Jim Plummer
John M. Fluke Professor of Electrical Engineering and Professor, by courtesy, of Materials Science and Engineering
Web page: https://profiles.stanford.edu/jim-plummer
Bio
Jim Plummer was born in Toronto, Canada. He obtained his BS degree from UCLA and his MS and PhD degrees in Electrical Engineering from Stanford University. He joined the Stanford faculty in 1978 as an associate professor. He became professor of electrical engineering in 1983.
His career at Stanford has included serving as director of the IC Laboratory, senior associate dean in the School of Engineering, and chair of the Electrical Engineering Department. He was the Frederick Emmons Terman Dean of the School of Engineering from 1999 until 2014. He also holds the John Fluke Professorship in Electrical Engineering. During his tenure as dean, the school renewed or replaced much of its laboratory and classroom space, dramatically increased the number of undergraduate students majoring in engineering and created interdisciplinary programs like the Bioengineering Department, which is jointly operated with the medical school, ICME, the Institute For Computational and Mathematical Engineering, and the Hasso Plattner Institute of Design (d.school) that changed the nature of engineering education. Plummer was a strong advocate as dean, for ensuring that engineering majors take advantage of the full set of opportunities at a liberal arts institution like Stanford.
Plummer has worked in a variety of areas in the broad field of silicon devices and technology. Much of his early work focused on high-voltage ICs and on high-voltage device structures. He and his group made important contributions to integrating CMOS logic and high-voltage lateral DMOS devices on the same chip and demonstrated circuits operating at several hundred volts. This work also led to several power MOS device concepts such as the IGBT which have become important power switching devices.
Throughout the 1980s and '90s, a major focus of his work was on silicon process modeling. This work involved many students and other faculty, particularly Professor Bob Dutton, and resulted in the development of several generations of SUPREM, which has become the standard process modeling tool used worldwide today. His recent work has focused on nanoscale silicon devices for logic and memory and power devices using wide bandgap semiconductor materials.
Plummer is a member of the National Academy of Engineering, the American Academy of Arts and Sciences and a fellow of the IEEE. He has received many awards for his research, including the 1991 Gordon Moore medal for Solid State Science and Technology from the Electrochemical Society, the 2001 Semiconductor Industry Association University Research Award, the 2003 IEEE J. J. Ebers Award, the 2003 IEEE Van der Ziel Award, the 2007 IEEE Andrew Grove award and the 2015 IEEE Founders Medal.He has been elected to the Silicon Valley and ISPSD Halls of Fame.
He has graduated more than 90 PhD students with whom he has published more than 500 journal papers and conference presentations. These papers have won eight conference and student best paper awards including two at IEDM and three at ISSCC. His textbooks,"Integrated Circuit Fabrication: Science and Technology" and "Silicon VLSI Technology: Fundamentals, Practice and Modeling," are used by many universities around the world (https://plummergriffinbook.stanford.edu). The link on this page provides information on how to download copies of these books for personal use. He has also received three teaching awards at Stanford. He has served and currently serves on the Board of Directors of several public companies including Intel and Cadence.
Plummer directed the Stanford Nanofabrication Facility from 1994 to 2000 and received an NSF commendation in 2000 for national leadership in building the NNUN, a consortium of universities who opened their nanofabrication facilities as national resources for industry and for students from around the nation.
Academic Appointments
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Professor, Electrical Engineering
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Professor (By courtesy), Materials Science and Engineering
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Member, Bio-X
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Affiliate, Precourt Institute for Energy
Administrative Appointments
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Frederick Emmons Terman Dean, Stanford School of Engineering (1999 - 2014)
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Chair, Electrical Engineering Dept. (1996 - 1999)
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Senior Associate Dean, School of Engineering (1993 - 1996)
Honors & Awards
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Best Paper Awards, ISSCC (1970, 1976, 1978)
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ASSU Award for Teaching Excellence, ASSU (1991)
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Solid State Science & Technology Award, Society (1991)
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Stanford Tau Beta Pi Award for Excellence in Undergraduate Teaching, Tau Beta Pi (1992)
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Best Paper Awards, IEDM (1993, 1995)
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Best Teacher Award, Society of Women Engineers (1995)
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Best Paper Award, ISPSD (1996)
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Elected Member, National Academy of Engineering (1996)
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Best Paper Award, MRS (2000)
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Best Paper Award, ICDS (2000)
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Third Millennium Medal, IEEE (2000)
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University Research Award, Semiconductor Industry Association (2001)
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Aldert Van der Ziel Award, IEEE (2003)
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J.J. Ebers Award, IEEE (2003)
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Laurels Award - Electronics, Aviation Week & Space Technology (2003)
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Jacob Millman Award, McGraw-Hill (2004)
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Paul Rappaport Award, IEDM (2006)
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UCLA Engineering Academic Alumnus of the Year, UCLA (2006)
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Andrew S. Grove Award, IEEE (2007)
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Elected Member, American Academy of Arts & Sciences (2008)
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Elected to Silicon Valley Engineering Hall of Fame, Silicon Valley Engineering Council (2014)
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IEEE Founders Medal, IEEE (2015)
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Elected to ISPSD Hall of Fame, International Symposium on Power Semiconductor Devices (2018)
Boards, Advisory Committees, Professional Organizations
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Board of Directors, Cadence Corp (2011 - Present)
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Board of Trustees, Olin College of Engineering (2015 - 2022)
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Board of Directors, Intel Corp (2005 - 2017)
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Board of Directors, Leadis Corp (2001 - 2010)
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Board of Directors, International Rectifier Corp (1995 - 2015)
Program Affiliations
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Stanford SystemX Alliance
Professional Education
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PhD, Stanford, Electrical Engineering (1971)
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MS, Stanford, Electrical Engineering (1967)
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BS, UCLA, Electrical Engineering (1966)
Current Research and Scholarly Interests
Dr. Plummer’s early work focused on high voltage ICs and on high voltage device structures. He and his group made important contributions to integrating CMOS logic and high voltage lateral DMOS devices on the same chip and demonstrated circuits operating at several hundred volts. This work also led to several power MOS device concepts such as the IGBT which have become important power switching devices.
Throughout the 1980s and 90s, a major focus of his work was on silicon process modeling. This work involved many students and other faculty, particularly Professor Bob Dutton, and resulted in the development of several generations of SUPREM, which has become the standard process modeling tool used worldwide today. Dr. Plummer’s contributions were principally in the areas of physical understanding and modeling of oxidation, diffusion, ion implantation and annealing. His recent work has focused on nanoscale silicon devices for logic and memory and has demonstrated new device concepts including vertical MOSFETs, the TRAM thyristor memory cell and the IMOS device which achieves < kT/q subthreshold slopes. Recent work has also focused on wide bandgap semiconductor materials, particularly SiC and GaN, for power control devices.
2024-25 Courses
- Integrated Circuit Fabrication Processes
EE 212 (Aut) -
Independent Studies (10)
- Graduate Independent Study
MATSCI 399 (Aut, Win, Spr, Sum) - Master's Research
MATSCI 200 (Aut, Win, Spr, Sum) - Master's Thesis and Thesis Research
EE 300 (Aut, Win, Spr, Sum) - Ph.D. Research
MATSCI 300 (Aut, Win, Spr, Sum) - Practical Training
MATSCI 299 (Aut, Win, Spr, Sum) - Special Studies and Reports in Electrical Engineering
EE 191 (Aut, Win, Spr, Sum) - Special Studies and Reports in Electrical Engineering
EE 391 (Aut, Win, Spr, Sum) - Special Studies and Reports in Electrical Engineering (WIM)
EE 191W (Aut, Win, Spr, Sum) - Special Studies or Projects in Electrical Engineering
EE 190 (Aut, Win, Spr, Sum) - Special Studies or Projects in Electrical Engineering
EE 390 (Aut, Win, Spr, Sum)
- Graduate Independent Study
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Prior Year Courses
2023-24 Courses
- Integrated Circuit Fabrication Processes
EE 212 (Aut) - Power Semiconductor Devices and Technology
EE 218 (Win)
2022-23 Courses
- Integrated Circuit Fabrication Processes
EE 212 (Aut) - Power Semiconductor Devices and Technology
EE 218 (Spr)
2021-22 Courses
- Integrated Circuit Fabrication Processes
EE 212 (Aut)
- Integrated Circuit Fabrication Processes
Stanford Advisees
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Doctoral Dissertation Reader (AC)
ZHENGLIANG BIAN, Thomas Rodriguez, Victor Turbiner -
Master's Program Advisor
Yulin Deng, Ryan Tran
All Publications
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Rapid Melt Growth of Single Crystal InGaAs on Si Substrates
ADVANCES IN MATERIALS SCIENCE AND ENGINEERING
2016
View details for DOI 10.1155/2016/7139085
View details for Web of Science ID 000385104100001
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Si incorporation from the seed into Ge stripes crystallized using rapid melt growth
APPLIED PHYSICS LETTERS
2014; 104 (5)
View details for DOI 10.1063/1.4863976
View details for Web of Science ID 000331644100058
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Low-Temperature Monolithic Three-Layer 3-D Process for FPGA
IEEE ELECTRON DEVICE LETTERS
2013; 34 (8): 1044-1046
View details for DOI 10.1109/LED.2013.2266111
View details for Web of Science ID 000323911800037
- Low-Temperature Monolithic 3-Layer 3-D Process for FPGA IEEE Elec. Dev. Letters 2013; 34 (8): 1044-1046
- Optimal Device Architecture and Hetero-Integration Scheme for III-V CMOS 2013
- Si Incorporation From the Seed Into Ge Stripes Crystalized Using Rapid Melt Growth submitted to APL 2013
- The Future of the Semiconductor Industry and What Does This Imply for Universities? 2012
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Statistical Retardation Delay of I-MOS and Its Measurement Using TDR
IEEE ELECTRON DEVICE LETTERS
2011; 32 (2): 206-208
View details for DOI 10.1109/LED.2010.2090491
View details for Web of Science ID 000286677700032
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A High-Resolution Low-Power Incremental Sigma Delta ADC With Extended Range for Biosensor Arrays
IEEE JOURNAL OF SOLID-STATE CIRCUITS
2010; 45 (6): 1099-1110
View details for DOI 10.1109/JSSC.2010.2048493
View details for Web of Science ID 000281763900002
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Single-Crystal GaAs and GaSb on Insulator on Bulk Si Substrates Based on Rapid Melt Growth
IEEE ELECTRON DEVICE LETTERS
2010; 31 (6): 597-599
View details for DOI 10.1109/LED.2010.2045875
View details for Web of Science ID 000284097800017
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High Quality Single-Crystal Laterally Graded SiGe on Insulator by Rapid Melt Growth
ELECTROCHEMICAL AND SOLID STATE LETTERS
2010; 13 (8): H281-H283
View details for DOI 10.1149/1.3436665
View details for Web of Science ID 000278694500028
- Si CMOS – What happens When Scaling Isn’t An Option? 2010
- High-Resolution Low-Power Incremental ADC With Extended Range for Biosensor Arrays IEEE Journal of Solid State Circuits 2010; 45 (6): 1099-1110
- High-quality single-crystal laterally graded SiGe on insulator by rapid melt growth Electrochem. Soc. Solid-State Lett 2010; 13 (8): 281-283
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Second generation monolithic full-depletion radiation sensor with integrated CMOS circuitry
IEEE Nuclear Science Symposium (NSS)/Medical Imaging Conference (MIC)/17th International Workshop on Room-Temperature Semiconductor X-ray and Gamma-ray Detectors
IEEE. 2010: 1896–1900
View details for Web of Science ID 000306402902010
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Negative Differential Resistance Circuit Design and Memory Applications
IEEE TRANSACTIONS ON ELECTRON DEVICES
2009; 56 (4): 634-640
View details for DOI 10.1109/TED.2009.2014194
View details for Web of Science ID 000265090100013
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A Novel Depletion-IMOS (DIMOS) Device With Improved Reliability and Reduced Operating Voltage
IEEE ELECTRON DEVICE LETTERS
2009; 30 (1): 64-67
View details for DOI 10.1109/LED.2008.2008029
View details for Web of Science ID 000262364200022
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High-performance gate-all-around GeOI p-MOSFETs fabricated by rapid melt growth using plasma nitridation and ALD Al2O3 gate dielectric and self-aligned NiGe contacts
IEEE ELECTRON DEVICE LETTERS
2008; 29 (7): 805-807
View details for DOI 10.1109/LED.2008.2000613
View details for Web of Science ID 000257626000047
- Opportunities and Challenges in the Semiconductor Industry 2008
- BTBT Transistor Scaling: Can they be Competitive with MOSFETs? 2008 DRC 2008
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P-channel germanium FinFET based on rapid melt growth
IEEE ELECTRON DEVICE LETTERS
2007; 28 (7): 637-639
View details for DOI 10.1109/LED.2007.899329
View details for Web of Science ID 000247643900032
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Mechanism of solid phase crystallization of prepatterned nanoscale alpha-Si pillars
JOURNAL OF APPLIED PHYSICS
2007; 101 (10)
View details for DOI 10.1063/1.2734531
View details for Web of Science ID 000246891500159
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Modeling of surrounding gate MOSFETs with bulk trap states
IEEE TRANSACTIONS ON ELECTRON DEVICES
2007; 54 (1): 166-169
View details for DOI 10.1109/TED.2006.887521
View details for Web of Science ID 000243280500024
- A High-Resolution Low-Power Oversampling ADC with Extended-Range for Bio-Sensor Arrays 2007
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A high-resolution low-power oversampling ADC with extended-range for bio-sensor Arrays
20th Symposium on VLSI Circuits
JAPAN SOCIETY APPLIED PHYSICS. 2007: 244–245
View details for Web of Science ID 000250541000094
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Monolithic 3D integrated circuits
International Symposium on VLSI Technology, Systems and Applications
IEEE. 2007: 66–69
View details for Web of Science ID 000247059300031
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A semiclassical model of dielectric relaxation in glasses
JOURNAL OF APPLIED PHYSICS
2006; 100 (12)
View details for DOI 10.1063/1.2397323
View details for Web of Science ID 000243157900069
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Integration of germanium-on-insulator and silicon MOSFETs on a silicon substrate
IEEE ELECTRON DEVICE LETTERS
2006; 27 (11): 911-913
View details for DOI 10.1109/LED.2006.883286
View details for Web of Science ID 000241749700013
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Charge trapping in high-k gate stacks due to the bilayer structure itself
IEEE TRANSACTIONS ON ELECTRON DEVICES
2006; 53 (8): 1858-1867
View details for DOI 10.1109/TED.2006.877700
View details for Web of Science ID 000239286700015
- Novel Methods for Ultrashallow Low Resistance Junction Formation 2006
- Novel Methods for Ultrashallow Low Resistance Junction Formation 2006
- Novel Methods for Ultrashallow Low Resistance Junction Formation 2006
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Low resistance, low-leakage ultrashallow p(+)-junction formation using millisecond flash anneals
IEEE TRANSACTIONS ON ELECTRON DEVICES
2005; 52 (7): 1610-1615
View details for DOI 10.1109/TED.2005.850621
View details for Web of Science ID 000230123100045
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Novel very high IE structures based on the directed BBHE mechanism for ultralow-power flash memories
IEEE ELECTRON DEVICE LETTERS
2005; 26 (3): 212-215
View details for DOI 10.1109/LED.2005.843784
View details for Web of Science ID 000227262500029
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Critical thickness enhancement of epitaxial SiGe films grown on small structures
JOURNAL OF APPLIED PHYSICS
2005; 97 (4)
View details for DOI 10.1063/1.1854204
View details for Web of Science ID 000226841900030
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Rapid melt growth of germanium crystals with self-aligned microcrucibles on Si substrates
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
2005; 152 (8): G688-G693
View details for DOI 10.1149/1.1946368
View details for Web of Science ID 000230494000076
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Ni2Si and NiSi formation by low temperature soak and spike RTPs
13th IEEE International Conference on Advanced Thermal Processing of Semiconductor
IEEE. 2005: 177–181
View details for Web of Science ID 000235927800024
- Ni2 and NiSi Formation by Low Temperature Soak and Spike RTPs 2005
- A Novel SiGe-based Negative Differential Resistance (NDR) Device 2005
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Design requirements for integrated biosensor arrays
Conference on Imaging, Manipulation, and Analysis of Biomolecules and Cells - Fundamentals and Applications III
SPIE-INT SOC OPTICAL ENGINEERING. 2005: 403–413
View details for Web of Science ID 000229039000047
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From DRAM to SRAM with a novel SiGe-based negative differential resistance (NDR) device
IEEE International Electron Devices Meeting
IEEE. 2005: 979–982
View details for Web of Science ID 000236225100224
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Impact ionization MOS (I-MOS) - Part II: Experimental results
IEEE TRANSACTIONS ON ELECTRON DEVICES
2005; 52 (1): 77-84
View details for DOI 10.1109/TED.2004.841345
View details for Web of Science ID 000225915000012
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Impact ionization MOS (I-MOS) - Part I: Device and circuit simulations
IEEE TRANSACTIONS ON ELECTRON DEVICES
2005; 52 (1): 69-76
View details for DOI 10.1109/TED.2004.841344
View details for Web of Science ID 000225915000011
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Metastable boron active concentrations in Si using flash assisted solid phase epitaxy
JOURNAL OF APPLIED PHYSICS
2004; 96 (12): 7357-7360
View details for DOI 10.1063/1.1814792
View details for Web of Science ID 000225482400059
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Double-well model of dielectric relaxation current
APPLIED PHYSICS LETTERS
2004; 84 (18): 3489-3491
View details for DOI 10.1063/1.1738177
View details for Web of Science ID 000221062500019
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Diffuse x-ray scattering and transmission electron microscopy study of defects in antimony-implanted silicon
JOURNAL OF APPLIED PHYSICS
2004; 95 (8): 3968-3976
View details for DOI 10.1063/1.1666975
View details for Web of Science ID 000220586100014
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High-quality single-crystal Ge on insulator by liquid-phase epitaxy on Si substrates
APPLIED PHYSICS LETTERS
2004; 84 (14): 2563-2565
View details for DOI 10.1063/1.1691175
View details for Web of Science ID 000220586800031
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Carrier profiling via scanning tunneling spectroscopy: Comparison with scanning capacitance microscopy
7th International Workshop on the Fabrication, Characterization and Modeling of Ultra-Shallow Doping Profiles in Semiconductors
A V S AMER INST PHYSICS. 2004: 422–26
View details for Web of Science ID 000220573800082
- High Quality Single-crystal Ge-on-insulator by Liquid-phase Epitaxy on Si Substrates Appl. Phys. Letters 2004; 84 (14): 2563–2565
- What’s Hot in Engineering – A Look at the Next 25 years 2004
- Silicon-based Devices and Technology for the Nanoscale Era 2004
- Low Resistant Contacts to Laser Annealed Junctions 2004
- Critical Thickness Enhancement of Epitaxial SiGe Films Grown on Small Structures 2004
- CMOS Compatible Liquid-Phase Epitaxial Growth of Ge on Si Substrates 2004
- Metastable Active Concentrations in Si Using Flash Assisted Solid Phase Epitaxy J. Appl. Phys. 2004; 96 (12): 7357-7360
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MOSFETs and high-speed photodetectors on Ge-on-insulator substrates fabricated using rapid melt growth
50th IEEE International Electron Devices Meeting
IEEE. 2004: 1001–1004
View details for Web of Science ID 000227158500231
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A multi-enzyme model for pyrosequencing
NUCLEIC ACIDS RESEARCH
2004; 32 (21)
Abstract
Pyrosequencing is a DNA sequencing technique based on sequencing-by-synthesis enabling rapid real-time sequence determination. This technique employs four enzymatic reactions in a single tube to monitor DNA synthesis. Nucleotides are added iteratively to the reaction and in case of incorporation, pyrophosphate (PPi) is released. PPi triggers a series of reactions resulting in production of light, which is proportional to the amount of DNA and number of incorporated nucleotides. Generated light is detected and recorded by a detector system in the form of a peak signal, which reflects the activity of all four enzymes in the reaction. We have developed simulations to model the kinetics of the enzymes. These simulations provide a full model for the Pyrosequencing four-enzyme system, based on which the peak height and shape can be predicted depending on the concentrations of enzymes and substrates. Simulation results are shown to be compatible with experimental data. Based on these simulations, the rate-limiting steps in the chain can be determined, and K(M) and kcat of all four enzymes in Pyrosequencing can be calculated.
View details for DOI 10.1093/nar/gnh159
View details for Web of Science ID 000225676700001
View details for PubMedID 15576673
View details for PubMedCentralID PMC535692
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Atomistic modeling of deactivation and reactivation mechanisms in high-concentration boron profiles
APPLIED PHYSICS LETTERS
2003; 83 (20): 4166-4168
View details for DOI 10.1063/1.1628391
View details for Web of Science ID 000186523400029
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Activation and diffusion studies of ion-implanted p and n dopants in germanium
APPLIED PHYSICS LETTERS
2003; 83 (16): 3275-3277
View details for DOI 10.1063/1.1618382
View details for Web of Science ID 000185954400015
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Hall measurements of bilayer structures
JOURNAL OF APPLIED PHYSICS
2003; 93 (2): 1060-1063
View details for DOI 10.1063/1.1529093
View details for Web of Science ID 000180134200039
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Atomistic modeling of B activation and deactivation for ultra-shallow junction formation
IEEE International Conference on Simulation of Semiconductor Processes and Devices
IEEE. 2003: 151–154
View details for Web of Science ID 000185660800037
- Carrier Profiling via STM/STS; Comparison with SCM and SIMS 2003
- School of Engineering Strategic Initiatives E-DAY Keynote 2003
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Stress effects on nanocrystal formation by Ni-induced crystallization of amorphous Si
Symposium on Amorphous and Nanocrystalline Silicon-Based Films held at the 2003 MRS Spring Meeting
MATERIALS RESEARCH SOCIETY. 2003: 669–673
View details for Web of Science ID 000187620100102
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Problems with metal-oxide high-K dielectrics due to 1/t dielectric relaxation current in amorphous materials
IEEE International Electron Devices Meeting
IEEE. 2003: 91–94
View details for Web of Science ID 000189158800020
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The use of laser annealing to reduce parasitic series resistances in MOS devices
14th International Conference on Ion Implantation Technology
IEEE. 2003: 56–59
View details for Web of Science ID 000189388900014
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Single-crystalline Si on insulator in confined structures fabricated by two-step metal-induced crystallization of amorphous Si
APPLIED PHYSICS LETTERS
2002; 81 (24): 4634-4636
View details for DOI 10.1063/1.1527977
View details for Web of Science ID 000179611800046
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Impact of lateral source/drain abruptness on device performance
IEEE TRANSACTIONS ON ELECTRON DEVICES
2002; 49 (11): 1882-1890
View details for DOI 10.1109/TED.2002.806790
View details for Web of Science ID 000179694200006
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Dopant deactivation in heavily Sb doped Si (001): A high-resolution x-ray diffraction and transmission electron microscopy study
JOURNAL OF APPLIED PHYSICS
2002; 92 (9): 5503-5507
View details for DOI 10.1063/1.1510953
View details for Web of Science ID 000178767200099
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Silicon orientation effects in the initial regime of wet oxidation
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
2002; 149 (8): F98-F101
View details for DOI 10.1149/1.1491986
View details for Web of Science ID 000176815100048
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Physical processes associated with the deactivation of dopants in laser annealed silicon
JOURNAL OF APPLIED PHYSICS
2002; 92 (1): 235-244
View details for DOI 10.1063/1.1481974
View details for Web of Science ID 000176314800039
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A comparative study of dopant activation in boron, BF2, arsenic, and phosphorus implanted silicon
IEEE TRANSACTIONS ON ELECTRON DEVICES
2002; 49 (7): 1183-1191
View details for Web of Science ID 000176532900013
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Thermal stability of dopants in laser annealed silicon
JOURNAL OF APPLIED PHYSICS
2002; 92 (1): 230-234
View details for DOI 10.1063/1.1481975
View details for Web of Science ID 000176314800038
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Fluorine interaction with point defects, boron, and arsenic in ion-implanted Si
APPLIED PHYSICS LETTERS
2002; 80 (19): 3530-3532
View details for DOI 10.1063/1.1479458
View details for Web of Science ID 000175464100022
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Atomic-scale diffusion mechanisms via intermediate species
PHYSICAL REVIEW B
2002; 65 (13)
View details for DOI 10.1103/PhysRevB.65.134303
View details for Web of Science ID 000174903900073
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A physics based approach to ultra-shallow p(+)-junction formation at the 32nm node
IEEE International Electron Devices Meeting
IEEE. 2002: 879–882
View details for Web of Science ID 000185143400202
- Thermal Stability of Laser Annealed Dopants in Silicon J. Appl. Physics 2002; 92: 230
- Miniaturized DNA Analysis Devices 2002
- Dopant Deactivation in Heavily Sb Doped Si (001): High Resolution X-ray Diffraction Study 2002
- A Study of the Deactivation of High Concentration, Laser Annealed Dopant Profiles in Silicon 2002
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The local structure of antimony in high dose antimony implants in silicon by XAFS and SIMS
Symposium on Silicon Front-End Junction Formation Technologies held at the MRS Spring Meeting
MATERIALS RESEARCH SOCIETY. 2002: 121–127
View details for Web of Science ID 000178750600016
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I-MOS: A novel semiconductor device with a subthreshold slope lower than kT/q
IEEE International Electron Devices Meeting
IEEE. 2002: 289–292
View details for Web of Science ID 000185143400066
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Silicon self-diffusion under extrinsic conditions
APPLIED PHYSICS LETTERS
2001; 79 (26): 4328-4330
View details for Web of Science ID 000172815100020
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Increased hot-carrier effects using SiGe layers in vertical surrounding-gate MOSFETs
IEEE TRANSACTIONS ON ELECTRON DEVICES
2001; 48 (12): 2690-2694
View details for Web of Science ID 000173259700006
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Suppression of the floating-body effect using SiGe layers in vertical surrounding-gate MOSFETs
IEEE TRANSACTIONS ON ELECTRON DEVICES
2001; 48 (12): 2684-2689
View details for Web of Science ID 000173259700005
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Modeling the suppression of boron transient enhanced diffusion in silicon by substitutional carbon incorporation
JOURNAL OF APPLIED PHYSICS
2001; 90 (4): 1768-1778
View details for Web of Science ID 000170223200016
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Study of the effect of grain boundary migration on hillock formation in Al thin films
JOURNAL OF APPLIED PHYSICS
2001; 90 (2): 781-788
View details for Web of Science ID 000169660000035
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Material and process limits in silicon VLSI technology
PROCEEDINGS OF THE IEEE
2001; 89 (3): 240-258
View details for Web of Science ID 000167927300003
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Characterization of profiling techniques for ultralow energy arsenic implants
ELECTROCHEMICAL AND SOLID STATE LETTERS
2001; 4 (1): G1-G3
View details for Web of Science ID 000165499200010
- Ultrashallow, Low Resistivity Junctions in MOS Devices 2001
- Perspectives on the Past, Present and Future of the Semiconductor Industry 2001
- Issues In Ultra Shallow Junction Fabrication: Dopant Activation and Defect Kinetics 2001
- Challenges in Characterization and Formation of Ultra Shallow Junctions Using Arsenic Implants 2001
- Electronic Structure and Properties of Tetrahedral Hafnium and Zirconium Silicates 2001
- Complete Model for Carbon Suppression of Boron Transient Enhanced Diffusion in Silicon 2001
- Material and Process Limits in Silicon VLSI Technology 2001
- Modeling of the Time Evolution of Carbon Diffusion and Suppression of Boron Transient Enhanced Diffusion in SiGeC and SiC J. Appl. Physics 2001; 90 (4): 1768–1779
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Transparent probe test structure for electrical and physical characterization of defects in thin films
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
2000; 147 (12): 4633-4638
View details for Web of Science ID 000165469800041
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Ural, griffin, and plummer reply:
Physical review letters
2000; 85 (22): 4836-?
View details for PubMedID 11082665
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Comment on "Self-diffusion in silicon: Similarity between the properties of native point defects" - Ural, Griffin, and Plummer reply
PHYSICAL REVIEW LETTERS
2000; 85 (22): 4836-4836
View details for Web of Science ID 000165556600049
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Hydrogen passivation in plasma-etched polycrystalline silicon resistors
ELECTROCHEMICAL AND SOLID STATE LETTERS
2000; 3 (11): 517-519
View details for Web of Science ID 000089277100008
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A diffraction-based transmission electron microscope technique for measuring average grain size
ELECTROCHEMICAL AND SOLID STATE LETTERS
2000; 3 (11): 520-523
View details for Web of Science ID 000089277100009
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Microstructure of thermal hillocks on blanket Al thin films
THIN SOLID FILMS
2000; 371 (1-2): 278-282
View details for Web of Science ID 000088276200043
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Creep-controlled diffusional hillock formation in blanket aluminum thin films as a mechanism of stress relaxation
JOURNAL OF MATERIALS RESEARCH
2000; 15 (8): 1709-1718
View details for Web of Science ID 000088588800011
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Electrical and structural properties of polycrystalline silicon
JOURNAL OF APPLIED PHYSICS
2000; 87 (11): 7913-7926
View details for Web of Science ID 000087067400048
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Characterization of arsenic dose loss at the Si/SiO2 interface
JOURNAL OF APPLIED PHYSICS
2000; 87 (5): 2255-2260
View details for Web of Science ID 000085529500030
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Ultra low energy arsenic implant limits on sheet resistance and junction depth
20th Symposium on VLSI Technology
IEEE. 2000: 112–113
View details for Web of Science ID 000088359300044
- On a Novel Technique for the Electrical Characterization of Polycrystalline Silicon 2000
- Limits of Scaling Shallow Junctions Using Ultra Low Energy Arsenic Implants 2000
- A Comparative Study of Dose Loss for B11 and BF2 Implants 2000
- 50-nm Vertical Replacement-Gate (VRG) pMOSFETs 2000
- What Does Silicon Self-diffusion Tell Us About Ultra-shallow Junctions 2000
- Silicon VLSI Technology – Fundamentals, Practice and Modeling Prentice Hall, Upper Saddle River, NJ. 2000
- Pseudo-Mos Operation of Ultra-Narrow Polysilicon Wires: Electrical Characterization and Memory Effects 2000
- Coupled Diffusion of Dopants 2000
- Silicon MOSFETs (Conventional and Non-Traditional) at the Scaling Limit 2000
- Modeling and Fabrication of Vertical Pillar MOSFETs made in Recrystallized Si 2000
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Kinetics of boron activation
International Conference on Simulation of Semiconductor Processes and Devices
IEEE. 2000: 163–166
View details for Web of Science ID 000166421700040
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Diffusional hillock formation in Al thin films controlled by creep
Symposium V on Thin Films-Stresses and Mechanical Properties VIII held at the 1999 MRS Fall Meeting
MATERIALS RESEARCH SOCIETY. 2000: 129–134
View details for Web of Science ID 000165506400021
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SiGe heterojunctions in epitaxial vertical surrounding-gate MOSFETs
20th Symposium on VLSI Technology
IEEE. 2000: 36–37
View details for Web of Science ID 000088359300014
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Nonequilibrium experiments on self-diffusion in silicon at low temperatures using isotopically enriched structures
20th International Conference on Defects in Semiconductors (ICDS-20)
ELSEVIER SCIENCE BV. 1999: 512–515
View details for Web of Science ID 000084452200120
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Self-diffusion in silicon: Similarity between the properties of native point defects
PHYSICAL REVIEW LETTERS
1999; 83 (17): 3454-3457
View details for Web of Science ID 000083242800027
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Fractional contributions of microscopic diffusion mechanisms for common dopants and self-diffusion in silicon
JOURNAL OF APPLIED PHYSICS
1999; 85 (9): 6440-6446
View details for Web of Science ID 000079871200024
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Lattice compression of Si crystals and crystallographic position of As impurities measured with x-ray standing wave spectroscopy
JOURNAL OF APPLIED PHYSICS
1999; 85 (3): 1429-1437
View details for Web of Science ID 000078137100022
- A Self-Aligned Split-Gate Pillar Flash EEPROM Cell 1999
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Two-dimensional dopant diffusion study using scanning capacitance microscopy
Symposium on Si Front-End Processing-Physics and Technology of Dopant-Defect Interactions
MATERIALS RESEARCH SOCIETY. 1999: 233–237
View details for Web of Science ID 000082188100034
- Diffusional Hillock Formation in Al Thin Films Controlled by Creep 1999
- Thermal Conduction in Doped Single-Crystal Silicon Films 1999
- A Novel Thryristor-based SRAM Cell (T-RAM) for High-Speed, Low Voltage Giga-scale Memories 1999
- High Performance Fully and Partially Depleted Poly-Si Surround Gate Transistors 1999
- Two-Dimensional Dopant Diffusion and Activation Study Using Scanning Capacitance Microscopy 1999
- Interdisciplinary Research - Examples From the Silicon Chip World 1999
- Biomedical Applications of MEMS and Nanotechnologies 1999
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A simple model for threshold voltage of surrounding-gate MOSFET's
IEEE TRANSACTIONS ON ELECTRON DEVICES
1998; 45 (11): 2381-2383
View details for Web of Science ID 000076754800020
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Arsenic deactivation enhanced diffusion: A time, temperature, and concentration study
JOURNAL OF APPLIED PHYSICS
1998; 84 (7): 3593-3601
View details for Web of Science ID 000076184800020
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Lateral IGBT in thin SOI for high voltage, high speed power IC
IEEE TRANSACTIONS ON ELECTRON DEVICES
1998; 45 (10): 2251-2254
View details for Web of Science ID 000076221300024
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Experimental evidence for a dual vacancy interstitial mechanism of self-diffusion in silicon
APPLIED PHYSICS LETTERS
1998; 73 (12): 1706-1708
View details for Web of Science ID 000075993800034
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A new structure for controlling dark current due to surface generation in drift detectors
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
1998; 414 (2-3): 307-316
View details for Web of Science ID 000076090100019
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A vertical high voltage termination structure for high-resistivity silicon detectors
1997 Nuclear Science Symposium
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 1998: 364–69
View details for Web of Science ID 000074161200027
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Characterization of arsenic dose loss at the Si/SiO2 interface using high resolution X-ray Photoelectron Spectrometry
International Electron Devices Meeting (IEDM)
IEEE. 1998: 721–724
View details for Web of Science ID 000078581800166
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Localized intermixing of AlAs and GaAs layers for lithographic control of the lateral oxidation of AlAs
24th IEEE International Symposium on Compound Semiconductors
I E E E. 1998: 329–332
View details for Web of Science ID 000075543900078
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Validation of two-dimensional implant and diffusion profiles using novel scanning capacitance microscope sample preparation and deconvolution techniques
International Electron Devices Meeting (IEDM)
IEEE. 1998: 717–720
View details for Web of Science ID 000078581800165
- The National Nanofabrication Users Network - Sharing Hi-Tech Facilities to Stimulate New Applications of Silicon Technology 1998
- Computer Simulation Of Silicon Technology 1998
- A Novel High Density, Low Voltage SRAM Cell with a Vertical NDR Device 1998
- Point Defect Based Modeling of Dopant Diffusion and Transient Enhanced Diffusion in Silicon 1998
- Validation of Two-Dimensional Implant and Diffusion Profiles Using Novel Scanning Capacitance Microscope Sample Preparation and Deconvolution Techniques 1998
- Dynamics of Arsenic Dose Loss at the SiO2 Interface During TED 1998
- Semiconductor Industry-University Collaboration and Impacts on Education - A University Perspective 1998
- Dynamics of Arsenic Dose Loss at the SiO2 Interface 1998
- Atomic and Molecular Physics Needs for Designing and Manufacturing Silicon Integrated Circuits 1998
- A Novel Pillar DRAM Cell for 4Gbit and Beyond 1998
- Silicon Technology and Devices for the 21st Century 1998
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Effects of PECVD deposition fluxes on the spatial variation of thin film density of as-deposited SiO2 films in interconnect structures
International Interconnect Technology Conference
I E E E. 1998: 175–177
View details for Web of Science ID 000075220300048
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Localized intermixing of AlAs and GaAs layers for lithographic control of the lateral oxidation of AlAs
24th IEEE International Symposium on Compound Semiconductors
IOP PUBLISHING LTD. 1998: 329–332
View details for Web of Science ID 000074779700078
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A vertical high voltage termination structure for high-resistivity silicon detectors
1997 IEEE Nuclear Science Symposium and Medical Imaging Conference
IEEE. 1998: 299–303
View details for Web of Science ID 000074401900063
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Heating mechanisms of LDMOS and LIGBT in ultrathin SOI
IEEE ELECTRON DEVICE LETTERS
1997; 18 (9): 414-416
View details for Web of Science ID A1997XR89300004
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A test structure advisor and a coupled, library-based test structure layout and testing environment
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
1997; 10 (3): 370-383
View details for Web of Science ID A1997XN83900005
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Nitrogen-doped poly spacer local oxidation
IEEE ELECTRON DEVICE LETTERS
1997; 18 (7): 346-348
View details for Web of Science ID A1997XG99700013
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Localised impurity induced layer disordering for lithographic control of the lateral oxidation of AlAs
ELECTRONICS LETTERS
1997; 33 (12): 1087-1089
View details for Web of Science ID 000072040800062
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Applied bias slewing in transient Wigner function simulation of resonant tunneling diodes
IEEE TRANSACTIONS ON ELECTRON DEVICES
1997; 44 (5): 733-737
View details for Web of Science ID A1997WV64800008
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Diffusion modeling of zinc implanted into GaAs
JOURNAL OF APPLIED PHYSICS
1997; 81 (4): 1670-1676
View details for Web of Science ID A1997WH33900010
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Arsenic deactivation enhanced diffusion and the reverse short-channel effect
IEEE ELECTRON DEVICE LETTERS
1997; 18 (2): 42-44
View details for Web of Science ID A1997WD27400004
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Scaling theory for cylindrical, fully-depleted, surrounding-gate MOSFET's
IEEE ELECTRON DEVICE LETTERS
1997; 18 (2): 74-76
View details for Web of Science ID A1997WD27400015
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Design and characterization of SiGe TFT devices and process using Stanford's test chip design environment
1997 IEEE International Conference on Microelectronic Test Structures
I E E E. 1997: 143–145
View details for Web of Science ID A1997BH73B00029
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Cross sectional TEM sample preparation using e-beam lithography and reactive ion etching
Symposium on Specimen Preparation for Transmission Electron Microscopy of Materials IV
MATERIALS RESEARCH SOCIETY. 1997: 217–224
View details for Web of Science ID A1997BJ94J00021
- Silicon TED Process Simulation - What’s Possible Today and What Will Be Needed Tomorrow? 1997
- Defects and Diffusion Issues for The Manufacturing of Semiconductors in the 21st Century 1997
- The Influence of Amorphizing Implants on Boron Transient Enhanced Diffusion in Silicon 1997
- Cross-sectional TEM Sample Preparation Using E-beam Lithography and Reactive Ion Etching 1997
- Process Modeling For 21st Century Silicon Devices 1997
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The influence of amorphizing implants on boron diffusion in silicon
Symposium on Defects and Diffusion in Silicon Processing
MATERIALS RESEARCH SOCIETY. 1997: 347–352
View details for Web of Science ID 000071462300047
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Simulation of charge cloud evolution in silicon drift detectors
1996 IEEE Nuclear Science Symposium and Medical Imaging Conference
IEEE. 1997: 558–562
View details for Web of Science ID A1997BH59W00122
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Modeling of Al/Ga interdiffusion in AlAs/GaAs superlattice materials
26th State of the Art Program on Compound Semiconductors (SOTAPOCS XXVI) at the 191st Meeting of the Electrochemical-Society
ELECTROCHEMICAL SOCIETY INC. 1997: 120–28
View details for Web of Science ID A1997BH73D00015
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Diffusion of implanted zinc in GaAs and AlxGa1-xAs modeled with the kick-out mechanism
26th State of the Art Program on Compound Semiconductors (SOTAPOCS XXVI) at the 191st Meeting of the Electrochemical-Society
ELECTROCHEMICAL SOCIETY INC. 1997: 111–19
View details for Web of Science ID A1997BH73D00014
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Modeling stress effects on thin oxide growth kinetics
1997 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 97)
I E E E. 1997: 49–52
View details for Web of Science ID A1997BJ53T00012
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Spatial temperature profiles due to nonuniform self-heating in LDMOS's in thin SOI
IEEE ELECTRON DEVICE LETTERS
1997; 18 (1): 13-15
View details for Web of Science ID A1997VZ12900005
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A model for mobility degradation in highly doped arsenic layers
IEEE TRANSACTIONS ON ELECTRON DEVICES
1996; 43 (11): 2025-2027
View details for Web of Science ID A1996VR35600038
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Simulation and modelling of a new silicon X-ray drift detector design for synchrotron radiation applications
9th International Workshop on Room Temperature Semiconductor X-Ray and Gamma-Ray Detectors, Associated Electronics and Applications
ELSEVIER SCIENCE BV. 1996: 288–94
View details for Web of Science ID A1996VW52700065
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The dose, energy, and time dependence of silicon self-implantation induced transient enhanced diffusion at 750 degrees C
APPLIED PHYSICS LETTERS
1996; 69 (14): 2113-2115
View details for Web of Science ID A1996VJ78300042
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Comparison of self-consistency iteration options for the Wigner function method of quantum device simulation
PHYSICAL REVIEW B
1996; 54 (11): 8070-8082
View details for Web of Science ID A1996VL14500075
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Influence of dislocation loops created by amorphizing implants on point defect and boron diffusion in silicon
APPLIED PHYSICS LETTERS
1996; 68 (25): 3570-3572
View details for Web of Science ID A1996UR15300016
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Evolution of the crystallographic position of As impurities in heavily doped Si crystals as their electrical activity changes
APPLIED PHYSICS LETTERS
1996; 68 (22): 3090-3092
View details for Web of Science ID A1996UM64300010
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Surface and bulk point defect generation in Czochralski and float zone type silicon wafers
APPLIED PHYSICS LETTERS
1996; 68 (15): 2085-2087
View details for Web of Science ID A1996UD97400018
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Enhanced diffusion by electrical deactivation of arsenic and its implications for bipolar devices
IEEE TRANSACTIONS ON ELECTRON DEVICES
1996; 43 (4): 547-553
View details for Web of Science ID A1996UC51100006
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Species and dose dependence of ion implantation damage induced transient enhanced diffusion
JOURNAL OF APPLIED PHYSICS
1996; 79 (5): 2352-2363
View details for Web of Science ID A1996TY11900028
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Calculation of the fractional interstitial component of boron diffusion and segregation coefficient of boron in Si0.8Ge0.2
APPLIED PHYSICS LETTERS
1996; 68 (6): 791-793
View details for Web of Science ID A1996TT66300022
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A test structure advisor and a coupled, library-based test structure layout and testing environment
1996 IEEE International Conference on Microelectronic Test Structures (ICMTS 1996)
IEEE. 1996: 201–205
View details for Web of Science ID A1996BG12J00036
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0.18um dual Vt MOSFET process and energy-delay measurement
1996 International Electron Devices Meeting
IEEE. 1996: 851–854
View details for Web of Science ID A1996BG98F00191
- TCAD - The Semiconductor Industry Roadmap and a Path to the Future 1996
- Modeling Stress Effects on Thin Oxides for Trench Isolation 1996
- 0.18µm Dual Vt MOSFET Process and Energy-Delay Measurement 1996
- Temperature Ramp Rate Dependence of Transient Enhanced Dopant Diffusion 1996
- Short Anneal Time Behavior of Transient Enhanced Diffusion 1996
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Physical modeling of transient enhanced diffusion in silicon
4th International Symposium on Process Physics and Modeling in Semiconductor Technology
ELECTROCHEMICAL SOCIETY INC. 1996: 101–15
View details for Web of Science ID A1996BJ91Q00011
- The Effects of Source/Drain Processing on the Reverse Short Channel Effect of Deep Submicron Bulk and SOI MOSFETs 1996
- Silicon Oxidation Kinetics - From Deal-Grove to VLSI Process Models 1996
- Physical Modeling of Transient Enhanced Diffusion in Silicon 1996
- A Test Structure Advisor and a Coupled, Library-Based Test Structure Layout and Testing Environment 1996
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High voltage, high speed lateral IGBT in thin SOI for power IC
1996 IEEE International SOI Conference
IEEE. 1996: 132–133
View details for Web of Science ID A1996BG49M00065
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Nitridation enhanced diffusion of antimony in bulk and silicon-on-insulator material
4th International Symposium on Process Physics and Modeling in Semiconductor Technology
ELECTROCHEMICAL SOCIETY INC. 1996: 54–63
View details for Web of Science ID A1996BJ91Q00006
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Vertical, fully-depleted, surrounding gate MOSFETs on sub-0.1 mu m thick silicon pillars
54th Annual Device Research Conference
IEEE. 1996: 108–109
View details for Web of Science ID A1996BG23Q00042
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High voltage LDMOS transistors in sub-micron SOI films
8th International Symposium on Power Semiconductor Devices and PCs (ISPSD 96)
I E E E. 1996: 89–92
View details for Web of Science ID A1996BF73Z00012
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VACANCY GENERATION RESULTING FROM ELECTRICAL DEACTIVATION OF ARSENIC
APPLIED PHYSICS LETTERS
1995; 67 (24): 3575-3577
View details for Web of Science ID A1995TJ30400019
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PERFORMANCE OF THE 3-D PENCIL FLASH EPROM CELL AND MEMORY ARRAY
IEEE TRANSACTIONS ON ELECTRON DEVICES
1995; 42 (11): 1982-1991
View details for Web of Science ID A1995TB57900017
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MODELING THE DIFFUSION OF GROWN-IN BE IN MOLECULAR-BEAM EPITAXY GAAS
JOURNAL OF APPLIED PHYSICS
1995; 78 (3): 1595-1605
View details for Web of Science ID A1995RK57600032
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MODELING THE DIFFUSION OF IMPLANTED BE IN GAAS
JOURNAL OF APPLIED PHYSICS
1995; 78 (3): 1606-1613
View details for Web of Science ID A1995RK57600033
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CHALLENGES FOR PREDICTIVE PROCESS SIMULATION IN SUB 0.1 MU-M SILICON DEVICES
2nd International Conference on Computer Simulation of Radiation Effects in Solids
ELSEVIER SCIENCE BV. 1995: 160–66
View details for Web of Science ID A1995RR77700031
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STUDY ON HYDROGENATION OF POLYSILICON THIN-FILM TRANSISTORS BY ION-IMPLANTATION
IEEE TRANSACTIONS ON ELECTRON DEVICES
1995; 42 (6): 1134-1140
View details for Web of Science ID A1995QZ20000017
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Optimization of quarter micron MOSFETs for low voltage low power applications
1995 International Electron Devices Meeting
IEEE. 1995: 63–66
View details for Web of Science ID A1995BF10D00012
- Incorporating Point-Defect Dynamics into Process Simulation 1995
- Computational Prototyping For 21st Century Semiconductor Devices 1995
- Transient Enhanced Diffusion During Implant Damage Annealing 1995
- Challenges For Predictive Process Simulation in Sub 0.1 Micron Silicon Devices 1995
- Computational Prototyping for 21st Century Structures Invited Talk, Sematech, Austin TX 1995
- Physically Based Process Simulation for Submicron Silicon Devices 1995
- Computational Prototyping for Advanced Semiconductor Structures 1995
- Optimization of Quarter Micron MOSFETs for Low Voltage/Low Power Applications 1995
- Computational Prototyping for Advanced Semiconductor Devices 1995
- Computational Prototyping for 21st Century Structures 1995
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''The effect of source/drain processing on the reverse short channel effect of deep sub-micron bulk and SOI NMOSFETs''
1995 International Electron Devices Meeting
IEEE. 1995: 427–430
View details for Web of Science ID A1995BF10D00095
- Technology CAD - Status and Future Possibilities 1995
- Low Threshold Voltage Quarter Micron MOSFETs for Low Power Applications 1995
- Modeling the Diffusion of Grown-in Be in MBE GaAs J. Appl. Physics 1995; 78 (3): 1595-1605
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Implant enhanced diffusion of boron in silicon germanium
Symposium on Strained Layer Epitaxy-Materials, Processing, and Device Applications
MATERIALS RESEARCH SOC. 1995: 379–384
View details for Web of Science ID A1995BE33N00058
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DISPERSION OF MOS CAPACITANCE-VOLTAGE CHARACTERISTICS RESULTING FROM THE RANDOM CHANNEL DOPANT ION DISTRIBUTION
IEEE TRANSACTIONS ON ELECTRON DEVICES
1994; 41 (11): 2222-2232
View details for Web of Science ID A1994PT16000042
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A VERTICAL SUBMICRON POLYSILICON THIN-FILM-TRANSISTOR USING A LOW-TEMPERATURE PROCESS
IEEE ELECTRON DEVICE LETTERS
1994; 15 (10): 415-417
View details for Web of Science ID A1994PL26900015
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CHARACTERIZATION OF INTERFACE TOPOGRAPHY OF THE BURIED SI-SIO2 INTERFACE IN SILICON-ON-INSULATOR MATERIAL BY ATOMIC-FORCE MICROSCOPY
APPLIED PHYSICS LETTERS
1994; 65 (13): 1698-1699
View details for Web of Science ID A1994PH33200032
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EFFECT OF BURIED SI-SIO2 INTERFACES ON OXIDATION AND IMPLANT-ENHANCED DOPANT DIFFUSION IN THIN SILICON-ON-INSULATOR FILMS
JOURNAL OF APPLIED PHYSICS
1994; 76 (5): 2756-2764
View details for Web of Science ID A1994PD44000027
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A SIMPLE EEPROM CELL USING TWIN POLYSILICON THIN-FILM TRANSISTORS
IEEE ELECTRON DEVICE LETTERS
1994; 15 (8): 304-306
View details for Web of Science ID A1994PB03100014
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ELECTRICAL DEACTIVATION OF ARSENIC AS A SOURCE OF POINT-DEFECTS
APPLIED PHYSICS LETTERS
1994; 65 (5): 578-580
View details for Web of Science ID A1994PA15300022
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OXIDATION ENHANCED DOPANT DIFFUSION IN SEPARATION BY IMPLANTATION BY OXYGEN SILICON-ON-INSULATOR MATERIAL
APPLIED PHYSICS LETTERS
1994; 64 (24): 3264-3266
View details for Web of Science ID A1994NQ97900021
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PIN DETECTOR ARRAYS AND INTEGRATED READOUT CIRCUITRY ON HIGH-RESISTIVITY FLOAT-ZONE SILICON
IEEE TRANSACTIONS ON ELECTRON DEVICES
1994; 41 (6): 903-912
View details for Web of Science ID A1994NR95500007
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PARASITIC BIPOLAR GAIN IN FULLY DEPLETED N-CHANNEL SOI MOSFETS
IEEE TRANSACTIONS ON ELECTRON DEVICES
1994; 41 (6): 970-977
View details for Web of Science ID A1994NR95500017
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HIGH-MOBILITY SI1-XGEX PMOS TRANSISTORS TO 5K
1st European Workshop on Low Temperature Electronics (WOLTE 1)
EDITIONS PHYSIQUE. 1994: 69–74
View details for Web of Science ID A1994NU91400012
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MEASUREMENT OF SUBSTRATE CURRENT IN SOI MOSFETS
IEEE ELECTRON DEVICE LETTERS
1994; 15 (4): 132-134
View details for Web of Science ID A1994NK10700006
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OXIDATION-ENHANCED DIFFUSION OF BORON AND PHOSPHORUS IN HEAVILY-DOPED LAYERS IN SILICON
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
1994; 141 (4): 1074-1081
View details for Web of Science ID A1994NF41000045
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A PROTOTYPE MONOLITHIC PIXEL DETECTOR
1st International Symposium on Development and Application of Semiconductor Tracking Detectors (Hiroshima STD Symposium)
ELSEVIER SCIENCE BV. 1994: 59–77
View details for Web of Science ID A1994NB21500010
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DOPING AND DAMAGE DOSE DEPENDENCE OF IMPLANT INDUCED TRANSIENT ENHANCED DIFFUSION BELOW THE AMORPHIZATION THRESHOLD
APPLIED PHYSICS LETTERS
1994; 64 (10): 1242-1244
View details for Web of Science ID A1994MZ17100023
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INVESTIGATION OF BODY EFFECT OF FULLY DEPLETED N-CHANNEL SOI DEVICE AS A FUNCTION OF BODY BIAS
1994 IEEE International SOI Conference
IEEE. 1994: 57–58
View details for Web of Science ID A1990BD41Z00028
- The Effect of Buried Si-SiO2 Interfaces on Oxidation and Implant Enhanced Dopant Diffusion in Thin Silicon-on-Insulator Films J. Appl. Phys 1994; 76: 2756
- A Comparison of Implant Enhanced Dopant Diffusion in Bulk and SOI Material 1994
- High Mobility Si1-xGex PMOS Transistors to 5K 1st European Workshop on Low Temperature Electronics, WOLTE 1, Grenoble France, June 1994. Also published Journal de Physique IV, Colloque C6, supplement to Journal de Physique III 1994; 4
- Oxidation Enhanced Diffusion in Separation by Implantation of Oxygen Silicon-on-Insulator Material Appl. Phys. Letters 1994; 64 (24): 3264-3266
- SOI - Power ICs, VLSI Devices and Process Technology Issues 1994
- CMOS Technology Scaling for Low Voltage, Low Power Applications 1994
- Challenges For Predictive Process Simulation in Sub 0.1 Micron Silicon Devices 1994
- A Twin Polysilicon TFT Planar EEPROM Cell 1994
- Doping and Damage Dependence of Implant Induced Transient Enhanced Diffusion Below the Amorphization Threshold Appl. Phys. Lett. 1994; 64: 1242-1244
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A TRENCH-GATE LIGBT STRUCTURE AND 2 LMCT STRUCTURES IN SOI SUBSTRATES
6th International Symposium on Power Semiconductor Devices and ICs (ISPSD 94)
I E E E. 1994: 405–410
View details for Web of Science ID A1994BB75B00068
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DEVICE IMPLICATIONS OF ENHANCED DIFFUSION CAUSED BY THE ELECTRICAL DEACTIVATION OF ARSENIC
1994 IEEE International Electron Devices Meeting
IEEE. 1994: 861–864
View details for Web of Science ID A1994BC55U00196
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IIA-5 1ST DIRECT BETA-MEASUREMENT FOR PARASITIC LATERAL BIPOLAR-TRANSISTORS IN FULLY-DEPLETED SOI MOSFETS
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 1993: 2101–2
View details for Web of Science ID A1993ME78300040
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A 3-D SIDEWALL FLASH EPROM CELL AND MEMORY ARRAY
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 1993: 2126–27
View details for Web of Science ID A1993ME78300080
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A NEW MOSFET OUTPUT CONDUCTANCE MEASUREMENT TECHNIQUE
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
1993; 42 (5): 893-898
View details for Web of Science ID A1993MC21600003
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A 3-D SIDEWALL FLASH EPROM CELL AND MEMORY ARRAY
IEEE ELECTRON DEVICE LETTERS
1993; 14 (8): 415-417
View details for Web of Science ID A1993LQ00900016
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SILICON INTERSTITIAL ABSORPTION DURING THERMAL-OXIDATION AT 900 DEGREES-C BY EXTENDED DEFECTS FORMED VIA SILICON IMPLANTATION
APPLIED PHYSICS LETTERS
1993; 62 (20): 2498-2500
View details for Web of Science ID A1993LB88500014
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PERFORMANCE OF A MONOLITHIC PIXEL DETECTOR
3RD INTERNATIONAL CONF ON ADVANCED TECHNOLOGY AND PARTICLE PHYSICS
ELSEVIER SCIENCE BV. 1993: 460–467
View details for Web of Science ID A1993LF47300058
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1ST BEAM TEST-RESULTS FROM A MONOLITHIC SILICON PIXEL DETECTOR
6TH EUROPEAN SYMP ON SEMICONDUCTOR DETECTORS
ELSEVIER SCIENCE BV. 1993: 144–49
View details for Web of Science ID A1993KP97200021
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DESIGN AND ANALYSIS OF A NEW CONDUCTIVITY-MODULATED POWER MOSFET
IEEE TRANSACTIONS ON ELECTRON DEVICES
1993; 40 (2): 428-438
View details for Web of Science ID A1993KJ10800029
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DEVELOPMENT OF ANIMATED SIMULATION OF SEMICONDUCTOR ELECTRONIC DEVICES FOR CLASSROOM DEMONSTRATION
International Conference on Simulation in Engineering Education (ICSEE 94)/1994 Western Multiconference
SOC COMPUTER SIMULATION INT. 1993: 67–72
View details for Web of Science ID A1993BA76V00012
- A Novel Floating Gate Spacer Polysilicon TFT 1993
- Hydrogenation of Polycrystalline Si TFTs by Ion Implantation 1993
- Evidence for a Kickout Mechanism for Ge Diffusion in Si 1993
- A Novel Vertical Polysilicon Memory Device 1993
- The Role of Extended Defects in Dopant Diffusion 1993
- Simulating Complex Process Sequences in Semiconductors, Particularly Silicon 1993
- Process Simulation in Submicron Silicon Structures 1993
- A Novel Vertical Submicron Polysilicon TFT 1993
- Performance of the 3-D Sidewall Flash EPROM Cell 1993
- Oxidation Enhanced Diffusion in Thin SOI Films 1993
- Experimental Characterization of Arsenic Segregation Behavior in the Poly/Single-Crystal Silicon System 1993
- First Direct Measurement for Parasitic Lateral Bipolar Transistors in Fully Depleted SOI MOSFETs 1993
- A Parametric Design Tool for Device Space Exploration 1993
- Oxidation Enhanced Diffusion of Boron and Phosphorus in Heavily Doped Layers in Silicon 1993
- Instruction and Prototyping Using the Virtual Factory 1993
- First Beam Test Results from a Monolithic Silicon Pixel Detector 1993
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LATERAL DEPLETION-MODE THYRISTORS IN SOI SUBSTRATES
5th International Symp on Power Semiconductor Devices and IC(S) ( ISPSD 93 )
I E E E. 1993: 269–273
View details for Web of Science ID A1993BY87C00046
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SOI LIGBT DEVICES WITH A DUAL P-WELL IMPLANT FOR IMPROVED LATCHING CHARACTERISTICS
5th International Symp on Power Semiconductor Devices and IC(S) ( ISPSD 93 )
I E E E. 1993: 254–258
View details for Web of Science ID A1993BY87C00043
- 2-D Current Flow Effects in Bipolar Transistors at Cryogenic Temperature 1993
- Species, Dose and Energy Dependence of Implant Induced Transient Enhanced Diffusion 1993
- Modeling the Diffusion Behavior of Implanted Beryllium in Gaalium Arsenide Using SUPREM-IV 1993
- Activation and Deactivation of High Concentration Arsenic with Some Evidence of Precipitation 1993
- A Simple SPICE Level-3 Model For Polysilicon TFT DC ON-Current 1993
- A Virtual Factory-Based Environment for Semiconductor Device Development Invited Paper, SEMICON/Europa'93, Geneva Switzerland 1993
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BREAKDOWN VOLTAGE OF SUBMICRON MOSFETS IN FULLY DEPLETED SOI
CONF ON MICROELECTRONICS MANUFACTURING AND RELIABILITY
SPIE - INT SOC OPTICAL ENGINEERING. 1993: 202–212
View details for Web of Science ID A1993BX93T00020
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PROGRAMMABLE FACTORY FOR ADAPTABLE IC MANUFACTURING
1993 SYMP ON VERY-LARGE-SCALE-INTEGRATION ( VLSI ) TECHNOLOGY
JAPAN SOC APPLIED PHYSICS. 1993: 131–132
View details for Web of Science ID A1993BZ20V00066
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USE OF LOW-TEMPERATURE SI MBE GROWTH TECHNIQUES FOR HIGH-PERFORMANCE SIGE/SI ELECTRONICS
SYMP ON SEMICONDUCTOR HETEROSTRUCTURES FOR PHOTONIC AND ELECTRONIC APPLICATIONS, AT THE 1992 FALL MEETING OF THE MATERIALS RESEARCH SOC
MATERIALS RESEARCH SOC. 1993: 415–420
View details for Web of Science ID A1993BY84H00061
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A NEW INTEGRATED PIXEL DETECTOR FOR HIGH-ENERGY PHYSICS
1991 NUCLEAR SCIENCE SYMP AND MEDICAL IMAGING CONF ( NSS / MIUC )
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 1992: 1263–69
View details for Web of Science ID A1992JZ68400013
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GEXSI1-X/SILICON INVERSION-BASE TRANSISTORS - EXPERIMENTAL DEMONSTRATION
IEEE TRANSACTIONS ON ELECTRON DEVICES
1992; 39 (9): 2119-2126
View details for Web of Science ID A1992JJ51600019
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GEXSI1-X/SILICON INVERSION-BASE TRANSISTORS - THEORY OF OPERATION
IEEE TRANSACTIONS ON ELECTRON DEVICES
1992; 39 (9): 2108-2118
View details for Web of Science ID A1992JJ51600018
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THE FIELD-ASSISTED TURN-OFF THYRISTOR - A REGENERATIVE DEVICE WITH VOLTAGE-CONTROLLED TURN-OFF
IEEE TRANSACTIONS ON ELECTRON DEVICES
1992; 39 (8): 1946-1953
View details for Web of Science ID A1992JD66000024
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RETARDED DIFFUSION OF SB IN A HIGH-CONCENTRATION AS BACKGROUND DURING SILICON OXIDATION
APPLIED PHYSICS LETTERS
1992; 61 (3): 303-305
View details for Web of Science ID A1992JE52400021
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SUB-QUARTER-MICROMETER CMOS ON ULTRATHIN (400 ANGSTROM) SOI
IEEE ELECTRON DEVICE LETTERS
1992; 13 (5): 235-237
View details for Web of Science ID A1992HQ60500003
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MODELING UPHILL DIFFUSION OF MG IMPLANTS IN GAAS USING SUPREM-IV
JOURNAL OF APPLIED PHYSICS
1992; 71 (6): 2615-2623
View details for Web of Science ID A1992HJ65500021
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OXYHEMOGLOBIN SATURATION FOLLOWING ELECTIVE ABDOMINAL-SURGERY IN PATIENTS RECEIVING CONTINUOUS INTRAVENOUS-INFUSION OR INTRAMUSCULAR MORPHINE ANALGESIA
ANAESTHESIA
1992; 47 (3): 256-260
Abstract
Oxygen saturation was continuously measured using computerised pulse oximetry for 8 h overnight pre-operatively and for the first 24 h postoperatively in 40 patients receiving intermittent intramuscular morphine or continuous infusion of morphine following elective upper abdominal surgery. The proportion of time with an oxygen saturation less than 94% was used as an index of desaturation. Patients receiving continuous infusion analgesia received a larger morphine dose and achieved better analgesia than the intramuscular group. Postoperatively, the duration of desaturation increased 10-fold over pre-operative values, 'intramuscular' patients spending 39.0% (SD, 37.0%) and 'continuous infusion' patients 40.0% (SD, 37.5%) of the time below 94% saturation. Although newer therapies (e.g. epidural analgesia and patient-controlled analgesia) are currently receiving greater attention, the sequelae of these more traditional analgesic techniques warrant further study.
View details for Web of Science ID A1992HH73600017
View details for PubMedID 1566997
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1ST RESULTS FROM AN INTEGRATED PIXEL DETECTOR
JOINT INTERNATIONAL LEPTON-PHOTON SYMP / EUROPHYSICS CONF ON HIGH ENERGY PHYSICS
WORLD SCIENTIFIC PUBL CO PTE LTD. 1992: A232–A235
View details for Web of Science ID A1992BW68C00062
- Fast Switching LIGT Devices in SOI Substrates 1992
- A Virtual Factory-Based Environment for Semiconductor Device Development 1992
- Kinetics of High Concentration Arsenic Deactivation at Moderate to Low Temperatures 1992
- Elimination of Bipolar-Induced Breakdown in Fully-Depleted SOI MOSFETs 1992
- Dependence of Fully Depleted SOI MOSFET Breakdown Voltage on Film Thickness and Channel Length 1992
- Sub-Quarter Micron CMOS on Ultra-Thin (400Å) SOI IEEE Elec. Dev. Letters 1992; 13 (5): 235-237
- Thermal Oxidation Kinetics and LOCOS Isolation in SOI Materials 1992
- AC Characterization and Modeling of the GexSi1-x/Si BICFET 1992
- A Virtual Factory-Based Environment for Semiconductor Device Development 1992
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TOOL INTEGRATION FOR POWER DEVICE MODELING INCLUDING 3D ASPECTS
INTERNATIONAL SYMP ON POWER SEMICONDUCTOR DEVICES AND CIRCUITS
PLENUM PRESS DIV PLENUM PUBLISHING CORP. 1992: 111–138
View details for Web of Science ID A1992BY09R00005
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THE SUPERLATTICE DIFFUSION PROBE - A TOOL FOR MODELING DIFFUSION IN III-V SEMICONDUCTORS
SYMP ON ADVANCED III-V-COMPOUND SEMICONDUCTOR GROWTH, PROCESSING AND DEVICE, AT THE 1991 MEETING OF THE MATERIALS RESEARCH SOC
MATERIALS RESEARCH SOC. 1992: 709–714
View details for Web of Science ID A1992BW39A00106
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SUPPRESSION OF AL-GA INTERDIFFUSION BY A WNX FILM ON AN ALXGA1-XAS/ALAS SUPERLATTICE STRUCTURE
APPLIED PHYSICS LETTERS
1991; 59 (25): 3252-3254
View details for Web of Science ID A1991GV07900017
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DEVICE PHYSICS AND TECHNOLOGY OF COMPLEMENTARY SILICON MESFETS FOR VLSI APPLICATIONS
IEEE TRANSACTIONS ON ELECTRON DEVICES
1991; 38 (12): 2619-2631
View details for Web of Science ID A1991GP30000006
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EXTENDED DEFECTS OF ION-IMPLANTED GAAS
JOURNAL OF APPLIED PHYSICS
1991; 70 (11): 6790-6795
View details for Web of Science ID A1991GU04900021
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A NEW DEVICE STRUCTURE AND PROCESS FLOW FOR A LOW-LEAKAGE P-I-N DIODE-BASED INTEGRATED DETECTOR ARRAY
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 1991: 2696–97
View details for Web of Science ID A1991GP30000034
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MERGED BICMOS LOGIC TO EXTEND THE CMOS BICMOS PERFORMANCE CROSSOVER BELOW 2.5-V SUPPLY
IEEE JOURNAL OF SOLID-STATE CIRCUITS
1991; 26 (11): 1606-1614
View details for Web of Science ID A1991GL70900019
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A COMPARISON OF THE DIFFUSION BEHAVIOR OF ION-IMPLANTED SN, GE, AND SI IN GALLIUM-ARSENIDE
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
1991; 138 (11): 3440-3449
View details for Web of Science ID A1991GN90900050
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AN 8-TERMINAL KELVIN-TAPPED BIPOLAR-TRANSISTOR FOR EXTRACTING PARASITIC SERIES RESISTANCES
IEEE TRANSACTIONS ON ELECTRON DEVICES
1991; 38 (9): 2139-2154
View details for Web of Science ID A1991FZ27400026
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3-AMINO-2,3-DIDEOXY-D-ERYTHRO-FURANOSE DERIVATIVES
TETRAHEDRON
1991; 47 (27): 4861-4868
View details for Web of Science ID A1991FT53800004
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MODELING ACTIVATION OF IMPLANTED SI IN GAAS
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
1991; 138 (7): 2134-2140
View details for Web of Science ID A1991FW34100049
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ON H-PASSIVATION OF SI DONORS IN GAAS ANNEALED WITH PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITED SILICON-NITRIDE CAPS
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
1991; 138 (3): 870-871
View details for Web of Science ID A1991FA23600044
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MBICMOS - COMPLEX LOGIC AND MODIFIED GATES FOR IMPROVED PERFORMANCE
1991 MEETING ON BIPOLAR CIRCUITS AND TECHNOLOGY
I E E E. 1991: 210–213
View details for Web of Science ID A1991BU64B00043
- Consistent Models for Point Defects in Silicon 1991
- A New Integrated Pixel Detector for High Energy Physics 1991
- Process Physics in Submicron VLSI Devices 1991
- MBiCMOS: A Device and Circuit Technique Scalable to Sub-Micron, Sub-2V Regime 1991
- The Superlattice Disordering Probe: A Tool for Modeling Diffusion in III-V Semiconductors 1991
- The Superlattice Disordering Probe: A Tool for Modeling Diffusion in GaAs 1991
- First Results from an Integrated Pixel Detector 1991
- Bipolar Transistor Modeling Over Temperature 1991
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A NEW INTEGRATED PIXEL DETECTOR FOR HIGH-ENERGY PHYSICS
1991 IEEE NUCLEAR SCIENCE SYMP AND MEDICAL IMAGING CONF
I E E E. 1991: 457–460
View details for Web of Science ID A1991BW12R00085
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TEMPERATURE AND TIME-DEPENDENCE OF B-DIFFUSION AND P-DIFFUSION IN SI DURING SURFACE OXIDATION
JOURNAL OF APPLIED PHYSICS
1990; 68 (8): 4327-4329
View details for Web of Science ID A1990EE60900082
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THE COMPLEMENTARY INSULATED-GATE BIPOLAR-TRANSISTOR (CIGBT) - A NEW POWER SWITCHING DEVICE
IEEE ELECTRON DEVICE LETTERS
1990; 11 (9): 368-370
View details for Web of Science ID A1990DV76600004
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TRANSIENT DIFFUSION OF LOW-CONCENTRATION-B IN SI DUE TO SI-29 IMPLANTATION DAMAGE
APPLIED PHYSICS LETTERS
1990; 56 (18): 1787-1789
View details for Web of Science ID A1990DB07100026
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THE EFFECT OF BACKGROUND DOPING AND DOSE ON DIFFUSION OF ION-IMPLANTED TIN IN GALLIUM-ARSENIDE
JOURNAL OF APPLIED PHYSICS
1990; 67 (7): 3311-3314
View details for Web of Science ID A1990CV63900014
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REDUCTION OF LATERAL PHOSPHORUS DIFFUSION IN CMOS NORMAL-WELLS
IEEE TRANSACTIONS ON ELECTRON DEVICES
1990; 37 (3): 806-807
View details for Web of Science ID A1990CR84400039
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DIFFUSION OF ION-IMPLANTED TIN IN GALLIUM-ARSENIDE
SYMP AT THE 1989 FALL MEETING OF THE MATERIALS RESEARCH SOC : IMPURITIES,DEFECTS, AND DIFFUSION IN SEMICONDUCTORS : BULK AND LAYERED STRUCTURES
MATERIALS RESEARCH SOC. 1990: 685–689
View details for Web of Science ID A1990BR53C00110
- Diffusion of Ion-Implanted Group IV Atoms in Gallium Arsenide 1990
- A Novel DC Measurement Method for the Accurate Extraction of Bipolar Resistive Parasitics 1990
- A Model For Si Activation in GaAs 1990
- Variations in Point Defect Concentrations Associated with Oxygen Precipitation in Czochralski Silicon 1990
- Etching, Deposition, Diffusion and Oxidation Models in SUPREM IV 1990
- Complementary Merged BiCMOS with Vertical PNP 1990
- Bipolar Transistor Modeling Over Temperature 1990
- Transient and Small-Signal Modeling of the GexSi1-x/Si BICFET 1990
- Process and Device Modeling 1990
- Radiation Tolerant Complementary Silicon MESFETs for VLSI Applications IEEE Nuclear and Space Radiation Effects Conference, Reno Nevada. Also IEEE Transactions on Nuclear Science 1990
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THE EFFECT OF INTERCONNECTION RESISTANCE ON THE PERFORMANCE ENHANCEMENT OF LIQUID-NITROGEN-COOLED CMOS CIRCUITS
IEEE TRANSACTIONS ON ELECTRON DEVICES
1989; 36 (8): 1510-1520
View details for Web of Science ID A1989AF21600014
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EFFECTS OF STRESS ON THE ELECTRICAL ACTIVATION OF IMPLANTED SI IN GAAS
APPLIED PHYSICS LETTERS
1989; 55 (3): 274-276
View details for Web of Science ID A1989AF18000023
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VACANCY SUPERSATURATION IN SI UNDER SIO2 CAUSED BY SIO FORMATION DURING ANNEALING IN AR
JOURNAL OF APPLIED PHYSICS
1989; 65 (8): 2957-2963
View details for Web of Science ID A1989T892200012
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POINT-DEFECTS AND DOPANT DIFFUSION IN SILICON
REVIEWS OF MODERN PHYSICS
1989; 61 (2): 289-384
View details for Web of Science ID A1989U100300004
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DEMONSTRATION OF A P-CHANNEL BICFET IN THE GEXSI1-X/SI SYSTEM
IEEE ELECTRON DEVICE LETTERS
1989; 10 (1): 14-16
View details for Web of Science ID A1989R604400005
- Dielectric Isolation of Silicon through SEG/ELO in Trenches 1989
- Process Simulation for High Performance Bipolar and BiCMOS Devices 1989
- Point Defects and Dopant Diffusion in Silicon 1989
- Microelectronics After 30 Years - Is There Still Room for Innovation? 1989
- Hole Mobilities in GexSi1-x/Si Strain-Layer Quantum Wells 1989
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ADVANCED HETEROJUNCTION GEXSI1-X/SI BIPOLAR-DEVICES
1989 INTERNATIONAL ELECTRON DEVICES MEETING
I E E E, ELECTRON DEVICES SOC & RELIABILITY GROUP. 1989: 655–658
View details for Web of Science ID A1989BQ39F00150
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A CLOSED-FORM ANALYSIS OF FT FOR THE BIPOLAR-TRANSISTOR DOWN TO LIQUID-NITROGEN TEMPERATURE
1989 INTERNATIONAL ELECTRON DEVICES MEETING
I E E E, ELECTRON DEVICES SOC & RELIABILITY GROUP. 1989: 807–810
View details for Web of Science ID A1989BQ39F00185
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CHARACTERIZATION OF SURFACE MOBILITY IN MOS STRUCTURES CONTAINING INTERFACIAL CESIUM IONS
IEEE TRANSACTIONS ON ELECTRON DEVICES
1989; 36 (1): 96-100
View details for Web of Science ID A1989R447000016
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DEVICE PHYSICS AND OPTIMIZATION OF CONDUCTIVITY-MODULATED POWER MOSFETS
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 1988: 2457–58
View details for Web of Science ID A1988R026300121
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SURFACE-POTENTIAL FLUCTUATIONS IN MOS DEVICES INDUCED BY THE RANDOM DISTRIBUTION OF CHANNEL DOPANT IONS
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 1988: 2431–31
View details for Web of Science ID A1988R026300057
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FILM STRESS-RELATED VACANCY SUPERSATURATION IN SILICON UNDER LOW-PRESSURE CHEMICAL VAPOR-DEPOSITED SILICON-NITRIDE FILMS
JOURNAL OF APPLIED PHYSICS
1988; 64 (10): 4914-4919
View details for Web of Science ID A1988Q971300017
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ENHANCED SB DIFFUSION IN SI UNDER THERMAL SI3N4 FILMS DURING ANNEALING IN AR
APPLIED PHYSICS LETTERS
1988; 53 (17): 1593-1595
View details for Web of Science ID A1988Q621100007
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CIRCUIT APPROACHES TO INCREASING IGBT SWITCHING SPEED
IEEE JOURNAL OF SOLID-STATE CIRCUITS
1988; 23 (5): 1276-1279
View details for Web of Science ID A1988Q243900039
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OPTIMIZATION OF SILICON BIPOLAR-TRANSISTORS FOR HIGH-CURRENT GAIN AT LOW-TEMPERATURES
IEEE TRANSACTIONS ON ELECTRON DEVICES
1988; 35 (8): 1311-1321
View details for Web of Science ID A1988P433100016
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VACANCY GENERATION AT THE SI/SIO2 INTERFACE CAUSED BY SIO FORMATION
ELECTROCHEMICAL SOC INC. 1988: C362–C362
View details for Web of Science ID A1988P675200286
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A LOW ION ENERGY TRENCH ETCH PROCESS FOR POWER MOS APPLICATIONS
ELECTROCHEMICAL SOC INC. 1988: C359–C359
View details for Web of Science ID A1988P675200247
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EFFECT OF OXYGEN PRECIPITATION ON PHOSPHORUS DIFFUSION IN CZOCHRALSKI SILICON
APPLIED PHYSICS LETTERS
1988; 53 (1): 34-36
View details for Web of Science ID A1988P109100012
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A NOVEL TRENCH-INJECTOR POWER DEVICE WITH LOW ON RESISTANCE AND HIGH SWITCHING SPEED
IEEE ELECTRON DEVICE LETTERS
1988; 9 (7): 321-323
View details for Web of Science ID A1988N947500001
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CHEMISTRY OF SI-SIO2 INTERFACE TRAP ANNEALING
JOURNAL OF APPLIED PHYSICS
1988; 63 (12): 5776-5793
View details for Web of Science ID A1988N823000025
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ADVANCED DIFFUSION-MODELS FOR VLSI
SOLID STATE TECHNOLOGY
1988; 31 (5): 171-176
View details for Web of Science ID A1988N611600016
- Film Stress-related Vacancy Supersaturation in Silicon under Low-Pressure CVD Si3N4 Films Journal of Applied Physics 1988; 64: 4914
- Fabrication of a p-Channel BICFET in the GexSi1-x/Si Systems 1988
- Enhanced Sb Diffusion under Thermal Si3N4 Films During Annealing in Ar Applied Physics Letters 1988; 17 (53): 1593
- Characterization of Surface Mobility on the Sidewalls of Dry-Etched Trenches 1988
- Advanced Diffusion Models for VLSI 1988
- Effect of Thin Film Stress on Dopant Diffusion in Silicon 1988
- A Physical Model for the Observed Dependence of the Metal-Semiconductor Work Function Difference on Substrate Orientation 1988
- Range Distribution of Implanted Cesium Ions in Silicon Dioxide Films Journal Applied Physics 1988; 12 (63): 5887-5889
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A STUDY OF SILICON INTERSTITIAL KINETICS USING SILICON MEMBRANES - APPLICATIONS TO 2D DOPANT DIFFUSION
JOURNAL OF APPLIED PHYSICS
1987; 62 (12): 4745-4755
View details for Web of Science ID A1987L184400015
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ANALYTICAL RELATIONSHIP FOR THE OXIDATION OF SILICON IN DRY OXYGEN IN THE THIN-FILM REGIME
JOURNAL OF APPLIED PHYSICS
1987; 62 (8): 3416-3423
View details for Web of Science ID A1987K424500054
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QUANTITATIVE MODELING OF SI/SIO2 INTERFACE FIXED CHARGE .2. PHYSICAL MODELING
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
1987; 134 (10): 2573-2580
View details for Web of Science ID A1987K470800039
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QUANTITATIVE MODELING OF SI/SIO2 INTERFACE FIXED CHARGE .1. EXPERIMENTAL RESULTS
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
1987; 134 (10): 2565-2573
View details for Web of Science ID A1987K470800038
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PROCESS DEPENDENCE OF THE METAL-SEMICONDUCTOR WORK FUNCTION DIFFERENCE
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
1987; 134 (9): 2297-2303
View details for Web of Science ID A1987K066500041
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SI-SIO2 INTERFACE TRAP PRODUCTION BY LOW-TEMPERATURE THERMAL-PROCESSING
APPLIED PHYSICS LETTERS
1987; 51 (7): 514-516
View details for Web of Science ID A1987J560400016
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MODEL FOR BULK EFFECTS ON SI INTERSTITIAL DIFFUSIVITY IN SILICON
APPLIED PHYSICS LETTERS
1987; 51 (2): 115-117
View details for Web of Science ID A1987J051300020
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GETTERING OF GOLD IN SILICON - A TOOL FOR UNDERSTANDING THE PROPERTIES OF SILICON INTERSTITIALS
JOURNAL OF APPLIED PHYSICS
1987; 61 (12): 5286-5298
View details for Web of Science ID A1987H692700011
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CHARACTERIZATION OF CESIUM DIFFUSION IN SILICON DIOXIDE FILMS USING BACKSCATTERING SPECTROMETRY
APPLIED PHYSICS LETTERS
1987; 50 (17): 1200-1202
View details for Web of Science ID A1987G970700029
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TIME RESOLVED ANNEALING OF INTERFACE TRAPS IN POLYSILICON GATE METAL-OXIDE-SILICON CAPACITORS
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
1987; 134 (3): 674-681
View details for Web of Science ID A1987G410200032
- Efficient Numerical Simulation of the High Frequency MOS Capacitance IEEE Transactions on Electron Devices 1987; ED-34 (10): 2214-2215
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NONIDEAL BASE CURRENT IN BIPOLAR-TRANSISTORS AT LOW-TEMPERATURES
IEEE TRANSACTIONS ON ELECTRON DEVICES
1987; 34 (1): 130-138
View details for Web of Science ID A1987E921100018
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SUBSTRATE CURRENT AT CRYOGENIC TEMPERATURES - MEASUREMENTS AND A TWO-DIMENSIONAL MODEL FOR CMOS TECHNOLOGY
IEEE TRANSACTIONS ON ELECTRON DEVICES
1987; 34 (1): 64-74
View details for Web of Science ID A1987E921100009
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A LOW-TEMPERATURE NMOS TECHNOLOGY WITH CESIUM-IMPLANTED LOAD DEVICES
IEEE TRANSACTIONS ON ELECTRON DEVICES
1987; 34 (1): 28-38
View details for Web of Science ID A1987E921100005
- Optimization of Bipolar Transistors for Low Temperature Operation 1987
- Effect of Interconnection Delay on Liquid Nitrogen Temperature CMOS Circuit Performance 1987
- Universal Mobility Field Curves for Electrons and Holes in MOS Inversion Layers 1987
- Time Resolved Annealing of Interface Traps in Polysilicon Gate Metal-Oxide-Silicon Capacitors Journal Electrochemical Society 1987; 134 (3): 674-681
- Quantitative Modeling of Si/SiO2 Interface Fixed Charge: II. Physical Modeling Journal Electrochemical Society 1987; 134 (10): 2573-2580
- A Model for Bulk Effects on Si Interstitial Diffusivity in Silicon Applied Physics Letters 1987; 2 (51): 115-117
- SUPREM 3.5 - Process Modeling of GaAs 1987
- Thermionic Emission Probability for Semiconductor-Insulator Interfaces IEEE Transactions on Electron Devices 1987; ED-34 (10): 2211-2212
- Process Dependence of the Metal Semiconductor Work Function Difference Journal Electrochemical Society 1987; 134 (9): 2297-2303
- Non-Ideal Base Current in Bipolar Transistors at Low Temperature IEEE Transactions on Electron Devices 1987; ED-34 (1): 130-138
- Characterization and Cesium Diffusion in Silicon Dioxide Films Using Backscattering Spectrometry Applied Physics Letters 1987; 17 (50): 1200-1202
- Analytical Relationship for the Oxidation of Silicon in Dry Oxygen in the Thin Regime Journal Applied Physics 1987; 8 (62): 3416-3423
- The Field Assisted Turn-Off Thyristor: A Regenerative Device with Voltage Controlled Turn-Off 1987
- A Low Temperature NMOS Technology with Cesium Implanted Load Devices IEEE Transactions on Electron Devices 1987; ED-34 (1): 28-38
- A Study of Silicon Interstitial Kinetics Using Silicon Membranes - Applications to 2-D Dopant Diffusion Journal Applied Physics 1987; 12 (62): 4745-4755
- Characterization of Cs Oxide Implants for Use in MOS Devices Operated at 77K 1987
- Prospects for Cooled MOS Devices and Circuits 1987
- Substrate Current at Cryogenic Temperatures: Measurements and a 2-D Model for CMOS Technology IEEE Transactions on Electron Devices 1987; ED-34 (2): 64-74
- Si/SiO2 Interface Trap Production by Low Temperature Thermal Processing Applied Physics Letters 1987; 7 (51): 514-516
- Quantitative Modeling of Si/SiO2 Interface Fixed Charge: I. Experimental Results Journal Electrochemical Society 1987; 134 (10): 2565-2573
- Gettering of Gold in Silicon - A Tool for Understanding the Properties of Silicon Interstitials Journal Applied Physics 1987; 12 (61): 5286-5298
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2-REACTION MODEL OF INTERFACE TRAP ANNEALING
IEEE TRANSACTIONS ON NUCLEAR SCIENCE
1986; 33 (6): 1198-1202
View details for Web of Science ID A1986F270900007
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A DI/JI-COMPATIBLE MONOLITHIC HIGH-VOLTAGE MULTIPLEXER
IEEE TRANSACTIONS ON ELECTRON DEVICES
1986; 33 (12): 1977-1984
View details for Web of Science ID A1986E797000009
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PHYSICS, TECHNOLOGY, AND MODELING OF POLYSILICON EMITTER CONTACTS FOR VLSI BIPOLAR-TRANSISTORS
IEEE TRANSACTIONS ON ELECTRON DEVICES
1986; 33 (11): 1754-1768
View details for Web of Science ID A1986E351000019
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A MODIFIED LIGHTLY DOPED DRAIN STRUCTURE FOR VLSI MOSFETS
IEEE TRANSACTIONS ON ELECTRON DEVICES
1986; 33 (11): 1769-1779
View details for Web of Science ID A1986E351000020
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SHORT-CHANNEL EFFECTS IN MOSFETS AT LIQUID-NITROGEN TEMPERATURE
IEEE TRANSACTIONS ON ELECTRON DEVICES
1986; 33 (7): 1012-1019
View details for Web of Science ID A1986C640800019
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THERMAL-INSTABILITY OF SCHOTTKY DIODE BARRIER HEIGHTS MODIFIED BY INERT ION SPUTTER-ETCHING DAMAGE
IEEE ELECTRON DEVICE LETTERS
1986; 7 (4): 247-249
View details for Web of Science ID A1986A770700015
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POINT-DEFECT GENERATION DURING OXIDATION OF SILICON IN DRY OXYGEN .1. THEORY
JOURNAL OF APPLIED PHYSICS
1986; 59 (7): 2541-2550
View details for Web of Science ID A1986A570100042
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POINT-DEFECT GENERATION DURING OXIDATION OF SILICON IN DRY OXYGEN .2. COMPARISON TO EXPERIMENT
JOURNAL OF APPLIED PHYSICS
1986; 59 (7): 2551-2561
View details for Web of Science ID A1986A570100043
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PROCESS PHYSICS - IMPLICATIONS FOR MANUFACTURING OF SUBMICRON SILICON DEVICES
SOLID STATE TECHNOLOGY
1986; 29 (3): 61-66
View details for Web of Science ID A1986A623800003
- Two Reaction Model of Interface Trap Annealing IEEE Trans. Nuc. Science 1986; NS-33 (6): 1198-1202
- Kinetic Studies of Silicon-Silicon Dioxide Interface Trap Annealing Using Rapid Thermal Processing 1986
- Complementary Silicon MESFETs for VLSI 1986
- Thermal Instability of Schottky Diode Barrier Heights Modified by Inert Ion Sputter-Etching Damage IEEE Electron Device Letters 1986; EDL-7 (4): 247-249
- Point Defect Generation During Oxidation of Silicon in Dry Oxygen. I. Theory Journal Applied Physics 1986; 7 (59): 2541-2550
- Short Channel Effects in MOSFETs at Liquid Nitrogen Temperature IEEE Transactions on Electron Devices 1986; ED-33 (7): 1012-1019
- Physics, Technology and Modeling of Polysilicon Emitter Contacts for VLSI Bipolar Transistors IEEE Transactions on Electron Devices 1986; ED-33 (11): 1754-1768
- A Modified Lightly Doped Drain Structure for VLSI MOSFETs IEEE Transactions on Electron Devices 1986; ED-33 (11): 1769-1779
- A DI/JI Compatible Monolithic High-Voltage Multiplexer IEEE Transactions on Electron Devices 1986; ED-33 (12): 1977-1984
- Modeling Dopant Redistribution in SiO2/WSi2/Si Structures 1986
- Process Physics Determining 2D Impurity Profiles in VLSI Devices 1986
- Low Temperature CMOS Devices and Technology 1986
- Kinetic Modeling of <100> and <111> Interface Trap Annealing 1986
- Point Defect Generation During Oxidation of Silicon in Dry Oxygen. II. Comparison to Experiment Journal Applied Physics 1986; 7 (59): 2551-2561
- Process Physics: Implications for Manufacturing of Submicron Silicon Devices 1986
- Morphological Studies of Polysilicon Emitter Contacts Proceedings Materials Research Society 1985; 37: 461-466
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THERMAL-OXIDATION OF SILICON IN DRY OXYGEN - GROWTH-RATE ENHANCEMENT IN THE THIN REGIME .2. PHYSICAL-MECHANISMS
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
1985; 132 (11): 2693-2700
View details for Web of Science ID A1985ATZ4700034
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THERMAL-OXIDATION OF SILICON IN DRY OXYGEN GROWTH-RATE ENHANCEMENT IN THE THIN REGIME .1. EXPERIMENTAL RESULTS
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
1985; 132 (11): 2685-2693
View details for Web of Science ID A1985ATZ4700033
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SILICON INTERSTITIAL GENERATION BY ARGON IMPLANTATION
APPLIED PHYSICS LETTERS
1985; 46 (5): 510-512
View details for Web of Science ID A1985AFC2900024
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THERMAL-OXIDATION OF SILICON IN DRY OXYGEN - ACCURATE DETERMINATION OF THE KINETIC RATE CONSTANTS
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
1985; 132 (7): 1745-1753
View details for Web of Science ID A1985ALK9100048
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MEASUREMENT AND REDUCTION OF INTERFACE STATES AT THE RECRYSTALLIZED SILICON-UNDERLYING INSULATOR INTERFACE
APPLIED PHYSICS LETTERS
1985; 46 (12): 1171-1173
View details for Web of Science ID A1985AJT1100022
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RAPID THERMAL ANNEALING OF INTERFACE STATES IN ALUMINUM GATE METAL-OXIDE-SILICON CAPACITORS
APPLIED PHYSICS LETTERS
1985; 47 (4): 400-402
View details for Web of Science ID A1985APG5500026
- Impact of Processing Parameters on Base Current in Polysilicon Contacted Bipolar Transistors 1985
- Formation of 0.1 µm N++p and P++N Junctions by Doped Silicide Technology 1985
- Thermal Oxidation of Silicon in Dry Oxygen: Growth Rate Enhancement in the Thin Regime. II. Physical Mechanisms Journal Electrochemical Society 1985; 132 (11): 2694-2700
- Insulator/Silicon Interfaces - Impact on Substrate Defects and Impurity Diffusion in VLSI Structures 1985
- Thermal Oxidation of Silicon in Dry Oxygen: Accurate Determination of the Kinetic Rate Constants Journal Electrochemical Society 1985; 132 (7): 1745-1752
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MEASUREMENT OF SILICON INTERSTITIAL DIFFUSIVITY
APPLIED PHYSICS LETTERS
1985; 47 (3): 319-321
View details for Web of Science ID A1985AMT4900053
- A Quantitative Model for Si/SiO2 Interface Charges in Oxidizing and Dilute Oxidizing Ambients 1985
- Gettering in Low Temperature VLSI Processes 1985
- Thermal Oxidation of Silicon in Dry Oxygen: Growth Rate Enhancement in the Thin Regime. I. Experimental Results Journal Electrochemical Society 1985; 132 (11): 2685-2693
- Silicon Interstitial Generation by Argon Implantation Applied Physics Letters 1985; 46 (5): 510-512
- Measurement and Reduction of Interface States at the Recrystallized Silicon-Underlying Insulator Interface Applied Physics Letters 1985; 12 (46): 1171-1172
- Substrate Current in N-Channel and P-Channel MOSFETs Between 77K and 300K: Characterization and Simulation 1985
- Modified LDD Device Structures for VLSI 1985
- A New Silicided Shallow Junction Technology for CMOS VLSI 1985
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STRUCTURE AND MORPHOLOGY OF POLYCRYSTALLINE SILICON-SINGLE CRYSTAL SILICON INTERFACES
JOURNAL OF APPLIED PHYSICS
1985; 57 (8): 2779-2782
View details for Web of Science ID A1985AHS7300014
- A High Voltage Monolithic Multiplexer for Use in Vehicle Tester Applications 1985
- Rapid Thermal Annealing of Interface States in Aluminum Gate MOS Capacitors Applied Physics Letters 1985; 46 (4): 400-402
- Power MOS Devices in Discrete and Integrated Circuits in Power Integrated Circuits, McGraw Hill 1985
- Process and Device Modeling for VLSI Structures Semiconductor Processing, ASTM, STP 850 1984
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ELECTRICAL PERFORMANCE AND PHYSICS OF ISOLATION REGION STRUCTURES FOR VLSI
IEEE TRANSACTIONS ON ELECTRON DEVICES
1984; 31 (7): 861-872
View details for Web of Science ID A1984SV87600002
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CHARACTERIZATION OF TRANSIENT PROCESS PHENOMENA USING A TEMPERATURE-TOLERANT METALLURGY
IEEE ELECTRON DEVICE LETTERS
1984; 5 (3): 75-77
View details for Web of Science ID A1984SF10700004
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EXPERIMENTAL-DETERMINATION OF THE TEMPERATURE-DEPENDENCE OF ARGON ANNEALED FIXED OXIDE CHARGE AT THE SI/SIO2 INTERFACE
APPLIED PHYSICS LETTERS
1984; 45 (3): 263-265
View details for Web of Science ID A1984TE86900031
- Structural Aspects of Polysilicon Emitter Contacts 1984
- Simulation of Multilayer Structures for VLSI Using the SUPREM III Process Simulation Program 1984
- Physical Modeling of Backside Gettering 1984
- Characterization of Bipolar Transistors with Polysilicon Emitter Contacts 1984
- Electrical Performance and Physics of Isolation Region Structures for VLSI IEEE Transactions on Electron Devices 1984; ED-31: 861-872
- Characterization of Transient Process Phenomena Using a Temperature Tolerant Metallurgy IEEE Electron Device Letters 1984; EDL-5 (3): 75-77
- Experimental Determination of the Temperature Dependence of Argon Annealed Fixed Oxide Charge at the Si/SiO2 Interface Applied Physics Letters 1984; 45 (3): 263-265
- Physical Modeling of Backside Damage Gettering 1984
- Point Defect Generation During Silicon Oxidation 1984
- Trench Isolation Technology and Device Physics 1983
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ANALOG MULTIPLEXERS SWITCH HIGH VOLTAGES
ELECTRONIC DESIGN
1983; 31 (22): 209-?
View details for Web of Science ID A1983RM49000018
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VLSI PROCESS MODELING - SUPREM-III
IEEE TRANSACTIONS ON ELECTRON DEVICES
1983; 30 (11): 1438-1453
View details for Web of Science ID A1983RT38000003
- Current Problems in Silicon Oxidation 1983
- SUPREM III - Process Simulation Toward VLSI 1983
- Kinetics of As-Grown Fixed Oxide Charge Nf at the Si-SiO2 Interface During Thermal Oxidation of Silicon 1983
- VLSI Process Modeling - SUPREM III IEEE Transactions on Electron Devices 1983; Ed-30: 1438-1453
- Thermal Oxidation: Kinetics, Charges, Physical Models, and Interaction with Other Processes in VLSI Devices 1983
- The Role of Point Defects in VLSI Processing 1983
- Oxide Growth Kinetics and Mechanical Stress Effects in the Thin Regime (<500 Å), 1982
- Process Dependence of Si/SiO2 Interface Charges 1982
- The Use of 2D Effects in LOCOS Structures to Improve Device Isolation 1982
- A Comparison of Buried Channel and Surface Channel MOSFETs for VLSI 1982
- An Implantable Ion Sensor Transducer 1981
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SMALL GEOMETRY DEPLETED BASE BIPOLAR-TRANSISTORS (BSIT) - VLSI DEVICES
IEEE TRANSACTIONS ON ELECTRON DEVICES
1981; 28 (11): 1354-1363
View details for Web of Science ID A1981MQ64900015
- The Role of the Si/SiO2 Interface in Silicon Oxidation Kinetics 1981
- Physical Mechanisms Responsible for Short Channel Effects in MOS Devices 1981
- Small Geometry Depleted Base Bipolar Transistors (BSIT) - VLSI Devices? IEEE Transactions on Electron Devices 1981; ED-28 (11): 1354-1364
- Measurement of Submicron Potential Barriers in Depleted Base Transistors 1981
- Thermal Oxidation of Silicon in Dry O2 in the Thin Regime 1981
- Process Sensitivity of Depleted Base Bipolar Transistors (BSIT) 1981
- Monolithic MOS High Voltage Integrated Circuits 1980
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ELECTRON-MOBILITY IN INVERSION AND ACCUMULATION LAYERS ON THERMALLY OXIDIZED SILICON SURFACES
IEEE TRANSACTIONS ON ELECTRON DEVICES
1980; 27 (8): 1497-1508
View details for Web of Science ID A1980KH84500029
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INSULATED-GATE PLANAR THYRISTORS .1. STRUCTURE AND BASIC OPERATION
IEEE TRANSACTIONS ON ELECTRON DEVICES
1980; 27 (2): 380-387
View details for Web of Science ID A1980JM12500010
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MODELING OF THE ON-RESISTANCE OF LDMOS, VDMOS, AND VMOS POWER TRANSISTORS
IEEE TRANSACTIONS ON ELECTRON DEVICES
1980; 27 (2): 356-367
View details for Web of Science ID A1980JM12500007
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ELECTRON-MOBILITY IN INVERSION AND ACCUMULATION LAYERS ON THERMALLY OXIDIZED SILICON SURFACES
IEEE JOURNAL OF SOLID-STATE CIRCUITS
1980; 15 (4): 562-573
View details for Web of Science ID A1980KL99300030
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INSULATED-GATE PLANAR THYRISTORS .2. QUANTITATIVE MODELING
IEEE TRANSACTIONS ON ELECTRON DEVICES
1980; 27 (2): 387-394
View details for Web of Science ID A1980JM12500011
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ON THE GENERATION OF HIGH-FREQUENCY ACOUSTIC ENERGY WITH POLYVINYLIDENE FLUORIDE
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS
1980; 27 (6): 295-303
View details for Web of Science ID A1980KX17800003
- Modeling of Depleted Base Bipolar Structures 1980
- Insulated Gate Planar Thyristors, Part I: Structure and Basic Operation IEEE Transactions on Electron Devices 1980; ED-27 (2): 380-387
- Modeling of the On Resistance of LDMOS, VDMOS, and VMOS Power MOS Transistors IEEE Transactions on Electron Devices 1980; ED-27 (2): 356-367
- Growth Kinetics and Charge Properties of Thin, Thermally Grown SiO2 Layers on Silicon 1980
- Monolithic Silicon - PVF2 Piezoelectric Arrays for Ultrasonic Imaging 8th International Symposium on Acoustical Imaging, May 30-June 2, 1978, Key Biscayne Florida, Acoustical Imaging 1980; 8: 69-95
- Electron Mobility in Inversion and Accumulation Layers on Thermally Oxidized Silicon Surfaces IEEE Transactions on Electron Devices 1980; ED-27 (8): 1497-1508
- On the Generation of High Frequency Acoustic Energy with Polyvinylidene Fluoride IEEE Transactions Sonics and Ultrasonics 1980; SU-27 (6): 295-303
- Insulated Gate Planar Thyristors, Part 2: Quantitative Modeling IEEE Transactions on Electron Devices 1980; ED-27 (2): 387-394
- Thermal Oxidation: Kinetics, Charges, Physical Models and Application 1980
- Technology and Device Structures for VLSI 1980
- Integrated Silicon-PVF2 Acoustic Transducer Arrays IEEE Transactions on Electron Devices 1979; ED-26 (12): 1921-1931
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SI-SIO2 INTERFACE OXIDATION-KINETICS - PHYSICAL MODEL FOR THE INFLUENCE OF HIGH SUBSTRATE DOPING LEVELS .2. COMPARISON WITH EXPERIMENT AND DISCUSSION
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
1979; 126 (9): 1523-1530
View details for Web of Science ID A1979HK66300019
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SI-SIO2 INTERFACE OXIDATION-KINETICS - PHYSICAL MODEL FOR THE INFLUENCE OF HIGH SUBSTRATE DOPING LEVELS .1. THEORY
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
1979; 126 (9): 1516-1522
View details for Web of Science ID A1979HK66300018
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INTEGRATED SILICON-PVF2 ACOUSTIC TRANSDUCER ARRAYS
IEEE TRANSACTIONS ON ELECTRON DEVICES
1979; 26 (12): 1921-1931
View details for Web of Science ID A1979JC56800009
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IMPROVED MOS DEVICE PERFORMANCE THROUGH THE ENHANCED OXIDATION OF HEAVILY DOPED N+ SILICON
IEEE TRANSACTIONS ON ELECTRON DEVICES
1979; 26 (4): 623-630
View details for Web of Science ID A1979GV91700048
- An Improved Wedge-Type Backing for Piezoelectric Transducers IEEE Transactions Sonics and Ultrasonics 1979; SU-26 (2): 140-142
- Improved MOS Device Performance Through the Enhanced Oxidation of Heavily Doped N++ Silicon Special Issue on VLSI, IEEE Transactions on Electron Devices 1979; ED-26 (4): 623-630
- An Advanced 34 Element Monolithic Silicon-PVF2 Piezoelectric Array for Ultrasonic Imaging 1979
- An Electronically Addressed Bulk Acoustic Wave Fourier Transform Device 1979
- Si/SiO2 Interface Oxidation Kinetics: A Physical Model for the Influence of High Substrate Doping Levels. I. Theory Journal Electrochemical Society 1979; 126 (9): 1516-1522
- Electron Mobility in Inversion and Accumulation Layers on Thermally Oxidized Silicon Surfaces 1979
- Si/SiO2 Interface Oxidation Kinetics: A Physical Model for the Influence of High Substrate Doping Levels. II. Comparison with Experiment and Discussion Journal Electrochemical Society 1979; 126 (9): 1523-1530
- Thermal Oxidation of Heavily Doped Silicon: Physical Modeling and Device Applications 1978
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THERMAL-OXIDATION OF HEAVILY PHOSPHORUS-DOPED SILICON
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
1978; 125 (4): 665-671
View details for Web of Science ID A1978EU18200035
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2-DIMENSIONAL TRANSMIT-RECEIVE CERAMIC PIEZOELECTRIC ARRAYS - CONSTRUCTION AND PERFORMANCE
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS
1978; 25 (5): 273-280
View details for Web of Science ID A1978FM84700001
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KINETICS OF THERMAL-OXIDATION OF SILICON IN O2/H2O AND O2/CL2 MIXTURES
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
1978; 125 (2): 339-346
View details for Web of Science ID A1978EK22200032
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OBSERVATION OF PHOSPHORUS PILE-UP AT SIO2-SI INTERFACE
JOURNAL OF APPLIED PHYSICS
1978; 49 (8): 4453-4458
View details for Web of Science ID A1978FL73400028
- Trade-Off Between Threshold Voltage and Breakdown in High Voltage Double Diffused MOS Transistors IEEE Transactions on Electron Devices 1978; Ed-25 (11): 1325-1327
- Kinetics of the Thermal Oxidation of Silicon in O2/H2O and O2/Cl2 Mixtures Journal Electrochemical Society 1978; 125 (2): 339-346
- Observation of Phosphorus Pile-Up at the SiO2-Si Interface Journal Applied Physics 1978; 8 (49)
- A MOS-Controlled Triac Device 1978
- Thermal Oxidation of Heavily Phosphorus Doped Silicon Journal Electrochemical Society 1978; 125 (4): 665-671
- Thermal Oxides 1978
- Two Dimensional Transmit/Receive Piezoelectric Arrays - Construction and Performance IEEE Journal Sonics and Ultrasonics 1978; SU-25 (5): 273-280
- Process Phenomena - Silicon Oxidation 1977
- Silicon Epitaxy and Oxidation Process and Device Modeling for Integrated Circuit Design edited by Wiele, V., Engl, Jespers Noordhoff-Leyden. 1977: 57–113
- The Need for Process Models in a Ubiquitous Technology 1977
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State-of-the-art in two-dimensional ultrasonic transducer array technology.
Medical physics
1976; 3 (5): 312-318
Abstract
Attention is given to means of sensing ultrasonic energy distributions over an area. Under the restraints appropiate to real-time imaging of deep body organs, piezoelectric arrays offer the most promising method. Adaptation of integrated circuit techniques to array assembly permits very large arrays of small elements to be batch fabricated. Further, special semiconductor switching devices specifically designed for addressing the array have been produced and applied. These permit both the passage of weak received signals and the application of voltage and current levels sufficient for transmission without significant disturbance of the basic piezoelectric element properties. Emphasis is placed on the complete data acquisition, processing, and display flexibility that arises from an array capability. Operation becomes possible in any of the presently used A or time motion (TM), in real time B or C scan, or in novel scan patterns adapted to specific organs. Further development with acoustic and electronic focusing, taking advantage of the unique possibilities obtained with the bidirectional array structure, is discussed.
View details for PubMedID 979920
- Avalanche Breakdown in High Voltage D-MOS Devices IEEE Transactions on Electron Devices, ED-23 1976: 1-4
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MONOLITHIC 200-V CMOS ANALOG SWITCH
IEEE JOURNAL OF SOLID-STATE CIRCUITS
1976; 11 (6): 809-817
View details for Web of Science ID A1976CQ29000012
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AVALANCHE BREAKDOWN IN HIGH-VOLTAGE D-MOS DEVICES
IEEE TRANSACTIONS ON ELECTRON DEVICES
1976; 23 (1): 1-4
View details for Web of Science ID A1976BE70700001
- Filter Bank Approach for Volume and Mean Flow Estimation in an Ultrasonic Blood Flowmeter Bulletin Electrochemical Laboratory, Japan 1976; 40 (4, 5): 392-408
- A Monolithic 200 Volt CMOS Analog Switch 1976
- A Monolithic 200 Volt CMOS Analog Switch IEEE Journal of Solid State Circuits 1976; SC-11: 809-817
- Silicon Through-Hole Substrate Bulletin Electrochemical Laboratory, Japan 1976; 40 (4, 5): 409-416
- Ultrasonic Imaging Using Two-Dimensional Transducer Arrays Cardiovascular Imaging and Image Processing, Theory and Practice 1975; 72
- State-of-the-art in Two Dimensional Ultrasonic Transducer Array Technology 1975
- A New Ultrasonic Imaging System for Real Time Cardiac Imaging 1974
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CARDIAC DYNAMICS VISUALIZATION SYSTEM
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 1974: 69–69
View details for Web of Science ID A1974S158400056
- A Real Time 3-D Ultrasonic Imaging System 1974
- Ultrasonic Imaging System for Real Time Cardiac Imaging 1974
- An Acoustic-Image Sensor Using a Transmit-Receive Array 1973
- Real Time Imaging Using a Transmit-Receive Transducer Array 1973
- A Cardiac Dynamics Visualization System 1973
- Solid-State Image Sensors for Biomedical Applications 1973
- MOS Electronics for a Portable Reading Aid for the Blind IEEE Journal of Solid-State Circuits, SC-7 1972: 111-120
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MOS ELECTRONICS FOR A PORTABLE READING AID FOR BLIND
IEEE JOURNAL OF SOLID-STATE CIRCUITS
1972; SC 7 (2): 111-?
View details for Web of Science ID A1972M061300003
- A Low-Light Self-Scanned MOS Image Sensor 1972
- High Voltage Monolithic MOS Driver Arrays 1971
- A Reading Aid for the Blind Using MOS Electronics 1970
- Integrated Electronics for a Reading Aid for the Blind 1969
- Integrated Electronics for a Reading Aid for the Blind IEEE Journal of Solid-State Circuits, SC-4 1969: 304-312