Olav Solgaard

All Publications

• Moth-eye anti-reflection structures in silicon for Long Wave IR applications JOURNAL OF MODERN OPTICS Papatzacos, P., Broaddus, P., Solgaard, O., Akram, M., Ohlckers, P. 2024

  View details for DOI 10.1080/09500340.2024.2400197

  View details for Web of Science ID 001314950600001

• Coupled Mode Design of Low-Loss Electromechanical Phase Shifters MICRO-SWITZERLAND Abebe, N. S., Pai, S., Hwang, R. L., Broaddus, P., Miao, Y., Solgaard, O. 2024; 4 (2): 334-347

  View details for DOI 10.3390/micro4020021

  View details for Web of Science ID 001317767900001

• High-efficiency vertically emitting coupler facilitated by three wave interaction gratings. Optics letters Valdez, C. G., Pai, S., Broaddus, P., Solgaard, O. 2024; 49 (9): 2373-2376

  Abstract

  We designed a grating coupler optimized for normal incidence and numerically demonstrate near-unity coupling in a standard 220-nm-thick silicon-on-insulator (SOI) technology. Our design breaks the vertical symmetry within the grating region by implementing three scattering sites per local period. This technique removes the need for bottom reflectors or additional material layers and can be realized using only two lithography masks. Using adjoint method-based optimization, we engineer the coupling spectrum of the grating, balancing the trade-off between peak efficiency and bandwidth. Using this technique, we simulate three devices with peak coupling efficiencies ranging between 93.4 (-0.3 dB) and 98.6% (-0.06 dB) with corresponding 1 dB bandwidths between 48 and 8 nm all centered around 1.55 m.

  View details for DOI 10.1364/OL.517492

  View details for PubMedID 38691722

• Subrelativistic Alternating Phase Focusing Dielectric Laser Accelerators. Physical review letters Broaddus, P., Egenolf, T., Black, D. S., Murillo, M., Woodahl, C., Miao, Y., Niedermayer, U., Byer, R. L., Leedle, K. J., Solgaard, O. 2024; 132 (8): 085001

  Abstract

  We demonstrate a silicon-based electron accelerator that uses laser optical near fields to both accelerate and confine electrons over extended distances. Two dielectric laser accelerator (DLA) designs were tested, each consisting of two arrays of silicon pillars pumped symmetrically by pulse front tilted laser beams, designed for average acceleration gradients 35 and 50  MeV/m, respectively. The DLAs are designed to act as alternating phase focusing (APF) lattices, where electrons, depending on the electron-laser interaction phase, will alternate between opposing longitudinal and transverse focusing and defocusing forces. By incorporating fractional period drift sections that alter the synchronous phase between ±60° off crest, electrons captured in the designed acceleration bucket experience half the peak gradient as average gradient while also experiencing strong confinement forces that enable long interaction lengths. We demonstrate APF accelerators with interaction lengths up to 708  μm and energy gains up to 23.7±1.07  keV FWHM, a 25% increase from starting energy, demonstrating the ability to achieve substantial energy gains with subrelativistic DLA.

  View details for DOI 10.1103/PhysRevLett.132.085001

  View details for PubMedID 38457729

• Scalable low-latency optical phase sensor array OPTICA Sun, Z., Pai, S., Valdez, C., Milanizadeh, M., Melloni, A., Morichetti, F., Miller, D. B., Solgaard, O. 2023; 10 (9): 1165-1172

  View details for DOI 10.1364/OPTICA.494612

  View details for Web of Science ID 001167720400001

• Experimental evaluation of digitally verifiable photonic computing for blockchain and cryptocurrency OPTICA Pai, S., Park, T., Ball, M., Penkovsky, B., Dubrovsky, M., Abebe, N., Milanizadeh, M., Morichetti, F., Melloni, A., Fan, S., Solgaard, O. 2023; 10 (5): 552-560

  View details for DOI 10.1364/OPTICA.476173

  View details for Web of Science ID 000996342500003

• Experimentally realized in situ backpropagation for deep learning in photonic neural networks. Science (New York, N.Y.) Pai, S., Sun, Z., Hughes, T. W., Park, T., Bartlett, B., Williamson, I. A., Minkov, M., Milanizadeh, M., Abebe, N., Morichetti, F., Melloni, A., Fan, S., Solgaard, O., Miller, D. A. 2023; 380 (6643): 398-404

  Abstract

  Integrated photonic neural networks provide a promising platform for energy-efficient, high-throughput machine learning with extensive scientific and commercial applications. Photonic neural networks efficiently transform optically encoded inputs using Mach-Zehnder interferometer mesh networks interleaved with nonlinearities. We experimentally trained a three-layer, four-port silicon photonic neural network with programmable phase shifters and optical power monitoring to solve classification tasks using "in situ backpropagation," a photonic analog of the most popular method to train conventional neural networks. We measured backpropagated gradients for phase-shifter voltages by interfering forward- and backward-propagating light and simulated in situ backpropagation for 64-port photonic neural networks trained on MNIST image recognition given errors. All experiments performed comparably to digital simulations ([Formula: see text]94% test accuracy), and energy scaling analysis indicated a route to scalable machine learning.

  View details for DOI 10.1126/science.ade8450

  View details for PubMedID 37104594

• Power monitoring in a feedforward photonic network using two output detectors NANOPHOTONICS Pai, S., Valdez, C., Park, T., Milanizadeh, M., Morichetti, F., Melloni, A., Fan, S., Solgaard, O., Miller, D. B. 2023

  View details for DOI 10.1515/nanoph-2022-0527

  View details for Web of Science ID 000909801000001

• Integrated Amplitude and Phase Monitor for Micro-Actuators. Micromachines Manosalvas-Kjono, S. N., Quan, R., Solgaard, O. 2022; 13 (8)

  Abstract

  Micro-actuators driven on resonance maximize reach and speed; however, due to their sensitivity to environmental factors (e.g., temperature and air pressure), the amplitude and phase response must be monitored to achieve an accurate actuator position. We introduce an MEMS (microelectromechanical system) amplitude and phase monitor (MAPM) with a signal-to-noise ratio of 51 dB and 11.0 kHz bandwidth, capable of simultaneously driving and sensing the movement of 1D and 2D electrostatically driven micro-actuators without modifying the chip or its packaging. The operational principle is to electromechanically modulate the amplitude of a high-frequency signal with the changing capacitance of the micro-actuator. MAPM operation is characterized and verified by simultaneously measuring the amplitude and phase frequency response of commercial micromirrors. We demonstrate that the MAPM circuitry is insensitive to complex relationships between capacitance and position of the MEMS actuators, and it is capable of giving real-time read-out of the micromirror motion. Our measurements also reveal and quantify observations of phase drift and crosstalk in 2D resonant operation. Measurements of phase changes over time under normal operation also verify the need for phase monitoring. The open-loop, high-sensitivity position sensor enables detailed characterization of dynamic micro-actuator behavior, leading to new insights and new types of operation, including improved control of nonlinear motion.

  View details for DOI 10.3390/mi13081360

  View details for PubMedID 36014282

• Immersion graded index optics: theory, design, and prototypes. Microsystems & nanoengineering Vaidya, N., Solgaard, O. 2022; 8: 69

  Abstract

  Immersion optics enable creation of systems with improved optical concentration and coupling by taking advantage of the fact that the luminance of light is proportional to the square of the refractive index in a lossless optical system. Immersion graded index optical concentrators, that do not need to track the source, are described in terms of theory, simulations, and experiments. We introduce a generalized design guide equation which follows the Pareto function and can be used to create various immersion graded index optics depending on the application requirements of concentration, refractive index, height, and efficiency. We present glass and polymer fabrication techniques for creating broadband transparent graded index materials with large refractive index ranges, (refractive index ratio)2 of ~2, going many fold beyond what is seen in nature or the optics industry. The prototypes demonstrate 3x optical concentration with over 90% efficiency. We report via functional prototypes that graded-index-lens concentrators perform close to the theoretical maximum limit and we introduce simple, inexpensive, design-flexible, and scalable fabrication techniques for their implementation.

  View details for DOI 10.1038/s41378-022-00377-z

  View details for PubMedID 35769230

  View details for PubMedCentralID PMC9234043

• Acoustic Localization With an Optical Fiber Silicon Microphone System IEEE SENSORS JOURNAL Lorenzo, S., Solgaard, O. 2022; 22 (10): 9408-9416

  View details for DOI 10.1109/JSEN.2022.3164597

  View details for Web of Science ID 000795148500029

• High gradient silicon carbide immersion lens ultrafast electron sources JOURNAL OF APPLIED PHYSICS Leedle, K. J., Niedermayer, U., Skaer, E., Urbanek, K., Miao, Y., Broaddus, P., Solgaard, O., Byer, R. L. 2022; 131 (13)

  View details for DOI 10.1063/5.0086321

  View details for Web of Science ID 000788718800005

• Quantum Nature of Dielectric Laser Accelerators PHYSICAL REVIEW X Adiv, Y., Wang, K., Dahan, R., Broaddus, P., Miao, Y., Black, D., Leedle, K., Byer, R. L., Solgaard, O., England, R., Kaminer, I. 2021; 11 (4)

  View details for DOI 10.1103/PhysRevX.11.041042

  View details for Web of Science ID 000726717900001

• Thermally-Compensated Optical Fiber Silicon Sensor Platform IEEE SENSORS JOURNAL Lorenzo, S., Kroo, A., Wong, Y., Solgaard, O. 2021; 21 (21): 24121-24128

  View details for DOI 10.1109/JSEN.2021.3112066

  View details for Web of Science ID 000712581600050

• Electron Pulse Compression with Optical Beat Note. Physical review letters Zhao, Z., Leedle, K. J., Black, D. S., Solgaard, O., Byer, R. L., Fan, S. 2021; 127 (16): 164802

  Abstract

  Compressing electron pulses is important in many applications of electron beam systems. In this study, we propose to use optical beat notes to compress electron pulses. The beat frequency is chosen to match the initial electron pulse duration, which enables the compression of electron pulses with a wide range of durations. This functionality extends the optical control of electron beams, which is important in compact electron beam systems such as dielectric laser accelerators. We also find that the dominant frequency of the electron charge density changes continuously along its drift trajectory, which may open up new opportunities in coherent interaction between free electrons and quantum or classical systems.

  View details for DOI 10.1103/PhysRevLett.127.164802

  View details for PubMedID 34723609

• Electron Pulse Compression with Optical Beat Note PHYSICAL REVIEW LETTERS Zhao, Z., Leedle, K. J., Black, D. S., Solgaard, O., Byer, R. L., Fan, S. 2021; 127 (16)

  View details for DOI 10.1103/PhysRevLett.127.164802

  View details for Web of Science ID 000707499800003

• Resonant scanning design and control for fast spatial sampling. Scientific reports Sun, Z., Quan, R., Solgaard, O. 2021; 11 (1): 20011

  Abstract

  Two-dimensional, resonant scanners have been utilized in a large variety of imaging modules due to their compact form, low power consumption, large angular range, and high speed. However, resonant scanners have problems with non-optimal and inflexible scanning patterns and inherent phase uncertainty, which limit practical applications. Here we propose methods for optimized design and control of the scanning trajectory of two-dimensional resonant scanners under various physical constraints, including high frame-rate and limited actuation amplitude. First, we propose an analytical design rule for uniform spatial sampling. We demonstrate theoretically and experimentally that by expanding the design space, the proposed designs outperform previous designs in terms of scanning range and fill factor. Second, we show that we can create flexible scanning patterns that allow focusing on user-defined Regions-of-Interest (RoI) by modulation of the scanning parameters. The scanning parameters are found by an optimization algorithm. In simulations, we demonstrate the benefits of these designs with standard metrics and higher-level computer vision tasks (LiDAR odometry and 3D object detection). Finally, we experimentally implement and verify both unmodulated and modulated scanning modes using a two-dimensional, resonant MEMS scanner. Central to the implementations is high bandwidth monitoring of the phase of the angular scans in both dimensions. This task is carried out with a position-sensitive photodetector combined with high-bandwidth electronics, enabling fast spatial sampling at [Formula: see text] Hz frame-rate.

  View details for DOI 10.1038/s41598-021-99373-y

  View details for PubMedID 34625586

• Low-Energy-Spread Attosecond Bunching and Coherent Electron Acceleration in Dielectric Nanostructures PHYSICAL REVIEW APPLIED Niedermayer, U., Black, D. S., Leedle, K. J., Miao, Y., Byer, R. L., Solgaard, O. 2021; 15 (2)

  View details for DOI 10.1103/PhysRevApplied.15.L021002

  View details for Web of Science ID 000628654500001

• Optical Fiber Photonic Crystal Hydrophone for Cellular Acoustic Sensing IEEE ACCESS Lorenzo, S., Wong, Y., Solgaard, O. 2021; 9: 42305–13

  View details for DOI 10.1109/ACCESS.2021.3066150

  View details for Web of Science ID 000633619500001

• Optical Fiber Photonic Crystal Hydrophone for Acoustic Bio-Sensing Lorenzo, S., Wong, Y., Solgaard, O., IEEE IEEE. 2021

  View details for Web of Science ID 000831479803239

• MEMS Photonic Networks For Parallelized Matrix Multiplication Using Wavelength-Division Multiplexing Pai, S., Abebe, N., Hwang, R. L., Miller, D. B., Solgaard, O., IEEE IEEE. 2021

  View details for Web of Science ID 000831479800025

• Wavelength-Division Multiplexed Optical Cryptocurrency Pai, S., Abebe, N., Dubrovsky, M., Hwang, R. L., Karpov, M., Penkovsky, B., Miller, D. B., Solgaard, O., IEEE IEEE. 2021

  View details for Web of Science ID 000831479800115

• Novel Materials-based Laser Acceleration Deng, H., Leedle, K. J., Miao, Y., Black, D. S., Urbanek, K., McNeur, J., Kozak, M., Ceballos, A., Hommelhoff, P., Solgaard, O., Byer, R. L., Harris, J. S., IEEE IEEE. 2021

  View details for Web of Science ID 000831479803055

• Fast Spatial Sampling with Phase Controlled Resonant Scanner Sun, Z., Quan, R., Solgaard, O., IEEE IEEE. 2021

  View details for Web of Science ID 000831479801194

• Operating modes of dual-grating dielectric laser accelerators PHYSICAL REVIEW ACCELERATORS AND BEAMS Black, D. S., Zhao, Z., Leedle, K. J., Miao, Y., Byer, R. L., Fan, S., Solgaard, O. 2020; 23 (11)

  View details for DOI 10.1103/PhysRevAccelBeams.23.114001

  View details for Web of Science ID 000598051300001

• Conjugated MEMS Phased Arrays for Large Field of View Random Access Scanning IEEE PHOTONICS TECHNOLOGY LETTERS Ashida, Y., Hamann, S., Landry, J., Solgaard, O. 2020; 32 (20): 1291–94

  View details for DOI 10.1109/LPT.2020.3021910

  View details for Web of Science ID 000571742200002

• Design of a multichannel photonic crystal dielectric laser accelerator PHOTONICS RESEARCH Zhao, Z., Black, D. S., England, R., Hughes, T. W., Miao, Y., Solgaard, O., Byer, R. L., Fan, S. 2020; 8 (10): 1586–98

  View details for DOI 10.1364/PRJ.394127

  View details for Web of Science ID 000577372300009

• Optical Fiber-Facet Multiplexed Monolithic Silicon Pressure Sensors Lorenzo, S., Solgaard, O. IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 2020: 10598–606

  View details for DOI 10.1109/JSEN.2020.2993770

  View details for Web of Science ID 000575389000030

• Parallel Programming of an Arbitrary Feedforward Photonic Network IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS Pai, S., Williamson, I. D., Hughes, T. W., Minkov, M., Solgaard, O., Fan, S., Miller, D. B. 2020; 26 (5)

  View details for DOI 10.1109/JSTQE.2020.2997849

  View details for Web of Science ID 000557444000001

• Self-aligned concentrating immersion-lens arrays for patterning and efficiency recovery in scaffold-reinforced perovskite solar cells APPLIED MATERIALS TODAY Printz, A. D., Zhao, O., Hamann, S., Rolston, N., Solgaard, O., Dauskardt, R. H. 2020; 20

  View details for DOI 10.1016/j.apmt.2020.100704

  View details for Web of Science ID 000598351900009

• Random Access Cylindrical Lensing and Beam Steering Using a High-Speed Linear Phased Array IEEE PHOTONICS TECHNOLOGY LETTERS Landry, J. R., Hamann, S. S., Solgaard, O. 2020; 32 (14): 859–62

  View details for DOI 10.1109/LPT.2020.3000614

  View details for Web of Science ID 000544101700004

• SPADnet: deep RGB-SPAD sensor fusion assisted by monocular depth estimation OPTICS EXPRESS Sun, Z., Lindell, D. B., Solgaard, O., Wetzstein, G. 2020; 28 (10): 14948–62

  Abstract

  Single-photon light detection and ranging (LiDAR) techniques use emerging single-photon detectors (SPADs) to push 3D imaging capabilities to unprecedented ranges. However, it remains challenging to robustly estimate scene depth from the noisy and otherwise corrupted measurements recorded by a SPAD. Here, we propose a deep sensor fusion strategy that combines corrupted SPAD data and a conventional 2D image to estimate the depth of a scene. Our primary contribution is a neural network architecture-SPADnet-that uses a monocular depth estimation algorithm together with a SPAD denoising and sensor fusion strategy. This architecture, together with several techniques in network training, achieves state-of-the-art results for RGB-SPAD fusion with simulated and captured data. Moreover, SPADnet is more computationally efficient than previous RGB-SPAD fusion networks.

  View details for DOI 10.1364/OE.392386

  View details for Web of Science ID 000538870000067

  View details for PubMedID 32403527

• Software-Based Phase Control, Video-Rate Imaging, and Real-Time Mosaicing With a Lissajous-Scanned Confocal Microscope IEEE TRANSACTIONS ON MEDICAL IMAGING Loewke, N. O., Qiu, Z., Mandella, M. J., Ertsey, R., Loewke, A., Gunaydin, L. A., Rosenthal, E. L., Contag, C. H., Solgaard, O. 2020; 39 (4): 1127–37

  Abstract

  We present software-based methods for automatic phase control and for mosaicing high-speed, Lissajous-scanned images. To achieve imaging speeds fast enough for mosaicing, we first increase the image update rate tenfold from 3 to 30 Hz, then vertically interpolate each sparse image in real-time to eliminate fixed pattern noise. We validate our methods by imaging fluorescent beads and automatically maintaining phase control over the course of one hour. We then image fixed mouse brain tissues at varying update rates and compare the resulting mosaics. Using reconstructed image data as feedback for phase control eliminates the need for phase sensors and feedback controllers, enabling long-term imaging experiments without additional hardware. Mosaicing subsampled images results in video-rate imaging speeds, nearly fully recovered spatial resolution, and millimeter-scale fields of view.

  View details for DOI 10.1109/TMI.2019.2942552

  View details for Web of Science ID 000525265800029

  View details for PubMedID 31567074

• Optical Fiber-Tip Monolithic Silicon Pressure Sensors IEEE SENSORS JOURNAL Lorenzo, S., Wong, Y., Solgaard, O. 2020; 20 (5): 2476–84

  View details for DOI 10.1109/JSEN.2019.2952546

  View details for Web of Science ID 000522451400027

• Gallium Oxide for High-Power Optical Applications ADVANCED OPTICAL MATERIALS Deng, H., Leedle, K. J., Miao, Y., Black, D. S., Urbanek, K. E., McNeur, J., Kozak, M., Ceballos, A., Hommelhoff, P., Solgaard, O., Byer, R. L., Harris, J. S. 2020

  View details for DOI 10.1002/adom.201901522

  View details for Web of Science ID 000507932100001

• Surface treatments of dielectric laser accelerators for increased laser-induced damage threshold OPTICS LETTERS Miao, Y., Black, D. S., Leedle, K. J., Zhao, Z., Deng, H., Ceballos, A., Byer, R. L., Harris, J. S., Solgaard, O. 2020; 45 (2): 391–94

  View details for DOI 10.1364/OL.379628

  View details for Web of Science ID 000510865100034

• Design of a multi-channel photonic crystal dielectric laser accelerator Zhao, Z., Black, D. S., England, R., Hughes, T. W., Miao, Y., Solgaard, O., Byer, R. L., Fan, S., IEEE IEEE. 2020

  View details for Web of Science ID 000612090003182

• High-speed axially swept light sheet microscopy using a linear MEMS phased array for isotropic resolution. Journal of biomedical optics Landry, J. n., Hamann, S. n., Solgaard, O. n. 2020; 25 (10)

  Abstract

  Axially swept light sheet microscopy is used for deconvolution-free, high-resolution 3D imaging, but usually the axial scan mechanism reduces the top imaging speed. Phased arrays (PAs) for axial scanning enable both high resolution and high speed.A high-speed PA with an update rate faster than the camera row read time is used to track the rolling shutter at camera-limited rates.The point spread function is evaluated to ensure sub-micron isotropic resolution, and the technique is demonstrated on a live Drosophila embryo.Isotropic resolution is shown down to 720  ±  55  nm in all three spatial dimensions. With an update rate of 2.85  μs, the PA tracks the camera sensor rolling shutter at camera-limited rates. Features in the Drosophila embryo are resolved clearly compared with the equivalent static light sheet case. The random-access nature of the PA enables a camera sensor readout in the same direction for each frame to maintain even temporal sampling in image sequences with no speed loss.Use of PAs is compatible with axially swept light sheet microscopy and offers significant improvements in speed.

  View details for DOI 10.1117/1.JBO.25.10.106504

  View details for PubMedID 33098281

• On-chip integrated laser-driven particle accelerator. Science (New York, N.Y.) Sapra, N. V., Yang, K. Y., Vercruysse, D. n., Leedle, K. J., Black, D. S., England, R. J., Su, L. n., Trivedi, R. n., Miao, Y. n., Solgaard, O. n., Byer, R. L., Vučkovicć, J. n. 2020; 367 (6473): 79–83

  Abstract

  Particle accelerators represent an indispensable tool in science and industry. However, the size and cost of conventional radio-frequency accelerators limit the utility and reach of this technology. Dielectric laser accelerators (DLAs) provide a compact and cost-effective solution to this problem by driving accelerator nanostructures with visible or near-infrared pulsed lasers, resulting in a 104 reduction of scale. Current implementations of DLAs rely on free-space lasers directly incident on the accelerating structures, limiting the scalability and integrability of this technology. We present an experimental demonstration of a waveguide-integrated DLA that was designed using a photonic inverse-design approach. By comparing the measured electron energy spectra with particle-tracking simulations, we infer a maximum energy gain of 0.915 kilo-electron volts over 30 micrometers, corresponding to an acceleration gradient of 30.5 mega-electron volts per meter. On-chip acceleration provides the possibility for a completely integrated mega-electron volt-scale DLA.

  View details for DOI 10.1126/science.aay5734

  View details for PubMedID 31896715

• Observation of the Quantum Nature of Laser-Driven Particle Acceleration Adiv, Y., Wang, K., Dahan, R., Broaddus, P., Miao, Y., Black, D., Leedle, K., Solgaard, O., England, J., Kaminer, I., IEEE IEEE. 2020

  View details for Web of Science ID 000612090002104

• Parallel Fault-Tolerant Programming and Optimization of Photonic Neural Networks Pai, S., Williamson, I. D., Minkov, M., Hughes, T. W., Solgaard, O., Fan, S., Miller, D. B., IEEE IEEE. 2020

  View details for Web of Science ID 000612090001197

• Broadband Optical Fiber-Facet Silicon Pressure Sensor Lorenzo, S., Wong, Y., Solgaard, O., IEEE IEEE. 2020

  View details for Web of Science ID 000612090000157

• Net Acceleration and Direct Measurement of Attosecond Electron Pulses in a Silicon Dielectric Laser Accelerator. Physical review letters Black, D. S., Niedermayer, U., Miao, Y., Zhao, Z., Solgaard, O., Byer, R. L., Leedle, K. J. 2019; 123 (26): 264802

  Abstract

  Net acceleration of attosecond-scale electron pulses is critical to the development of on-chip accelerators. We demonstrate a silicon-based laser-driven two-stage accelerator as an injector stage prototype for a Dielectric Laser Accelerator (DLA). The first stage converts a 57-keV (500±100)-fs (FWHM) electron pulse into a pulse train of 700±200 as (FWHM) microbunches. The second stage harnesses the tunability of dual-drive DLA to perform both a net acceleration and a streaking measurement. In the acceleration mode, the second stage increases the net energy of the electron pulse by 200 eV over 12.25  μm. In the deflection mode, the microbunch temporal profile is analyzed by a direct streaking measurement with 200 as resolution. This work provides a demonstration of a novel, on-chip method to access the attosecond regime, opening new paths towards attosecond science using DLA.

  View details for DOI 10.1103/PhysRevLett.123.264802

  View details for PubMedID 31951436

• Net Acceleration and Direct Measurement of Attosecond Electron Pulses in a Silicon Dielectric Laser Accelerator PHYSICAL REVIEW LETTERS Black, D. S., Niedermayer, U., Miao, Y., Zhao, Z., Solgaard, O., Byer, R. L., Leedle, K. J. 2019; 123 (26)

  View details for DOI 10.1103/PhysRevLett.123.264802

  View details for Web of Science ID 000504647800005

• Extended Design Space of Silicon-on-Nothing MEMS JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Wong, Y., Lorenzo, S., Miao, Y., Bregman, J., Solgaard, O. 2019; 28 (5): 850–58

  View details for DOI 10.1109/JMEMS.2019.2927466

  View details for Web of Science ID 000489837100014

• Matrix Optimization on Universal Unitary Photonic Devices PHYSICAL REVIEW APPLIED Pai, S., Bartlett, B., Solgaard, O., Miller, D. B. 2019; 11 (6)

  View details for DOI 10.1103/PhysRevApplied.11.064044

  View details for Web of Science ID 000473041300001

• Tunable structured illumination light sheet microscopy for background rejection and imaging depth in minimally processed tissues. Journal of biomedical optics Landry, J. R., Itoh, R., Li, J. M., Hamann, S. S., Mandella, M., Contag, C. H., Solgaard, O. 2019; 24 (4): 1–6

  Abstract

  We demonstrate improved optical sectioning in light sheet fluorescence microscopy using tunable structured illumination (SI) frequencies to optimize image quality in scattering specimens. The SI patterns are generated coherently using a one-dimensional spatial light modulator for maximum pattern contrast, and the pattern spatial frequency is adjustable up to half the incoherent cutoff frequency of our detection objective. At this frequency, we demonstrate background reductions of 2 orders of magnitude.

  View details for PubMedID 30968649

• Tunable structured illumination light sheet microscopy for background rejection and imaging depth in minimally processed tissues JOURNAL OF BIOMEDICAL OPTICS Landry, J. R., Itoh, R., Li, J. M., Hamann, S. S., Mandella, M., Contag, C. H., Solgaard, O. 2019; 24 (4)

  View details for DOI 10.1117/1.JBO.24.4.046501

  View details for Web of Science ID 000481879600009

• Laser-Driven Electron Lensing in Silicon Microstructures. Physical review letters Black, D. S., Leedle, K. J., Miao, Y., Niedermayer, U., Byer, R. L., Solgaard, O. 2019; 122 (10): 104801

  Abstract

  We demonstrate a laser-driven, tunable electron lens fabricated in monolithic silicon. The lens consists of an array of silicon pillars pumped symmetrically by two 300 fs, 1.95  μm wavelength, nJ-class laser pulses from an optical parametric amplifier. The optical near field of the pillar structure focuses electrons in the plane perpendicular to the pillar axes. With 100±10  MV/m incident laser fields, the lens focal length is measured to be 50±4  μm, which corresponds to an equivalent quadrupole focusing gradient B^{'} of 1.4±0.1  MT/m. By varying the incident laser field strength, the lens can be tuned from a 21±2  μm focal length (B^{'}>3.3  MT/m) to focal lengths on the centimeter scale.

  View details for DOI 10.1103/PhysRevLett.122.104801

  View details for PubMedID 30932681

• Laser-Driven Electron Lensing in Silicon Microstructures PHYSICAL REVIEW LETTERS Black, D. S., Leedle, K. J., Miao, Y., Niedermayer, U., Byer, R. L., Solgaard, O., ACHIP Collaboration 2019; 122 (10)

  View details for DOI 10.1103/PhysRevLett.122.104801

  View details for Web of Science ID 000461069000004

• MONOLITHIC SILICON-ON-NOTHING FIBER-BASED PRESSURE SENSORS Lorenzo, S., Wong, Y., Solgaard, O., IEEE IEEE. 2019: 1893–96

  View details for Web of Science ID 000539487000479

• Linear Micromechanical Phased Arrays Solgaard, O., Hamann, S. S., Landry, J. R., IEEE IEEE. 2019: 174–75

  View details for Web of Science ID 000522410000075

• High-speed random access optical scanning using a linear MEMS phased array OPTICS LETTERS Hamann, S., Ceballos, A., Landry, J., Solgaard, O. 2018; 43 (21): 5455–58

  Abstract

  We demonstrate a high-speed linear microelectromechanical systems (MEMS) phase modulator capable of random access scanning at 350 kHz, so that any state can be accessed in 2.9 μs from any other state. 670 scan lines with a .87 deg field of view (FOV) are demonstrated in a Fourier regime, with a projected far-field response of 660 lines with an 18 deg FOV after magnification.

  View details for DOI 10.1364/OL.43.005455

  View details for Web of Science ID 000448939000072

  View details for PubMedID 30383030

• Design and Fabrication of Monolithic Photonic Crystal Fiber Acoustic Sensor Wong, Y., Lorenzo, S., Solgaard, O. IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 2018: 7826–32

  View details for DOI 10.1109/JSEN.2018.2846788

  View details for Web of Science ID 000444832100010

• Design and Fabrication of Monolithic Photonic Crystal Fiber Acoustic Sensor. IEEE sensors journal Wong, Y. P., Lorenzo, S., Solgaard, O. 2018; 18 (19): 7826-7832

  Abstract

  Single-crystal silicon is an excellent optical and mechanical material, but its properties are compromised by the incorporation of other materials required for functionality or structural support. Here we describe a monolithic silicon acoustic sensor based on a sensing diaphragm with an integrated Photonic Crystal (PC) mirror. Diaphragm deflection is measured in a Fabry-Perot resonator formed between the PC mirror and a gold coated single-mode fiber. The sensors are fabricated on standard silicon wafers by standard CMOS processing technologies, yielding monolithic, low-stress sensing diaphragms. The packaged sensor exhibits a minimum detectable pressure of 10 μ Pa / Hz in the 8 kHz to 17 kHz frequency range.

  View details for DOI 10.1109/JSEN.2018.2846788

  View details for PubMedID 30923467

  View details for PubMedCentralID PMC6433403

• 3D printed optics with nanometer scale surface roughness MICROSYSTEMS & NANOENGINEERING Vaidya, N., Solgaard, O. 2018; 4

  View details for DOI 10.1038/s41378-018-0015-4

  View details for Web of Science ID 000438771600002

• 3D printed optics with nanometer scale surface roughness. Microsystems & nanoengineering Vaidya, N., Solgaard, O. 2018; 4: 18

  Abstract

  Complex optical devices including aspherical focusing mirrors, solar concentrator arrays, and immersion lenses were 3D printed using commercial technology and experimentally demonstrated by evaluating surface roughness and shape. The as-printed surfaces had surface roughness on the order of tens of microns. To improve this unacceptable surface quality for creating optics, a polymer smoothing technique was developed. Atomic force microscopy and optical profilometry showed that the smoothing technique reduced the surface roughness to a few nanometers, consistent with the requirements of high-quality optics, while tests of optical functionality demonstrated that the overall shapes were maintained so that near theoretically predicted operation was achieved. The optical surface smoothing technique is a promising approach towards using 3D printing as a flexible tool for prototyping and fabrication of miniaturized high-quality optics.

  View details for DOI 10.1038/s41378-018-0015-4

  View details for PubMedID 31057906

  View details for PubMedCentralID PMC6220180

• Elements of a dielectric laser accelerator OPTICA McNeur, J., Kozak, M., Schoenenberger, N., Leedle, K. J., Deng, H., Ceballos, A., Hoogland, H., Ruehl, A., Hartl, I., Holzwarth, R., Solgaard, O., Harris, J. S., Byer, R. L., Hommelhoff, P. 2018; 5 (6): 687–90

  View details for DOI 10.1364/OPTICA.5.000687

  View details for Web of Science ID 000435967000004

• Large negative and positive optical Goos-Hanchen shift in photonic crystals OPTICS LETTERS Wong, Y., Miao, Y., Skarda, J., Solgaard, O. 2018; 43 (12): 2803–6

  Abstract

  Low-loss photonic crystal (PC) mirrors exhibit positive and negative Goos-Hänchen shift (GHS) due to the strong angular and wavelength dependencies of their reflected phase. This Letter demonstrates the existence of large positive and negative GHS in PC mirrors through theoretical, numerical, and experimental approaches. A simple algebraic relation shows that positive effective thickness yields positive (negative) GHS for resonances that blue (red) shift with angle, while the opposite is true for interfaces with negative effective thickness. Spatiotemporal coupled-mode theory demonstrates the above relation for simple systems with one or two resonance modes, and it also shows the existence of both positive and negative GHS. These effects are numerically and experimentally verified in complex PCs with several resonance modes.

  View details for DOI 10.1364/OL.43.002803

  View details for Web of Science ID 000435386600020

  View details for PubMedID 29905693

• On-Chip Laser-Power Delivery System for Dielectric Laser Accelerators PHYSICAL REVIEW APPLIED Hughes, T. W., Tan, S., Zhao, Z., Sapra, N. V., Leedle, K. J., Deng, H., Miao, Y., Black, D. S., Solgaard, O., Harris, J. S., Vuckovic, J., Byer, R. L., Fan, S., England, R., Lee, Y., Qi, M. 2018; 9 (5)

  View details for DOI 10.1103/PhysRevApplied.9.054017

  View details for Web of Science ID 000433002200001

• Phase-dependent laser acceleration of electrons with symmetrically driven silicon dual pillar gratings OPTICS LETTERS Leedle, K. J., Black, D. S., Miao, Y., Urbanek, K. E., Ceballos, A., Deng, H., Harris, J. S., Solgaard, O., Byer, R. L. 2018; 43 (9): 2181–84

  Abstract

  We present the demonstration of phase-dependent laser acceleration and deflection of electrons using a symmetrically driven silicon dual pillar grating structure. We show that exciting an evanescent inverse Smith-Purcell mode on each side of a dual pillar grating can produce hyperbolic cosine acceleration and hyperbolic sine deflection modes, depending on the relative excitation phase of each side. Our devices accelerate sub-relativistic 99.0 keV kinetic energy electrons by 3.0 keV over a 15 μm distance with accelerating gradients of 200 MeV/m with 40 nJ, 300 fs, 1940 nm pulses from an optical parametric amplifier. These results represent a significant step towards making practical dielectric laser accelerators for ultrafast, medical, and high-energy applications.

  View details for DOI 10.1364/OL.43.002181

  View details for Web of Science ID 000431179400061

  View details for PubMedID 29714784

• Automated Cell Segmentation for Quantitative Phase Microscopy IEEE TRANSACTIONS ON MEDICAL IMAGING Loewke, N. O., Pai, S., Cordeiro, C., Black, D., King, B. L., Contag, C. H., Chen, B., Baer, T. M., Solgaard, O. 2018; 37 (4): 929–40

  Abstract

  Automated cell segmentation and tracking is essential for dynamic studies of cellular morphology, movement, and interactions as well as other cellular behaviors. However, accurate, automated, and easy-to-use cell segmentation remains a challenge, especially in cases of high cell densities, where discrete boundaries are not easily discernable. Here, we present a fully automated segmentation algorithm that iteratively segments cells based on the observed distribution of optical cell volumes measured by quantitative phase microscopy. By fitting these distributions to known probability density functions, we are able to converge on volumetric thresholds that enable valid segmentation cuts. Since each threshold is determined from the observed data itself, virtually no input is needed from the user. We demonstrate the effectiveness of this approach over time using six cell types that display a range of morphologies, and evaluate these cultures over a range of confluencies. Facile dynamic measures of cell mobility and function revealed unique cellular behaviors that relate to tissue origins, state of differentiation, and real-time signaling. These will improve our understanding of multicellular communication and organization.

  View details for DOI 10.1109/TMI.2017.2775604

  View details for Web of Science ID 000428886700010

  View details for PubMedID 29610072

  View details for PubMedCentralID PMC5907807

• Time-multiplexed light field synthesis via factored Wigner distribution function OPTICS LETTERS Hamann, S., Shi, L., Solgaard, O., Wetzstein, G. 2018; 43 (3): 599–602

  Abstract

  An optimization algorithm for preparing display-ready holographic elements (hogels) to synthesize a light field is outlined, and proof of concept is experimentally demonstrated. This method allows for higher-rank factorization, which can be used for time-multiplexing multiple frames for improved image quality, using phase-only and fully complex modulation with a single spatial light modulator.

  View details for DOI 10.1364/OL.43.000599

  View details for Web of Science ID 000423776600064

  View details for PubMedID 29400850

• Variable Focusing and Steering Using High Speed MEMS Phased Array Hamann, S., Solgaard, O., IEEE IEEE. 2018: 232–33

  View details for Web of Science ID 000454732000114

• Monolithic Photonic Crystal Fiber Acoustic Sensor Wong, Y., Solgaard, O., IEEE IEEE. 2017: 1113–15

  View details for Web of Science ID 000427677500375

• MONOLITHIC SILICON-ON-NOTHING PHOTONIC CRYSTAL PRESSURE SENSOR Wong, Y., Bregman, J., Solgaard, O., IEEE IEEE. 2017: 1963–66

  View details for Web of Science ID 000426701400482

• Characterizing Cardiomyocytes Motion with Quantitative Phase Imaging Cordeiro, C., Abilez, O., Gupta, T., Goetz, G., Solgaard, O., Palanker, D., IEEE IEEE. 2017

  View details for Web of Science ID 000427296200175

• Optophysiology of cardiomyocytes: characterizing cellular motion with quantitative phase imaging. Biomedical optics express Cordeiro, C. n., Abilez, O. J., Goetz, G. n., Gupta, T. n., Zhuge, Y. n., Solgaard, O. n., Palanker, D. n. 2017; 8 (10): 4652–62

  Abstract

  Quantitative phase imaging enables precise characterization of cellular shape and motion. Variation of cell volume in populations of cardiomyocytes can help distinguish their types, while changes in optical thickness during beating cycle identify contraction and relaxation periods and elucidate cell dynamics. Parameters such as characteristic cycle shape, beating frequency, duration and regularity can be used to classify stem-cell derived cardiomyocytes according to their health and, potentially, cell type. Unlike classical patch-clamp based electrophysiological characterization of cardiomyocytes, this interferometric approach enables rapid and non-destructive analysis of large populations of cells, with longitudinal follow-up, and applications to tissue regeneration, personalized medicine, and drug testing.

  View details for PubMedID 29082092

  View details for PubMedCentralID PMC5654807

• Light sheet fluorescence microscopy using high-speed structured and pivoting illumination OPTICS LETTERS Itoh, R., Landry, J. R., Hamann, S. S., Solgaard, O. 2016; 41 (21): 5015-5018

  Abstract

  We show that light sheet fluorescence microscopy with structured and pivoting illumination enables fast image acquisition and improved image quality. A one-dimensional spatial light phase modulator is used to control the illumination profile at high speed. To demonstrate the features of the system, we image fluorescent beads and biological samples, successfully obtaining optically sectioned images with higher contrast using structured illumination and with reduced shadowing effects using pivoting illumination.

  View details for DOI 10.1364/OL.41.005015

  View details for Web of Science ID 000386925800042

  View details for PubMedID 27805674

• Haltere-Like Optoelectromechanical Gyroscope IEEE SENSORS JOURNAL Kilic, O., Ra, H., Akkaya, O. C., Digonnet, M. J., Solgaard, O. 2016; 16 (11): 4274-4280

  View details for DOI 10.1109/JSEN.2016.2539687

  View details for Web of Science ID 000375563700036

• Design and fabrication of silicon-tessellated structures for monocentric imagers. Microsystems & nanoengineering Wu, T., Hamann, S. S., Ceballos, A. C., Chang, C. E., Solgaard, O., Howe, R. T. 2016; 2: 16019

  Abstract

  Compared with conventional planar optical image sensors, a curved focal plane array can simplify the lens design and improve the field of view. In this paper, we introduce the design and implementation of a segmented, hemispherical, CMOS-compatible silicon image plane for a 10-mm diameter spherical monocentric lens. To conform to the hemispherical focal plane of the lens, we use flexible gores that consist of arrays of spring-connected silicon hexagons. Mechanical functionality is demonstrated by assembling the 20-μm-thick silicon gores into a hemispherical test fixture. We have also fabricated and tested a photodiode array on a silicon-on-insulator substrate for use with the curved imager. Optical testing shows that the fabricated photodiodes achieve good performance; the hemispherical imager enables a compact 160 ° field of view camera with >80% fill factor using a single spherical lens.

  View details for DOI 10.1038/micronano.2016.19

  View details for PubMedID 31057822

  View details for PubMedCentralID PMC6444745

• Fast Stiffness Mapping of Cells Using High-Bandwidth Atomic Force Microscopy. ACS nano Wang, A., Vijayraghavan, K., Solgaard, O., Butte, M. J. 2016; 10 (1): 257-264

  Abstract

  The cytoskeleton controls cellular morphology and mediates the mechanical interactions between a cell and its environment. Atomic force microscopy (AFM) has the unique capability to map cytoskeletal mechanics and structures with nanometer resolution. However, whole-cell cytomechanical imaging with conventional AFM techniques is limited by low imaging speed. Here, we present fast nanomechanical mapping of cells using high-bandwidth AFM (HB-AFM), where >10(6) nanoindentation measurements were acquired in ∼10 min-a task that would take weeks to finish using conventional AFM. High-bandwidth measurements enabled capture of the entire tip-sample interaction for each tap on cells, engendering a new measurement ("force phase") that exceeds the contrast of conventional tapping mode and enabling spectral visualization of >10 harmonics. The abundance of measurements allowed discovery of subtle cytomechanical features, including the stiffness of fibers of the cellular spectrin network in situ. This approach bridges HB-AFM and high-harmonic imaging and opens future opportunities for measuring the dynamic mechanical properties of living cells.

  View details for DOI 10.1021/acsnano.5b03959

  View details for PubMedID 26554581

• Photonic-Crystal-Based Fiber Hydrophone With Sub-100 mu Pa/root Hz Pressure Resolution IEEE PHOTONICS TECHNOLOGY LETTERS Jan, C., Jo, W., Digonnet, M. J., Solgaard, O. 2016; 28 (2): 123-126

  View details for DOI 10.1109/LPT.2015.2487498

  View details for Web of Science ID 000366966900004

• Metal-insulator-metal waveguides for particle trapping and separation LAB ON A CHIP Khan, S. A., Chang, C., Zaidi, Z., Shin, W., Shi, Y., Bowden, A. K., Solgaard, O. 2016; 16 (12): 2302-2308

  Abstract

  Optical particle trapping and separation are essential techniques in the fields of biology and chemistry. In many applications, it is important to identify passive separation techniques that only rely on intrinsic forces in a system with a fixed device geometry. We present a dual-waveguide sorter that utilizes the loss of metal-insulator-metal (MIM) waveguides for completely passive particle trapping and separation and is created using a unique angle sidewall deposition process. Our experiments show that an inner Au-Si3N4-Au waveguide is able to trap particles within the propagation distance of its dominant modes and release the particles into an outer Au-H2O-Au waveguide. The outer waveguide then propels the particles and separates them by size. The separation results are accurately modeled by a first-principles, analytical model.

  View details for DOI 10.1039/c6lc00366d

  View details for Web of Science ID 000378944800016

  View details for PubMedID 27216706

• Dynamic and social behaviors of human pluripotent stem cells SCIENTIFIC REPORTS Phadnis, S. M., Loewke, N. O., Dimov, I. K., Pai, S., Amwake, C. E., Solgaard, O., Baer, T. M., Chen, B., Pera, R. A. 2015; 5

  Abstract

  Human pluripotent stem cells (hPSCs) can self-renew or differentiate to diverse cell types, thus providing a platform for basic and clinical applications. However, pluripotent stem cell populations are heterogeneous and functional properties at the single cell level are poorly documented leading to inefficiencies in differentiation and concerns regarding reproducibility and safety. Here, we use non-invasive time-lapse imaging to continuously examine hPSC maintenance and differentiation and to predict cell viability and fate. We document dynamic behaviors and social interactions that prospectively distinguish hPSC survival, self-renewal, and differentiation. Results highlight the molecular role of E-cadherin not only for cell-cell contact but also for clonal propagation of hPSCs. Results indicate that use of continuous time-lapse imaging can distinguish cellular heterogeneity with respect to pluripotency as well as a subset of karyotypic abnormalities whose dynamic properties were monitored.

  View details for DOI 10.1038/srep14209

  View details for Web of Science ID 000361369100001

  View details for PubMedID 26381699

  View details for PubMedCentralID PMC4585647

• Dielectric laser acceleration of sub-100 keV electrons with silicon dual-pillar grating structures OPTICS LETTERS Leedle, K. J., Ceballos, A., Deng, H., Solgaard, O., Pease, R. F., Byer, R. L., Harris, J. S. 2015; 40 (18): 4344-4347

  Abstract

  We present the demonstration of high-gradient laser acceleration and deflection of electrons with silicon dual-pillar grating structures using both evanescent inverse Smith-Purcell modes and coupled modes. Our devices accelerate subrelativistic 86.5 and 96.3 keV electrons by 2.05 keV over 5.6 μm distance for accelerating gradients of 370 MeV/m with a 3 nJ mode-locked Ti:sapphire laser. We also show that dual pillars can produce uniform accelerating gradients with a coupled-mode field profile. These results represent a significant step toward making practical dielectric laser accelerators for ultrafast, medical, and high-energy applications.

  View details for DOI 10.1364/OL.40.004344

  View details for Web of Science ID 000361556700040

• Single-Crystal Silicon Photonic-Crystal Fiber-Tip Pressure Sensors JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Wu, X., Jan, C., Solgaard, O. 2015; 24 (4): 968-975

  View details for DOI 10.1109/JMEMS.2014.2360859

  View details for Web of Science ID 000358952600024

• Optical separation of heterogeneous size distributions of microparticles on silicon nitride strip waveguides OPTICS EXPRESS Khan, S. A., Shi, Y., Chang, C., Jan, C., Fan, S., Ellerbee, A. K., Solgaard, O. 2015; 23 (7): 8855-8866

  Abstract

  We demonstrate two complementary optical separation techniques of dielectric particles on the surface of silicon nitride waveguides. Glass particles ranging from 2 μm to 10 μm in diameter are separated at guided powers below 40 mW. The effects of optical, viscous, and frictional forces on the particles are modeled and experimentally shown to enable separation. Particle interactions are investigated and shown to decrease measured particle velocity without interfering with the overall particle separation distribution. The demonstrated separation techniques have the potential to be integrated with microfluidic structures for cell sorting.

  View details for DOI 10.1364/OE.23.008855

  View details for Web of Science ID 000352290000088

  View details for PubMedID 25968723

• Dynamic and social behaviors of human pluripotent stem cells. Scientific reports Phadnis, S. M., Loewke, N. O., Dimov, I. K., Pai, S., Amwake, C. E., Solgaard, O., Baer, T. M., Chen, B., Reijo Pera, R. A. 2015; 5: 14209-?

  Abstract

  Human pluripotent stem cells (hPSCs) can self-renew or differentiate to diverse cell types, thus providing a platform for basic and clinical applications. However, pluripotent stem cell populations are heterogeneous and functional properties at the single cell level are poorly documented leading to inefficiencies in differentiation and concerns regarding reproducibility and safety. Here, we use non-invasive time-lapse imaging to continuously examine hPSC maintenance and differentiation and to predict cell viability and fate. We document dynamic behaviors and social interactions that prospectively distinguish hPSC survival, self-renewal, and differentiation. Results highlight the molecular role of E-cadherin not only for cell-cell contact but also for clonal propagation of hPSCs. Results indicate that use of continuous time-lapse imaging can distinguish cellular heterogeneity with respect to pluripotency as well as a subset of karyotypic abnormalities whose dynamic properties were monitored.

  View details for DOI 10.1038/srep14209

  View details for PubMedID 26381699

  View details for PubMedCentralID PMC4585647

• Design of resonant mirrors with negative group delay OPTICS EXPRESS Gellineau, A., Wong, Y., Solgaard, O. 2014; 22 (23): 29213-29222

  View details for DOI 10.1364/OE.22.029213

  View details for Web of Science ID 000345268500141

• Optical MEMS: From Micromirrors to Complex Systems JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Solgaard, O., Godil, A. A., Howe, R. T., Lee, L. P., Peter, Y., Zappe, H. 2014; 23 (3): 517-538

  View details for DOI 10.1109/JMEMS.2014.2319266

  View details for Web of Science ID 000337128200007

• Silicon buried gratings for dielectric laser electron accelerators APPLIED PHYSICS LETTERS Chang, C., Solgaard, O. 2014; 104 (18)

  View details for DOI 10.1063/1.4875957

  View details for Web of Science ID 000336249600079

• Digital quadrature amplitude modulation with optimized non-rectangular constellations for 100 Gb/s transmission by a directly-modulated laser OPTICS EXPRESS Ling, W. A., Lyubomirsky, I., Solgaard, O. 2014; 22 (9): 10844-10857

  Abstract

  We study the performance of novel quadrature amplitude modulation (QAM) constellations for 100 Gb/s transmission by a directly-modulated laser. Due to the strong nonlinearity of a directly-modulated laser, rectangular constellations suffer a large penalty from their regular spacing between symbols. We present a method for synthesizing irregular constellations which position symbols more efficiently. We will demonstrate the improved performance of these novel constellations over the conventional rectangular constellation as well as the superior performance achievable with digital QAM compared to optimally bit-loaded discrete-multitone modulation.

  View details for DOI 10.1364/OE.22.010844

  View details for Web of Science ID 000335905300112

  View details for PubMedID 24921784

• Double-Layer Silicon Photonic Crystal Fiber-Tip Temperature Sensors IEEE PHOTONICS TECHNOLOGY LETTERS Park, B., Jung, I. W., Provine, J., Gellineau, A., Landry, J., Howe, R. T., Solgaard, O. 2014; 26 (9): 900-903

  View details for DOI 10.1109/LPT.2014.2309345

  View details for Web of Science ID 000335819300003

• Monolithic silicon waveguides in bulk silicon wafers Conference on Next-Generation Optical Networks for Data Centers and Short-Reach Links Chang, C., Solgaard, O. SPIE-INT SOC OPTICAL ENGINEERING. 2014

  View details for DOI 10.1117/12.2044159

  View details for Web of Science ID 000338072100010

• Detection of single nano-defects in photonic crystals between crossed polarizers OPTICS EXPRESS Grepstad, J. O., Kaspar, P., Johansen, I., Solgaard, O., Sudbo, A. 2013; 21 (25): 31375-31389

  Abstract

  We investigate, by simulations and experiments, the light scattering of small particles trapped in photonic crystal membranes supporting guided resonance modes. Our results show that, due to amplified Rayleigh small particle scattering, such membranes can be utilized to make a sensor that can detect single nano-particles. We have designed a biomolecule sensor that uses cross-polarized excitation and detection for increased sensitivity. Estimated using Rayleigh scattering theory and simulation results, the current fabricated sensor has a detection limit of 26 nm, corresponding to the size of a single virus. The sensor can potentially be made both cheap and compact, to facilitate use at point-of-care.

  View details for DOI 10.1364/OE.21.031375

  View details for Web of Science ID 000328575700121

  View details for PubMedID 24514712

• Miniature fiber acoustic sensors using a photonic-crystal membrane OPTICAL FIBER TECHNOLOGY Jo, W., Akkaya, O. C., Solgaard, O., Digonnet, M. J. 2013; 19 (6): 785-792

  View details for DOI 10.1016/j.yofte.2013.07.009

  View details for Web of Science ID 000328105600010

• Engineering-reflected phase in Fabry-Perot sensors with resonant mirrors OPTICS LETTERS Gellineau, A., Wong, Y., Solgaard, O. 2013; 38 (23): 4992-4995

  Abstract

  Fabry-Perot cavities made with photonic crystal (PC) mirrors and other resonant structures exhibit nontraditional characteristics due to the strong wavelength dependence of their reflected phase. This Letter describes how engineering the phase of PC mirrors enables sensors that are tolerant to variations in laser center frequency and line width. Reflection spectra measurements of Fabry-Perot cavities made with PC mirrors were collected as a function of wavelength and cavity length, providing experimental verification of theory and simulations.

  View details for DOI 10.1364/OL.38.004992

  View details for Web of Science ID 000327815100017

  View details for PubMedID 24281492

• Fano resonances in integrated silicon Bragg reflectors for sensing applications OPTICS EXPRESS Chang, C., Solgaard, O. 2013; 21 (22): 27209-27218

  Abstract

  We investigate theoretically and experimentally Fano resonances in integrated silicon Bragg reflectors. These asymmetric resonances are obtained by interference between light reflected from the Bragg waveguide and from the end facet. The Bragg reflectors were designed and modeled using the 1D transfer matrix method, and they were fabricated in standard silicon wafers using a CMOS-compatible process. The results show that the shape and asymmetry of the Fano resonances depend on the relative phase of the reflected light from the Bragg reflectors and end facet. This phase relationship can be controlled to optimize the lineshapes for sensing applications. Temperature sensing in these integrated Bragg reflectors are experimentally demonstrated with a temperature sensitivity of 77 pm/°C based on the thermo-optic effect of silicon.

  View details for DOI 10.1364/OE.21.027209

  View details for Web of Science ID 000327007800179

  View details for PubMedID 24216944

• Finite-size limitations on Quality Factor of guided resonance modes in 2D Photonic Crystals OPTICS EXPRESS Grepstad, J. O., Greve, M. M., Holst, B., Johansen, I., Solgaard, O., Sudbo, A. 2013; 21 (20): 23640-23654

  Abstract

  High-Q guided resonance modes in two-dimensional photonic crystals, enable high field intensity in small volumes that can be exploited to realize high performance sensors. We show through simulations and experiments how the Q-factor of guided resonance modes varies with the size of the photonic crystal, and that this variation is due to loss caused by scattering of in-plane propagating modes at the lattice boundary and coupling of incident light to fully guided modes that exist in the homogeneous slab outside the lattice boundary. A photonic crystal with reflecting boundaries, realized by Bragg mirrors with a band gap for in-plane propagating modes, has been designed to suppress these edge effects. The new design represents a way around the fundamental limitation on Q-factors for guided resonances in finite photonic crystals. Results are presented for both simulated and fabricated structures.

  View details for DOI 10.1364/OE.21.023640

  View details for Web of Science ID 000325549800061

  View details for PubMedID 24104276

• Time-Division-Multiplexed Interferometric Sensor Arrays JOURNAL OF LIGHTWAVE TECHNOLOGY Akkaya, O. C., Digonnet, M. J., Kino, G. S., Solgaard, O. 2013; 31 (16): 3001-3008

  View details for DOI 10.1109/JLT.2013.2272718

  View details for Web of Science ID 000322145100001

• Short-cavity multimode fiber-tip Fabry-Perot sensors OPTICS EXPRESS Wu, X., Solgaard, O. 2013; 21 (12): 14487-14499

  Abstract

  We make the case for minimizing cavity length of extrinsic Fabry-Pérot (FP) cavities for use in fiber-tip sensors. Doing so mitigates multiple challenges that arise from using multimode fibers: mode averaging, phase uncertainty, amplitude reduction, and spectral modal noise. We explore these effects in detail using modal simulations, and construct pressure sensors based on this principle. We discuss the multimodal effects that we observe in our fiber sensors, and use simple filtering of the spectral signal to more easily measure pressure sensitivity. The concept of short-cavity FP interferometry is important for ensuring high quality and performance of multimode fiber sensors.

  View details for DOI 10.1364/OE.21.014487

  View details for Web of Science ID 000320510300060

  View details for PubMedID 23787637

• Two-axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors OPTICS EXPRESS Jeong, J., Park, B., Keum, H., Kim, S., Rogers, J. A., Solgaard, O. 2013; 21 (11): 13800-13809

  Abstract

  We present a two-axis electrostatic MEMS scanner with high-reflectivity monolithic single-crystal-silicon photonic crystal (PC) mirrors suitable for applications in harsh environments. The reflective surfaces of the MEMS scanner are transfer-printed PC mirrors with low polarization dependence, low angular dependence, and reflectivity over 85% in the wavelength range of 1490nm~1505nm and above 90% over the wavelength band of 1550~1570nm. In static mode, the scanner has total scan range of 10.2° on one rotation axis and 7.8° on the other. Dynamic operation on resonance increase the scan range to 21° at 608Hz around the outer rotation axis and 9.5° at 1.73kHz about the inner rotation axis.

  View details for DOI 10.1364/OE.21.013800

  View details for Web of Science ID 000319814900085

  View details for PubMedID 23736634

• High-Bandwidth AFM Probes for Imaging in Air and Fluid JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Vijayraghavan, K., Gellineau, A. A., Wang, A., Butte, M. J., Melosh, N. A., Solgaard, O. 2013; 22 (3): 603-612

  View details for DOI 10.1109/JMEMS.2012.2235822

  View details for Web of Science ID 000319827700011

• Measurement of elastic properties in fluid using high bandwidth atomic force microscope probes APPLIED PHYSICS LETTERS Vijayraghavan, K., Wang, A., Solgaard, O., Butte, M. J., Melosh, N. A. 2013; 102 (10)

  View details for DOI 10.1063/1.4795598

  View details for Web of Science ID 000316501200074

• MONOLITHIC SILICON WAVEGUIDES IN STANDARD SILICON IEEE MICRO Chang, C., Solgaard, O. 2013; 33 (1): 32-40

  View details for Web of Science ID 000315007400006

• Modeling and Demonstration of Thermally Stable High-Sensitivity Reproducible Acoustic Sensors Journal of Lightwave Technology Akkaya, O., C., Digonnet, M., J.F., Kino, G., S., Solgaard, O. 2013; 31 (16): 2701-2708
• Fano resonances in integrated silicon Bragg reflectors for sensing applications Optics Express Chang, C., M., Solgaard, O. 2013; 21 (22): 2720927219
• High-Reflectivity, Broadband Monolithic Silicon Photonic Crystal Mirrors on Two-Axis MEMS Scanner by Transfer-Printing Jeong, J-, W., Park, B., Keum, H., Kim, S., Rogers, J., A., Solgaard, O. 2013
• Engineering-reflected phase in Fabry–Perot sensors with resonant mirrors Optics Letters Gellineau, A., Wong, Y., P., Solgaard, O. 2013; 38 (23): 4992–4995
• Detection of single nano-defects in photonic crystals between crossed polarizers Optics Express Grepstad, J., O., Kaspar, P., Johansen, I., R., Solgaard, O., Sudbø, A. 2013; 21 (25): 31375–31389
• Monolithic Photonic Crystal-Based Fiber-TipFabry-Pérot Static Pressure Sensor Wu, X., Jan, C., Solgaard, O. 2013
• Single nano-particle sensing exploiting crossed polarizers to improve the signal-to-noise ratio Grepstad, J., O., Kaspar, P., Solgaard, O., Johansen, I-, R., Sudbø, A., S. 2013
• Short-cavity multimode fiber-tip Fabry-Pérot sensors Optics Express Wu, X., Solgaard, O. 2013; 21 (6): 14487–14499
• Double-layer silicon waveguides in standard silicon for 3D photonics Chang, C., M., Solgaard, O. 2013
• Modeling and Demonstration of Thermally Stable High-Sensitivity Reproducible Acoustic Sensors JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Akkaya, O. C., Kilic, O., Digonnet, M. J., Kino, G. S., Solgaard, O. 2012; 21 (6): 1347-1356

  View details for DOI 10.1109/JMEMS.2012.2196494

  View details for Web of Science ID 000311854500013

• Split-Frame Gimbaled Two-Dimensional MEMS Scanner for Miniature Dual-Axis Confocal Microendoscopes Fabricated by Front-Side Processing JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Jeong, J., Kim, S., Solgaard, O. 2012; 21 (2): 308-315

  View details for DOI 10.1109/JMEMS.2011.2175368

  View details for Web of Science ID 000302535800009

• Photonic-crystal membranes for optical detection of single nano-particles, designed for biosensor application OPTICS EXPRESS Grepstad, J. O., Kaspar, P., Solgaard, O., Johansen, I., Sudbo, A. S. 2012; 20 (7): 7954-7965

  Abstract

  A sensor designed to detect bio-molecules is presented. The sensor exploits a planar 2D photonic crystal (PC) membrane with sub-micron thickness and through holes, to induce high optical fields that allow detection of nano-particles smaller than the diffraction limit of an optical microscope. We report on our design and fabrication of a PC membrane with a nano-particle trapped inside. We have also designed and built an imaging system where an optical microscope and a CCD camera are used to take images of the PC membrane. Results show how the trapped nano-particle appears as a bright spot in the image. In a first experimental realization of the imaging system, single particles with a radius of 75 nm can be detected.

  View details for Web of Science ID 000302138800107

  View details for PubMedID 22453468

• Reflectivity and polarization dependence of polysilicon single-film broadband photonic crystal micro-mirrors OPTICS EXPRESS Kim, S., Hadzialic, S., Sudbo, A. S., Solgaard, O. 2012; 20 (6): 6306-6315

  Abstract

  We report on the fabrication of 2-D photonic crystal (PC) micro-mirrors, and Finite Difference Time Domain (FDTD) simulations and measurements of their reflectance spectra and polarization dependence at normal incidence. The PC mirrors were fabricated in free-standing thin polysilicon membranes supported by silicon nitride films for stress compensation. Greater than 90% reflectivity is measured over a wavelength range of 35 nm from 1565 nm to 1600 nm with small polarization dependence. Our FDTD simulations show that fabrication errors on the order of tens of nanometers can strongly affect the reflection spectra. When the fabrication errors are kept below this level, FDTD simulations on perfectly periodic structures accurately predict the reflection spectra of the fabricated PC mirrors, despite their sensitivity to the fabrication errors.

  View details for Web of Science ID 000301877700077

  View details for PubMedID 22418512

• In vivo near-infrared dual-axis confocal microendoscopy in the human lower gastrointestinal tract JOURNAL OF BIOMEDICAL OPTICS Piyawattanametha, W., Ra, H., Qiu, Z., Friedland, S., Liu, J. T., Loewke, K., Kino, G. S., Solgaard, O., Wang, T. D., Mandella, M. J., Contag, C. H. 2012; 17 (2)

  Abstract

  Near-infrared confocal microendoscopy is a promising technique for deep in vivo imaging of tissues and can generate high-resolution cross-sectional images at the micron-scale. We demonstrate the use of a dual-axis confocal (DAC) near-infrared fluorescence microendoscope with a 5.5-mm outer diameter for obtaining clinical images of human colorectal mucosa. High-speed two-dimensional en face scanning was achieved through a microelectromechanical systems (MEMS) scanner while a micromotor was used for adjusting the axial focus. In vivo images of human patients are collected at 5 frames/sec with a field of view of 362×212 μm(2) and a maximum imaging depth of 140 μm. During routine endoscopy, indocyanine green (ICG) was topically applied a nonspecific optical contrasting agent to regions of the human colon. The DAC microendoscope was then used to obtain microanatomic images of the mucosa by detecting near-infrared fluorescence from ICG. These results suggest that DAC microendoscopy may have utility for visualizing the anatomical and, perhaps, functional changes associated with colorectal pathology for the early detection of colorectal cancer.

  View details for DOI 10.1117/1.JBO.17.2.021102

  View details for Web of Science ID 000303033600004

  View details for PubMedID 22463020

  View details for PubMedCentralID PMC3380818

• Tapping-mode force spectroscopy using cantilevers with interferometric high-bandwidth force sensors APPLIED PHYSICS LETTERS Sarioglu, A. F., Magonov, S., Solgaard, O. 2012; 100 (5)

  View details for DOI 10.1063/1.3679683

  View details for Web of Science ID 000300065300065

• OvercomingMultimodal Effects in Optical Fiber Tip CMOS-Compatible Fabry-Perot Sensors Wu, X., Solgaard, O. 2012
• Enhanced scattering from nano-particles trapped in photonic crystal membranes International Conference on Optical MEMS and Nanophotonics (OMN) Grepstad, J. O., Kaspar, P., Solgaard, O., Johansen, I., Sudbo, A. S. IEEE. 2012: 21–22

  View details for Web of Science ID 000309942400011

• Asymmetric Fano Lineshapes in Integrated Silicon Bragg Reflectors Conference on Lasers and Electro-Optics (CLEO) Chang, C., Solgaard, O. IEEE. 2012

  View details for Web of Science ID 000310362402339

• 9.6-mm diameter femtosecond laser microsurgery probe Conference on Lasers and Electro-Optics (CLEO) Hoy, C. L., Ferhanoglu, O., Yildirim, M., Piyawattanametha, W., Ra, H., Solgaard, O., Ben-Yakar, A. IEEE. 2012

  View details for Web of Science ID 000310362400003

• Double-Layer Silicon Photonic Crystal Fiber Tip Temperature Sensor 25th IEEE Photonics Conference (IPC) Park, B., Jung, I. W., Provine, J., Howe, R. T., Solgaard, O. IEEE. 2012: 550–551

  View details for Web of Science ID 000312865000274

• Overcoming Multimodal Effects in Optical Fiber Tip CMOS-Compatible Fabry-Perot Sensors Conference on Lasers and Electro-Optics (CLEO) Wu, X., Solgaard, O. IEEE. 2012

  View details for Web of Science ID 000310362402186

• Interdigitated Annular CMUT Arrays for Ultrasound Assisted Delivery of Fluorescent Contrast Agents IEEE International Ultrasonics Symposium (IUS) Cristman, P., Oralkan, O., Mandella, M., Solgaard, O., Contag, C., Khuri-Yakub, B. T. IEEE. 2012: 96–99

  View details for Web of Science ID 000309918400024

• Ratiometric Molecular Microscopy: Towards Real-Time Quantitative Delineation of Brain Tumor Margins Leigh, S., Y., Wang, D., Chen, Y., Mandella, M., J., Haeberle, H., Solgaard, O. 2012
• Multifunctional Fiber Sensors Based on Photonic Crystals Solgaard, O. 2012
• Integrated Silicon Photonic Temperature Sensors Based onBragg Reflectors with Asymmetric Fano Lineshapes Chang, C., M., Solgaard, O. 2012
• Optical imaging system designed for biomolecule detection using photonic crystal membranes Grepstad, J., O., Kaspar, P., Solgaard, O., Johansen, I-, R., Sudbø, A., S. 2012
• Asymmetric Fano Lineshapes in Integrated Silicon Bragg Reflectors Chang, C., M., Solgaard, O. 2012
• Double-Layer Silicon Photonic Crystal Fiber Tip Temperature Sensor Park, B., Jung, I., W., Provine, J., Howe, R., T., Solgaard, O. 2012
• 9.6mm diameter femtosecond laser microsurgeryprobe Hoy, C., L., Ferhanoglu, O., Yildirim, M., Piyawattanametha, W., Ra, H., Solgaard, O. 2012
• Photonic Crystal Fiber Tip Sensor for High-Temperature Measurement IEEE SENSORS JOURNAL Park, B., Provine, J., Jung, I. W., Howe, R. T., Solgaard, O. 2011; 11 (11): 2643-2648

  View details for DOI 10.1109/JSEN.2011.2153844

  View details for Web of Science ID 000304162300004

• Multilayered Monolithic Silicon Photonic Crystals IEEE PHOTONICS TECHNOLOGY LETTERS Mallick, S. B., Jung, I. W., Meisner, A. M., Provine, J., Howe, R. T., Solgaard, O. 2011; 23 (11): 730-732

  View details for DOI 10.1109/LPT.2011.2132698

  View details for Web of Science ID 000290629800008

• High-Resolution Nanomechanical Mapping Using Interferometric-Force-Sensing AFM Probes JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Sarioglu, A. F., Liu, M., Solgaard, O. 2011; 20 (3): 654-664

  View details for DOI 10.1109/JMEMS.2011.2127452

  View details for Web of Science ID 000291316000015

• Optical design and imaging performance testing of a 9.6-mm diameter femtosecond laser microsurgery probe OPTICS EXPRESS Hoy, C. L., Ferhanoglu, O., Yildirim, M., Piyawattanametha, W., Ra, H., Solgaard, O., Ben-Yakar, A. 2011; 19 (11): 10536-10552

  Abstract

  We present the optical design of a 9.6-mm diameter fiber-coupled probe for combined femtosecond laser microsurgery and nonlinear optical imaging. Towards enabling clinical use, we successfully reduced the dimensions of our earlier 18-mm microsurgery probe by half, while improving optical performance. We use analytical and computational models to optimize the miniaturized lens system for off-axis scanning aberrations. The optimization reveals that the optical system can be aberration-corrected using simple aspheric relay lenses to achieve diffraction-limited imaging resolution over a large field of view. Before moving forward with custom lenses, we have constructed the 9.6-mm probe using off-the-shelf spherical relay lenses and a 0.55 NA aspheric objective lens. In addition to reducing the diameter by nearly 50% and the total volume by 5 times, we also demonstrate improved lateral and axial resolutions of 1.27 µm and 13.5 µm, respectively, compared to 1.64 µm and 16.4 µm in our previous work. Using this probe, we can successfully image various tissue samples, such as rat tail tendon that required 2-3 × lower laser power than the current state-of-the-art. With further development, image-guided, femtosecond laser microsurgical probes such as this one can enable physicians to achieve the highest level of surgical precision anywhere inside the body.

  View details for Web of Science ID 000290852800048

  View details for PubMedID 21643308

• In Vivo Imaging of Human and Mouse Skin with a Handheld Dual-Axis Confocal Fluorescence Microscope JOURNAL OF INVESTIGATIVE DERMATOLOGY Ra, H., Piyawattanametha, W., Gonzalez-Gonzalez, E., Mandella, M. J., Kino, G. S., Solgaard, O., Leake, D., Kaspar, R. L., Oro, A., Contag, C. H. 2011; 131 (5): 1061-1066

  Abstract

  Advancing molecular therapies for the treatment of skin diseases will require the development of new tools that can reveal spatiotemporal changes in the microanatomy of the skin and associate these changes with the presence of the therapeutic agent. For this purpose, we evaluated a handheld dual-axis confocal (DAC) microscope that is capable of in vivo fluorescence imaging of skin, using both mouse models and human skin. Individual keratinocytes in the epidermis were observed in three-dimensional image stacks after topical administration of near-infrared (NIR) dyes as contrast agents. This suggested that the DAC microscope may have utility in assessing the clinical effects of a small interfering RNA (siRNA)-based therapeutic (TD101) that targets the causative mutation in pachyonychia congenita (PC) patients. The data indicated that (1) formulated indocyanine green (ICG) readily penetrated hyperkeratotic PC skin and normal callused regions compared with nonaffected areas, and (2) TD101-treated PC skin revealed changes in tissue morphology, consistent with reversion to nonaffected skin compared with vehicle-treated skin. In addition, siRNA was conjugated to NIR dye and shown to penetrate through the stratum corneum barrier when topically applied to mouse skin. These results suggest that in vivo confocal microscopy may provide an informative clinical end point to evaluate the efficacy of experimental molecular therapeutics.

  View details for DOI 10.1038/jid.2010.401

  View details for Web of Science ID 000289789900014

  View details for PubMedID 21191407

• Highly Sensitive Monolithic Silicon Photonic Crystal Fiber Tip Sensor for Simultaneous Measurement of Refractive Index and Temperature JOURNAL OF LIGHTWAVE TECHNOLOGY Jung, I. W., Park, B., Provine, J., Howe, R. T., Solgaard, O. 2011; 29 (9): 1367-1374

  View details for DOI 10.1109/JLT.2011.2126018

  View details for Web of Science ID 000289802300007

• Miniature photonic-crystal hydrophone optimized for ocean acoustics JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA Kilic, O., Digonnet, M. J., Kino, G. S., Solgaard, O. 2011; 129 (4): 1837-1850

  Abstract

  This work reports on an optical hydrophone that is insensitive to hydrostatic pressure, yet capable of measuring acoustic pressures as low as the background noise in the ocean in a frequency range of 1 Hz to 100 kHz. The miniature hydrophone consists of a Fabry-Perot interferometer made of a photonic-crystal reflector interrogated with a single-mode fiber and is compatible with existing fiber-optic technologies. Three sensors with different acoustic power ranges placed within a sub-wavelength sized hydrophone head allow a high dynamic range in the excess of 160 dB with a low harmonic distortion of better than -30 dB. A method for suppressing cross-coupling between sensors in the same hydrophone head is also proposed. A prototype was fabricated, assembled, and tested. The sensitivity was measured from 100 Hz to 100 kHz, demonstrating a sound-pressure-equivalent noise spectral density down to 12 μPa/Hz(1/2), a flatband wider than 10 kHz, and very low distortion.

  View details for DOI 10.1121/1.3543949

  View details for Web of Science ID 000289298600026

  View details for PubMedID 21476640

• Modeling, design, and analysis of interferometric cantilevers for time-resolved force measurements in tapping-mode atomic force microscopy JOURNAL OF APPLIED PHYSICS Sarioglu, A. F., Solgaard, O. 2011; 109 (6)

  View details for DOI 10.1063/1.3553852

  View details for Web of Science ID 000289149900122

• AGILE: Axially Graded Index LEns as a non-tracking solar concentrator Vaidya, N., Dauskardt, R., Solgaard, O. 2011
• Fabry-Perot Fiber Sensors with Reproducible Displacement Sensitivities 16th International Conference on Optical MEMS and Nanophotonics (OMN) Akkaya, O. C., Kilic, O., Digonnet, M. J., Kino, G. S., Solgaard, O. IEEE. 2011: 191–192

  View details for Web of Science ID 000297850100081

• Double-Layer Silicon Photonic Crystal Fiber Tip Sensor 16th International Conference on Optical MEMS and Nanophotonics (OMN) Park, B., Jung, I. W., Provine, J., Shambat, G., Vuckovic, J., Howe, R. T., Solgaard, O. IEEE. 2011: 97–98

  View details for Web of Science ID 000297850100040

• 3-D MEMS Scanning System For Dual-Axis Confocal Microendoscopy 16th International Conference on Optical MEMS and Nanophotonics (OMN) Jeong, J., Mandella, M. J., Kino, G. S., Contag, C. H., Solgaard, O. IEEE. 2011: 71–72

  View details for Web of Science ID 000297850100029

• 3-D MEMS Scanning System For Dual-Axis Confocal Microendoscopy Jeong, J., W., Mandella, M., J., Kino, G., S., Contag, C., H., Solgaard, O. 2011
• Time-Resolved Tapping-Mode Atomic Force Microscopy Scanning Probe Microscopy in Nanoscience and Nanotechnology 2 Sarioglu, A., F., Solgaard, O. Springer Verlag. 2011: 1
• Fabry-Perot Fiber Sensors with Reproducible Displacement Sensitivities Akkaya, O., C., Kilic, O., Digonnet, M., J.F., Kino, G., S., Solgaard, O. 2011
• Spot Formation and Scanning Microscopy via Multimode Fibers Boucher, K., J., Jan, C., Kahn, J., M., Wilde, J., P., Solgaard, O. 2011
• Frontside-only processing of 2-D MEMS scanner for miniature dual-axis confocal microendoscopes Jeung, J., W., Vaithilingam, S., Solgaard, O. 2011
• Double-Layer Silicon Photonic Crystal Fiber Tip Sensor Park, B., Jung, I., W., Provine, J., Shambat, G., Vuckovic, J., Howe, R., T., Solgaard, O. 2011
• Interdigitated Annular CMUT Arrays for Ultrasound Assisted Delivery of Fluorescent Contrast Agents Cristman, P., Oralkan, O., Mandella, M., Solgaard, O., Contag, C., Khuri-Yakub, B., T. 2011
• Cortial blood flow imaging with a portable MEMS based2-photon fluorescence microendoscope Piyawattanametha, W., Solgaard, O., Schnitzer, M., J. 2011
• High resolution nanomechanical mapping using interferometric-force-sensing AFM probes Journal of Microelectromechanical Systems Sarioglu, A., F., Lui, M., Solgaard, O. 2011; 20 (3): 654-664
• Amplified spontaneous emission rejection with multi-functional MEMS tunable filter ELECTRONICS LETTERS Jeong, J. W., Cho, J. W., Jung, I. W., Solgaard, O. 2010; 46 (18): 1275-U57

  View details for DOI 10.1049/el.2010.0957

  View details for Web of Science ID 000281693800022

• Miniaturization of free space optical systems APPLIED OPTICS Solgaard, O. 2010; 49 (25): F18-F31

  Abstract

  Coherent illumination enables not only integrated optics, but also miniaturized free-space optics that takes advantage of the amplitude and phase control afforded by optical microelectromechanical systems (MEMS) and photonic crystals. These technologies also provide a practical and cost-effective means for integration and packaging of optical systems. The properties of miniaturized optical systems based on optical MEMS and photonic crystals are described, and efficient analysis and design approaches to miniaturized optical scanners and tunable diffractive optical elements are demonstrated. The impact of photonic crystals on free-space micro-optics is discussed.

  View details for Web of Science ID 000281748100025

  View details for PubMedID 20820200

• Displacement Sensing With a Mechanically Tunable Photonic Crystal IEEE PHOTONICS TECHNOLOGY LETTERS Hadzialic, S., Kim, S., Sarioglu, A. F., Sudbo, A. S., Solgaard, O. 2010; 22 (16): 1196-1198

  View details for DOI 10.1109/LPT.2010.2050584

  View details for Web of Science ID 000283537800004

• Photonic Components for Future Fiber Access Networks IEEE JOURNAL ON SELECTED AREAS IN COMMUNICATIONS Yen, S., Wong, S., Das, S., Cheng, N., Cho, J., Yamashita, S., Solgaard, O., Kazovsky, L. G. 2010; 28 (6): 928-935

  View details for DOI 10.1109/JSAC.2010.100816

  View details for Web of Science ID 000283383600016

• Multifunctional Tunable Optical Filter Using MEMS Spatial Light Modulator JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Jeong, J., Jung, I. W., Jung, H. J., Baney, D. M., Solgaard, O. 2010; 19 (3): 610-618

  View details for DOI 10.1109/JMEMS.2010.2043641

  View details for Web of Science ID 000278537900018

• Assessing delivery and quantifying efficacy of small interfering ribonucleic acid therapeutics in the skin using a dual-axis confocal microscope JOURNAL OF BIOMEDICAL OPTICS Ra, H., Gonzalez-Gonzalez, E., Smith, B. R., Gambhir, S. S., Kino, G. S., Solgaard, O., Kaspar, R. L., Contag, C. H. 2010; 15 (3)

  Abstract

  Transgenic reporter mice and advances in imaging instrumentation are enabling real-time visualization of cellular mechanisms in living subjects and accelerating the development of novel therapies. Innovative confocal microscope designs are improving their utility for microscopic imaging of fluorescent reporters in living animals. We develop dual-axis confocal (DAC) microscopes for such in vivo studies and create mouse models where fluorescent proteins are expressed in the skin for the purpose of advancing skin therapeutics and transdermal delivery tools. Three-dimensional image volumes, through the different skin compartments of the epidermis and dermis, can be acquired in several seconds with the DAC microscope in living mice, and are comparable to histologic analyses of reporter protein expression patterns in skin sections. Intravital imaging with the DAC microscope further enables visualization of green fluorescent protein (GFP) reporter gene expression in the skin over time, and quantification of transdermal delivery of small interfering RNA (siRNA) and therapeutic efficacy. Visualization of transdermal delivery of nucleic acids will play an important role in the development of innovative strategies for treating skin pathologies.

  View details for DOI 10.1117/1.3432627

  View details for Web of Science ID 000280642900042

  View details for PubMedID 20615029

  View details for PubMedCentralID PMC2904026

• Micromirror-scanned dual-axis confocal microscope utilizing a gradient-index relay lens for image guidance during brain surgery JOURNAL OF BIOMEDICAL OPTICS Liu, J. T., Mandella, M. J., Loewke, N. O., Haeberle, H., Ra, H., Piyawattanametha, W., Solgaard, O., Kino, G. S., Contag, C. H. 2010; 15 (2)

  Abstract

  A fluorescence confocal microscope incorporating a 1.8-mm-diam gradient-index relay lens is developed for in vivo histological guidance during resection of brain tumors. The microscope utilizes a dual-axis confocal architecture to efficiently reject out-of-focus light for high-contrast optical sectioning. A biaxial microelectromechanical system (MEMS) scanning mirror is actuated at resonance along each axis to achieve a large field of view with low-voltage waveforms. The unstable Lissajous scan, which results from actuating the orthogonal axes of the MEMS mirror at highly disparate resonance frequencies, is optimized to fully sample 500x500 pixels at two frames per second. Optically sectioned fluorescence images of brain tissues are obtained in living mice to demonstrate the utility of this microscope for image-guided resections.

  View details for DOI 10.1117/1.3386055

  View details for Web of Science ID 000278465300060

  View details for PubMedID 20459274

  View details for PubMedCentralID PMC2869369

• Two-Dimensional Photonic Crystals Fabricated in Monolithic Single-Crystal Silicon IEEE PHOTONICS TECHNOLOGY LETTERS Hadzialic, S., Kim, S., Sudbo, A. S., Solgaard, O. 2010; 22 (2): 67-69

  View details for DOI 10.1109/LPT.2009.2036143

  View details for Web of Science ID 000273091000001

• Asymmetrical Spectral Response in Fiber Fabry-Perot Interferometers (vol 27, pg 5648, 2009) JOURNAL OF LIGHTWAVE TECHNOLOGY Kilic, O., Digonnet, M. J., Kino, G. S., Solgaard, O. 2010; 28 (1): 188-188

  View details for DOI 10.1109/JLT.2009.2039364

  View details for Web of Science ID 000273569000001

• High Temperature Photonic Crystal Fiber Tip Sensor 2010 IEEE Sensors Conference Park, B., Provine, J., Howe, R. T., Solgaard, O., Jung, I. W. IEEE. 2010: 970–974

  View details for Web of Science ID 000287982100215

• Monolithic Silicon Photonic Crystal Fiber Tip Sensor for Refractive Index and Temperature Sensing Conference on Lasers and Electro-Optics (CLEO)/Quantum Electronics and Laser Science Conference (QELS) Park, B., Jung, I. W., Provine, J., Howe, R. T., Solgaard, O. IEEE. 2010

  View details for Web of Science ID 000290513600412

• High-Sensitivity Thermally Stable Acoustic Fiber Sensor 2010 IEEE Sensors Conference Akkaya, O. C., Kilic, O., Digonnet, M. J., Kino, G. S., Solgaard, O. IEEE. 2010: 1148–1151

  View details for Web of Science ID 000287982100253

• Quasi-Passive and Reconfigurable Node for Optical Access Network Conference on Lasers and Electro-Optics (CLEO)/Quantum Electronics and Laser Science Conference (QELS) Yen, S., Tendulkar, M., Jameson, J. R., Yamashita, S., Nishi, Y., Solgaard, O., Kazovsky, L. G. IEEE. 2010

  View details for Web of Science ID 000290513601076

• Surgical dual-axis confocal microscope for brain tumor resection IEEE Photonics Society Winter Topicals Meeting Series Liu, J. T., Mandella, M. J., Loewke, N. O., Haeberle, H., Ra, H., Piyawattanametha, W., Solgaard, O., Kino, G. S., Contag, C. H. IEEE. 2010: 76–77

  View details for Web of Science ID 000283803700040

• From Bench to Bedside with Advanced Confocal Microendoscope IEEE Photonics Society Winter Topicals Meeting Series Piyawattanametha, W., Mandella, M. J., Ra, H., Liu, J. T., Friedland, S., Qiu, Z., Kino, G. S., Wang, T. D., Contag, C. H., Solgaard, O. IEEE. 2010: 83–84

  View details for Web of Science ID 000283803700044

• From Bench to Bedside with Advanced Dual-Axes Confocal Microendoscope 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010) Piyawattanametha, W., Ra, H., Mandella, M. J., Contag, C. H., Solgaard, O. IEEE. 2010: 27–30

  View details for Web of Science ID 000278416400005

• A surgical confocal microscope utilizing a MEMS scanner and a GRIN relay lens for molecular image-guided brain tumor resection Liu, J., T.C., Mandella, M., J., Loewke, N., O., Garai, E., Piyawattanametha, W., Ra, H., Solgaard, O. 2010
• Photonic Crystal Mirrors for Free-Space Communication and Fiber-Optic Sensors Hadzialic, S., Jung, I., W., Kilic, O., Kim, S., Provine, J., Howe, R., T., Solgaard, O. 2010
• Quasi-Passive and Reconfigurable Node for Optical Access Network Yen, S., H., Tendulkar, M., Jameson, J., R., Yamashita, S., Nishi, Y., Solgaard, O. 2010
• From Bench to Bedside with AdvancedDual-Axes Confocal Microendoscope Piyawattanametha, W., Ra, H., Mandella, M., J., Contag, C., H., Solgaard, O. 2010
• Miniature optical-sectioning microscopy for molecular image guidance during brain tumor resection Liu, J., T.C., Mandella, M., J., Loewke, N., O., Ra, H., Solgaard, O., Kino, G., S. 2010
• High Temperature Photonic Crystal Fiber Tip Sensor Park, B., Provine, J., Jung, I-, W., Howe, R., T., Solgaard, O. 2010
• From Bench to Bedside with AdvancedDual-Axes Confocal Microendoscope Piyawattanametha, W., Mandella, M., J., Ra, H., Lui, J., T.C., Friedland, S., Qui, Z., Solgaard, O. 2010
• High-Sensitivity Thermally Stable Acoustic Fiber Sensor Akkaya, O., C., Kilic, O., Digonnet, M., J.F., Kino, G., S., Solgaard, O. 2010
• SurgicalDual-Axis Confocal Microscope for Brain Tumor Resection Lui, J., T.C., Mandella, M., J., Loewke, N., O., Haeberle, H., Ra, H., Piyawattanametha, W., Solgaard, O. 2010
• Monolithic Silicon Photonic Crystal Fiber Tip Sensor forRefractive Index and Temperature Sensing Park, B., Jung, I, W., Provine, J., Howe, R., T., Solgaard, O. 2010
• Asymmetrical Spectral Response in Fiber Fabry-Perot Interferometers JOURNAL OF LIGHTWAVE TECHNOLOGY Kilic, O., Digonnet, M. J., Kino, G. S., Solgaard, O. 2009; 27 (24): 5648-5656

  View details for DOI 10.1109/JLT.2009.2032135

  View details for Web of Science ID 000272479900001

• A Large-Area High-Reflectivity Broadband Monolithic Single-Crystal-Silicon Photonic Crystal Mirror MEMS Scanner With Low Dependence on Incident Angle and Polarization IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS Jung, I. W., Mallick, S. B., Solgaard, O. 2009; 15 (5): 1447-1454

  View details for DOI 10.1109/JSTQE.2009.2021863

  View details for Web of Science ID 000270950300023

• 3-D Near-Infrared Fluorescence Imaging Using an MEMS-Based Miniature Dual-Axis Confocal Microscope IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS Piyawattanametha, W., Ra, H., Mandella, M. J., Loewke, K., Wang, T. D., Kino, G. S., Solgaard, O., Contag, C. H. 2009; 15 (5): 1344-1350

  View details for DOI 10.1109/JSTQE.2009.2021533

  View details for Web of Science ID 000270950300008

• Introduction to the Issue on Nanophotonics and Optical MEMS IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS Peter, Y., He, S., Martin, O. J., Sasaki, M., Solgaard, O. 2009; 15 (5): 1307-1309

  View details for DOI 10.1109/JSTQE.2009.2024388

  View details for Web of Science ID 000270950300001

• High-Reflectivity Broadband Photonic Crystal Mirror MEMS Scanner With Low Dependence on Incident Angle and Polarization JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Jung, I. W., Kim, S., Solgaard, O. 2009; 18 (4): 924-932

  View details for DOI 10.1109/JMEMS.2009.2021814

  View details for Web of Science ID 000268641700018

• siRNA silencing of keratinocyte-specific GFP expression in a transgenic mouse skin model GENE THERAPY Gonzalez-Gonzalez, E., Ra, H., Hickerson, R. P., Wang, Q., Piyawattanametha, W., Mandella, M. J., Kino, G. S., Leake, D., Avilion, A. A., Solgaard, O., Doyle, T. C., Contag, C. H., Kaspar, R. L. 2009; 16 (8): 963-972

  Abstract

  Small interfering RNAs (siRNAs) can be designed to specifically and potently target and silence a mutant allele, with little or no effect on the corresponding wild-type allele expression, presenting an opportunity for therapeutic intervention. Although several siRNAs have entered clinical trials, the development of siRNA therapeutics as a new drug class will require the development of improved delivery technologies. In this study, a reporter mouse model (transgenic click beetle luciferase/humanized monster green fluorescent protein) was developed to enable the study of siRNA delivery to skin; in this transgenic mouse, green fluorescent protein reporter gene expression is confined to the epidermis. Intradermal injection of siRNAs targeting the reporter gene resulted in marked reduction of green fluorescent protein expression in the localized treatment areas as measured by histology, real-time quantitative polymerase chain reaction and intravital imaging using a dual-axes confocal fluorescence microscope. These results indicate that this transgenic mouse skin model, coupled with in vivo imaging, will be useful for development of efficient and 'patient-friendly' siRNA delivery techniques and should facilitate the translation of siRNA-based therapeutics to the clinic for treatment of skin disorders.

  View details for DOI 10.1038/gt.2009.62

  View details for Web of Science ID 000268916800004

  View details for PubMedID 19474811

• In vivo brain imaging using a portable 2.9 g two-photon microscope based on a microelectromechanical systems scanning mirror OPTICS LETTERS Piyawattanametha, W., Cocker, E. D., Burns, L. D., Barretto, R. P., Jung, J. C., Ra, H., Solgaard, O., Schnitzer, M. J. 2009; 34 (15): 2309-2311

  Abstract

  We present a two-photon microscope that is approximately 2.9 g in mass and 2.0 x 1.9 x 1.1 cm(3) in size and based on a microelectromechanical systems (MEMS) laser-scanning mirror. The microscope has a focusing motor and a micro-optical assembly composed of four gradient refractive index lenses and a dichroic microprism. Fluorescence is captured without the detected emissions reflecting off the MEMS mirror, by use of separate optical fibers for fluorescence collection and delivery of ultrashort excitation pulses. Using this microscope we imaged neocortical microvasculature and tracked the flow of erythrocytes in live mice.

  View details for Web of Science ID 000269405900022

  View details for PubMedID 19649080

• Vertical Mirror Fabrication Combining KOH Etch and DRIE of (110) Silicon JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Lee, D., Yu, K., Krishnamoorthy, U., Solgaard, O. 2009; 18 (1): 217-227

  View details for DOI 10.1109/JMEMS.2008.2009840

  View details for Web of Science ID 000263123100022

• Higher harmonics and time-varying force detection in dynamic force microscopy Handbook of Nanotechnology Quate, C., Sahin, O., Solgaard, O., Giessibl, F., J. Springer Verlag. 2009; 3: 1
• Photonic Crystal Fiber Tip Sensor for Precision Temperature Sensing 22nd Annual Meeting of the IEEE-Photonics-Society Jung, I. W., Park, B., Provine, J., Howe, R. T., Solgaard, O. IEEE. 2009: 761–762

  View details for Web of Science ID 000279577600388

• Sequential in vivo Molecular Imaging with a Dual-Axes Confocal Microscope Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference (CLEO/QELS 2009) Ra, H., Gonzalez, E., Piyawattanametha, W., Mandella, M. J., Kaspar, R., Contag, C. H., Kino, G. S., Solgaard, O. IEEE. 2009: 1–2

  View details for Web of Science ID 000274751300001

• A CMOS Compatible Low Temperature Process for Photonic CrystalMEMS Scanner Takahashi, K., Jung, I., W., Higo, A., Mita, Y., Fujita, H., Toshiyoshi, H., Solgaard, O. 2009
• Optomechanical fiber gyroscope Kilic, O., Akkaya, O., C., Digonnet, M., Kino, G., Solgaard, O. 2009
• Photonic Crystal Fiber Tip Sensorfor Precision Temperature Sensing Jung, I., W., Park, B., Provine, J., Howe, R., T., Solgaard, O. 2009
• In vivo Clinical and Intravital Imaging with MEMS Based Dual-Axes Confocal Microscopes Piyawattanametha, W., Ra, H., Mandella, M., J., Liu, J., T, Gonzalez, E., Kaspar, R., Solgaard, O. 2009
• Tunable Optical Bandpass Filter with High-Quality Vertical MirrorsMicroassembled on Movable MEMS Platforms Jeung, J., W., Jung, I., W., Baney, D., M., Solgaard, O. 2009
• Sequential in vivo Molecular Imaging with a Dual-Axes Confocal Microscope Ra, H., Gonzalez, E., Piyawattanametha, W., Mandella, M., J., Kaspar, R., Contag, C., H., Solgaard, O. 2009
• Monolithic Silicon Photonic Crystal Slab Fiber Tip Sensor Jung, I., W., Park, B., Provine, J., Howe, R., T., Solgaard, O. 2009
• Interferometric Force Sensing AFM Probes ForNanomechanical Mapping of Material Properties Sarioglu, F., Liu, M., Solgaard, O. 2009
• Fiber-Optical Acoustic Sensor Based on a Photonic-Crystal Diaphragm Kilic, O., Digonnet, M., J.F., Kino, G., S., Solgaard, O. 2009
• Analysis of guided-resonance-based polarization beam splitting in photonic crystal slabs JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION Kilic, O., Fan, S., Solgaard, O. 2008; 25 (11): 2680-2692

  Abstract

  We present an analysis of the phase and amplitude responses of guided resonances in a photonic crystal slab. Through this analysis, we obtain the general rules and conditions under which a photonic crystal slab can be employed as a general elliptical polarization beam splitter, separating an incoming beam equally into its two orthogonal constituents, so that half the power is reflected in one polarization state, and half the power is transmitted in the other state. We show that at normal incidence a photonic crystal slab acts as a dual quarter-wave retarder in which the fast and slow axes are switched for reflection and transmission. We also analyze the case where such a structure operates at oblique incidences. As a result we show that the effective dielectric constant of the photonic crystal slab imposes the Brewster angle as a boundary, separating two ranges of angles with different mechanisms of polarization beam splitting. We show that the diattenuation can be tuned from zero to one to make the structure a circular or linear polarization beam splitter. We verify our analytical analysis through finite-difference time-domain simulations and experimental measurements at infrared wavelengths.

  View details for Web of Science ID 000261520700008

  View details for PubMedID 18978845

• Pull-In Analysis of Torsional Scanners Actuated by Electrostatic Vertical Combdrives JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Lee, D., Solgaard, O. 2008; 17 (5): 1228-1238

  View details for DOI 10.1109/JMEMS.2008.2004824

  View details for Web of Science ID 000260464800019

• Controlling uncoupled resonances in photonic crystals through breaking the mirror symmetry OPTICS EXPRESS Kilic, O., Digonnet, M., Kino, G., Solgaard, O. 2008; 16 (17): 13090-13103

  Abstract

  We show that modes in a photonic crystal slab that are uncoupled to outside radiation in a symmetric structure can be excited by breaking the mirror symmetry through introducing a protrusion on the side of the photonic crystal holes. We show that coupling to these resonances can be controlled by the strength of this asymmetry, and that it is also possible to choose among modes to couple to, through the shape of the asymmetry introduced. We provide simple theoretical arguments that explain the effect, and present eigenmode simulations and time-domain simulations. We confirm this predicted behavior with measurements on a photonic crystal with a broken mirror symmetry that exhibits an additional sharp resonant feature with a linewidth of 0.5 nm, in agreement with both calculated and simulated predictions.

  View details for Web of Science ID 000259268700070

  View details for PubMedID 18711548

• Cantilevers with integrated sensor for time-resolved force measurement in tapping-mode atomic force microscopy APPLIED PHYSICS LETTERS Sarioglu, A. F., Solgaard, O. 2008; 93 (2)

  View details for DOI 10.1063/1.2959828

  View details for Web of Science ID 000257796100091

• Miniaturized probe for femtosecond laser microsurgery and two-photon imaging OPTICS EXPRESS Hoy, C. L., Durr, N. J., Chen, P., Piyawattanametha, W., Ra, H., Solgaard, O., Ben-Yakar, A. 2008; 16 (13): 9996-10005

  Abstract

  Combined two-photon fluorescence microscopy and femtosecond laser microsurgery has many potential biomedical applications as a powerful "seek-and-treat" tool. Towards developing such a tool, we demonstrate a miniaturized probe which combines these techniques in a compact housing. The device is 10 x 15 x 40 mm(3) in size and uses an aircore photonic crystal fiber to deliver femtosecond laser pulses at 80 MHz repetition rate for imaging and 1 kHz for microsurgery. A fast two-axis microelectromechanical system scanning mirror is driven at resonance to produce Lissajous beam scanning at 10 frames per second. Field of view is 310 microm in diameter and the lateral and axial resolutions are 1.64 microm and 16.4 microm, respectively. Combined imaging and microsurgery is demonstrated using live cancer cells.

  View details for Web of Science ID 000257563900082

  View details for PubMedID 18575570

• Three-dimensional in vivo imaging by a handheld dual-axes confocal microscope OPTICS EXPRESS Ra, H., Piyawattanametha, W., Mandella, M. J., Hsiung, P., Hardy, J., Wang, T. D., Contag, C. H., Kino, G. S., Solgaard, O. 2008; 16 (10): 7224-7232

  Abstract

  We present a handheld dual-axes confocal microscope that is based on a two-dimensional microelectromechanical systems (MEMS) scanner. It performs reflectance and fluorescence imaging at 488 nm wavelength, with three-dimensional imaging capability. The fully packaged microscope has a diameter of 10 mm and acquires images at 4 Hz frame rate with a maximum field of view of 400 microm x 260 microm. The transverse and axial resolutions of the handheld probe are 1.7 microm and 5.8 microm, respectively. Capability to perform real time small animal imaging is demonstrated in vivo in transgenic mice.

  View details for Web of Science ID 000256469800048

  View details for PubMedID 18545427

• Scalable optical switches with large port count based on a waveguide grating router and passive couplers IEEE PHOTONICS TECHNOLOGY LETTERS Joe, I., Solgaard, O. 2008; 20 (5-8): 508-510

  View details for DOI 10.1109/LPT.2008.918237

  View details for Web of Science ID 000257952800061

• Micro and Nano Electromechanical Systems National Nanotechnology Infrastructure Network (NNIN) Open Textbook on Nanotechnology (33 pages), http://www.nano.umn.edu/nnin_opentext/contents.jsp Howe, R., T., Maharbiz, M., M., Muhlstein, C., L., Solgaard, O. 2008: 1
• Large-Area High-Reflectivity Broadband Monolithic Silicon Photonic Crystal Mirror MEMS Scanner IEEE/LEOS International Conference on Optical MEMS and Nanophotonics Jung, I. W., Mallick, S. B., Solgaard, O. IEEE. 2008: 76–77

  View details for Web of Science ID 000264556700039

• Large-Area Monolithic Photonic Crystal Mirrors with High Reflectivity in the 1250-1650nm Band Patterned by Optical Lithography IEEE/LEOS International Conference on Optical MEMS and Nanophotonics Jung, I. W., Mallick, S. B., Solgaard, O. IEEE. 2008: 86–87

  View details for Web of Science ID 000264556700044

• Two-Photon Luminescence Imaging Using a MEMS-Based Miniaturized Probe Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference (CLEO/QELS 2008) Hoy, C., Durr, N., Chen, P., Smith, D. K., Larson, T., Piyawattanametha, W., Ra, H., Korgel, B., Sokolov, K., Solgaard, O., Ben-Yakar, A. IEEE. 2008: 951–952

  View details for Web of Science ID 000260498400477

• Photonic-crystal-diaphragm-based fiber-tip hydrophone optimized for ocean acoustics 19th International Conference on Optical Fibre Sensors Kilic, O., Digonnet, M., Kino, G., Solgaard, O. SPIE-INT SOC OPTICAL ENGINEERING. 2008

  View details for DOI 10.1117/12.785919

  View details for Web of Science ID 000258398100003

• Double-layered Monolithic Silicon Photonic Crystals Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference (CLEO/QELS 2008) Mallick, S. B., Kim, S., Hadzialic, S., Sudbo, A., Solgaard, O. IEEE. 2008: 857–858

  View details for Web of Science ID 000260498400430

• MEMS based Dual-Axes Confocal Clinical Endoscope for Real Time in vivo Imaging IEEE/LEOS International Conference on Optical MEMS and Nanophotonics Piyawattanametha, W., Mandella, M. J., Ra, H., Liu, J. T., Garai, E., Kino, G. S., Solgaard, O., Contag, C. H. IEEE. 2008: 42–43

  View details for Web of Science ID 000264556700022

• Three-dimensional in-vivo imaging with a miniature dual-axes confocal fluorescence microscope Piyawattanametha, W., Mandella, M., J., Ra, H., Du, C., Contag, C., H., Kino, G., S., Solgaard, O. 2008
• Double-layered Monolithic Silicon Photonic Crystals Mallick, S., Basu, Kim, S., Hadzialic, S., Sudbø, A., Solgaard, O. 2008
• Large-Area Monolithic Photonic Crystal Mirrors with High Reflectivity in the 1250-1650nm Band Patterned by Optical Lithography Jung, I., W., Mallick, S., B., Solgaard, O. 2008
• Interface Quality Control of Monolithic Photonic Crystals by Hydrogen Annealing Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference (CLEO/QELS 2008) Kim, S., Kant, R., Hadzialic, S., Howe, R. T., Solgaard, O. IEEE. 2008: 316–317

  View details for Web of Science ID 000260498400159

• Microelectromechanical Systems for Lightwave Communication Optical Fiber Telecommunications, A: Components and Subsystems Wu, M., C., Solgaard, O., Ford, J., E. edited by Kaminow, I., P., Li, T., Willner, A., E. Academic Press. 2008: 713–758
• Displacement sensing with a mechanically tunable photonic crystal Hadzialic, S., Kim, S., Sudbø, A., Solgaard, O. 2008
• Monolithic photonic crystals Hadzialic, S., Kim, S., Mallick, S., Basu, Sudbø, A., Solgaard, O. 2008
• Two-Photon Luminescence Imaging Using a MEMS-Based Miniaturized Probe Hoy, C., Durr, N., Chen, P., Smith, D., K., Larson, T., Piyawattanametha, W., Solgaard, O. 2008
• Interface Quality Control of Monolithic Photonic Crystals by Hydrogen Annealing Kim, S., Kant, R., Hadzialic, S., Howe, R., T., Solgaard, O. 2008
• MEMS based Dual-Axes Confocal Clinical Endoscope for Real Time in vivo Imaging Piyawattanametha, W., Mandella, M., J., Ra, H., Liu, J., T.C., Garai, E., Kino, G., S., Solgaard, O. 2008
• Photonic Microsystems - Micro and Nanotechnology Applied to Optical Devices and Systems Solgaard, O. Springer Verlag. 2008
• In vivo Intravital Imaging with a Dual-Axes Confocal Microscope in Skin Ra, H., Piyawattanametha, W., Gonzalez, E., Kaspar, R., Mandella, M., J., Contag, C., H., Solgaard, O. 2008
• Large-Area High-Reflectivity Broadband Monolithic Silicon Photonic Crystal Mirror MEMS Scanner Jung, I., W., Mallick, S., B., Solgaard, O. 2008
• Photonic-crystal-diaphragm-based fiber-tip hydrophone optimized for ocean acoustics Kilic, O., Digonnet, M., Kino, G., Solgaard, O. 2008
• Reconfigurable optical wavelength multiplexer using a MEMS tunable blazed grating JOURNAL OF LIGHTWAVE TECHNOLOGY Antoine, C., Li, X., Wang, J., Solgaard, O. 2007; 25 (10): 3100-3107

  View details for DOI 10.1109/JLT.2007.904427

  View details for Web of Science ID 000250846000027

• External fibre Fabry-Perot acoustic sensor based on a photonic-crystal mirror 18th International Conference on Optical Fibre Sensors Kilic, O., Digonnet, M., Kino, G., Solgaard, O. IOP PUBLISHING LTD. 2007: 3049–54

  View details for DOI 10.1088/0957-0233/18/10/S01

  View details for Web of Science ID 000249982100002

• An atomic force microscope tip designed to measure time-varying nanomechanical forces NATURE NANOTECHNOLOGY Sahin, O., Magonov, S., Su, C., Quate, C. F., Solgaard, O. 2007; 2 (8): 507-514

  Abstract

  Tapping-mode atomic force microscopy (AFM), in which the vibrating tip periodically approaches, interacts and retracts from the sample surface, is the most common AFM imaging method. The tip experiences attractive and repulsive forces that depend on the chemical and mechanical properties of the sample, yet conventional AFM tips are limited in their ability to resolve these time-varying forces. We have created a specially designed cantilever tip that allows these interaction forces to be measured with good (sub-microsecond) temporal resolution and material properties to be determined and mapped in detail with nanoscale spatial resolution. Mechanical measurements based on these force waveforms are provided at a rate of 4 kHz. The forces and contact areas encountered in these measurements are orders of magnitude smaller than conventional indentation and AFM-based indentation techniques that typically provide data rates around 1 Hz. We use this tool to quantify and map nanomechanical changes in a binary polymer blend in the vicinity of its glass transition.

  View details for DOI 10.1038/nnano.2007.226

  View details for Web of Science ID 000249062900016

  View details for PubMedID 18654349

• Two-dimensional MEMS scanner for dual-axes confocal microscopy JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Ra, H., Piyawattanametha, W., Taguchi, Y., Lee, D., Mandella, M. J., Solgaard, O. 2007; 16 (4): 969-976

  View details for DOI 10.1109/JMEMS.2007.892900

  View details for Web of Science ID 000248578700021

• Fiber-optic confocal microscope using a MEMS scanner and miniature objective lens OPTICS EXPRESS Shin, H., Pierce, M. C., Lee, D., Ra, H., Solgaard, O., Richards-Kortum, R. 2007; 15 (15): 9113-9122

  Abstract

  We designed and constructed a single-fiber-optic confocal microscope (SFCM) with a microelectromechanical system (MEMS) scanner and a miniature objective lens. Axial and lateral resolution values for the system were experimentally measured to be 9.55 mum and 0.83 mum respectively, in good agreement with theoretical predictions. Reflectance images were acquired at a rate of 8 frames per second, over a 140 mum x 70 mum field-of-view. In anticipation of future applications in oral cancer detection, we imaged ex vivo and in vivo human oral tissue with the SFCM, demonstrating the ability of the system to resolve cellular detail.

  View details for Web of Science ID 000248394500002

  View details for PubMedID 19547251

• Introduction to the issue on optical micro- and nanosystems IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS Talghader, J. J., Solgaard, O., Lin, L. Y. 2007; 13 (2): 145-146

  View details for DOI 10.1109/JSTQE.2007.894188

  View details for Web of Science ID 000246123200001

• Optical pattern generation using a, spatial light modulator for maskless lithography IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS Jung, I. W., Wang, J., Solgaard, O. 2007; 13 (2): 147-154

  View details for DOI 10.1109/JSTQE.2006.893095

  View details for Web of Science ID 000246123200002

• Single-crystal-silicon continuous membrane deformable mirror array for adaptive optics in space-based telescopes IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS Woong-Jung, I., Peter, Y., Carr, E., Wang, J., Solgaard, O. 2007; 13 (2): 162-167

  View details for DOI 10.1109/JSTQE.2007.893560

  View details for Web of Science ID 000246123200004

• Superresolution digital image enhancement by subpixel image translation with a scanning micromirror IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS Yu, K., Park, N., Lee, D., Solgaard, O. 2007; 13 (2): 304-311

  View details for DOI 10.1109/JSTQE.2006.893110

  View details for Web of Science ID 000246123200023

• Miniature near-infrared dual-axes confocal microscope utilizing a two-dimensional microelectromechanical systems scanner OPTICS LETTERS Liu, J. T., Mandella, M. J., Ra, H., Wong, L. K., Solgaard, O., Kino, G. S., Piyawattanametha, W., Contag, C. H., Wang, T. D. 2007; 32 (3): 256-258

  Abstract

  The first, to our knowledge, miniature dual-axes confocal microscope has been developed, with an outer diameter of 10 mm, for subsurface imaging of biological tissues with 5-7 microm resolution. Depth-resolved en face images are obtained at 30 frames per second, with a field of view of 800 x 100 microm, by employing a two-dimensional scanning microelectromechanical systems mirror. Reflectance and fluorescence images are obtained with a laser source at 785 nm, demonstrating the ability to perform real-time optical biopsy.

  View details for Web of Science ID 000244278900018

  View details for PubMedID 17215937

• Portable forms of fiber-optic one- and two-photon fluorescence microendoseopy towards imaging in freely moving mice 51st Annual Meeting of the Biophysical-Society Cocker, E. D., Flusberg, B. A., Piyawattanametha, W., Jung, J. C., Baretto, R. P., Ko, T. H., Ra, H., Lee, D., Solgaard, O., Schnitzer, M. J. CELL PRESS. 2007: 154A–154A

  View details for Web of Science ID 000243972400714

• A portable two-photon fluorescence microendoscope based on a two-dimensional scanning mirror IEEE/LEOS International Conference on Optical MEMS and Nanophotonics Piyawattanametha, W., Cocker, E. D., Barretto, R. P., Jung, J. C., Flusberg, B. A., Ra, H., Solgaard, O., Schnitzer, M. J. IEEE. 2007: 6–7

  View details for Web of Science ID 000251224200004

• An external cavity tunable laser with a low-loss narrowband MEMS tunable blazed grating 20th Annual Meeting of the IEEE-Lasers-and-Electro-Optics-Society Antoine, C., Li, X., Sesko, D., Solgaard, O. IEEE. 2007: 834–835

  View details for Web of Science ID 000259345200418

• Vortex generation and pixel calibration using a spatial light modulator for maskless lithography IEEE/LEOS International Conference on Optical MEMS and Nanophotonics Jung, I. W., Wang, J., Solgaard, O. IEEE. 2007: 147–148

  View details for Web of Science ID 000251224200072

• Pull-in analysis of scanners actuated by electrostatic vertical combdrives IEEE/LEOS International Conference on Optical MEMS and Nanophotonics Lee, D., Solgaard, O. IEEE. 2007: 85–86

  View details for Web of Science ID 000251224200043

• Displacement sensing with a mechanically tunable photonic crystal 20th Annual Meeting of the IEEE-Lasers-and-Electro-Optics-Society Hadzialic, S., Kim, S., Sudbo, A., Solgaard, O. IEEE. 2007: 345–346

  View details for Web of Science ID 000259345200170

• Large-stroke self-aligned vertical comb drive actuated micromirror arrays for adaptive optics applications Conference on MEMS Adaptive Optics Carr, E., Olivier, S., Solgaard, O. SPIE-INT SOC OPTICAL ENGINEERING. 2007

  View details for DOI 10.1117/12.710894

  View details for Web of Science ID 000246079300025

• Monolithic photonic crystals 20th Annual Meeting of the IEEE-Lasers-and-Electro-Optics-Society Hadzialic, S., Kim, S., Mallick, S. B., Sudbo, A., Solgaard, O. IEEE. 2007: 341–342

  View details for Web of Science ID 000259345200168

• Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope Conference on MOEMS and Miniaturized Systems VI Ra, H., Piyawattanametha, W., Taguchi, Y., Solgaard, O. SPIE-INT SOC OPTICAL ENGINEERING. 2007

  View details for DOI 10.1117/12.711560

  View details for Web of Science ID 000245835900015

• Three-dimensional In vivo real time imaging by a miniature dual-axes confocal microscope based on a two-dimensional mems scanner 14th International Conference on Solid-State Sensors, Actuators and Microsystems/21st European Conference on Solid-State Transducers Piyawattanametha, W., Ra, H., Mandella, M. J., Liu, J. T., Wong, L. K., Du, C. B., Wang, T. D., Contag, C. H., Kino, G. S., Solgaard, O. IEEE. 2007

  View details for Web of Science ID 000249603700105

• Single-film Broadband Photonic Crystal Micro-mirror with Large Angular Range and Low Polarization Dependence Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference Kim, S., Hadzialic, S., Sudbo, A., Solgaard, O. IEEE. 2007: 1255–1256

  View details for Web of Science ID 000268751001067

• High reflectivity broadband photonic crystal mirror MEMS scanner 14th International Conference on Solid-State Sensors, Actuators and Microsystems/21st European Conference on Solid-State Transducers Jung, I. W., Kim, S., Solgaard, O. IEEE. 2007

  View details for Web of Science ID 000249603700375

• Compact optical design for dual-axes confocal endoscopic microscopes Conference on Three-Dimensional and Multidimensional Microscopy - Image Acquisition and Processing XIV Mandella, M. J., Liua, J. T., Piyawattanametha, W., Ra, H., Hsiung, P., Wong, L. K., Solgaard, O., Wang, T. D., Contag, C. H., Kino, G. S. SPIE-INT SOC OPTICAL ENGINEERING. 2007

  View details for DOI 10.1117/12.699484

  View details for Web of Science ID 000245855700007

• Three-Dimensional in vivo Reflectance and Fluorescence Imaging by a Handheld Dual-Axes Confocal Microscope Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference Ra, H., Piyawattanametha, W., Mandella, M. J., Liu, J. T., Wong, L. K., Wang, T. D., Contag, C. H., Kino, G. S., Solgaard, O. IEEE. 2007: 795–796

  View details for Web of Science ID 000268751000400

• Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope (invited talk) Ra, H., Piyawattanametha, W., Taguchi, Y., Lee, D., Solgaard, O. 2007
• Three-Dimensional in vivo Reflectance and Fluorescence Imaging by a Handheld Dual-Axes Confocal Microscope Ra, H., Piyawattanametha, W., Mandella, M., J., Liu, J., T.C., Wong, L., K., Wang, T., D., Solgaard, O. 2007
• A compact 15-mm wide two-photon microscope for imaging and femtosecond laser microsurgery Hoy, C., L., Durr, N., J., Douglass, S., Mallick, S., Solgaard, O., Ben-Yakar, A. 2007
• A Portable Two-photon Fluorescence Microendoscope Based on a Two-dimensional Scanning Mirror Piyawattananmetha, W., Crocker, E., D, Barretto, R., P.J., Jung, J., C., Flusberg, B., A., Ra, H., Solgaard, O. 2007
• Vortex Generation and Pixel Calibration Using a Spatial Light Modulators for Maskless Lithography Jung, I., W., Wang, J, S., Solgaard, O. 2007
• Large-Stroke Self-Aligned Vertical Comb Drive Actuated Micromirror Arrays for Adaptive Optics Applications Carr, E., Olivier, S., Solgaard, O. 2007
• Compact optical design for a dual-axes confocal endoscopic microscope Mandella, M., J., Liu, J., T.C., Piyawattanametha, W., Ra, H., Hsiung, P., Wong, L., K., Solgaard, O. 2007
• Three-Dimensional In Vivo Real Time Imaging By A Miniature Dual-Axes Confocal Microscope Based on a Two-Dimensional MEMS Scanner Piyawattanametha, W., Ra, H., Mandella, M., J., Liu, J., T.C., Wong, L., K., Du, C., B., Solgaard, O. 2007
• High Reflectivity Broadband Photonic Crystal Mirror MEMS Scanner Jung, I., W., Kim, S., Solgaard, O. 2007
• MEMS Based Dual-axes Confocal Microscope for in-vivo Imaging Piyawattanametha, W., Ra, H., Mandella, M., J., Liu, J., T.C., Wong, L., K., Hsiung, P., Solgaard, O. 2007
• An External Cavity Tunable Laser with a Low-Loss Narrowband MEMS Tunable Blazed Grating Antoine, C., Li, X., Sesko, D., Solgaard, O. 2007
• Displacement Sensing with a Mechanically Tunable Photonic Crystal Hadzialic, S., Kim, S., Sudbø, A., Solgaard, O. 2007
• Optical Bandpass Filter with Tunable Chromatic Dispersion and Optical Bandwidth Using a Variable MEMS Reflector Yu, K., Lee, H., Park, N., Lee, D., Solgaard, O. 2007
• Single-film Broadband Photonic Crystal Micro-mirror with Large Angular Range and Low Polarization Dependence Kim, S., Hadzialic, S., Sudbo, A., Solgaard, O. 2007
• Pull-in Analysis of Scanners Actuated by Electrostatic Vertical Combdrives Lee, D., Solgaard, O. 2007
• Toward portable two-photon fluorescence micro-endoscopy using a two-dimensional microelectromechanical (MEMS) scanning mirror Piyawattanametha, W., Flusberg, B., A., Baretto, R., P.J., Jung, J., C., Ko, T., H., Cocker, E., D., Solgaard, O. 2007
• Monolithic Photonic Crystals Hadzialic, S., Kim, S., Mallick, S., Basu, Sudbø, A., Solgaard, O. 2007
• Optical MEMS Based on High-Reflectivity Photonic Crystals Solgaard, O. 2007
• Algorithms for the synthesis of complex-value spectral filters with an array of micromechanical mirrors OPTICS EXPRESS Lacolle, M., Belikov, R., Sagberg, H., Solgaard, O., Sudbo, A. S. 2006; 14 (26): 12590-12612

  Abstract

  We study optical spectral filter synthesis with arrays of piston-actuated micro-mirrors. We propose two algorithms for the calculation of the positions of the micro-mirrors, giving us control of both the amplitude and phase of the synthetic filter. Both algorithms for filter synthesis are explored in an analytic version and in numerical searches for the least deviations between the target and the synthesized filter. We measure the quality of the filter both in terms of the deviations and in filter transmissivity, and present results of numerical simulations for a wide selection of target filters. We find that numerical searches can sometimes yield considerable improvement in the filter synthesis compared to the analytic approximation.

  View details for Web of Science ID 000243144600005

  View details for PubMedID 19532151

• Tunable optical bandpass filter with variable-aperture MEMS reflector JOURNAL OF LIGHTWAVE TECHNOLOGY Yu, K., Lee, D., Park, N., Solgaard, O. 2006; 24 (12): 5095-5102

  View details for DOI 10.1109/JLT.2006.884987

  View details for Web of Science ID 000243888600060

• Micromachined bubble-jet cell sorter with multiple operation modes 13th International Conference on Solid-State Sensors, Actuators and Microsystems Chen, C. C., Wang, J. S., Solgaard, O. ELSEVIER SCIENCE SA. 2006: 523–29

  View details for DOI 10.1016/j.snb.2006.05.011

  View details for Web of Science ID 000239876900029

• Single fiber confocal microscope with a two-axis gimbaled MEMS scanner for cellular imaging OPTICS EXPRESS Carlson Maitland, K., Shin, H. J., Ra, H., Lee, D., Solgaard, O., Richards-Kortum, R. 2006; 14 (19): 8604-8612

  Abstract

  We present a single fiber reflectance confocal microscope with a two dimensional MEMS gimbaled scanner. Achieved lateral and axial resolutions are 0.82 mum and 13 mum, respectively. The field of view is 140 x 100 mum at 8 frames/second. Images and videos of cell phantoms and tissue are presented with sub-cellular resolution.

  View details for Web of Science ID 000240638700016

  View details for PubMedID 19529240

• Micromachined Fourier transform spectrometer on silicon optical bench platform 13th International Conference on Solid-State Sensors, Actuators and Microsystems Yu, K., Lee, D., Krishnamoorthy, U., Park, N., Solgaard, O. ELSEVIER SCIENCE SA. 2006: 523–530

  View details for DOI 10.1016/j.sna.2005.12.022

  View details for Web of Science ID 000239295000072

• Fast-scanning two-photon fluorescence imaging based on a microelectromechanical systems two-dimensional scanning mirror OPTICS LETTERS Piyawattanametha, W., Barretto, R. P., Ko, T. H., Flusberg, B. A., Cocker, E. D., Ra, H., Lee, D., Solgaard, O., Schnitzer, M. J. 2006; 31 (13): 2018-2020

  Abstract

  Towards overcoming the size limitations of conventional two-photon fluorescence microscopy, we introduce two-photon imaging based on microelectromechanical systems (MEMS) scanners. Single crystalline silicon scanning mirrors that are 0.75 mm x 0.75 mm in size and driven in two dimensions by microfabricated vertical comb electrostatic actuators can provide optical deflection angles through a range of approximately16 degrees . Using such scanners we demonstrated two-photon microscopy and microendoscopy with fast-axis acquisition rates up to 3.52 kHz.

  View details for Web of Science ID 000238494600026

  View details for PubMedID 16770418

• High fill-factor two-axis gimbaled tip-tilt-piston micromirror array actuated by self-aligned vertical electrostatic combdrives JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Jung, I. W., Krishnamoorthy, U., Solgaard, O. 2006; 15 (3): 563-571

  View details for DOI 10.1109/JMEMS.2006.876666

  View details for Web of Science ID 000238311000014

• Tunable blazed gratings JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Li, X., Antoine, C., Lee, D., Wang, J., Solgaard, O. 2006; 15 (3): 597-604

  View details for DOI 10.1109/MEMS.2006.872241

  View details for Web of Science ID 000238311000018

• Tunable wavelength demultiplexer and OCDMA code hopping using a 10-mu s-tuning MEMS-actuated Gires-Tournois filter IEEE PHOTONICS TECHNOLOGY LETTERS Ebrahimi, P., Yu, K., Hauer, M. C., Willner, A. E., Solgaard, O. 2006; 18 (9-12): 1398-1400

  View details for DOI 10.1109/LPT.2006.876999

  View details for Web of Science ID 000238708300133

• Microoptical characterization of piezoelectric vibratory microinjections in Drosophila embryos for genome-wide RNAi screen JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Zhang, X. J., Scott, M. P., Quate, C. F., Solgaard, O. 2006; 15 (2): 277-286

  View details for DOI 10.1109/JMEMS.2006.872242

  View details for Web of Science ID 000236770200001

• Air-bridged photonic crystal slabs at visible and near-infrared wavelengths PHYSICAL REVIEW B Crozier, K. B., Lousse, V., Kilic, O., Kim, S., Fan, S. H., Solgaard, O. 2006; 73 (11)

  View details for DOI 10.1103/PhysRevB.73.115126

  View details for Web of Science ID 000236467300064

• Automated MEMS-based Drosophila embryo injection system for high-throughput RNAi screens LAB ON A CHIP Zappe, S., Fish, M., Scott, M. P., Solgaard, O. 2006; 6 (8): 1012-1019

  Abstract

  We have developed an automated system based on microelectromechanical systems (MEMS) injectors for reliable mass-injection of Drosophila embryos. Targeted applications are high-throughput RNA interference (RNAi) screens. Our injection needles are made of silicon nitride. The liquid to be injected is stored in an integrated 500 nl reservoir, and an externally applied air pressure pulse precisely controls the injected volume. A steady-state water flow rate per applied pressure of 1.2 nl s(-1) bar(-1) was measured for a needle with channel width, height and length of 6.1 microm, 2.3 microm and 350 microm, respectively. A typical volume of 60 pl per embryo can be reliably and rapidly delivered within tens of milliseconds. Theoretical predictions of flow rates match measured values within +/-10%. Embryos are attached to a glass slide surface and covered with oil. Packages with the injector chip and the embryo slide are mounted on motorized xyz-stages. Two cameras allow the user to quickly align the needle tip to alignment marks on the glass slide. Our system then automatically screens the glass slide for embryos and reliably detects and injects more than 98% of all embryos. Survival rates after deionized (DI) water injection of 80% and higher were achieved. A first RNAi experiment was successfully performed with double-stranded RNA (dsRNA) corresponding to the segment polarity gene armadillo at a concentration of 0.01 microM. Almost 80% of the injected embryos expressed an expected strong loss-of-function phenotype. Our system can replace current manual injection technologies and will support systematic identification of Drosophila gene functions.

  View details for DOI 10.1039/b600238b

  View details for Web of Science ID 000239313800007

  View details for PubMedID 16874371

• Two-dimensional MEMS scanner for dual-axes confocal in vivo microscopy 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006) Ra, H., Taguchi, Y., Lee, D., Piyawattanametha, W., Solgaard, O. IEEE. 2006: 862–865

  View details for Web of Science ID 000236994500216

• Large-stroke self-aligned vertical comb drive actuators for adaptive optics applications Conference on MEMS/MOEMS Components and Their Applications III Carr, E., Olivier, S., Solgaard, O. SPIE-INT SOC OPTICAL ENGINEERING. 2006

  View details for DOI 10.1117/12.656508

  View details for Web of Science ID 000237171400026

• High-sensitivity interferometric schemes for ML2 micromirror calibrations Conference on Emerging Lithographic Technologies X Wang, J., Solgaard, O., Neureuther, A. R. SPIE-INT SOC OPTICAL ENGINEERING. 2006

  View details for DOI 10.1117/12.656553

  View details for Web of Science ID 000238249800034

• Chip-scale high-speed Fourier-transform spectrometer based on a combination of a Michelson and a Fabry-Perot interferometer 5th IEEE Sensors Conference Yu, K., Park, N., Lee, D., Solgaard, O. IEEE. 2006: 412–415

  View details for Web of Science ID 000248587500105

• High Capacity Optical Packet Switch Based on a Waveguide Grating Router Operated over Multiple FSRs Joe, I., S., Solgaard, O. 2006
• Superresolution Image Enhancement in Digital Photomicrography by Subpixel Translation using a Scanning Micromirror Yu, K., Park, N., Lee, D., Solgaard, O. 2006
• Micromechanical Diffractive Optical Filters for Spectroscopy Lacolle, M., Sagberg, H., Johansen, I., R., Løvhaugen, O., Sudbø, A., Solgaard, O. 2006
• Single-Crystal-Silicon Continuous Membrane Deformable Mirror Array for Adaptive Optics Jung, I., W., Peter, Y. A., Carr, E., Wang, J, S., Solgaard, O. 2006
• Micromirror-based scan range enhancement in Fourier-domain optical coherence tomography Yu, K., Park, N., Lee, D., Solgaard, O. 2006
• Spatial Light Modulators for Maskless Lithography Jung, I., W., Wang, J, S., Solgaard, O. 2006
• Dual quarter-wave retardation based polarization beam splitting in photonic crystal slabs Kilic, O., Fan, S., Solgaard, O. 2006
• Dual-Axes Confocal Fluorescence Microscopy with a Two-Dimensional MEMS Scanner Ra, H., Piyawattanametha, W., Taguchi, Y., Solgaard, O. 2006
• Single Fiber Confocal Microscope Using a Two-Axis Microscanner for Cellular Imaging Carlson, K., Shin, H., J., Ra, H., Lee, D., Solgaard, O., Richards-Kortum, R. 2006
• Coupled Torsional Cantilevers for label-free single-molecule bio-detection and nanomaterials characterization Sahin, O., Person, H., H.J., Quate, C., F., Solgaard, O. 2006
• Higher-Harmonic Force Detection in Dynamic Force Microscopy Handbook of Nanotechnology Quate, C., Sahin, O., Solgaard, O., Giessibl, F., J. Springer Verlag. 2006; 2: 717–736
• High-sensitivity interferometric schemes for ML2 micromirror calibrations Wang, J., S., Solgaard, O., Neureuther, A., R. 2006
• Optical MEMS for Light Wave Communication (Invited Paper) Journal of Lightwave Technology Wu, M., Solgaard, O., Ford, J. 2006; 24 (12): 4433-4454.
• Large-Stroke Self-Aligned Vertical Comb Drive Actuators for Adaptive Optics Applications Carr, E., Olivier, S., Solgaard, O. 2006
• Compact Laser Scanning Distance Sensor with a Two-axis Gimbaled Microscanner for Volumetric Imaging Yu, K., Park, N., Lee, D., Solgaard, O. 2006
• Fast-scanning Two-photon Fluorescence Imaging Using a Microelectromechanical Systems (MEMS) Two-dimensional Scanning Mirror Piyawattanametha, W., Barretto, R., P.J., Ko, T., H., Flusberg, B., A., Cocker, E., D., Ra, H., Solgaard, O. 2006
• Photonic Crystals as Angle-Insensitive Broadband Mirrors Blad, J., Sudbø, A., Solgaard, O. 2006
• A reconfigurable optical demultiplexer based on a MEMS deformable blazed grating Antoine, C., Li, X., Wang, J, S., Solgaard, O. 2006
• MEMS Based Dual-axes Confocal Reflectance Handheld Microscope for in vivo Imaging Piyawattanametha, W., Liu, J., T.C., Mandella, M., J., Ra, H., Wong, L., K., Hsiung, P., Solgaard, O. 2006
• External Fiber Fabry-Perot Acoustic Sensor Based on Photonic Crystal Mirror Kilic, O., Digonnet, M., Kino, G., Solgaard, O. 2006
• Reconfigurable near-infrared optical filter with a micromechanical diffractive Fresnel lens IEEE PHOTONICS TECHNOLOGY LETTERS Lacolle, M., Sagberg, H., Johansen, I. R., Lovhaugen, O., Solgaard, O., Sudbo, A. S. 2005; 17 (12): 2622-2624

  View details for DOI 10.1109/LPT.2005.859186

  View details for Web of Science ID 000233621000041

• Effects of through-focus symmetry in maskless lithography using micromirror arrays 49th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Wang, J. S., Hafeman, S., Neureuther, A. R., Solgaard, O. A V S AMER INST PHYSICS. 2005: 2738–42

  View details for DOI 10.1116/1.2062407

  View details for Web of Science ID 000234613200088

• Microoptical characterization and modeling of positioning forces on drosophila embryos self-assembled in two-dimensional arrays JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Zhang, X. J., Chen, C. C., Bernstein, R. W., Zappe, S., Scott, M. P., Solgaard, O. 2005; 14 (5): 1187-1197

  View details for DOI 10.1109/JMEMS.2005.851834

  View details for Web of Science ID 000232571000032

• Displacement sensing using evanescent tunneling between guided resonances in photonic crystal slabs JOURNAL OF APPLIED PHYSICS Suh, W., Solgaard, O., Fan, S. 2005; 98 (3)

  View details for DOI 10.1063/1.1999031

  View details for Web of Science ID 000231246100002

• Micro-optical characterization of fluidic self-assembly of Drosophila embryos through surface tension: Principle, simulation and experiments International Conference on Optical MEMS and Their Applications Zhang, X. J., Chen, C. C., Scott, M. P., Solgaard, O. OPTICAL SOC JAPAN. 2005: 352–57

  View details for Web of Science ID 000232089300016

• Vertical Combdrives - Design and Implementation MEMS/NEMS Handbook Krishnamoorthy, U., Solgaard, O. Springer-Verlag New York Inc.. 2005: 393–420
• High-resolution microelectromechanical scanners for miniaturized dual-axes confocal microscopes Conference on MOEMS Display and Imaging Systems III Ra, H., Jung, I. W., Lee, D., Krishnamoorthy, U., Yu, K., Solgaard, O. SPIE-INT SOC OPTICAL ENGINEERING. 2005: 132–135

  View details for DOI 10.1117/12.597331

  View details for Web of Science ID 000228764100017

• Micromachined Fourier transform spectrometer on silicon optical bench platform 13th International Conference on Solid-State Sensors, Actuators and Microsystems Yu, K., Lee, D., Krishnamoorthy, U., Park, N., Solgaard, O. IEEE. 2005: 1250–1254

  View details for Web of Science ID 000232189100308

• Silicon masking layers for fabrication of high aspect ratio MEMS 10th IEEE/LEOS International Conference on Optical MEMs and Their Applications Lee, D., Solgaard, O. IEEE. 2005: 85–86

  View details for Web of Science ID 000232362400041

• Summary of adaptive optics at Stanford 4th International Workshop on Adaptive Optics for Industry and Medicine Lu, P., Peter, Y. A., Carr, E., Krishnamoorty, U., Jung, I. W., Solgaard, O., Byer, R. SPRINGER-VERLAG BERLIN. 2005: 53–59

  View details for Web of Science ID 000232738200007

• Design and operation of a micromachined bubble-jet cell sorter 13th International Conference on Solid-State Sensors, Actuators and Microsystems Chen, C. C., Wang, J. S., Zappe, S., Zhang, X. J., Solgaard, O. IEEE. 2005: 441–444

  View details for Web of Science ID 000232189100106

• Excitation of non-degenerate resonances through breaking of mirror symmetry in photonic crystal slabs Conference on Lasers and Electro-Optics (CLEO) Kilic, O., Kim, S., Digonnet, M., Kino, G., Solgaard, O. OPTICAL SOC AMERICA. 2005: 828–830

  View details for Web of Science ID 000234819901019

• Micromachined silicon diffractive optical force encoders: Principles and applications in biology 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences Zhang, X. J., Zappe, S., Chen, C. C., Scott, M. P., Solgaard, O. ROYAL SOC CHEMISTRY. 2005: 518–20

  View details for Web of Science ID 000229017400172

• Near-Field Sensor Using Photonic Crystal Slabs Suh, W., Solgaard, O., Fan, S. 2005
• Excitation of Non-Degenerate Resonances through Breaking of Mirror Symmetry in Photonic Crystal Slabs Kilic, O., Kim, S., Digonnet, M., Kino, G., Solgaard, O. 2005
• Design and Operation of a Micromachined Bubble-Jet Cell Sorter Chen, C, C., Wang, J, S., Zappe, S., Zhang, X., Solgaard, O. 2005
• Silicon Masking Layers for Fabrication of High Aspect Ratio MEMS Lee, D., Solgaard, O. 2005
• Near-field sensor using photonic crystal slabs Conference on Lasers and Electro-Optics (CLEO) Suh, W., Solgaard, O., Fan, S. OPTICAL SOC AMERICA. 2005: 837–839

  View details for Web of Science ID 000234819901022

• A Micro-Mechanical Fresnel Lens for Spectral Filtering Lacolle, M., Sagberg, H., Lee, D., Solgaard, O., Johansen, I, R., Løvhaugen, O. 2005
• Reconfigurable Near-Infrared Optical Filter with Micromechanical Diffractive Fresnel Lens IEEE Photonics Technology Letters Lacolle, M., Sagberg, H., Johansen, I., R., Løvhaugen, O., Solgaard, O., Sudbo, A. 2005; 17 (12): 2622-2624
• A wavelength selective switch with flat passband using a free-space grating and MEMS phase-shifters Yu, K., Park, N., Lee, D., Solgaard, O. 2005
• Micromachined Fourier Transform Spectrometer on Silicon Optical Bench Platform Yu, K., Lee, D., Krishnamoorthy, U., Park, N., Solgaard, O. 2005
• High-resolution microelectromechanical scanners for miniaturized dual-axes confocal microscopes Ra, H-, J., Jung, I, W., Lee, D., Krishnamoorthy, U., Yu, K., Solgaard, O. 2005
• Understanding Through-Focus Symmetry in Maskless Lithography Using Micromirror Arrays Wang, J., S., Hafeman, S., Neureuther, A., R., Solgaard, O. 2005
• Scalable optical switch fabric for avionic networks Joe, I., S., Solgaard, O. 2005
• Photonic crystal slabs demonstrating strong broadband suppression of transmission in the presence of disorders OPTICS LETTERS Kilic, O., Kim, S., Suh, W., Peter, Y. A., Sudbo, A. S., Yanik, M. F., Fan, S. H., Solgaard, O. 2004; 29 (23): 2782-2784

  Abstract

  We characterize the transmission spectra of out-of-plane, normal-incidence light of two-dimensional silicon photonic crystal slabs and observe excellent agreement between the measured data and finite-difference time-domain simulations over the 1050-1600-nm wavelength range. Crystals that are 340 nm thick and have holes of 330-nm radius on a square lattice of 998-nm pitch show 20-dB extinction in transmission from 1220 to 1255 nm. Increasing the hole radius to 450 nm broadens the extinction band further, and we obtain >85% extinction from 1310 to 1550 nm. Discrepancies between simulation and measurement are ascribed to disorder in the photonic lattice, which is measured through image processing on high-resolution scanning electron micrographs. Analysis of crystal imperfections indicates that they tend to average out narrowband spectral features, while having relatively small effects on broadband features.

  View details for PubMedID 15605504

• Analysis of resonant frequency of fast scanning micromirror with vertical combdrives IEICE TRANSACTIONS ON ELECTRONICS Wada, H., Lee, D. S., Zappe, S., Solgaard, O. 2004; E87C (11): 2006-2008

  View details for Web of Science ID 000225210400040

• Fabrication method for elastomer spatial light modulators for short wavelength maskless lithography 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) Wang, J. S., Jung, I. W., Solgaard, O. ELSEVIER SCIENCE SA. 2004: 528–35

  View details for DOI 10.1016/j.sna.2003.12.001

  View details for Web of Science ID 000223704800057

• Design and operation of a microfluidic sorter for Drosophila embryos 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) Chen, C. C., Zappe, S., Sahin, O., Zhang, X. J., Fish, M., Scott, M., Solgaard, O. ELSEVIER SCIENCE SA. 2004: 59–66

  View details for DOI 10.1016/j.snu.2003.10.015

  View details for Web of Science ID 000223969400009

• Micromachined silicon force sensor based on diffractive optical encoders for characterization of microinjection 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) Zhang, X. J., Zappe, S., Bernstein, R. W., Sahin, O., Chen, C. C., Fish, M., Scott, M. P., Solgaard, O. ELSEVIER SCIENCE SA. 2004: 197–203

  View details for DOI 10.1016/j.sna.2003.11.028

  View details for Web of Science ID 000223704800011

• High-resolution imaging of elastic properties using harmonic cantilevers 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) Sahin, O., Yaralioglu, G., Grow, R., Zappe, S. F., Atalar, A., Quate, C., Solgaard, O. ELSEVIER SCIENCE SA. 2004: 183–90

  View details for DOI 10.1016/j.sna.2003.11.031

  View details for Web of Science ID 000223704800009

• Characterization of fluidic microassembly for immobilization and positioning of Drosophila embryos in 2-D arrays 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) Bernstein, R. W., Zhang, X. J., Zappe, S., Fish, M., Scott, M., Solgaard, O. ELSEVIER SCIENCE SA. 2004: 191–96

  View details for DOI 10.1016/j.sna.2003.11.021

  View details for Web of Science ID 000223704800010

• Single-crystalline silicon micromirrors actuated by self-aligned vertical electrostatic combdrives with piston-motion and rotation capability 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) Lee, D., Krishnamoorthy, U., Yu, K., Solgaard, O. ELSEVIER SCIENCE SA. 2004: 423–28

  View details for DOI 10.1016/j.sna.2003.11.024

  View details for Web of Science ID 000223704800041

• Lithography process for trench pattern above large cavity to fabricate fast scanning micromirror IEICE TRANSACTIONS ON ELECTRONICS Wada, H., Lee, D., Zappe, S., Krishnamoorthy, U., Solgaard, O. 2004; E87C (8): 1395-1398

  View details for Web of Science ID 000223264700030

• Tunable optical transversal filters based on a Gires-Tournois interferometer with MEMS phase shifters IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS Yu, K., Solgaard, O. 2004; 10 (3): 588-597

  View details for DOI 10.1109/JSTQE.2004.828477

  View details for Web of Science ID 000223299300022

• Introduction to the issue on optical microsystems IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS Solgaard, O., Talghader, J., Toshiyoshi, H., Kopola, H. 2004; 10 (3): 433-434

  View details for Web of Science ID 000223299300001

• Micromechanical gratings for visible and near-infrared spectroscopy IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS Sagberg, H., Lacolle, M., Johansen, I. R., Lovhaugen, O., Belikov, R., Solgaard, O., Sudbo, A. S. 2004; 10 (3): 604-613

  View details for DOI 10.1109/JSTQE.2004.82849

  View details for Web of Science ID 000223299300024

• Angular and polarization properties of a photonic crystal slab mirror LEOS Topical Meeting on Photonic Crystals and Holey Fibers Lousse, V., Suh, W., Kilic, O., Kim, S., Solgaard, O., Fan, S. H. OPTICAL SOC AMER. 2004: 1575–82

  Abstract

  It was recently demonstrated that a photonic crystal slab can function as a mirror for externally incident light along a normal direction with near-complete reflectivity over a broad wavelength range. We analyze the angular and polarization properties of such photonic crystal slab mirror, and show such reflectivity occurs over a sizable angular range for both polarizations. We also show that such mirror can be designed to reflect one polarization completely, while allowing 100% transmission for the other polarization, thus behaving as a polarization splitter with a complete contrast. The theoretical analysis is validated by comparing with experimental measurements.

  View details for Web of Science ID 000220908100012

  View details for PubMedID 19474983

• Resonant harmonic response in tapping-mode atomic force microscopy PHYSICAL REVIEW B Sahin, O., Quate, C. F., Solgaard, O., Atalar, A. 2004; 69 (16)

  View details for DOI 10.1103/PhysRevB.69.165416

  View details for Web of Science ID 000221427100093

• Snap down voltage of a fast-scanning micromirror with vertical electrostatic combdrives JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS Wada, H., Lee, D., Zappe, S., Krishnamoorthy, U., Solgaard, O. 2004; 43 (2B): L284-L286

  View details for Web of Science ID 000220378600016

• Bonding of two silicon layers above a gap to fabricate a fast scanning micromirror JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS Wada, H., Lee, D., Zappe, S., Krishnamoorthy, U., Solgaard, O. 2004; 43 (1A-B): L50-L52

  View details for DOI 10.1143/JJAP.43.L50

  View details for Web of Science ID 000220092700016

• Automated MEMS Based Fruit Fly Embryo Injection System for Genome-Wide High-Throughput RNAi Screens Zappe, S., Fish, M., Scott, M., P., Solgaard, O. 2004
• Variable bandwidth optical filters with vertical micromirrors and silicon optical bench alignment technology 17th Annual Meeting of the IEEE-Lasers-and-Electro-Optics-Society Yu, K., Lee, D., Solgaard, O. IEEE. 2004: 531–532

  View details for Web of Science ID 000225390900264

• Micro-Optical Characterization and Modeling of Microfluidic Self-Assembly in Biology Zhang, X., Chen, C., C., Scott, M., P., Solgaard, O. 2004
• Interference-Based Optical MEMS Filters Solgaard, O., Belikov, R., Yu, K. 2004
• Tunable external cavity laser with a stationary deformable MEMS grating. Belikov, R., Antoine-Snowden, C., Solgaard, O. 2004
• Ultrasonic Microinjection Characterized by Integrated Micro-optical Force Encoder Zhang, X., Zappe, S., F., Quate, C., F., Scott, M., P., Solgaard, O. 2004
• Variable Bandwidth Optical Filters with Vertical Micromirrors and Silicon Optical Bench Alignment Technology Yu, K., Lee, D., Solgaard, O. 2004
• Mechanically switchable photonic crystal structures based on coupled photonic crystal slabs Conference on Photonic Crystal Materials and Devices II Suh, W., Yanik, M. F., Solgaard, O., Fan, S. H. SPIE-INT SOC OPTICAL ENGINEERING. 2004: 299–306

  View details for DOI 10.1117/12.521541

  View details for Web of Science ID 000223224600033

• Tunable optical wavelength deinterleaver based on tunable MEMS blazed gratings 17th Annual Meeting of the IEEE-Lasers-and-Electro-Optics-Society Li, X., Lee, D., Belikov, R., Yu, K., Solgaard, O. IEEE. 2004: 320–321

  View details for Web of Science ID 000225390900159

• A 10-ms-tuning MEMS-Actuated Gires-Tournois Filter for use as a Tunable Wavelength Demultiplexer and a TunableOCDMA Encoder/Decoder Ebrahimi, P., Kargar, M., Hauer, M., C., Willner, A., E., Yu, K., Solgaard, O. 2004
• Micromachined Silicon Diffractive Optical Force Encoders: Principles and Applications in Biology Zhang, X., Zappe, S., Chen, C., C., Scott, M., P., Solgaard, O. 2004
• Vertical micromirror fabricated in (110) silicon device layer by combination of KOH and DRIE etch Lee, D., Yu, K., Krishnamoorthy, U., Solgaard, O. 2004
• A Transmissive Interferometric Light Modulator based on Silicon Nitride Double-Half-Wave Filter Structure Kato, T., Solgaard, O. 2004
• Two-Axis Gimbaled Microscanner in Double SOI Layers Actuated by Self-Aligned Vertical Electrostatic Combdrive Lee, D., Solgaard, O. 2004
• Surface Micromachined Elastomer Spatial Light modulators for Extreme Ultra violet Radiation Wang, J., S., Chen, Y., Solgaard, O. 2004
• High Fill-Factor Two-Axis Gimbaled Tip-Tilt-Piston Micromirror Array Actuated by Self-Aligned Vertical Electrostatic Combdrives Jung, I., W., Krishnamoorthy, U., Solgaard, O. 2004
• Tunable Optical Wavelength Deinterleaver based on Tunable MEMS Blazed Gratings Li, X., Lee, D., Belikov, R., Yu, K., Solgaard, O. 2004
• Mechanically switchable photonic crystal structures based on coupled photonic crystal slabs Suh, W., Yanik, M., F., Solgaard, O., Fan, S. 2004
• Two-Dimensional Photonic Crystals at Visible Wavelengths Crozier, K., B., Kim, S., Kilic, O., Suh, W., Fan, S., Solgaard, O. 2004
• The torque of high speed scanning micromirrors with vertical combdrives JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS Wada, H., Lee, D., Zappe, S., Solgaard, O. 2003; 42 (12A): L1449-L1451

  View details for DOI 10.1143/JJAP.42.L1449

  View details for Web of Science ID 000187509800015

• Scaling Internet routers using optics SIGCOMM 2003 Conference Keslassy, I., Chuang, S. T., Yu, K., Miller, D., Horowitz, M., Solgaard, O., McKeown, N. ASSOC COMPUTING MACHINERY. 2003: 189–200

  View details for Web of Science ID 000188215800017

• Self-aligned vertical electrostatic combdrives for micromirror actuation JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Krishnamoorthy, U., Lee, D., Solgaard, O. 2003; 12 (4): 458-464

  View details for DOI 10.1109/JMEMS.2003.811728

  View details for Web of Science ID 000184649700007

• Optical wavelength filtering by diffraction from a surface relief (vol 28, pg 447, 2003) OPTICS LETTERS Belikov, R., Solgaard, O. 2003; 28 (12): 1055-1055

  View details for Web of Science ID 000183362700031

• Displacement-sensitive photonic crystal structures based on guided resonance in photonic crystal slabs APPLIED PHYSICS LETTERS Suh, W., Yanik, M. F., Solgaard, O., Fan, S. H. 2003; 82 (13): 1999-2001

  View details for DOI 10.1063/1.1563739

  View details for Web of Science ID 000181801100001

• Optical wavelength filtering by diffraction from a surface relief OPTICS LETTERS Belikov, R., Solgaard, O. 2003; 28 (6): 447-449

  Abstract

  We present an analytical solution to the problem of finding a diffractive surface relief that generates a specific optical amplitude and phase spectral reflection in a particular direction. We show that any discrete finite impulse response filter can be generated to within a multiplicative constant at nonzero frequencies. We propose an implementation of such a filter that works in the visible and the near infrared, based on a two-dimensional array of dual-state tiltable mirrors. A 1024 x 1024 array results in a 1024-tap filter with 10-bit quantization of the impulse response. The applications of such a device include spectroscopy and wavelength-division multiplex switching.

  View details for Web of Science ID 000181411300023

  View details for PubMedID 12659275

• Configurable spectral filter with an array of diffraction gratings IEEE/LEOS International Conference on Optical MEMS Sagberg, H., Lacolle, M., Johansen, I. R., Lovhaugen, O., Solgaard, O., Sudbo, A. S. IEEE. 2003: 30–31

  View details for Web of Science ID 000185581900015

• MOEMS spatial light modulator development at the Center for Adaptive Optics Conference on MOEMS and Miniaturized Systems III Krulevitch, P., Bierden, P., Bifano, T., Carr, E., Dimas, C., Dyson, H., Helmbrecht, M., Kurczynski, P., Muller, R., Olivier, S., Peter, Y. A., Sadoulet, B., Solgaard, O., Yang, E. H. SPIE-INT SOC OPTICAL ENGINEERING. 2003: 172–179

  View details for Web of Science ID 000181865000028

• High-resolution, high-speed microscanner in single-crystalline silicon actuated by self-aligned dual-mode vertical electrostatic combdrive with capability for phased array operation 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) Lee, D., Krishnamoorthy, U., Yu, K., Solgaard, O. IEEE. 2003: 576–579

  View details for Web of Science ID 000184567300145

• Elastomer spatial light modulators for extreme ultraviolet lithography 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) Wang, J. S., Jung, I. W., Solgaard, O. IEEE. 2003: 1458–1461

  View details for Web of Science ID 000184567300366

• Femtosecond direct space-to-time pulse shaping with MEMS micromirror arrays IEEE/LEOS International Conference on Optical MEMS Belikov, R., Antoine-Snowden, C., Solgaard, O. IEEE. 2003: 24–25

  View details for Web of Science ID 000185581900012

• MOEMS spatial light modulator development at the Center for Adaptive Optics Conference on MOEMS Display and Imaging Systems Krulevitch, P., Bierden, P., Bifano, T., Carr, E., Dimas, C., Dyson, H., Helmbrecht, M., Kurczynski, P., Muller, R., Olivier, S., Peter, Y. A., Sadoulet, B., Solgaard, O., Yang, E. H. SPIE-INT SOC OPTICAL ENGINEERING. 2003: 172–179

  View details for Web of Science ID 000181866900018

• Tunable wavelength multiplexer/demultiplexer using a MEMS Gires-Tournois interferometer 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society Yu, K., Lee, D., Solgaard, O. IEEE. 2003: 521–522

  View details for Web of Science ID 000188359700263

• Harmonic cantilevers for nanomechanical sensing of elastic properties 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) Sahin, O., Yaralioglu, G., Grow, R., Zappe, S. F., Atalar, A., Quate, C., Solgaard, O. IEEE. 2003: 1124–1127

  View details for Web of Science ID 000184567300282

• Tunable bandwidth optical filter based on MEMS Gires-Tournois interferometer IEEE/LEOS International Conference on Optical MEMS Yu, K. S., Lee, D., Krishnamoorthy, U., Solgaard, O. IEEE. 2003: 32–33

  View details for Web of Science ID 000185581900016

• Microfluidic switch for embryo and cell sorting 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) Chen, C. C., Zappe, S., Sahin, O., Zhang, X. J., Furlong, E. E., Fish, M., Scott, M., Solgaard, O. IEEE. 2003: 659–662

  View details for Web of Science ID 000184567300166

• Integrated optical diffractive micrograting-based injection force sensor 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) Zhang, X. J., Zappe, S., Bernstein, R. W., Sahin, O., Chen, C. C., Fish, M., Scott, M., Solgaard, O. IEEE. 2003: 1051–1054

  View details for Web of Science ID 000184567300264

• Programmable Optical Wavelength Filter Based on Diffraction from a 2‑D MEMS Micromirror Array Belikov, R., Li, X., Solgaard, O. 2003
• Integrated Optical Diffractive Micrograting-Based Injection Force Sensor Zhang, X., J., Zappe, S.,  , Bernstein, R., W.,  Sahin, O., Chen, C., C., Fish, M., Solgaard, O. 2003
• High-Precision Characterization of Embryo Positioning Force Using MEMS Optical Encoder Zhang, X., J., Zappe, S., Bernstein, R., W., Chen, C., C., Sahin, O., Scott, M., Solgaard, O. 2003
• Tunable Wavelength Multiplexer/Demultiplexer using a MEMS Gires-Tournois Interferometer Yu, K., Lee, D., Solgaard, O. 2003
• Harmonic Cantilevers for Nanomechanical Sensing of Elastic Properties Sahin, O., Yaralioglu, G., Grow, R., Zappe, S., F., Atalar, A., Quate, C., Solgaard, O. 2003
• Elastomer Spatial Light Modulators for Extreme Ultraviolet Lithography Wang, J., S., Jung, I., W., Solgaard, O. 2003
• Microoptical phased arrays for spatial and spectral switching Solgaard, O., Yu, K., Krishnamoorthy, U., Li, K., Heritage, J., P. 2003
• Optical Microphone Based on a Modulated Diffractive Lens IEEE Photonics Technology Letters Sagberg, H., Sudbo, A., Solgaard, O., Bakke, K., A. Hestnes, Johansen, I., R. 2003; 15 (10): 1431-1433
• Characterization of Drosophila Embryos Immobilized by Fluidic Microassembly Bernstein, R., W., Zhang, X., Zappe, S.,  Fish, M., Scott, M., Solgaard, O. 2003
• Tunable bandwidth optical filter based on MEMS Gires‑Tournois Interferometer Yu, K., Lee, D., Krishnamoorthy, U., Solgaard, O. 2003
• Optical MEMS - Fabrication, Scaling and Design of Microoptical Devices and Systems Solgaard, O. 2003
• MOEMS Spatial Light Modulator Development at the Center for Adaptive Optics Krulevitch, P., Bierden, P., Bifano, T., Carr, E., Dimas, C., Dyson, H., Solgaard, O. 2003
• Microfluidic Switch for Embryo and Cell Sorting Chen, C., C., Zappe, S., Sahin, O., Zappe, X., F., Furlong, E., E. M., Fish, M., Solgaard, O. 2003
• Configurable spectral filter with an array of diffraction gratings Sagberg, H., Lacolle, M., Sudbo, A., S., Solgaard, O. 2003
• Femtosecond Direct Space-to-Time Pulse Shaping with MEMS Micromirror Arrays Belikov, R., Antoine-Snowden, C., Solgaard, O. 2003
• High-Resolution, High-Speed Microscanner in Single-Crystalline Silicon Actuated by Self-Aligned Dual-Mode Vertical Electrostatic Combdrive with Capability for Phased Array Operation Lee, D., Krishnamoorthy, U., Yu, K., Solgaard, O. 2003
• MEMS optical wavelength deinterleaver with continuously variable channel spacing and center wavelength IEEE Photonics Technology Letters Yu, K., Solgaard, O. 2003; 15 (3): 425-427
• Optical characterization of high speed scanning micromirrors with vertical combdrives JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS Wada, H., Lee, D., Yu, K., Krishnamoorthy, U., Solgaard, O. 2002; 41 (10B): L1169-L1171

  View details for DOI 10.1143/JJAP.41.L1169

  View details for Web of Science ID 000179893900014

• Process for high speed micro electromechanical systems (MEMS) scanning mirrors with vertical comb drives JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS Wada, H., Lee, D., Krishnamoorthy, U., Zappe, S., Solgaard, O. 2002; 41 (8A): L899-L901

  View details for DOI 10.1143/JJAP.41.L899

  View details for Web of Science ID 000177527400012

• Dual-mode micromirrors for optical phased array applications Transducers 2001 Conference/Eurosensor XVth Conference Krishnamoorthy, U., Li, K., Yu, K., Lee, D., Heritage, J. P., Solgaard, O. ELSEVIER SCIENCE SA. 2002: 21–26

  View details for Web of Science ID 000176297000004

• Coherent micromirror arrays OPTICS LETTERS Li, K. B., Krishnamoorthy, U., Heritage, J. P., Solgaard, O. 2002; 27 (5): 366-368

  Abstract

  A one-dimensional, spatial light phase modulator consists of a coherent array of programmable micromirrors. Each micromirror has rotation as well as elevation control to permit high-fidelity, piecewise linear approximations to a desired spatial phase profile. We demonstrate programmable, coherent spatial modulation by configuring a four-micromirror array to act as a blazed diffraction grating, showing five diffraction orders. In sharp contrast, adjustment of each mirror elevation converts the grating into the equivalent of a single, large tilted mirror that reflects only in a new specular direction. Higher-order diffraction is effectively suppressed.

  View details for Web of Science ID 000174143400028

  View details for PubMedID 18007805

• Introduction to the issue on optical MEMS IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS Solgaard, O., Ford, J. E., Fujita, H., Herzig, H. P. 2002; 8 (1): 1-3

  View details for Web of Science ID 000174519300001

• Microoptical phased arrays for spatial and spectral switching Conference on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 Solgaard, O., Yu, K., Krishnamoorthy, U., Li, K. B., Heritage, J. P. SPIE-INT SOC OPTICAL ENGINEERING. 2002: 1–9

  View details for Web of Science ID 000176995300001

• High Speed MEMS Scanning Mirror with Vertical Comb Drive Wada, H., Lee, D., Yu, K., Krishnamoorthy, U., Zappe, S., Solgaard, O. 2002
• Microoptical phased arrays for spatial and spectral switching Solgaard, O., Yu, K., Krishnamoorthy, U., Li, K., Heritage, J., P. 2002
• Positioning and Immobilization of Drosophila Embryos in 2‑D Arrays for Drug Injection Bernstein, R., W., Zhang, X., J., Zappe, S., Fish, M., Scott, M., Solgaard, O. 2002
• Segmented Deformable Micromirror for Free-Space Optical Communication Peter, Y., A., Carr, E., Solgaard, O. 2002
• Dual mode micromirrors for optical phased array applications Sensors and Actuators: A. Physical Krishnamoorthy, U., Li, K., Yu, K., Lee, D., Heritage, J., P., Solgaard, O. 2002; A97-98: 21-26
• Micromachined Hollow Needle with Integrated Pressure Sensor for Precise, Calibrated Injection into Cells and Embryos Zappe, S., Zhang, X., J., Jung, I., W., Bernstein, R.,  W., Furlong, E., E. M., Fish, M., Solgaard, O. 2002
• Dynamic Diffractive Optical Elements based on MEMS Technology Solgaard, O. 2002
• Micromirror Array Phase Modulator for Ultrashort Optical Pulse Shaping Li, K., Krishnamoorthy, U., Heritage, J., P., Solgaard, O. 2002
• Optical Communication with Coherent MEMS Arrays Solgaard, O. 2002
• Tunable Chromatic Dispersion Compensators Using MEMS Gires-Tournois Interferometers Yu, K., Solgaard, O. 2002
• MEMS Switchable WDM De interleaver Based on a Gires-Tournois Interferometer Yu, K., Solgaard, O. 2001
• Effects of Mirror Surface Deformation in Optical Delay Lines Based on Resonant-Scanning Micromirrors Cornett, K., T., Walker, B., Carr, E., J., Heritage, J., P., Solgaard, O. 2001
• Phased Arrays of Micromirrors for Programmable Shaping of Ultrashort Pulses Li, K., Krishnamoorthy, U., Heritage, J., P., Solgaard, O. 2001
• Self-Aligned Vertical Combdrive Actuators for Optical Scanning Micromirrors Krishnamoorthy, U. 2001
• Dual Mode Micromirrors for Optical Phased Arrays Applications Krishnamoorthy, U., Li, K., Yu, K., Lee, D., Heritage, J., P., Solgaard, O. 2001
• Narrow-band light emission in semiconductor-fibre asymmetric waveguide coupler ELECTRONICS LETTERS Mao, E., Yankelevich, D. R., Lin, C. C., Solgaard, O., Knoesen, A., Harris, J. S. 2000; 36 (16): 1378-1379

  View details for Web of Science ID 000088762800031

• Scalable optical cross-connect switch using micromachined mirrors IEEE PHOTONICS TECHNOLOGY LETTERS Hagelin, P. M., Krishnamoorthy, U., Heritage, J. P., Solgaard, O. 2000; 12 (7): 882-884

  View details for Web of Science ID 000088505800042

• Free space communication link using a grating light modulator 10th International Conference on Solid-State Sensors and Actuators Pedersen, D., Solgaard, O. ELSEVIER SCIENCE SA. 2000: 6–10

  View details for Web of Science ID 000087144800002

• Wavelength-selective semiconductor in-line fibre photodetectors ELECTRONICS LETTERS Mao, E., Yankelevich, D. R., Lin, C. C., Solgaard, O., Knoesen, A., Harris, J. S. 2000; 36 (6): 515-516

  View details for Web of Science ID 000086381000023

• Low Power Wireless Readout of Autonomous Sensor Wafer using MEMS Grating Light Modulator Krueger, M., V.P., Guddal, M., H., Belikov, R., Bhatnagar, A., Solgaard, O., Spanos, C. 2000
• Micro-electro- mechanical systems spatial light modulator development Olivier, S., S., Bierden, P., A., Bifano, T., G., Bishop, D., J., Carr, E., Cowan, W., D., Solgaard, O. 2000
• Surface-micromachined mirrors for scalable fiber optic switching applications Krishnamoorthy, U., Hagelin, P., M., Heritage, J., P., Solgaard, O. 2000
• A raster-scanning full-motion video display using polysilicon micromachined mirrors Sensors & Actuators A Conant, R., A., Hagelin, P., M., Krishnamoorthy, U., Hart, M., Solgaard, O., Lau, K., Y. 2000; 83 (1-3): 291-296
• Compact Optical Delay Line Based on Scanning Surface Micromachined Polysilicon Micromirrors Cornett, K., T., Heritage, J., P., Solgaard, O. 2000
• Miniature variable optical delay using silicon micromachined scanning mirrors Cornett, K., T., Hagelin, P., M., Heritage, J., P., Solgaard, O., Everett, M. 2000
• GaAs AlGaAs multiple-quantum-well in-line fiber intensity modulator APPLIED PHYSICS LETTERS Mao, E., Coldren, C. W., Harris, J. S., Yankelevich, D. R., Solgaard, O., Knoesen, A. 1999; 75 (3): 310-312

  View details for Web of Science ID 000081409000002

• Optical raster-scanning displays based on surface-micromachined polysilicon mirrors IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS Hagelin, P. M., Solgaard, O. 1999; 5 (1): 67-74

  View details for Web of Science ID 000079972900012

• A Raster-Scanning Full-Motion Video Display Using Polysilicon Micromachined Mirrors Conant, R., A., Hagelin, P., M., Krishnamoorthy, U., Solgaard, O., Lau, K., Y., Muller, R., S. 1999
• Micromachined Scalable Fiber-Optic Switch Hagelin, P., M., Krishnamoorthy, U., Arft, C., M., Heritage, J., P., Solgaard, O. 1999
• Scalable Fiber Optic Switch Using Micromachined Mirrors Hagelin, P., M., Krishnamoorthy, U., Arft, C., M., Heritage, J., P., Solgaard, O. 1999
• Robustness and Reliability of Micromachined Scanning Mirrors Conant, R., A., Nee, J., Hart, M., Solgaard, O., Lau, K., Y., Muller, R., S. 1999
• Static and Dynamic Characterization of Polysilicon Surface-Micromachined Actuators Laible, V., Hagelin, P., M., Solgaard, O., Obermeier, E. 1999
• A GaAs/AlGaAs narrow bandwidth in-line fiber filter Mao, E., Coldren, C., W., Harris, J., S., Yankelevich, D., R., Solgaard, O., Knoesen, A. 1999
• Free-Space Communication Link Using a Grating Light Modulator Pedersen, D., R., Solgaard, O. 1999
• Integrated Micromachined Scanning Display Systems Hagelin, P., M., Krishnamoorthy, U., Conant, R., Muller, R., S., Lau, K., Solgaard, O. 1999
• Micromachined grating light modulators for wireless sensor networks Pedersen, D., R., Solgaard, O. 1999
• Polysilicon optical microscanners for laser scanning displays 9th International Conference on Solid-State Sensors and Actuators Kiang, M. H., Solgaard, O., Lau, K. Y., Muller, R. S. ELSEVIER SCIENCE SA. 1998: 195–99

  View details for Web of Science ID 000075835900030

• Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Kiang, M. H., Solgaard, O., Lau, K. Y., Muller, R. S. 1998; 7 (1): 27-37

  View details for Web of Science ID 000073005900004

• Electrostatic Combdrive-Actuated Micromirrors for Laser-Beam Scanning and Positioning IEEE Journal of MicroElectroMechanical Systems (JMEMS) Kiang, M, H., Solgaard, O., Lau, K., Y., Muller, R., S. 1998; 7 (1): 27-37
• In-line fiber-optic filter using GaAs ARROW waveguide Mao, E., Coldren, C., Harris, J., S., Yankelevich, D., Solgaard, O., Knoesen, A. 1998
• Micromachined Mirrors in a Raster Scanning Display System Hagelin, P., Cornett, K., Solgaard, O. 1998
• Polysilicon optical microscanners for laser scanning displays Kiang, M., H, Solgaard, O., Lau, K., Y., Muller, R., S. 1998
• Compact 2D laser beam scanner with fan laser array and Si micromachined microscanner ELECTRONICS LETTERS Francis, D. A., Kiang, M. H., Solgaard, O., Lau, K. Y., Muller, R. S., Chang-Hasnain, C. J. 1997; 33 (13): 1143-1145

  View details for Web of Science ID 000072040900030

• Micromachined microscanners for optical scanning Kiang, M, H., Solgaard, O., Muller, R., S., Lau, K., Y. 1997
• Actuated polysilicon micromirrors for raster-scanning displays 9th International Conference on Solid-State Sensors and Actuators Kiang, M. H., Francis, D. A., CHANGHASNAIN, C. J., Solgaard, O., Lau, K. Y., Muller, R. S. IEEE. 1997: 323–326

  View details for Web of Science ID A1997BJ35B00079

• Micromachined microscanners for optical scanning Conference on Miniaturized Systems with Micro-Optics and Micromechanics II Kiang, M. H., Solgaard, O., Muller, R. S., Lau, K. Y. SPIE - INT SOC OPTICAL ENGINEERING. 1997: 82–90

  View details for Web of Science ID A1997BH70G00009

• High-Resolution Silicon Surface Micromachined Displays Solgaard, O. 1997
• Actuated Polysilicon Micromirrors for Raster-Scanning Displays Kiang, M., H., Francis, D., A., Chang-Hasnain, C., J., Solgaard, O., Lau, K., Y., Muller, R., S. 1997
• Compact 2D laser beam scanner with fan laser array and Si micromachined microscanner Electronics Letters (UK), IEE Francis, D., A., Kiang, M., H., Solgaard, O., Lau, K., Y., Muller, R., S., Chang-Hasnain, C., J. 1997; 33 (13): 1143-5
• Micromachined polysilicon microscanners for barcode readers IEEE PHOTONICS TECHNOLOGY LETTERS Kiang, M. H., Solgaard, O., Muller, R. S., Lau, K. Y. 1996; 8 (12): 1707-1709

  View details for Web of Science ID A1996VV26000042

• Linear microvibromotor for positioning optical components JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Daneman, M. J., Tien, N. C., Solgaard, O., Pisano, A. P., Lau, K. Y., Muller, R. S. 1996; 5 (3): 159-165

  View details for Web of Science ID A1996VH43900003

• Surface-micromachined mirrors for laser-beam positioning SENSORS AND ACTUATORS A-PHYSICAL Tien, N. C., Solgaard, O., Kiang, M. H., Daneman, M., Lau, K. Y., Muller, R. S. 1996; 52 (1-3): 76-80

  View details for Web of Science ID A1996UR00700012

• Laser-to-fiber coupling module using a micromachined alignment mirror IEEE PHOTONICS TECHNOLOGY LETTERS Daneman, M. J., Solgaard, O., Tien, N. C., Lau, K. Y., Muller, R. S. 1996; 8 (3): 396-398

  View details for Web of Science ID A1996TY86800031

• Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers IEEEPhotonics Techn. Letters Kiang, M, H., Solgaard, O., Muller, R., S., Lau, K., Y. 1996; 8 (1): 95-97
• Actuation of polysilicon surface-micromachined mirrors Conference on Miniaturized Systems with Micro-Optics and Micromechanics Tien, N. C., Kiang, M. H., Daneman, M. J., Solgaard, O., Lau, K. Y., Muller, R. S. SPIE - INT SOC OPTICAL ENGINEERING. 1996: 53–59

  View details for Web of Science ID A1996BF18M00007

• Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners IEEE 9th Annual International Workshop on Micro Electro Mechanical Systems - An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems Kiang, M. H., Solgaard, O., Muller, R. S., Lau, K. Y. I E E E. 1996: 192–197

  View details for Web of Science ID A1996BF27K00033

• Surface-micromachined electrostatic-comb driven scanning micromirrors for barcode scanners Kiang, M, H., Solgaard, O., Muller, R., S., Lau, K., Y. 1996
• Design and Fabrication of High-Performance Silicon Micromachined Resonant Microscanners for Optical Scanning Applications Kiang, M, H., Solgaard, O., Muller, R., S., Lau, K., Y. 1996
• Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers IEEE PHOTONICS TECHNOLOGY LETTERS Kiang, M. H., Solgaard, O., Muller, R. S., LAU, R. Y. 1996; 8 (1): 95-97

  View details for Web of Science ID A1996TN50000033

• Linear Microvibromotor for Positioning Optical Components IEEE Journal of MicroElectroMechanical Systems (JMEMS) Daneman, M., J., Tien, N., C., Solgaard, O., Pisano, A., P., Lau, K., Y., Muller, R., S. 1996; 5 (3): 159-165
• Actuated Micromachined Microreflector with Two Degrees of Freedom for Integrated Optical Systems Daneman, M., Tien, N., C., Solgaard, O., Lau, K., Y., Muller, R., S. 1996
• Surface-Micromachined Mirrors for Laser-Beam Positioning Sensors and Actuators A (Physical) Tien, N., C., Solgaard, O., Kiang, M., H., Daneman, M., Lau, K., Y., Muller, R., S. 1996; A52 (13): 76-80
• High-Precision Silicon Micromachined Micromirrors for Laser Beam Scanning and Positioning Kiang, M, H., Solgaard, O., Muller, R., S., Lau, K., Y. 1996
• Actuation of polysilicon surface-micromachined mirrors Tien, N., C., Kiang, M-, H., Daneman, M., Solgaard, O., Lau, K., Y., Muller, R., S. 1996
• Linear Vibromotor-Actuated Micromachined microreflector for Integrated Optical Systems Daneman, M., Tien, N., C., Solgaard, O., Lau, K., Y., Muller, R., S. 1996
• Laser-to-fiber Coupling Module Using a Micromachined Alignment Mirror IEEE Photonics Technology Letters Daneman, M., Solgaard, O., Tien, N., C., Lau, K., Y., Muller, R., S. 1996; 8 (3): 396-398
• OPTICAL-TRANSMISSION OF NARROW-BAND MILLIMETER-WAVE SIGNALS IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES GEORGES, J. B., CUTRER, D. M., Solgaard, O., Lau, K. Y. 1995; 43 (9): 2229-2240

  View details for Web of Science ID A1995RU47900008

• High-precision Si-micromachined micromirrors with on-chip actuation for external cavity semiconductor lasers Kiang, M, H., Solgaard, O., Daneman, M., Tien, N., C., Muller, R., S., Lau, K., Y. 1995
• OPTOELECTRONIC PACKAGING USING SILICON SURFACE-MICROMACHINED ALIGNMENT MIRRORS IEEE PHOTONICS TECHNOLOGY LETTERS Solgaard, O., Daneman, M., Tien, N. C., Friedberger, A., Muller, R. S., Lau, K. Y. 1995; 7 (1): 41-43

  View details for Web of Science ID A1995QD67300014

• Linear microvibromotor for positioning optical components 8th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS) Daneman, M. J., Tien, N. C., Solgaard, O., Pisano, A. P., Lau, K. Y., Muller, R. S. IEEE. 1995: 55–60

  View details for Web of Science ID A1995BD67E00010

• Precision and performance of polysilicon micromirrors for hybrid integrated optics Conference on Miniaturized Systems with Micro-Optics and Micromechanics/Laser Diode Optics II/Optical Engineering for Data Storage and Laser Imaging Solgaard, O., Tien, N. C., Daneman, M., Kiang, M. H., Friedberger, A., Muller, R. S., Lau, K. Y. SPIE - INT SOC OPTICAL ENGINEERING. 1995: 99–109

  View details for Web of Science ID A1995BD11H00009

• Surface-micromachined active optical bench for optoelectronic integration and packaging Solgaard, O., Daneman, M., Tien, N., C., Muller, R., S., Lau, K., Y. 1995
• Linear Microvibromotor for Positioning Optical Elements Daneman, M., Tien, N., C., Solgaard, O., Pisano, A., P., Lau, K., Y., Muller, R., S. 1995
• Optical Transmission of Narrowband Millimeter-Wave Signals IEEE Transactions on Microwave Theory and Techniques Georges, J., B., Cutrer, D., Solgaard, O., Lau, K., Y. 1995; 43 (9): 2229-2240
• Precision and performance of polysilicon micromirrors for hybrid integrated optics Solgaard, O., Tien, N., C., Daneman, M., Kiang, M., H., Friedberger, A., Muller, R., S. 1995
• Polysilicon-micromachined optical devices Tien, N., C., Daneman, M., Kiang, M, H., Solgaard, O., Lau, K., Y., Muller, R., S. 1995
• Optoelectronic packaging using silicon surface-micromachined alignment mirrors IEEEPhotonics Techn. Letters Solgaard, O., Daneman, M., Tien, N., C., Friedberger, A., Muller, R., S., Lau, K., Y. 1995; 7 (1): 41-43
• Surface-micromachined mirrors for laser-beam positioning Tien, N., C., Solgaard, O., Kiang, M., H., Daneman, M., Muller, R., S., Lau, K., Y. 1995
• Integrated Laser to Fiber Coupling Module Using a Micromachined Alignment Mirror Daneman, M., Solgaard, O., Tien, N., C., Muller, R., S., Lau, K., Y. 1995
• TRANSMISSION OF 300 MBIT/S BPSK AT 39 GHZ USING FEEDFORWARD OPTICAL MODULATION ELECTRONICS LETTERS GEORGES, J. B., Park, J., Solgaard, O., Pepeljugoski, P., Sayed, M., Lau, K. Y. 1994; 30 (2): 160-161

  View details for Web of Science ID A1994MW04000044

• STABLE PICOSECOND PULSE GENERATION AT 46GHZ BY MODELOCKING OF A SEMICONDUCTOR-LASER OPERATING IN AN OPTOELECTRONIC PHASELOCKED LOOP ELECTRONICS LETTERS GEORGES, J. B., BUCKMAN, L., VASSILOVSKI, D., Park, J., Kiang, M. H., Solgaard, O., Lau, K. L. 1994; 30 (1): 69-71

  View details for Web of Science ID A1994MT57700049

• Stable Picosecond Pulse Generation at 46 GHz by Mode-Locking of a Semiconductor Laser Operating in an Optoelectronic Phase-Locked Loop Electronics Letters Georges, J., B., Buckman, L., A., Vassilovski, D., Park, J., Kiang, M., H., Solgaard, O. 1994; 30 (1): 69-71
• IMPACT-ACTUATED LINEAR MICROVIBROMOTOR FOR MICRO-OPTICAL SYSTEMS ON SILICON 1994 IEEE International Electron Devices Meeting Tien, N. C., Daneman, M., Solgaard, O., Lau, K. Y., Muller, R. S. IEEE. 1994: 924–926

  View details for Web of Science ID A1994BC55U00211

• High Data Rate Millimeter Wave Subcarrier Transmission Using Feedforward Optical Modulation Georges, J., B., Park, J., Solgaard, O., Cutrer, D., Pepeljugoski, P., Lau, K., Y. 1994
• Impact-actuated linear microvibromotor for micro- optical systems on silicon Tien, N., C., Daneman, M., Solgaard, O., Lau, K., Y., Muller, R., S. 1994
• Transmission of 300 Mb/s BPSK at 39 GHz Using Feedforward Optical Modulation Electronics Letters Georges, J., B., Park, J., Solgaard, O., Pepeljugoski, P., Sayed, M., Lau, K., Y. 1994; 30 (2): 160-161
• Stable Picosecond Pulse Generation at 46 GHz by Passive Mode-Locking of a Semiconductor Laser Operating in an Optoelectronic Phase-Locked Loop Buckman, L., A., Georges, J., B., Vassilovski, D., Park, J., Solgaard, O., Lau, K., Y. 1994
• Micromachined alignment mirrors for opto-electronic packaging Solgaard, O., Daneman, M., Tien, N., C., Friedberger, A., Muller, R., S., Lau, K., Y. 1994
• OPTICAL FEEDBACK STABILIZATION OF THE INTENSITY OSCILLATIONS IN ULTRAHIGH-FREQUENCY PASSIVELY MODELOCKED MONOLITHIC QUANTUM-WELL LASERS IEEE PHOTONICS TECHNOLOGY LETTERS Solgaard, O., Lau, K. Y. 1993; 5 (11): 1264-1267

  View details for Web of Science ID A1993MN04200002

• PULSE BUILDUP IN PASSIVELY MODE-LOCKED MONOLITHIC QUANTUM-WELL SEMICONDUCTOR-LASERS APPLIED PHYSICS LETTERS Solgaard, O., Kiang, M. H., Lau, K. Y. 1993; 63 (15): 2021-2023

  View details for Web of Science ID A1993MA97700003

• MILLIMETER-WAVE, MULTIGIGAHERTZ OPTICAL MODULATION BY FEEDFORWARD PHASE NOISE COMPENSATION OF A BEAT NOTE GENERATED BY PHOTOMIXING OF 2 LASER-DIODES IEEE PHOTONICS TECHNOLOGY LETTERS Solgaard, O., Park, J., GEORGES, J. B., Pepeljugoski, P. K., Lau, K. Y. 1993; 5 (5): 574-577

  View details for Web of Science ID A1993LE08100031

• Optical Feedback Stabilization of the Intensity Oscillations in Ultra-high Frequency, Passively Modelocked, Monolithic, Quantum Well Lasers Photonics Techn. Lett. Solgaard, O., Lau, K., Y. 1993; 5 (11): 1264-1267
• Millimeter wave optical transmission using a tunable laser beatnote source with feedforward compensation Solgaard, O., Park, J., Georges, J., B., Pepeljugoski, P., Lau, K., Y. 1993
• Dynamics of pulse build-up in QW lasers passively mode-locked at millimeter wave frequencies Kiang, M., H., Solgaard, O., Lau, K., Y. 1993
• Pulse buildup in passively mode-locked quantum-well semiconductor lasers Applied Physics Letters Solgaard, O., Kiang, M., H., Lau, K., Y. 1993; 15 (63): 2021-2023
• Millimeter-Wave Frequency, Multi-Gigahertz Optical Modulation by Feedforward Phase Noise Compensation of a Beat Note Generated by Photomixing of Two Laser Diodes IEEEPhotonics Techn. Letters Solgaard, O., Park, J., Georges, J., B., Pepeljugoski, P., Lau, K., Y. 1993; 5 (5): 574-577
• HIGH-FREQUENCY ATTENUATED TOTAL INTERNAL-REFLECTION LIGHT-MODULATOR APPLIED PHYSICS LETTERS Solgaard, O., Ho, F., Thackara, J. I., Bloom, D. M. 1992; 61 (21): 2500-2502

  View details for Web of Science ID A1992JZ02500002

• DEFORMABLE GRATING OPTICAL MODULATOR OPTICS LETTERS Solgaard, O., SANDEJAS, F. S., Bloom, D. M. 1992; 17 (9): 688-690

  Abstract

  A new type of light modulator, the deformable grating modulator, based on electrically controlling the amplitude of a micromachined phase grating is described. Mechanical motion of one quarter of a wavelength is sufficient for switching in this device. The small mechanical motion allows the use of structures with high mechanical resonance frequencies. We have developed a deformable grating modulator with a bandwidth of 1.8 MHz and a switching voltage of 3.2 V and have demonstrated modulation with 16 dB of contrast. Smaller devices with bandwidths of as much as 6.1 MHz and predicted switching voltages of less than 10 V were also fabricated.

  View details for Web of Science ID A1992HP32800020

  View details for PubMedID 19794599

• A deformable grating optical modulator Optics Letters Solgaard, O., Sandejas, F., S. A., Bloom, D., M. 1992; 17 (9): 688-690
• An Attenuated Internal Reflection Modulator Applied Physics Letters Solgaard, O., Ho, F., Thackara, J., I., Bloom, D., M. 1992; 21 (61): 2500-2502
• Deformable grating optical modulator Sandejas, F., Solgaard, O., Bloom, D., M. 1992
• ALL-SILICON INTEGRATED OPTICAL MODULATOR IEEE JOURNAL ON SELECTED AREAS IN COMMUNICATIONS Solgaard, O., Godil, A. A., HEMENWAY, B. R., Bloom, D. M. 1991; 9 (5): 704-710

  View details for Web of Science ID A1991FW03000011

• High Speed Attenuated Internal reflection Modulators Solgaard, O., Ho, F., Thackara, J., I., Bloom, D., M. 1991
• PIGTAILED SINGLE-MODE FIBER OPTIC LIGHT-MODULATOR IN SILICON IEEE PHOTONICS TECHNOLOGY LETTERS Solgaard, O., Godil, A. A., HEMENWAY, B. R., Bloom, D. M. 1990; 2 (9): 640-642

  View details for Web of Science ID A1990EB35300012

• A POLARIZATION-INDEPENDENT SILICON LIGHT-INTENSITY MODULATOR FOR 1.32-MU-M FIBER OPTICS IEEE PHOTONICS TECHNOLOGY LETTERS HEMENWAY, B. R., Solgaard, O., Godil, A. A., Bloom, D. M. 1990; 2 (4): 262-264

  View details for Web of Science ID A1990CX91400013

• A SMALL-AREA LIGHT-INTENSITY MODULATOR IMPLEMENTED IN SILICON HEMENWAY, B. R., Solgaard, O., Bloom, D. M. IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC. 1989: 2614–14

  View details for Web of Science ID A1989AW89000071

• ALL-SILICON INTEGRATED OPTICAL MODULATOR FOR 1.3-MU-M FIBER-OPTIC INTERCONNECTS APPLIED PHYSICS LETTERS HEMENWAY, B. R., Solgaard, O., Bloom, D. M. 1989; 55 (4): 349-350

  View details for Web of Science ID A1989AG24200009

• Bulk piezoresistors for stable pressure sensors Jakobsen, H., Solgaard, O. 1986