 709-718

  View details for DOI 10.1109/JMEMS.2007.893677

  View details for Web of Science ID 000247219200025

• Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators SENSORS AND ACTUATORS A-PHYSICAL Kim, B., Candler, R. N., Hopcroft, M. A., Agarwal, M., Park, W., Kenny, T. W. 2007; 136 (1): 125-131

  View details for DOI 10.1016/j.sna.2006.10.040

  View details for Web of Science ID 000246463000014

• Wafer-scale fabrication of infrared detectors based on tunneling displacement transducers SENSORS AND ACTUATORS A-PHYSICAL Ajakaiye, A., Grade, J., Shin, C., Kenny, T. 2007; 134 (2): 575-581

  View details for DOI 10.1016/j.sna.2005.07.028

  View details for Web of Science ID 000245319900038

• Inhibition of metalloprotease botulinum serotype A from a pseudo-peptide binding mode to a small molecule that is active in primary neurons JOURNAL OF BIOLOGICAL CHEMISTRY Burnett, J. C., Ruthel, G., Stegmann, C. M., Panchal, R. G., Nguyen, T. L., Hermone, A. R., Stafford, R. G., Lane, D. J., Kenny, T. A., McGrath, C. F., Wipf, P., Stahl, A. M., Schmidt, J. J., Gussio, R., Brunger, A. T., Bavari, S. 2007; 282 (7): 5004-5014

  Abstract

  An efficient research strategy integrating empirically guided, structure-based modeling and chemoinformatics was used to discover potent small molecule inhibitors of the botulinum neurotoxin serotype A light chain. First, a modeled binding mode for inhibitor 2-mercapto-3-phenylpropionyl-RATKML (K(i) = 330 nM) was generated, and required the use of a molecular dynamic conformer of the enzyme displaying the reorientation of surface loops bordering the substrate binding cleft. These flexible loops are conformationally variable in x-ray crystal structures, and the model predicted that they were pivotal for providing complementary binding surfaces and solvent shielding for the pseudo-peptide. The docked conformation of 2-mercapto-3-phenylpropionyl-RATKML was then used to refine our pharmacophore for botulinum serotype A light chain inhibition. Data base search queries derived from the pharmacophore were employed to mine small molecule (non-peptidic) inhibitors from the National Cancer Institute's Open Repository. Four of the inhibitors possess K(i) values ranging from 3.0 to 10.0 microM. Of these, NSC 240898 is a promising lead for therapeutic development, as it readily enters neurons, exhibits no neuronal toxicity, and elicits dose-dependent protection of synaptosomal-associated protein (of 25 kDa) in a primary culture of embryonic chicken neurons. Isothermal titration calorimetry showed that the interaction between NSC 240898 and the botulinum A light chain is largely entropy-driven, and occurs with a 1:1 stoichiometry and a dissociation constant of 4.6 microM.

  View details for DOI 10.1074/jbc.M608166200

  View details for Web of Science ID 000244482000083

  View details for PubMedID 17092934

• Acceleration sensitivity in beam-type electrostatic microresonators APPLIED PHYSICS LETTERS Agarwal, M., Park, K. K., Chandorkar, S. A., Candler, R. N., Kim, B., Hopcroft, M. A., Melamud, R., Kenny, T. W., Murmann, B. 2007; 90 (1)

  View details for DOI 10.1063/1.2426884

  View details for Web of Science ID 000243379900112

• Investigating the role of orientation angle on gecko, setae adhesion using a dual-axis MEMS force sensor 14th International Conference on Solid-State Sensors, Actuators and Microsystems/21st European Conference on Solid-State Transducers Hill, G. C., Soto, D. R., Lue, S. J., Peattie, M., Full, R. J., Kenny, T. W. IEEE. 2007

  View details for Web of Science ID 000249603700563

• Using MEMS to build the device and the package 14th International Conference on Solid-State Sensors, Actuators and Microsystems/21st European Conference on Solid-State Transducers Kim, B., Hopcroft, M., Jha, C. M., Melamud, R., Chandorkar, S., Agarwal, M., Chen, K. L., Park, W. T., Candler, R., Yama, G., Partridge, A., Lutz, M., Kenny, T. W. IEEE. 2007

  View details for Web of Science ID 000249603700078

• CMOS compatible wafer-scale encapsulation with MEMS resonators ASME InterPACK Conference Kim, B., Hopcroft, M. A., Melamud, R., Jha, C. M., Agarwal, M., Chandorkar, S. A., Kenny, T. W. AMER SOC MECHANICAL ENGINEERS. 2007: 499–504

  View details for Web of Science ID 000254115600065

• Si-SiO2 composite MEMS resonators in CMOS compatible wafer-scale thin-film encapsulation Joint IEEE International Frequency Control Symposium/21st European Frequency and Time Forum Kim, B., Melamud, R., Hopcroft, M. A., Chandorkar, S. A., Bahl, G., Messana, M., Candler, R. N., Yama, G., Kenny, T. IEEE, ELECTRON DEVICES SOC & RELIABILITY GROUP. 2007: 1214–1219

  View details for Web of Science ID 000252304500254

• An improved method of thermal resistance measurement for variable thermal resistors ASME InterPACK Conference Kim, H., Song, H. O., Kenny, T. W. AMER SOC MECHANICAL ENGINEERS. 2007: 249–253

  View details for Web of Science ID 000254115600034

• A high-stability MEMS frequency reference 14th International Conference on Solid-State Sensors, Actuators and Microsystems/21st European Conference on Solid-State Transducers Hopcroft, M. A., Lee, H. K., Kim, B., Melamud, R., Chandorkar, S., Agarwal, M., Jha, C. M., Salvia, J., Bahl, G., Mehta, H., Kenny, T. W. IEEE. 2007

  View details for Web of Science ID 000249603700322

• Composite flexural-mode resonator with controllable turnover temperature 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007) Melamud, R., Kim, B., Hopcroft, M. A., Chandorkar, S., Agarwal, M., Jha, C. M., Kenny, T. W. IEEE. 2007: 378–381

  View details for Web of Science ID 000255867800095

• Non-isothermal micromechanical resonators 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007) Chandorkar, S. A., Mehta, H., Agarwal, M., Hopcroft, M. A., Jha, C. M., Candler, R. N., Yama, G., Bahl, G., Kim, B., Melamud, R., Goodson, K. E., Kenny, T. W. IEEE. 2007: 714–717

  View details for Web of Science ID 000255867800179

• Impact of miniaturization on the current handling of electrostatic MEMS resonators 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007) Agarwal, M., Mehta, H., Candler, R. N., Chandorkar, S. A., Kim, B., Hopicroft, M. A., Melamud, R., Bahl, G., Yama, G., Kenny, T. W., Murmann, B. IEEE. 2007: 530–533

  View details for Web of Science ID 000255867800133

• Cmos-compatible dual-resonator mems temperature sensor with milli-degree accuracy 14th International Conference on Solid-State Sensors, Actuators and Microsystems/21st European Conference on Solid-State Transducers Jha, C. M., Bahl, G., Melamud, R., Chandorkar, S. A., Hopcroft, M. A., Kim, B., Agarwal, M., Salvia, J., Mehta, H., Kenny, T. W. IEEE. 2007

  View details for Web of Science ID 000249603700054

• Long-term and accelerated life testing of a novel single-wafer vacuum encapsulation for MEMS resonators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Candler, R. N., Hopcroft, M. A., Kim, B., Park, W., Melamud, R., Agarwal, M., Yama, G., Partridge, A., Lutz, M., Kenny, T. W. 2006; 15 (6): 1446-1456

  View details for DOI 10.1109/JMEMS.2006.883586

  View details for Web of Science ID 000242983300004

• Engineering MEMS resonators with low thermoelastic damping JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Duwel, A., Candler, R. N., Kenny, T. W., Varghese, M. 2006; 15 (6): 1437-1445

  View details for DOI 10.1109/JMEMS.2006.883573

  View details for Web of Science ID 000242983300003

• Optimal drive condition for nonlinearity reduction in electrostatic microresonators APPLIED PHYSICS LETTERS Agarwal, M., Chandorkar, S. A., Candler, R. N., Kim, B., Hopcroft, M. A., Melamud, R., Jha, C. M., Kenny, T. W., Murmann, B. 2006; 89 (21)

  View details for DOI 10.1063/1.2388886

  View details for Web of Science ID 000242220000087

• Impact of geometry on thermoelastic dissipation in micromechanical resonant beams JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Candler, R. N., Duwel, A., Varghese, M., Chandorkar, S. A., Hopcroft, M. A., Park, W., Kim, B., Yama, G., Partridge, A., Lutz, M., Kenny, T. W. 2006; 15 (4): 927-934

  View details for DOI 10.1109/JMEMS.2006.879374

  View details for Web of Science ID 000239712600023

• A hybrid method for bubble geometry reconstruction in two-phase microchannels EXPERIMENTS IN FLUIDS Wang, E. N., Devasenathipathy, S., Lin, H., Hidrovo, C. H., Santiago, J. G., Goodson, K. E., Kenny, T. W. 2006; 40 (6): 847-858

  View details for DOI 10.1007/s00348-006-0123-z

  View details for Web of Science ID 000239549100003

• Encapsulated submillimeter piezoresistive accelerometers JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Park, W., Partridge, A., Candler, R. N., Ayanoor-Vitikkate, V., Yama, G., Lutz, M., Kenny, T. W. 2006; 15 (3): 507-514

  View details for DOI 10.1109/JMEMS.2006.876648

  View details for Web of Science ID 000238311000007

• Two-phase microfluidics for semiconductor circuits and fuel cells HEAT TRANSFER ENGINEERING Hidrovo, C. H., Kramer, T. A., Wang, E. N., Vigneron, E., Steinbrenner, J. E., Koo, J. M., Wang, F. M., Fogg, D. W., Flynn, R. D., Lee, E. S., Cheng, C. H., Kenny, T. W., Eaton, J. K., Goodson, K. E. 2006; 27 (4): 53-63

  View details for DOI 10.1080/01457630500523816

  View details for Web of Science ID 000236239500006

• Advanced cooling technologies for microprocessors Workshop on Frontiers in Electronics (WOFE-04) Kenny, T. W., Goodson, K. E., Santiago, J. G., Wang, E., Koo, J., Jiang, L., Pop, E., Sinha, S., Zhang, L., Fogg, D., Yao, S., Flynn, R., Chang, C., Hidrovo, C. H. WORLD SCIENTIFIC PUBL CO PTE LTD. 2006: 301–313

  View details for Web of Science ID 000241022300016

• Temperature dependence of quality factor in MEMS resonators 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006) Kim, B., Jha, C. M., White, T., Candler, R. N., Hopcroft, M., Agarwal, M., Park, K. K., Melamud, R., Chandorkar, S., Kenny, T. W. IEEE. 2006: 590–593

  View details for Web of Science ID 000236994500148

• Wafer Scale Encapsulation of Wide Gaps using oxidation of Sacrificial Beams 31st IEEE/CPMT International Electronic Manufacturing Technology Symposium Ayanoor-vitikkate, V., Chen, K., Park, W., Yama, G., Kenny, T. W. IEEE. 2006: 300–306

  View details for Web of Science ID 000264172700048

• Effects of mechanical vibrations and bias voltage noise on phase noise of MEMS resonator based oscillators 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006) Agarwal, M., Park, K. K., Hopcroft, M., Chandorkar, S., Candler, R. N., Kim, B., Melamud, R., Yama, G., Murmann, B., Kenny, T. W. IEEE. 2006: 154–157

  View details for Web of Science ID 000236994500039

• Temperature compensation of a MEMS resonator using quality factor as a thermometer 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006) Hopcroft, M. A., Agarwal, M., Park, K. K., Kim, B., Jha, C. M., Candler, R. N., Yama, G., Murmann, B., Kenny, T. W. IEEE. 2006: 222–225

  View details for Web of Science ID 000236994500056

• Nonlinear characterization of electrostatic MEMS resonators IEEE International Frequency Control Symposium and Exposition Agarwal, M., Park, K. K., Candler, R. N., Kim, B., Hopcroft, M. A., Chandorkar, S. A., Jha, C. M., Melamud, R., Kenny, T. W., Murmann, B. IEEE. 2006: 209–212

  View details for Web of Science ID 000243684700037

• Phase change phenomena in silicon microchannels INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER Zhang, L. A., Wang, E. N., Goodson, K. E., Kenny, T. W. 2005; 48 (8): 1572-1582

  View details for DOI 10.1016/j.ijheatmasstransfer.2004.09.048

  View details for Web of Science ID 000228228400015

• Two-phase microfluidics for semiconductor circuits and fuel cells 3rd International Conference on Microchannels and Minichannels Hidrovo, C. H., Kramer, T. A., Wang, E. N., Vigneron, S., Steinbrenner, J. E., Koo, J., Wang, F., Fogg, D. W., Flynn, R. D., Lee, E. S., Cheng, C., Kenny, T. W., Eaton, J. K., Goodson, K. E. AMER SOC MECHANICAL ENGINEERS. 2005: 49–58

  View details for Web of Science ID 000243025300006

• Study of high speed acoustic separation in micro channels using mu-PIV 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences Li, H., Vitikkate, V., Kenny, T. W. SPRINGER. 2005: 12–14

  View details for Web of Science ID 000228997000004

• Impact of slot location on thermoelastic dissipation in micromechanical resonators 13th International Conference on Solid-State Sensors, Actuators and Microsystems Candler, R. N., Hopcroft, M., Low, C. W., Chandorkar, S., Kim, B., Varghese, M., Duwel, A., Kenny, T. W. IEEE. 2005: 597–600

  View details for Web of Science ID 000232189100145

• Frequency stability of wafer-scale encapsulated MEMS resonators 13th International Conference on Solid-State Sensors, Actuators and Microsystems Kim, B., Candler, R. N., Hopcroft, M., Agarwal, M., Park, W. T., Kenny, T. W. IEEE. 2005: 1965–1968

  View details for Web of Science ID 000232189100487

• Fully encapsulated sub-millimeter accelerometers 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Park, W. T., Candler, R. N., Ayanoor-Vitikkate, V., Lutz, M., Partridge, A., Yama, G., Kenny, T. W. IEEE. 2005: 347–350

  View details for Web of Science ID 000228430000086

• Effects of stress on the temperature coefficient of frequency in double clamped resonators 13th International Conference on Solid-State Sensors, Actuators and Microsystems Melamud, R., Hopcroft, M., Jha, C., Kim, B., Chandorkar, S., Candler, R., Kenny, T. W. IEEE. 2005: 392–395

  View details for Web of Science ID 000232189100095

• Hydrogen diffusion and pressure control of encapsulated MEMS resonators 13th International Conference on Solid-State Sensors, Actuators and Microsystems Candler, R. N., Park, W. T., Hopcroft, M., Kim, B., Kenny, T. W. IEEE. 2005: 920–923

  View details for Web of Science ID 000232189100225

• Non-linearity cancellation in MEMS resonators for improved power-handling IEEE International Electron Devices Meeting Agarwal, M., Park, K., Candler, R., Hopcroft, M., Jha, C., Melamud, R., Kim, B., Murmann, B., Kenny, T. W. IEEE. 2005: 295–298

  View details for Web of Science ID 000236225100066

• Sub-mm encapsulated accelerometers: A fully implantable sensor for cochlear implants 13th International Conference on Solid-State Sensors, Actuators and Microsystems Park, W. T., O'Connor, K. N., Mallon, J. R., Maetani, T., Candler, R. N., Ayanoor-Vitikkate, V., Roberson, J. B., Puria, S., Kenny, T. W. IEEE. 2005: 109–112

  View details for Web of Science ID 000232189100028

• Micromachined jets for liquid impingement cooling of VLSI chips (vol 13, pg 833, 2004) JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Wang, E. N., Zhang, L., Jiang, L. N., Koo, J. M., Maveety, J. G., Sanchez, E. A., Goodson, K. E., Kenny, T. W. 2004; 13 (6): 1072-1072

  View details for DOI 10.1109/JMEMS.2004.840851

  View details for Web of Science ID 000225515100022

• Micromachined jets for liquid impingement cooling of VLSI chips JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Wang, E. N., Zhang, L., Jiang, L. N., Koo, J. M., Maveety, J. G., Sanchez, E. A., Goodson, K. E., Kenny, T. W. 2004; 13 (5): 833-842

  View details for DOI 10.1109/JMEMS.2004.835768

  View details for Web of Science ID 000224413100014

• Comparison of thermal and piezoresistive sensing approaches for atomic force microscopy topography measurements APPLIED PHYSICS LETTERS King, W. P., Kenny, T. W., Goodson, K. E. 2004; 85 (11): 2086-2088

  View details for DOI 10.1063/1.1787160

  View details for Web of Science ID 000223923300073

• Fatigue crack growth in micro-machined single-crystal silicon JOURNAL OF MATERIALS RESEARCH Renuart, E. D., Fitzgerald, A. M., Kenny, T. W., Dauskardt, R. H. 2004; 19 (9): 2635-2640

  View details for DOI 10.1557/JMR.2004.0343

  View details for Web of Science ID 000223689000017

• Nucleation and growth of vapor bubbles in a heated silicon microchannel JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME Wang, E. N., Devasenathipathy, S., Santiago, J. G., Goodson, K. E., Kenny, T. W. 2004; 126 (4): 497-497

  View details for Web of Science ID 000223989100004

• Measurement system for low force and small displacement contacts JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Pruitt, B. L., Park, W. T., Kenny, T. W. 2004; 13 (2): 220-229

  View details for Web of Science ID 000220759300008

• Development and characterization of a TES optical imaging array for astrophysics applications 10th International Workshop on Low Temperature Detectors Burney, J., Bay, T. J., Brink, P. L., Cabrera, B., Castle, J. P., Romani, R. W., Tomada, A., Nam, S. W., Miller, A. J., Martinis, J., Wang, E., Kenny, T., Young, B. A. ELSEVIER SCIENCE BV. 2004: 533–36

  View details for DOI 10.1016/j.nima.2003.11.307

  View details for Web of Science ID 000220606900143

• High speed particles separation using ultrasound for microTAS and lab-on-a-chip application. Conference proceedings : ... Annual International Conference of the IEEE Engineering in Medicine and Biology Society. IEEE Engineering in Medicine and Biology Society. Conference Li, H., Kenny, T. 2004; 4: 2631-2634

  Abstract

  Engineers have long envisioned that a handheld portable blood diagnosis device would be able to give an accurate measurement of chemical content based on a very small sample in the shortest time possible. One of the immediate applications of such device is the point of care (POC) diagnosis system, whereby a single drop of human blood would determine his health status. However, a major technical challenge lies in the ability to separate different particles, which in the case of human blood, is to separate red and white blood cells and plasma in a quick, cheap, reliable device with low power consumption. In this paper, we present some preliminary results from our tests of ultrasound standing waves as a potential separation mechanism for blood cells. Also, we report on the study of the behavior of suspended particles of the size equivalent to a human cell under the influence of ultrasonic acoustic field, using micro particle image velocimetry (PIV) measurement technique. This provides the fundamental understanding and foundation of designing an integrated microchannel structure that can provide ultrasonic cell separation in the microscale regime. The study has shown promising results of successfully separating two different particles based on their sizes difference.

  View details for PubMedID 17270815

• High speed particles separation using ultrasound for micro-TAS and lab-on-a-chip application 26th Annual International Conference of the IEEE-Engineering-in-Medicine-and-Biology-Society Li, H., Kenny, T. IEEE. 2004: 2631–2634

  View details for Web of Science ID 000225461800681

• Fundamental noise in MEMS force sensors Conference on Noise and Information in Nanoelectronics, Sensors and Standards II Kenny, T. W., Liang, Y. C., Pruitt, B. L., Harley, J. A. SPIE-INT SOC OPTICAL ENGINEERING. 2004: 143–151

  View details for DOI 10.1117/12.549814

  View details for Web of Science ID 000223225600017

• Measurements of cooling by room-temperature thermionic emission across a nanometer gap JOURNAL OF APPLIED PHYSICS Hishinuma, Y., Geballe, T. H., Moyzhes, B. Y., Kenny, T. W. 2003; 94 (7): 4690-4696

  View details for DOI 10.1063/1.1606852

  View details for Web of Science ID 000185420900071

• Stress wave interference effects during fracture of silicon micromachined specimens EXPERIMENTAL MECHANICS Fitzgerald, A. M., Kenny, T. W., Dauskardt, R. H. 2003; 43 (3): 317-322

  View details for Web of Science ID 000185166800011

• Single wafer encapsulation of MEMS devices IEEE TRANSACTIONS ON ADVANCED PACKAGING Candler, R. N., Park, W. T., Li, H. M., Yama, G., Partridge, A., Lutz, M., Kenny, T. W. 2003; 26 (3): 227-232

  View details for DOI 10.1109/TADVP.2003.818062

  View details for Web of Science ID 000185862400003

• Design of piezoresistive MEMS-based accelerometer for integration with wireless sensing unit for structural monitoring JOURNAL OF AEROSPACE ENGINEERING Lynch, J. P., Partridge, A., Law, K. H., Kenny, T. W., Kiremidjian, A. S., Carryer, E. 2003; 16 (3): 108-114

  View details for DOI 10.1016/(ASCE)0893-1321(2003)16:3(108)

  View details for Web of Science ID 000183657900002

• Design of large deflection electrostatic actuators JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Grade, J. D., Jerman, H., Kenny, T. W. 2003; 12 (3): 335-343

  View details for DOI 10.1109/JMEMS.2003.811750

  View details for Web of Science ID 000183356300013

• Piezoresistive cantilevers and measurement system for characterizing low force electrical contacts SENSORS AND ACTUATORS A-PHYSICAL Pruitt, B. L., Kenny, T. W. 2003; 104 (1): 68-77

  View details for DOI 10.1016/S0924-4247(02)00485-5

  View details for Web of Science ID 000181236100011

• Embedment of structural monitoring algorithms in a wireless sensing unit STRUCTURAL ENGINEERING AND MECHANICS Lynch, J. P., Sundararajan, A., Law, K. H., Kiremidjian, A. S., Kenny, T., Carryer, E. 2003; 15 (3): 285-297

  View details for Web of Science ID 000181569500002

• On-chip coupling of isoelectric focusing and free solution electrophoresis for multidimensional separations ANALYTICAL CHEMISTRY Herr, A. E., Molho, J. I., Drouvalakis, K. A., Mikkelsen, J. C., Utz, P. J., Santiago, J. G., Kenny, T. W. 2003; 75 (5): 1180-1187

  Abstract

  We have developed an acrylic microfluidic device that sequentially couples liquid-phase isoelectric focusing (IEF) and free solution capillary electrophoresis (CE). Rapid separation (<1 min) and preconcentration (73x) of species were achieved in the initial IEF dimension. Using full-field fluorescence imaging, we observed nondispersive mobilization velocities on the order of 20 microm/s during characterization of the IEF step. This transport behavior allowed controlled electrokinetic mobilization of focused sample bands to a channel junction, where voltage switching was used to repeatedly inject effluent from the IEF dimension into an ampholyte-based CE separation. This second dimension was capable of analyzing all fluid volumes of interest from the IEF dimension, as IEF was 'parked' during each CE analysis and refocused prior to additional CE analyses. Investigation of each dimension of the integrated system showed time-dependent species displacement and band-broadening behavior consistent with IEF and CE, respectively. The peak capacity of the 2D system was approximately 1300. A comprehensive 2D analysis of a fluid volume spanning 15% of the total IEF channel length was completed in less than 5 min.

  View details for DOI 10.1021/ac026239a

  View details for Web of Science ID 000181259300027

  View details for PubMedID 12641239

• Hard X-ray polarimetry with the Ramaty High Energy Solar Spectroscopic Imager (RHESSI) Conference on Polarimetry in Astronomy McConnell, M. L., Smith, D. M., Emslie, A. G., Lin, R. P., Ryan, J. M. SPIE-INT SOC OPTICAL ENGINEERING. 2003: 8–19

  View details for Web of Science ID 000181847200002

• Small insect measurements using a custom MEMS force sensor 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) Bartsch, M. S., Federle, W., Full, R. J., Kenny, T. W. IEEE. 2003: 1039–1042

  View details for Web of Science ID 000184567300261

• Investigation of energy loss mechanisms in micromechanical resonators 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) Candler, R. N., Li, H. M., Lutz, M., Park, W. T., Partridge, A., Yama, G., Kenny, T. W. IEEE. 2003: 332–335

  View details for Web of Science ID 000184567300083

• Mass-loaded cantilevers with suppressed higher-order modes for magnetic resonance force microscopy 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) Chui, B. W., Hishinuma, Y., Budakian, R., Mamin, H. J., Kenny, T. W., Rugar, D. IEEE. 2003: 1120–1123

  View details for Web of Science ID 000184567300281

• Two-tiered wireless sensor network architecture for structural health monitoring Smart Structures and Materials 2003 Conference Kottapalli, V. A., Kiremidjian, A. S., Lynch, J. P., Carryer, E., Kenny, T. W., Law, K. H., Lei, Y. SPIE-INT SOC OPTICAL ENGINEERING. 2003: 8–19

  View details for Web of Science ID 000185394400003

• Experimental study on two-phase heat transfer in microchannel heat sinks with hotspots 19th Annual IEEE Semiconductor Thermal Measurement and Management Symposium Cho, E. S., Koo, J. M., Jiang, L., Prasher, R. S., Kim, M. S., Santiago, J. G., Kenny, T. W., Goodson, K. E. IEEE. 2003: 242–246

  View details for Web of Science ID 000182024200038

• Statistical damage detection using time series analysis on a structural health monitoring benchmark problem 9th International Conference on Applications of Statistics and Probability in Civil Engineering Lei, Y., Kiremidjian, A. S., Nair, K. K., Lynch, J. P., Law, K. H., Kenny, T. W., Carryer, E., Kottapalli, A. MILLPRESS SCIENCE PUBLISHERS. 2003: 581–587

  View details for Web of Science ID 000189453300078

• UV-IR science prospects with TES imaging arrays Workshop on Hubbles Science Legacy - Future Optical/Ultraviolet Astronomy from Space Romani, R. W., Burney, J., Brink, P., Cabrera, B., Castle, P., Kenny, T., Wang, E., Young, B., Miller, A. J., Nam, S. W. ASTRONOMICAL SOC PACIFIC. 2003: 399–402

  View details for Web of Science ID 000183133000061

• Wafer-scale film encapsulation of micromachined accelerometers 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) Park, W. T., Candler, R. N., Kronmueller, S., Lutz, M., Partridge, A., Yama, G., Kenny, T. W. IEEE. 2003: 1903–1906

  View details for Web of Science ID 000184567300478

• Wafer scale encapsulation of MEMS devices International Electronic Packaging Technical Conference Park, V. T., Candler, R. N., Li, H. J., Cho, J., Li, H., Kenny, T. W., Partridge, A., Yama, G., Lutz, M. AMER SOC MECHANICAL ENGINEERS. 2003: 209–212

  View details for Web of Science ID 000222624900033

• Closed-loop cooling technologies for microprocessors IEEE International Electron Devices Meeting Upadhya, G., Zhou, P., Goodson, K., Munch, M., Kenny, T. IEEE. 2003: 775–778

  View details for Web of Science ID 000189158800177

• Development of superconducting transition edge sensors for time and energy resolved single photon counters with application to imaging astronomy Conference on Materials for Infrared Detectors III Bay, T. J., Burney, J. A., Brink, P. L., Cabrera, B., Castle, J. P., Romani, R. W., Tomada, A., Young, B. A., Nam, S. W., Miller, A. J., Martinis, J. M., Kenny, T., Wang, E. SPIE-INT SOC OPTICAL ENGINEERING. 2003: 192–200

  View details for Web of Science ID 000188460600018

• Silicon electroosmotic micropumps for integrated circuit thermal management 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) Laser, D. J., Myers, A. M., Yao, S. H., BELL, K. F., Goodson, K. E., Santiago, J. G., Kenny, T. W. IEEE. 2003: 151–154

  View details for Web of Science ID 000184567300038

• Design of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operation JOURNAL OF MICROELECTROMECHANICAL SYSTEMS King, W. P., Kenny, T. W., Goodson, K. E., Cross, G. L., Despont, M., Durig, U. T., Rothuizen, H., Binnig, G., Vettiger, P. 2002; 11 (6): 765-774

  View details for DOI 10.1109/JMEMS.2002.803283

  View details for Web of Science ID 000179740900017

• Process compatible polysilicon-based electrical through-wafer interconnects in silicon substrates JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Chow, E. M., Chandrasekaran, V., Partridge, A., Nishida, T., Sheplak, M., Quate, C. F., Kenny, T. W. 2002; 11 (6): 631-640

  View details for DOI 10.1109/JMEMS.2002.805206

  View details for Web of Science ID 000179740900002

• Vacuum thermionic refrigeration with a semiconductor heterojunction structure APPLIED PHYSICS LETTERS Hishinuma, Y., Moyzhes, B. Y., Geballe, T. H., Kenny, T. W. 2002; 81 (22): 4242-4244

  View details for DOI 10.1063/1.1523653

  View details for Web of Science ID 000179340800048

• Evidence for van der Waals adhesion in gecko setae PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA Autumn, K., Sitti, M., Liang, Y. C., Peattie, A. M., Hansen, W. R., Sponberg, S., Kenny, T. W., Fearing, R., Israelachvili, J. N., Full, R. J. 2002; 99 (19): 12252-12256

  Abstract

  Geckos have evolved one of the most versatile and effective adhesives known. The mechanism of dry adhesion in the millions of setae on the toes of geckos has been the focus of scientific study for over a century. We provide the first direct experimental evidence for dry adhesion of gecko setae by van der Waals forces, and reject the use of mechanisms relying on high surface polarity, including capillary adhesion. The toes of live Tokay geckos were highly hydrophobic, and adhered equally well to strongly hydrophobic and strongly hydrophilic, polarizable surfaces. Adhesion of a single isolated gecko seta was equally effective on the hydrophobic and hydrophilic surfaces of a microelectro-mechanical systems force sensor. A van der Waals mechanism implies that the remarkable adhesive properties of gecko setae are merely a result of the size and shape of the tips, and are not strongly affected by surface chemistry. Theory predicts greater adhesive forces simply from subdividing setae to increase surface density, and suggests a possible design principle underlying the repeated, convergent evolution of dry adhesive microstructures in gecko, anoles, skinks, and insects. Estimates using a standard adhesion model and our measured forces come remarkably close to predicting the tip size of Tokay gecko seta. We verified the dependence on size and not surface type by using physical models of setal tips nanofabricated from two different materials. Both artificial setal tips stuck as predicted and provide a path to manufacturing the first dry, adhesive microstructures.

  View details for DOI 10.1073/pnas.192252799

  View details for Web of Science ID 000178187000048

  View details for PubMedID 12198184

  View details for PubMedCentralID PMC129431

• Closed-loop electroosmotic microchannel cooling system for VLSI circuits 17th Annual IEEE Semiconductor Thermal Measurement and Management Symposium Jiang, L. N., Mikkelsen, J., Koo, J. M., Huber, D., Yao, S. H., Zhang, L., Zhou, P., Maveety, J. G., Prasher, R., Santiago, J. G., Kenny, T. W., Goodson, K. E. IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 2002: 347–55

  View details for DOI 10.1109/TCAPT.2002.800599

  View details for Web of Science ID 000180333200003

• Subcritical crack growth in single-crystal silicon using micromachined specimens JOURNAL OF MATERIALS RESEARCH Fitzgerald, A. M., Iyer, R. S., Dauskardt, R. H., Kenny, T. W. 2002; 17 (3): 683-692

  View details for Web of Science ID 000174300000027

• Measurements and modeling of two-phase flow in microchannels with nearly constant heat flux boundary conditions JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Zhang, L., Koo, J. M., Jiang, L., Asheghi, M., Goodson, K. E., Santiago, J. G., Kenny, T. W. 2002; 11 (1): 12-19

  View details for Web of Science ID 000173751000002

• Characterization of a two-dimensional cantilever array with through-wafer electrical interconnects APPLIED PHYSICS LETTERS Chow, E. M., Yaralioglu, G. G., Quate, C. F., Kenny, T. W. 2002; 80 (4): 664-666

  View details for Web of Science ID 000173508900044

• E-cadherin extra-cellular domain interaction examined by atomic force microscopy Rudnitsky, R. G., Drees, F., NELSON, W. J., Kenny, T. W. CELL PRESS. 2002: 55A–55A

  View details for Web of Science ID 000173252700273

• Transient and sub-atmospheric performance of a closed-loop electroosmotic microchannel cooling system THERMES 2002 International Conference Jiang, L., Mikkelsen, J., Koo, J. M., Zhang, L., Huber, D., Yao, S., Bari, A., Zhou, P., Santiago, J., Kenny, T., Goodson, K. E., Maveety, J., Prasher, R., Benning, S. MILLPRESS SCIENCE PUBLISHERS. 2002: 133–139

  View details for Web of Science ID 000181956000016

• Enhanced nucleate boiling in microchannels 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002) Zhang, L., Wang, E. N., Koo, J. M., Jiang, L., Goodson, K. E., Santiago, J. G., Kenny, T. W. IEEE. 2002: 89–92

  View details for Web of Science ID 000174908700022

• A wireless modular monitoring system for civil structures 20th IMAC Conference on Structural Dynamics Lynch, J. P., Law, K. H., Kiremidjian, A. S., Kenny, T., Carryer, E. SOC EXPERIMENTAL MECHANICS INC. 2002: 1–6

  View details for Web of Science ID 000176646000001

• Validation of a wireless modular monitoring system for structures Smart Structures and Materials 2002 Conference Lynch, J. P., Law, K. H., Kiremidjian, A. S., Carryer, E., Kenny, T. W., Partridge, A., Sundararajan, A. SPIE-INT SOC OPTICAL ENGINEERING. 2002: 124–135

  View details for Web of Science ID 000177732300013

• Electron spin relaxation near a micron-size ferromagnet PHYSICAL REVIEW LETTERS Stipe, B. C., Mamin, H. J., Yannoni, C. S., Stowe, T. D., Kenny, T. W., Rugar, D. 2001; 87 (27)

  Abstract

  Magnetic resonance force microscopy was used to study the behavior of small ensembles of unpaired electron spins in silica near a micrometer-size ferromagnetic tip. Using a cantilever-driven spin manipulation protocol and a magnetic field gradient greater than 10(5) T/m, signals from as few as 100 net spins within a 20 nm thick resonant slice could be studied. A sixfold increase in the spin-lattice relaxation rate was found within 800 nm of the ferromagnet, while no effect due to silica surface proximity was detected. The results are interpreted in terms of Larmor-frequency magnetic field fluctuations emanating from the ferromagnet.

  View details for DOI 10.1103/PhysRevLett.87.277602

  View details for Web of Science ID 000173040800056

  View details for PubMedID 11800915

• A high-stiffness axial resonant probe for atomic force microscopy JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Harley, J. A., Kenny, T. W. 2001; 10 (3): 434-441

  View details for Web of Science ID 000170875900013

• A high-precision, wide-bandwidth micromachined tunneling accelerometer JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Liu, C. H., Kenny, T. W. 2001; 10 (3): 425-433

  View details for Web of Science ID 000170875900012

• Noncontact friction and force fluctuations between closely spaced bodies PHYSICAL REVIEW LETTERS Stipe, B. C., Mamin, H. J., Stowe, T. D., Kenny, T. W., Rugar, D. 2001; 87 (9)

  Abstract

  Noncontact friction between a Au(111) surface and an ultrasensitive gold-coated cantilever was measured as a function of tip-sample spacing, temperature, and bias voltage using observations of cantilever damping and Brownian motion. The importance of the inhomogeneous contact potential is discussed and comparison is made to measurements over dielectric surfaces. Using the fluctuation-dissipation theorem, the force fluctuations are interpreted in terms of near-surface fluctuating electric fields interacting with static surface charge.

  View details for DOI 10.1103/PhysRevLett.87.096801

  View details for Web of Science ID 000170698000030

  View details for PubMedID 11531586

• Nanometer-Scale Force Sensing with MEMS Devices IEEE SENSORS JOURNAL Kenny, T. 2001; 1 (2): 148-157

  View details for DOI 10.1109/JSEN.2001.936932

  View details for Web of Science ID 000208325600006

• Refrigeration by combined tunneling and thermionic emission in vacuum: Use of nanometer scale design APPLIED PHYSICS LETTERS Hishinuma, Y., Geballe, T. H., Moyzhes, B. Y., Kenny, T. W. 2001; 78 (17): 2572-2574

  View details for Web of Science ID 000168304600053

• Magnetic dissipation and fluctuations in individual nanomagnets measured by ultrasensitive cantilever magnetometry PHYSICAL REVIEW LETTERS Stipe, B. C., Mamin, H. J., Stowe, T. D., Kenny, T. W., Rugar, D. 2001; 86 (13): 2874-2877

  Abstract

  Cantilever magnetometry with moment resolution better than 10(4)micro(B) was used to study individual nanomagnets. By using the fluctuation-dissipation theorem to interpret measurements of field-induced cantilever damping, the low frequency spectral density of magnetic fluctuations could be determined with resolution better than 1micro(B) Hz-1/2. Cobalt nanowires exhibited significant magnetic dissipation and the associated magnetic fluctuations were found to have 1/f frequency dependence. In individual submicron rare-earth alloy magnets, the dissipation/fluctuation was very small and not distinguishable from that of a bare silicon cantilever.

  View details for Web of Science ID 000167693000044

  View details for PubMedID 11290061

• Optimization of turn geometries for microchip electrophoresis ANALYTICAL CHEMISTRY Molho, J. I., Herr, A. E., Mosier, B. P., Santiago, J. G., Kenny, T. W., Brennen, R. A., Gordon, G. B., Mohammadi, B. 2001; 73 (6): 1350-1360

  View details for Web of Science ID 000167546400042

• Adventures in attonewton force detection APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING Rugar, D., Stipe, B. C., Mamin, H. J., Yannoni, C. S., Stowe, T. D., Yasumura, K. Y., Kenny, T. W. 2001; 72: S3-S10

  View details for DOI 10.1007/s003390100729

  View details for Web of Science ID 000205245800002

• Atomic force microscope cantilevers for combined thermomechanical data writing and reading APPLIED PHYSICS LETTERS King, W. P., Kenny, T. W., Goodson, K. E., Cross, G., Despont, M., Durig, U., Rothuizen, H., Binnig, G. K., Vettiger, P. 2001; 78 (9): 1300-1302

  View details for Web of Science ID 000167151000044

• A micromachined silicon low-voltage parallel-plate electrokinetic pump 11th International Conference on Solid-State Sensors and Actuators Laser, D., Yao, S. H., Chen, C. H., Mikkelsen, J., Goodson, K., Santiago, J., Kenny, T. SPRINGER-VERLAG BERLIN. 2001: 920–923

  View details for Web of Science ID 000172547800211

• Low force electrical contact measurements using piezoresistive MEMS cantilevers to characterize thin-film metallization 11th International Conference on Solid-State Sensors and Actuators Pruitt, B., Choi, D. H., Florando, J., Martens, R., Wenzel, S., Reynolds, C., Nix, W., Kenny, T. SPRINGER-VERLAG BERLIN. 2001: 1032–1035

  View details for Web of Science ID 000172547800237

• New thin film epitaxial polysilicon encapsulation for piezoresistive accelerometers 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) Partridge, A., Rice, A. E., Kenny, T. W., Lutz, M. IEEE. 2001: 54–59

  View details for Web of Science ID 000166833600014

• Exploring insect biomechanics with micromachined force sensors 11th International Conference on Solid-State Sensors and Actuators Bartsch, M., Federle, W., Full, R., Kenny, T. SPRINGER-VERLAG BERLIN. 2001: 1662–1665

  View details for Web of Science ID 000172547800386

• Two-phase microchannel heat sinks for an electrokinetic VLSI chip cooling system 17th Annual IEEE Semiconductor Thermal Measurement and Management Symposium Jiang, L. N., Koo, J. M., Zeng, S. L., Mikkelsen, J. C., Zhang, L., Zhou, P., Santiago, J. G., Kenny, T. W., Goodson, K. E., Maveety, J. G., Tran, Q. A. IEEE. 2001: 153–157

  View details for Web of Science ID 000168411800021

• Modeling of two-phase microchannel heat sinks for VLSI chips 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) Koo, J. M., Jiang, L. N., Zhang, L., Zhou, P., Banerjee, S. S., Kenny, T. W., Santiago, J. G., Goodson, K. E. IEEE. 2001: 422–426

  View details for Web of Science ID 000166833600102

• Performance characterization of ultra-thin n-type piezoresistive cantilevers 11th International Conference on Solid-State Sensors and Actuators Liang, Y. A., Ueng, S. W., Kenny, T. W. SPRINGER-VERLAG BERLIN. 2001: 998–1001

  View details for Web of Science ID 000172547800229

• A micromachined magnetic-field sensor based on an electron tunneling displacement transducer SENSORS AND ACTUATORS A-PHYSICAL DiLella, D., Whitman, L. J., Colton, R. J., Kenny, T. W., Kaiser, W. J., Vote, E. C., Podosek, J. A., Miller, L. M. 2000; 86 (1-2): 8-20

  View details for Web of Science ID 000090127700002

• Adhesive force of a single gecko foot-hair NATURE Autumn, K., Liang, Y. A., Hsieh, S. T., Zesch, W., Chan, W. P., Kenny, T. W., Fearing, R., Full, R. J. 2000; 405 (6787): 681-685

  Abstract

  Geckos are exceptional in their ability to climb rapidly up smooth vertical surfaces. Microscopy has shown that a gecko's foot has nearly five hundred thousand keratinous hairs or setae. Each 30-130 microm long seta is only one-tenth the diameter of a human hair and contains hundreds of projections terminating in 0.2-0.5 microm spatula-shaped structures. After nearly a century of anatomical description, here we report the first direct measurements of single setal force by using a two-dimensional micro-electromechanical systems force sensor and a wire as a force gauge. Measurements revealed that a seta is ten times more effective at adhesion than predicted from maximal estimates on whole animals. Adhesive force values support the hypothesis that individual seta operate by van der Waals forces. The gecko's peculiar behaviour of toe uncurling and peeling led us to discover two aspects of setal function which increase their effectiveness. A unique macroscopic orientation and preloading of the seta increased attachment force 600-fold above that of frictional measurements of the material. Suitably orientated setae reduced the forces necessary to peel the toe by simply detaching above a critical angle with the substratum.

  View details for Web of Science ID 000087465800046

  View details for PubMedID 10864324

• 1/F noise considerations for the design and process optimization of piezoresistive cantilevers JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Harley, J. A., Kenny, T. W. 2000; 9 (2): 226-235

  View details for Web of Science ID 000087842600008

• Integration of through-wafer interconnects with a two-dimensional cantilever array 10th International Conference on Solid-State Sensors and Actuators Chow, E. M., Soh, H. T., Lee, H. C., Adams, J. D., Minne, S. C., Yaralioglu, G., Atalar, A., Quate, C. F., Kenny, T. W. ELSEVIER SCIENCE SA. 2000: 118–23

  View details for Web of Science ID 000087144800019

• Fracture toughness and crack growth phenomena of plasma-etched single crystal silicon 10th International Conference on Solid-State Sensors and Actuators Fitzgerald, A. M., Dauskardt, R. H., Kenny, T. W. ELSEVIER SCIENCE SA. 2000: 194–99

  View details for Web of Science ID 000087144800031

• Rapid biochemical detection and differentiation with magnetic force microscope cantilever arrays 10th International Conference on Solid-State Sensors and Actuators Rudnitsky, R. G., Chow, E. M., Kenny, T. W. ELSEVIER SCIENCE SA. 2000: 256–62

  View details for Web of Science ID 000087144800041

• Packaging a piezoresistive pressure sensor to measure low absolute pressures over a wide sub-zero temperature range 10th International Conference on Solid-State Sensors and Actuators Reynolds, J. K., Catling, D., Blue, R. C., Maluf, N. I., Kenny, T. ELSEVIER SCIENCE SA. 2000: 142–49

  View details for Web of Science ID 000087144800023

• Electroosmotic capillary flow with nonuniform zeta potential Analytical chemistry Herr, A. E., Molho, J. I., Santiago, J. G., Mungal, M. G., Kenny, T. W., Garguilo, M. G. 2000; 72 (5): 1053-7

  Abstract

  The present work is an analytical and experimental study of electroosmotic flow (EOF) in cylindrical capillaries with nonuniform wall surface charge (zeta-potential) distributions. In particular, this study investigates perturbations of electroosmotic flow in open capillaries that are due to induced pressure gradients resulting from axial variations in the wall zeta-potential. The experimental inquiry focuses on electroosmotic flow under a uniform applied field in capillaries with an EOF-suppressing polymer adsorbed onto various fractions of the total capillary length. This fractional EOF suppression was achieved by coupling capillaries with substantially different zeta-potentials. The resulting flow fields were imaged with a nonintrusive, caged-fluorescence imaging technique. Simple analytical models for the velocity field and rate of sample dispersion in capillaries with axial zeta-potential variations are presented. The resulting induced pressure gradients and the associated band-broadening effects are of particular importance to the performance of chemical and biochemical analysis systems such as capillary electrokinetic chromatography and capillary zone electrophoresis.

  View details for PubMedID 10739211

• Quality factors in micron- and submicron-thick cantilevers JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Yasumura, K. Y., Stowe, T. D., Chow, E. M., Pfafman, T., Kenny, T. W., Stipe, B. C., Rugar, D. 2000; 9 (1): 117-125

  View details for Web of Science ID 000085857600017

• Electroosmotic capillary flow with nonuniform zeta potential ANALYTICAL CHEMISTRY Herr, A. E., Molho, J. I., Santiago, J. G., Mungal, M. G., Kenny, T. W., Garguilo, M. G. 2000; 72 (5): 1053-1057

  Abstract

  The present work is an analytical and experimental study of electroosmotic flow (EOF) in cylindrical capillaries with nonuniform wall surface charge (zeta-potential) distributions. In particular, this study investigates perturbations of electroosmotic flow in open capillaries that are due to induced pressure gradients resulting from axial variations in the wall zeta-potential. The experimental inquiry focuses on electroosmotic flow under a uniform applied field in capillaries with an EOF-suppressing polymer adsorbed onto various fractions of the total capillary length. This fractional EOF suppression was achieved by coupling capillaries with substantially different zeta-potentials. The resulting flow fields were imaged with a nonintrusive, caged-fluorescence imaging technique. Simple analytical models for the velocity field and rate of sample dispersion in capillaries with axial zeta-potential variations are presented. The resulting induced pressure gradients and the associated band-broadening effects are of particular importance to the performance of chemical and biochemical analysis systems such as capillary electrokinetic chromatography and capillary zone electrophoresis.

  View details for Web of Science ID 000085605100043

• Designing corner compensation for electrophoresis in compact geometries 4th International Symposium on Micro Total Analysis Systems ((mu)TAS 2000) Molho, J. I., Herr, A. E., Mosier, B. P., Santiago, J. G., Kenny, T. W., Brennen, R. A., Gordon, G. B. SPRINGER. 2000: 287–290

  View details for Web of Science ID 000167335400065

• High-resolution measurement of crack growth in micro-machined single crystal silicon Symposium MM on Materials Science of Microelectromechanical Systems (MEMS) Devices II held at the 1999 MRS Fall Meeting Fitzgerald, A. M., Dauskardt, R. H., Kenny, T. W. MATERIALS RESEARCH SOCIETY. 2000: 43–48

  View details for Web of Science ID 000165506600007

• Miniaturized capillary isoelectric focusing (cIEF): Towards a portable high-speed separation method 4th International Symposium on Micro Total Analysis Systems ((mu)TAS 2000) Herr, A. E., Molho, J. I., Santiago, J. G., Kenny, T. W., Borkholder, D. A., Kintz, G. J., Belgrader, P., Northrup, M. A. SPRINGER. 2000: 367–370

  View details for Web of Science ID 000167335400085

• Experimental investigation of flow transition in microchannels using micron-resolution particle image velocimetry 7th Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems Zeighami, R., LASER, D., Zhou, P., Asheghi, M., Devasenathipathy, S., Kenny, T., Santiago, J., Goodson, K. IEEE. 2000: 148–153

  View details for Web of Science ID 000089141400023

• Silicon dopant imaging by dissipation force microscopy APPLIED PHYSICS LETTERS Stowe, T. D., Kenny, T. W., Thomson, D. J., Rugar, D. 1999; 75 (18): 2785-2787

  View details for Web of Science ID 000083295500027

• An integrated controller for tunnel sensors IEEE JOURNAL OF SOLID-STATE CIRCUITS Partridge, A., Reynolds, J. K., Grade, J. D., Kane, B. J., Maluf, N. I., Kovacs, G. T., Kenny, T. W. 1999; 34 (8): 1099-1107

  View details for Web of Science ID 000081755500009

• High-sensitivity piezoresistive cantilevers under 1000 angstrom thick APPLIED PHYSICS LETTERS Harley, J. A., Kenny, T. W. 1999; 75 (2): 289-291

  View details for Web of Science ID 000081265200047

• Intrinsic-carrier thermal runaway in silicon microcantilevers MICROSCALE THERMOPHYSICAL ENGINEERING Chui, B. W., Asheghi, M., Ju, Y. S., Goodson, K. E., Kenny, T. W., Mamin, H. J. 1999; 3 (3): 217-228

  View details for Web of Science ID 000082536200006

• Ultrahigh-density atomic force microscopy data storage with erase capability APPLIED PHYSICS LETTERS Binnig, G., Despont, M., Drechsler, U., Haberle, W., Lutwyche, M., Vettiger, P., Mamin, H. J., Chui, B. W., Kenny, T. W. 1999; 74 (9): 1329-1331

  View details for Web of Science ID 000079010000047

• Technique for measurement of the noise of a sensor in the presence of large background signals REVIEW OF SCIENTIFIC INSTRUMENTS Barzilai, A., VanZandt, T., Kenny, T. 1998; 69 (7): 2767-2772

  View details for Web of Science ID 000075279200030

• Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolution JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Liu, C. H., Barzilai, A. M., Reynolds, J. K., Partridge, A., Kenny, T. W., Grade, J. D., Rockstad, H. K. 1998; 7 (2): 235-244

  View details for Web of Science ID 000073957900012

• Independent detection of vertical and lateral forces with a sidewall-implanted dual-axis piezoresistive cantilever APPLIED PHYSICS LETTERS Chui, B. W., Kenny, T. W., Mamin, H. J., Terris, B. D., Rugar, D. 1998; 72 (11): 1388-1390

  View details for Web of Science ID 000072566000043

• Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Chui, B. W., Stowe, T. D., Ju, Y. S., Goodson, K. E., Kenny, T. W., Mamin, H. J., Terris, B. D., Ried, R. P., Rugar, D. 1998; 7 (1): 69-78

  View details for Web of Science ID 000073005900009

• Sidewall-implanted dual-axis piezoresistive cantilever for AFM data storage readback and tracking 11th Annual International Workshop on Micro Electro Mechanical Systems Chui, B. W., Mamin, H. J., Terris, B. D., Rugar, D., Kenny, T. W. IEEE. 1998: 12–17

  View details for Web of Science ID 000073380900003

• Numerical framework for the modeling of electrokinetic flows Microfluidic Devices and Systems Deshpande, M., GHADDAR, C., Gilbert, J. R., St John, P. M., WOUDENBERG, T., Connell, C., Molho, J., Herr, A., Mungal, G., Kenny, T. SPIE-INT SOC OPTICAL ENGINEERING. 1998: 217–227

  View details for Web of Science ID 000076705100023

• Attonewton force detection using ultrathin silicon cantilevers APPLIED PHYSICS LETTERS Stowe, T. D., Yasumura, K., Kenny, T. W., Botkin, D., Wago, K., Rugar, D. 1997; 71 (2): 288-290

  View details for Web of Science ID A1997XK16000047

• Fabrication of collimating grids for an x-ray solar telescope using LIGA methods MICROSYSTEM TECHNOLOGIES Brennen, R. A., Hecht, M. H., Wiberg, D. V., MANION, S. J., Bonivert, W. D., Hruby, J. M., Scholz, M. L., Stowe, T. D., Kenny, T. W., Jackson, K. H., Malek, C. K. 1997; 3 (3): 91-96

  View details for Web of Science ID A1997YD29700001

• Torsional force probes optimized for higher order mode suppression 9th International Conference on Solid-State Sensors and Actuators STOWE, T., Yasumura, K., Pfafman, T., Kenny, T., Botkin, D., Rugar, D. I E E E. 1997: 141–144

  View details for Web of Science ID A1997BJ35B00032

• Development of a modal analysis accelerometer based on a tunneling displacement transducer 9th International Conference on Solid-State Sensors and Actuators Scheeper, P. R., Reynolds, J. K., Kenny, T. W. IEEE. 1997: 867–870

  View details for Web of Science ID A1997BJ35B00211

• Characterization of a high-sensitivity micromachined tunneling accelerometer 9th International Conference on Solid-State Sensors and Actuators Liu, C. H., Grade, J. D., Barzilai, A. M., Reynolds, J. K., Partridge, A., Rockstad, H. K., Kenny, T. W. IEEE. 1997: 471–472

  View details for Web of Science ID A1997BJ35B00118

• Low frequency drift in tunnel sensors 9th International Conference on Solid-State Sensors and Actuators Grade, J., Barzilai, A., Reynolds, J. K., Liu, C. H., Partridge, A., Miller, L. M., Podosek, J. A., Kenny, T. IEEE. 1997: 871–874

  View details for Web of Science ID A1997BJ35B00212

• Wafer-scale processing, assembly, and testing of tunneling infrared detectors. 9th International Conference on Solid-State Sensors and Actuators Grade, J., Barzilai, A., Reynolds, J. K., Liu, C. H., Partridge, A., Jerman, H., Kenny, T. IEEE. 1997: 1241–1244

  View details for Web of Science ID A1997BJ35B00305

• Micromachined heaters with 1-mu s thermal time constants for AFM thermomechanical data storage 9th International Conference on Solid-State Sensors and Actuators Chui, B. W., Mamin, H. J., Terris, B. D., Rugar, D., Goodson, K. E., Kenny, T. W. I E E E. 1997: 1085–1088

  View details for Web of Science ID A1997BJ35B00265

• Low-stiffness silicon cantilevers for thermal writing and piezoresistive readback with the atomic force microscope APPLIED PHYSICS LETTERS Chui, B. W., Stowe, T. D., Kenny, T. W., Mamin, H. J., Terris, B. D., Rugar, D. 1996; 69 (18): 2767-2769

  View details for Web of Science ID A1996VP26500049

• A miniature, high-sensitivity, electron tunneling accelerometer 8th International Conference on Solid-State Sensors and Actuators (Eurosensors IX) Rockstad, H. K., Tang, T. K., Reynolds, J. K., Kenny, T. W., Kaiser, W. J., Gabrielson, T. B. ELSEVIER SCIENCE SA. 1996: 227–31

  View details for Web of Science ID A1996UV64900002

• Micromachined infrared sensors using tunneling displacement transducers REVIEW OF SCIENTIFIC INSTRUMENTS Kenny, T. W., Reynolds, J. K., Podosek, J. A., Vote, E. C., Miller, L. M., Rockstad, H. K., Kaiser, W. J. 1996; 67 (1): 112-128

  View details for Web of Science ID A1996TQ62300016

• A microfabricated electron-tunneling accelerometer as a directional underwater acoustic sensor Workshop on Acoustic Particle Velocity Sensors - Design, Performance, and Applications Rockstad, H. K., Kenny, T. W., Kelly, P. J., Gabrielson, T. B. AIP PRESS. 1996: 57–68

  View details for Web of Science ID A1996BF36A00004

• A mu-magnetometer based on electron tunneling IEEE 9th Annual International Workshop on Micro Electro Mechanical Systems - An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems Miller, L. M., Podosek, J. A., Kruglick, E., Kenny, T. W., KOVACICH, J. A., Kaiser, W. J. I E E E. 1996: 467–472

  View details for Web of Science ID A1996BF27K00081

• SENSORS BASED ON TUNNELING DISPLACEMENT TRANSDUCERS - DESIGN, APPLICATIONS, AND LIMITATIONS Kenny, T. AMER CHEMICAL SOC. 1995: 50-COLL

  View details for Web of Science ID A1995QP23201561

• Fabricating sub-collimating grids for an X-ray solar imaging spectrometer using LIGA techniques 1st Annual SPIE Conference on Microlithography and Metrology in Micromachining Brennen, R. A., Hecht, M. H., WIEBERG, D. V., MANION, S. J., Bonivert, W. D., Hruby, J. M., Scholz, M. L., Stowe, T. D., Kenny, T. W., Jackson, K. H., Malek, C. K. SPIE - INT SOC OPTICAL ENGINEERING. 1995: 214–225

  View details for Web of Science ID A1995BE24J00024

• MICROINSTRUMENTS AND MICROSENSORS FOR SPACE SCIENCE 43rd Astronautical Congress VARSI, G., Chrisp, M., Jones, R., VanZandt, T., Kenny, T., Kaiser, W., BANERDT, W., Hui, E., Crisp, D. PERGAMON-ELSEVIER SCIENCE LTD. 1994: 705–13

  View details for Web of Science ID A1994QE69400009

• WIDE-BANDWIDTH ELECTROMECHANICAL ACTUATORS FOR TUNNELING DISPLACEMENT TRANSDUCERS JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Kenny, T. W., Kaiser, W. J., Rockstad, H. K., Reynolds, J. K., Podosek, J. A., Vote, E. C. 1994; 3 (3): 97-104

  View details for Web of Science ID A1994RM17600002

• A MINIATURE HIGH-SENSITIVITY BROAD-BAND ACCELEROMETER BASED ON ELECTRON-TUNNELING TRANSDUCERS 7th International Conference on Solid-State Sensors and Actuators (Transducers 93) Rockstad, H. K., Kenny, T. W., Reynolds, J. K., Kaiser, W. J., Gabrielson, T. B. ELSEVIER SCIENCE SA LAUSANNE. 1994: 107–14

  View details for Web of Science ID A1994NT26700018

• CAPACITIVE EDGE SENSOR DESIGN FOR SELENE SEGMENTED PRIMARY MIRROR Conference on Laser Power Beaming Miller, L. M., Kaiser, W. J., Kenny, T., VanZandt, T. SPIE - INT SOC OPTICAL ENGINEERING. 1994: 125–138

  View details for Web of Science ID A1994BA43C00014

• MICROMACHINED TUNNELING DISPLACEMENT TRANSDUCERS FOR PHYSICAL SENSORS 39TH NATIONAL SYMP OF THE AMERICAN VACUUM SOC Kenny, T. W., Kaiser, W. J., Podosek, J. A., Rockstad, H. K., Reynolds, J. K., Vote, E. C. A V S AMER INST PHYSICS. 1993: 797–802

  View details for Web of Science ID A1993LP00700014

• FABRICATION AND CHARACTERIZATION OF A MICROMACHINED DEFORMABLE MIRROR FOR ADAPTIVE OPTICS APPLICATIONS Conference on Space Astronomical Telescopes and Instruments II Miller, L. M., AGRONIN, M. L., Bartman, R. K., Kaiser, W. J., Kenny, T. W., Norton, R. L., Vote, E. C. SPIE - INT SOC OPTICAL ENGINEERING. 1993: 421–430

  View details for Web of Science ID A1993BZ81R00045

• ELECTRON TUNNEL SENSORS 38TH NATIONAL SYMP OF THE AMERICAN VACUUM SOC Kenny, T. W., Kaiser, W. J., Reynolds, J. K., Podosek, J. A., Rockstad, H. K., Vote, E. C., WALTMAN, S. B. A V S AMER INST PHYSICS. 1992: 2114–18

  View details for Web of Science ID A1992JE68200120

• NOVEL POSITION SENSOR TECHNOLOGIES FOR MICROACCELEROMETERS CONF ON SENSORS AND SENSOR SYSTEMS FOR GUIDANCE AND NAVIGATION 2 VANZANDT, T. R., Kenny, T. W., Kaiser, W. J. SPIE - INT SOC OPTICAL ENGINEERING. 1992: 165–172

  View details for Web of Science ID A1992BW29W00018

• A MICROMACHINED SILICON ELECTRON-TUNNELING SENSOR 3RD WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS ( MEMS 90 ) Kenny, T. W., WALTMAN, S. B., Reynolds, J. K., Kaiser, W. J. I E E E. 1990: 192–196

  View details for Web of Science ID A1990BR07N00038

• ELECTRON TUNNEL SENSOR TECHNOLOGY CONF ON TECHNOLOGY 2000 Kenny, T. W., WALTMAN, S. B., Reynolds, J. K., Kaiser, W. J. NASA. 1990: 370–381

  View details for Web of Science ID A1990BT08G00046